Beam spot distribution detection device and electron gun

Abstract

The utility model discloses a beam spot distribution detection device and an electron gun, the beam spot distribution detection device comprises an experiment device, a diaphragm device, a fixed adjusting device and a processing device, the front end of the experiment device is connected with an electron gun supporting assembly, the cathode of the electron gun is opposite to the front end of the experiment device, and an experiment cavity is arranged in the experiment device; the diaphragm device comprises a diaphragm, a diaphragm connecting rod and a driving motor, the diaphragm comprises a supporting ring and a plurality of blade assemblies, the blade assemblies are arranged on the supporting ring and adjust the aperture of a middle hole of the diaphragm, and the blade assemblies are metal pieces and are connected with the processing device through wires in the diaphragm connecting rod; one end of the diaphragm connecting rod is fixed with the support ring, and the other end is fixed with the fixed adjusting device. The fixed adjusting device adjusts the position of the diaphragm device in the experiment cavity. According to the utility model, beam spots can be continuously, dynamically and adjustably measured, the distribution of the beam spots is reflected in a mode of directly receiving electrons to form current, and the experiment efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to a device for detecting beam spot distribution and an electron gun. Background Art

[0002] An electron accelerator is a device that accelerates charged particles (such as electrons) using an electric field or a magnetic field. They are widely used in research fields, including particle physics, nuclear physics, and materials science. Electron accelerators can work in different ways, including linear accelerators and circular accelerators. By continuously accelerating particles, electron accelerators can generate high-energy particle beams for studying high-energy physical phenomena or performing medical radiotherapy.

[0003] In an electron linear accelerator, the electron gun is designed to emit an electron beam with a certain beam divergence angle and current intensity under certain working conditions. Due to theoretical calculation errors and errors brought during manufacturing and assembly, the beam divergence angle and beam current shape during the operation of the electron gun will be affected. When the influence is serious, the electron gun cannot work. Therefore, it is necessary to perform beam spot tests on the physical object of the electron gun to evaluate whether parameters such as the beam spot shape, spatial distribution, and beam divergence angle of the electron gun meet the design requirements.

[0004] Generally, the main methods for measuring beam spots are the electron beam direct bombardment (trace) method, the CCD imaging method, and the knife-edge occlusion scanning method.

[0005] In the direct bombardment method, a fixed target is placed in the experimental chamber and taken out after electron bombardment. The spatial distribution of the beam spot is evaluated by observing the electron bombardment traces on the target. The target cannot be moved during a single experiment, and multiple experiments are required to fit the spatial distribution of the beam spot, resulting in low efficiency and poor resolution.

[0006] The CCD observation method relies on the CCD sensor to image the beam spot and perform calculation and fitting. Since it is an indirect measurement, there is a certain deviation between the calculation result and the actual situation.

[0007] The knife-edge occlusion method is effective for measuring beams or beam spots with regular geometric distributions, but it has limitations in evaluating beam spots with irregular distributions. Summary of the Utility Model

[0008] The technical problem to be solved by the utility model is to overcome the defects of low efficiency, large deviation, and small application range in the existing methods for measuring beam spots, and to provide a device for detecting beam spot distribution and an electron gun that can continuously and dynamically adjust the measurement of the beam spot, reflect the distribution of the beam spot by directly receiving the electrons to form a current, and greatly improve the experimental efficiency.

[0009] The utility model solves the above technical problem by the following technical solutions:

[0010] A beam spot distribution detection device for an electron gun, characterized in that the beam spot distribution detection device comprises an experimental device, an aperture device, a fixing adjustment device and a processing device.

[0011] The front end of the experimental device is connected to the electron gun support assembly, the cathode of the electron gun is opposite to the front end of the experimental device, and an experimental cavity is provided in the experimental device;

[0012] The aperture device includes an aperture, an aperture connecting rod and a driving motor, the aperture includes a supporting ring and a plurality of blade assemblies, the blade assemblies are arranged on the supporting ring and adjust the aperture of the aperture, the driving motor provides power to the movement of the blade assemblies, the blade assemblies are metal parts and are connected to the processing device through the wire inside the aperture connecting rod;

[0013] One end of the aperture connecting rod is fixed to the support ring and the other end is fixed to the fixing adjustment device, and the fixing adjustment device adjusts the position of the aperture device in the experimental cavity.

[0014] Preferably, the support ring includes a front cover, a rear cover, a base and a control ring. A positioning pin is provided on one side of the blade in the blade assembly and a toggle pin is provided on the other side. The blade assembly is mounted on the base using the positioning pin. A toggle slot is provided on the control ring. When the drive motor drives the control ring to rotate, the toggle slot drives the toggle pin to move. The base and the control ring are coaxially arranged between the front cover and the rear cover.

[0015] Preferably, the blade assembly includes 5 blades, the blades have the same shape and are all arc-shaped, the positioning pin and the driving pin are both arranged at one end of the blade, and all the blades are evenly mounted on the base.

[0016] Preferably, gear teeth are provided on the outer edge of the control ring, the drive motor is meshed with the gear teeth of the control ring via gears, and accommodating grooves for the gears are provided on the front cover and the rear cover.

