Electron irradiation equipment

Abstract

The utility model relates to the technical field of electronic irradiation equipment, and discloses electronic irradiation equipment, which comprises an equipment chamber, a ceiling fixedly mounted at the top end of the equipment chamber, a chamber door hinged to the inside of the side wall of the equipment chamber, and a rack fixedly mounted inside the equipment chamber. A winding motor is fixedly mounted on the outer wall of the rack, a winding roller is fixedly mounted at the output end of the winding motor, and the winding roller is rotationally mounted in the rack. According to the electronic irradiation equipment, in order to better improve the practicability of the equipment, the fixing assembly is arranged and matched with a sliding groove and an electric rolling wheel, irradiation can be conducted at multiple positions, different tension can be applied to a workpiece body in cooperation with an N-shaped frame, a servo hydraulic rod, an N-shaped block, a fixing shaft, a top end roller, a sliding rod, a vertical groove and a bottom end roller, and the fixing assembly is matched with a fixing block, a spring rod and a fixing sleeve; and the device can adapt to more workpiece bodies with different thicknesses, so that the practicability of the device can be better improved.

Description

Technical Field

[0001] The utility model relates to the technical field of electron irradiation equipment, in particular to an electron irradiation equipment. Background Technique

[0002] Electron irradiation technology is a physical method of irradiating materials with high-energy electron beams to improve or change their properties. This technology is based on the interaction between electron beams and material atoms, and can trigger a series of physical and chemical changes. Electron irradiation equipment usually consists of an electron accelerator, an irradiation chamber, a control system, etc., and can generate and precisely control parameters such as the dose, energy distribution, and irradiation time of high-energy electron beams.

[0003] In the field of materials science, electron irradiation technology can be used to prepare new functional materials, improve the mechanical properties and chemical stability of materials, etc. In the field of semiconductor manufacturing, electron irradiation technology can be used to control the carrier lifetime of semiconductor materials and change their electrical properties, etc.

[0004] However, when the material is wound up, the current electron irradiation equipment is not convenient for irradiating at multiple positions, not convenient for applying different tensions to the workpiece body, and has low practicability. In addition, it is not convenient to clean the workpiece body. In view of this, we propose an electron irradiation equipment. Content of the Utility Model

[0005] The purpose of the utility model is to provide an electron irradiation equipment to solve the problems raised in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution: an electron irradiation equipment, including an equipment chamber, the top of the equipment chamber is fixedly installed with a ceiling, the side wall of the equipment chamber is internally hinged with a chamber door, the inside of the equipment chamber is fixedly installed with a frame, the outer wall of the frame is fixedly installed with a winding motor, the output end of the winding motor is fixedly installed with a winding roller, the winding roller is rotatably installed inside the frame, a workpiece body is wound around the outside of the winding roller, two groups of auxiliary rollers are rotatably installed inside the frame at one end away from the winding roller, the outside of the workpiece body is slidably attached between the two groups of auxiliary rollers, and a fixing component is arranged at the top of the frame, and the fixing component includes:

[0007] A chute, a chute is opened on the frame, an electric roller is rotatably installed inside the chute, the top of the electric roller is fixedly connected to the bottom of an N-shaped frame, an irradiator is fixedly installed on the outer side of the top of the N-shaped frame, a servo hydraulic rod is fixedly installed on the top of the N-shaped frame, the piston end of the bottom of the servo hydraulic rod is fixedly connected to the center of the top of an N-shaped block, and the outside of the N-shaped block is slidably installed inside the N-shaped frame;

[0008] Fixed shaft, a fixed shaft is fixedly installed inside the N-shaped block. A top roller is rotatably installed outside the center of the fixed shaft. A sliding rod is slidably installed inside the N-shaped block. A vertical groove is formed in the N-shaped block, and the sliding rod is slidably installed inside the vertical groove. A bottom roller is rotatably installed outside the center of the sliding rod.

[0009] Fixed block, a fixed block is fixedly installed outside the N-shaped block. The top of the fixed block is fixedly connected to the bottom of the spring rod. The top of the spring rod is fixedly installed with a fixed sleeve, and the arc-shaped inner wall of the fixed sleeve fits the arc-shaped outer wall of the sliding rod.

[0010] Preferably, two sets of the chute and the electric roller are provided, and the two sets of the chute and the electric roller are symmetrically arranged at the front and rear ends of the frame with the horizontal midline in the left-right direction of the frame as the axis of symmetry, so that the N-shaped frame moves more stably.

[0011] Preferably, the outer side of the workpiece body is slidably fitted between the top roller and the bottom roller.

[0012] Preferably, two sets of the fixed block, the spring rod and the fixed sleeve are provided, so that the bottom roller moves more stably.

[0013] Preferably, an auxiliary component is provided at the top of the frame. The inner end of one side of a torsion spring is fixedly connected to the outside of the fixed shaft. One end of a side block is fixedly installed on the outside of the torsion spring. Two sets of the torsion spring and the side block are provided. A thin shaft is fixedly installed between the other ends of the two side blocks.

[0014] Preferably, a cleaning roller is rotatably installed on the outside of the thin shaft, and the outside of the cleaning roller is in rolling contact with the outside of the top of the workpiece body.

[0015] Compared with the prior art, the present invention provides an electron irradiation device, which has the following beneficial effects:

[0016] 1. For this electron irradiation device, in order to better improve the practicability of the device, by providing a fixing component, cooperating with the chute and the electric roller, irradiation can be carried out at multiple positions. Cooperating with the N-shaped frame, the servo hydraulic rod, the N-shaped block, the fixed shaft, the top roller, the sliding rod, the vertical groove and the bottom roller, different tensions can be applied to the workpiece body. Cooperating with the fixed block, the spring rod and the fixed sleeve, it can adapt to more workpiece bodies with different thicknesses, and then can better improve the practicability of the device.

[0017] 2. For this electron irradiation device, in order to better protect the workpiece body, by providing an auxiliary component, when the workpiece body is being wound up, the workpiece body contacts the cleaning roller. Cooperating with the torsion spring, the side block and the thin shaft, the contact between the workpiece body and the cleaning roller is made closer, so that the cleaning effect is better, and then the workpiece body can be better protected. Description of the Drawings

[0018] Figure 1 This is a top view schematic diagram of the overall structure of the present utility model;

[0019] Figure 2 This is a top view schematic diagram of a partial structure of the present utility model;

[0020] Figure 3 This is a top view schematic diagram of the frame of the present utility model;

[0021] Figure 4 This is the present utility model Figure 3 Schematic diagram of the enlarged structure of area A;

[0022] Figure 5 This is a cross-sectional schematic diagram of the frame of the present utility model;

[0023] Figure 6 This is a bottom view schematic diagram of the N-shaped frame of the present utility model;

[0024] Figure 7 This is the present utility model Figure 6 Schematic diagram of the enlarged structure of area B.

[0025] In the figure: 1, equipment room; 2, ceiling; 3, room door; 4, frame; 5, winding motor; 6, winding roller; 7, workpiece body; 8, auxiliary roller; 9, fixing component; 91, chute; 92, electric roller; 93, N-shaped frame; 94, servo hydraulic rod; 95, N-shaped block; 96, fixed shaft; 97, top roller; 98, slide bar; 99, vertical groove; 910, bottom roller; 911, fixed block; 912, spring rod; 913, fixed sleeve; 10, auxiliary component; 101, coil spring; 102, side block; 103, thin shaft; 104, cleaning roller; 11, irradiator. Specific embodiments

[0026] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0027] Please refer to Figures 1-7, the present utility model provides a technical solution: an electron irradiation device, which includes an equipment chamber 1. A ceiling 2 is fixedly installed at the top of the equipment chamber 1. A chamber door 3 is hingedly installed inside the side wall of the equipment chamber 1. A frame 4 is fixedly installed inside the equipment chamber 1. A winding motor 5 is fixedly installed on the outer wall of the frame 4. The output end of the winding motor 5 is fixedly installed with a winding roller 6. The winding roller 6 is rotatably installed inside the frame 4. A workpiece body 7 is wound around the outside of the winding roller 6. An auxiliary roller 8 is rotatably installed inside one end of the frame 4 away from the winding roller 6. There are two groups of auxiliary rollers 8. The outside of the workpiece body 7 is slidably attached between the two groups of auxiliary rollers 8.