[0017] Preferably, the electron gun support assembly includes an electron gun base assembly, an electron gun insulating section assembly, a vacuum port and a first vacuum flange, the vacuum port is arranged outside the electron gun insulating section assembly, and the first vacuum flange is connected to the vacuum flange at the front end of the experimental device.

[0018] Preferably, the experimental device includes a second vacuum flange, a shell, a focusing coil and a third vacuum flange, the second vacuum flange is connected to the electron gun support assembly, the focusing coil is arranged on the outside of the shell, and the third vacuum flange is arranged at the rear end of the experimental device and connected to the fixed adjustment device.

[0019] Preferably, the rear end of the housing includes a water-cooling box. The edge of the water-cooling box is connected to the housing. A water-cooling cavity is provided inside the water-cooling box. A connecting rod through-hole is provided on one side of the central axis of the water-cooling box. The diaphragm connecting rod passes through the connecting rod through-hole and is connected to a fixing and adjusting device. A water-cooling interface is provided on the outside of the water-cooling box.

[0020] Preferably, the fixing and adjusting device includes a fourth vacuum flange, a corrugated pipe, a connecting rod fixing member, and a three-dimensional sliding table. The fourth vacuum flange is provided at the front end of the corrugated pipe and is connected to the vacuum flange at the rear end of the experimental device. The rear end of the corrugated pipe is connected to the connecting rod fixing member, and the connecting rod fixing member is connected to the three-dimensional sliding table.

[0021] Preferably, the three-dimensional sliding table includes an X-direction sliding table, a Y-direction sliding table, and a Z-direction sliding table. The connecting rod fixing member is installed on the X-direction sliding table. The X-direction sliding table is installed on the Y-direction sliding table. The Y-direction sliding table is installed on the Z-direction sliding table. The Z-direction sliding table adjusts its position in the Z direction through a Z-direction adjusting handwheel. The Y-direction sliding table adjusts its position in the Y direction through a Y-direction adjusting handle. The X-direction sliding table adjusts its position in the X direction through an X-direction adjusting handle. A Z-direction fine-tuning handle is also provided on the connecting rod fixing member.

[0022] The present invention also provides an electron gun, which is characterized in that the electron gun is connected to the spot distribution detection device as described above through an electron gun support assembly.

[0023] On the basis of conforming to the common knowledge in the art, the above preferred conditions can be combined arbitrarily to obtain various preferred examples of the present invention.

[0024] The positive and progressive effects of the present invention are as follows:

[0025] The present invention can continuously and dynamically adjust the measurement of the spot, and reflects the distribution of the spot by directly receiving the electrons to form a current, greatly improving the experimental efficiency and playing a positive role in guiding the design improvement of the electron gun. Description of the Drawings

[0026] Figure 1 It is a schematic structural diagram of the spot distribution detection device according to Embodiment 1 of the present invention.

[0027] Figure 2 It is another schematic structural diagram of the spot distribution detection device according to Embodiment 1 of the present invention.

[0028] Figure 3 It is another schematic structural diagram of the spot distribution detection device according to Embodiment 1 of the present invention.

[0029] Figure 4Another structural schematic diagram of the beam spot distribution detection device according to Embodiment 1 of the present utility model.

[0030] Figure 5 Structural schematic diagram of the support ring according to Embodiment 1 of the present utility model.

[0031] Figure 6 Another structural schematic diagram of the support ring according to Embodiment 1 of the present utility model.

[0032] Figure 7 Another structural schematic diagram of the support ring according to Embodiment 1 of the present utility model.

[0033] Figure 8 Structural schematic diagram of the blade according to Embodiment 1 of the present utility model.

[0034] Figure 9 Structural schematic diagram of the fixed adjustment device according to Embodiment 1 of the present utility model. Detailed implementation manners

[0035] The present utility model will be further described below by way of embodiments, but the present utility model is not limited to the scope of the described embodiments.

[0036] Embodiment 1

[0037] In this embodiment, the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0038] Refer to Figures 1 to 9 , this embodiment provides a beam spot distribution detection device for an electron gun. The beam spot distribution detection device is arranged on the experimental platform 200.

[0039] The beam spot distribution detection device includes an experimental device 100, a diaphragm device 103, a fixed adjustment device 101, and a processing device.

[0040] The front end of the experimental device 100 is connected to the electron gun support assembly 102.

[0041] The direction in front of this embodiment refers to the direction of the experimental device towards the electron gun.

[0042] The cathode 104 of the electron gun is opposite to the front end of the experimental device.

[0043] There is an experimental cavity 105 inside the described experimental device;

[0044] The described diaphragm device includes a diaphragm, a diaphragm connecting rod 107, and a driving motor 108.

[0045] The described diaphragm includes a support ring 106 and a number of blade assemblies.

[0046] The described blade assemblies are arranged on the support ring and adjust the aperture of the central hole 109 of the diaphragm.

[0047] The described driving motor provides power for the movement of the blade assemblies.

[0048] The described blade assemblies are metal parts and are connected to the processing device through wires inside the diaphragm connecting rod.