[0028] In an embodiment of the present utility model, a fixing component 9 is provided at the top of the frame 4. The fixing component 9 includes a chute 91. A chute 91 is opened on the frame 4. An electric roller 92 is rotatably installed inside the chute 91. The top of the electric roller 92 is fixedly connected to the bottom of an N-shaped frame 93. An irradiator 11 is fixedly installed on the outer side of the top of the N-shaped frame 93. In addition, there are two groups of the chute 91 and the electric roller 92, and the two groups of the chute 91 and the electric roller 92 are symmetrically arranged at the front and rear ends of the frame 4 with the horizontal midline of the frame 4 in the left-right direction as the axis of symmetry, so that the N-shaped frame 93 moves more stably. Starting the electric roller 92 makes it move inside the chute 91, thereby driving the N-shaped frame 93 to move synchronously, thereby driving the irradiator 11 to move synchronously, so that irradiation can be performed at multiple positions of the workpiece body 7. A servo hydraulic rod 94 is fixedly installed on the top of the N-shaped frame 93. The piston end of the bottom of the servo hydraulic rod 94 is fixedly connected to the center of the top of an N-shaped block 95. The outside of the N-shaped block 95 is slidably installed inside the N-shaped frame 93. Cooperating with the servo hydraulic rod 94 makes the N-shaped block 95 move up and down. A fixing shaft 96 is fixedly installed inside the N-shaped block 95. A top roller 97 is rotatably installed outside the center of the fixing shaft 96. A sliding rod 98 is slidably installed inside the N-shaped block 95. A vertical groove 99 is opened on the N-shaped block 95. The sliding rod 98 is slidably installed inside the vertical groove 99. A bottom roller 910 is rotatably installed outside the center of the sliding rod 98. In addition, the outside of the workpiece body 7 is slidably attached between the top roller 97 and the bottom roller 910. Thus, cooperating with the fixing shaft 96, the top roller 97, the sliding rod 98, the vertical groove 99 and the bottom roller 910, different tensions can be applied to the workpiece body 7, so that the workpiece body 7 can be better irradiated while being wound. A fixing block 911 is fixedly installed on the outside of the N-shaped block 95. The top of the fixing block 911 is fixedly connected to the bottom of a spring rod 912. The top of the spring rod 912 is fixedly installed with a fixing sleeve 913. The arc-shaped inner wall of the fixing sleeve 913 fits the arc-shaped outer wall of the sliding rod 98. In addition, there are two groups of the fixing block 911, the spring rod 912 and the fixing sleeve 913, so that the bottom roller 910 moves more stably. Cooperating with the fixing block 911, the spring rod 912 and the fixing sleeve 913, workpieces of more different thicknesses of the workpiece body 7 can be adapted (when the thickness increases, the spring rod 912 is further compressed and deformed, and the sliding rod 98 slides downward inside the vertical groove 99), and then the practicability of the device can be better improved.

[0029] In an embodiment of the present utility model, an auxiliary component 10 is provided at the top end of the frame 4. One end of the inner side of a scroll spring 101 is fixedly connected to the outside of a fixed shaft 96. One end of a side block 102 is fixedly installed on the outside of the scroll spring 101. Two groups of the scroll spring 101 and the side block 102 are provided. A thin shaft 103 is fixedly installed between the other ends of the two groups of side blocks 102. In addition, a cleaning roller 104 is rotatably installed on the outside of the thin shaft 103. The outside of the cleaning roller 104 is in rolling contact with the outside of the top end of the workpiece body 7. Further, when the workpiece body 7 is wound up, the workpiece body 7 will contact the cleaning roller 104 and the floating dust will be removed. With the compression deformation of the scroll spring 101, the side block 102 and the thin shaft 103 are close to the workpiece body 7, so that the top end of the workpiece body 7 and the cleaning roller 104 are in closer contact, and thus the cleaning effect is better, and then the workpiece body 7 can be better protected.

[0030] Working principle: Start the electric roller 92 to make it move inside the chute 91, thereby driving the N-shaped frame 93 to move synchronously, and then driving the irradiator 11 to move synchronously, so that irradiation can be performed at multiple positions of the workpiece body 7. With the cooperation of the servo hydraulic rod 94, the N-shaped block 95 moves up and down, and then with the cooperation of the fixed shaft 96, the top roller 97, the slide rod 98, the vertical groove 99 and the bottom roller 910, different tensions can be applied to the workpiece body 7, so that the workpiece body 7 can be better irradiated while being wound up. With the cooperation of the fixed block 911, the spring rod 912 and the fixed sleeve 913, the workpiece body 7 with more different thicknesses can be adapted (when the thickness increases, the spring rod 912 is further compressed and deformed, and the slide rod 98 slides down inside the vertical groove 99), and then the practicability of the device can be better improved. Further, when the workpiece body 7 is wound up, the workpiece body 7 will contact the cleaning roller 104 and the floating dust will be removed. With the compression deformation of the scroll spring 101, the side block 102 and the thin shaft 103 are close to the workpiece body 7, so that the top end of the workpiece body 7 and the cleaning roller 104 are in closer contact, and thus the cleaning effect is better, and then the workpiece body 7 can be better protected.

[0031] The above has generally described the present utility model in detail. However, based on the present utility model, some modifications or improvements can be made, which are obvious to those of ordinary skill in the art. Therefore, the modifications or improvements made without departing from the spirit of the present utility model are within the protection scope of the present utility model.

Claims

1. An electron irradiation device, comprising a device chamber (1), a ceiling (2) is fixedly installed at the top end of the device chamber (1), a chamber door (3) is hingedly installed inside the side wall of the device chamber (1), a frame (4) is fixedly installed inside the device chamber (1), a winding motor (5) is fixedly installed on the outer wall of the frame (4), a winding roller (6) is fixedly installed at the output end of the winding motor (5), the winding roller (6) is rotatably installed inside the frame (4), a workpiece body (7) is wound around the outside of the winding roller (6), an auxiliary roller (8) is rotatably installed inside one end of the frame (4) away from the winding roller (6), there are two groups of the auxiliary rollers (8), and the outside of the workpiece body (7) is slidably attached between the two groups of the auxiliary rollers (8), characterized in that: A fixing component (9) is provided at the top of the frame (4), and the fixing component (9) includes: A chute (91), a chute (91) is provided on the frame (4), an electric roller (92) is rotatably installed inside the chute (91), the top of the electric roller (92) is fixedly connected to the bottom of an N-shaped frame (93), an irradiator (11) is fixedly installed on the outer side of the top of the N-shaped frame (93), a servo hydraulic rod (94) is fixedly installed on the top of the N-shaped frame (93), the piston end of the bottom of the servo hydraulic rod (94) is fixedly connected to the center of the top of an N-shaped block (95), and the outer side of the N-shaped block (95) is slidably installed inside the N-shaped frame (93); A fixed shaft (96), a fixed shaft (96) is fixedly installed inside the N-shaped block (95), a top roller (97) is rotatably installed on the outer side of the center of the fixed shaft (96), a sliding rod (98) is slidably installed inside the N-shaped block (95), a vertical groove (99) is provided on the N-shaped block (95), and the sliding rod (98) is slidably installed inside the vertical groove (99), and a bottom roller (910) is rotatably installed on the outer side of the center of the sliding rod (98); A fixed block (911), a fixed block (911) is fixedly installed on the outer side of the N-shaped block (95), the top of the fixed block (911) is fixedly connected to the bottom of a spring rod (912), a fixed sleeve (913) is fixedly installed on the top of the spring rod (912), and the arc-shaped inner wall of the fixed sleeve (913) fits the arc-shaped outer wall of the sliding rod (98).

2. An electron irradiation device according to claim 1, characterized in that: There are two sets of the chute (91) and the electric roller (92), and the two sets of the chute (91) and the electric roller (92) are symmetrically arranged at the front and rear ends of the frame (4) with the horizontal midline in the left-right direction of the frame (4) as the axis of symmetry.

3. An electron irradiation device according to claim 1, characterized in that: The outer side of the workpiece body (7) is slidably attached between the top roller (97) and the bottom roller (910).

4. An electron irradiation device according to claim 1, characterized in that: There are two sets of the fixed block (911), the spring rod (912) and the fixed sleeve (913).

5. An electron irradiation device according to claim 1, characterized in that: An auxiliary component (10) is provided at the top of the frame (4), the inner end of the outer side of the fixed shaft (96) is fixedly connected to the inner side of a torsion spring (101), one end of a side block (102) is fixedly installed on the outer side of the torsion spring (101), there are two sets of the torsion spring (101) and the side block (102), and a thin shaft (103) is fixedly installed between the other ends of the two sets of side blocks (102).

6. An electron irradiation device according to claim 5, characterized in that: A cleaning roller (104) is rotatably installed on the outer side of the thin shaft (103), and the outer side of the cleaning roller (104) is rotatably attached to the outer side of the top of the workpiece body (7).

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