[0049] One end of the diaphragm connecting rod 107 is fixed to the support ring and the other end is fixed to the fixed adjustment device.

[0050] The described fixed adjustment device adjusts the position of the diaphragm device in the experimental cavity.

[0051] The described support ring 106 includes a front cover 1061, a rear cover 1062, a base 1063, and a control ring 1064.

[0052] One side of the blade 110 in the described blade assembly is provided with a positioning pin 1101 and the other side is provided with a toggle pin 1102.

[0053] The blade assembly is installed on the base by using the positioning pin, and there is a toggle groove 10641 on the control ring 1064.

[0054] When the driving motor 108 drives the control ring 1064 to rotate, the toggle groove 10641 drives the toggle pin to move.

[0055] The base and the control ring are coaxially arranged between the front cover and the rear cover.

[0056] The described blade assembly includes 5 blades, the shapes of the blades are the same and are all arc-shaped, the positioning pins and the toggle pins are both arranged at one end of the blades, and all the blades are evenly installed on the base.

[0057] The outer edge of the control ring is provided with teeth, the driving motor 108 is meshed with the teeth of the control ring through a gear 1081, and the front cover and the rear cover are provided with accommodation grooves 1082 for the gear.

[0058] The aperture size of the diaphragm is formed by multiple arc-shaped blades enclosing each other. When the aperture is completely closed, the electron beam hits all the blades, and at this time the current signal is the largest; when the aperture is in a semi-open state, part of the electron beam hits the blades, and the current signal is nearly halved; when the aperture continues to expand to a certain value, the electron beam just nearly completely passes through the hole, and at this time the measured value of the ammeter drops to nearly zero, indicating that this aperture is nearly the boundary of the electron beam.

[0059] The structure and driving form of the blade are as follows: The blade has a positioning pin and a toggle pin on its front and back respectively. The positioning pin is fixed in a fixed hole on the diaphragm base, and the toggle pin moves as the blade motion control ring rotates, realizing the fixed-axis rotation of the blade.

[0060] In order to enable the blade motion control ring to achieve stable fixed-axis rotation, two measures are taken: One is that a circular track is designed on the inner side of the control ring, which cooperates with the circular groove of the diaphragm rear cover, so that the control ring can only move along the central axis of the diaphragm aperture; Secondly, the outer edge of the control ring is designed into a toothed shape, and the whole control ring becomes a gear, which is driven by a micro-precision stepping motor to realize the fixed-axis rotation of the control ring.

[0061] The electron gun support assembly 102 includes an electron gun base assembly 1021, an electron gun insulation section assembly 1022, a vacuum pumping port 1023, and a first vacuum flange 1024.

[0062] The vacuum pumping port is arranged on the outside of the electron gun insulation section assembly, and the first vacuum flange is connected to the vacuum flange at the front end of the experimental device.

[0063] An anode plate and an anode support assembly 1025 are arranged outside the cathode.

[0064] The experimental device 100 includes a second vacuum flange 1001, a housing 1002, a focusing coil 1003, and a third vacuum flange 1004.

[0065] The second vacuum flange is connected to the electron gun support assembly. The focusing coil is arranged on the outside of the housing, and the third vacuum flange is arranged at the rear end of the experimental device and is connected to the fixed adjustment device.

[0066] The rear end of the housing 1002 includes a water-cooling box 1005, and the edge of the water-cooling box is connected to the housing.

[0067] A water-cooling cavity is arranged inside the water-cooling box. A connecting rod through-hole 1006 is arranged on one side of the central axis of the water-cooling box. The diaphragm connecting rod passes through the connecting rod through-hole and is connected to the fixed adjustment device. A water-cooling interface 1007 is arranged on the outside of the water-cooling box.

[0068] The fixed adjustment device 101 includes a fourth vacuum flange 1011, a bellows 1012, a connecting rod fixing part 1013, and a three-dimensional slide table 1014.

[0069] The fourth vacuum flange 1011 is provided at the front end of the bellows and is connected to the vacuum flange at the rear end of the experimental device. The rear end of the bellows is connected to the connecting rod fixing part, and the connecting rod fixing part is connected to the three-dimensional slide table.

[0070] The three-dimensional slide table 1014 includes an X-direction slide table 10141, a Y-direction slide table 10142, and a Z-direction slide table 10143.

[0071] The connecting rod fixing part is installed on the X-direction slide table, the X-direction slide table is installed on the Y-direction slide table, and the Y-direction slide table is installed on the Z-direction slide table.

[0072] The Z-direction slide table is adjusted in the Z direction by a Z-direction adjustment handwheel 10144.

[0073] The Y-direction slide table is adjusted in the Y direction by a Y-direction adjustment handle 10145.

[0074] The X-direction slide table is adjusted in the X direction by an X-direction adjustment handle 10146.

[0075] A Z-direction fine adjustment handle 10147 is also provided on the connecting rod fixing part.

[0076] The position of the aperture is adjusted in the X, Y, and Z axes by the three-dimensional slide table, and it is verified whether the center of the aperture coincides with the axis of the beam current according to the change of the current magnitude, and how much the phase difference is evaluated.

[0077] The three-dimensional slide table includes adjustment modules in three axial directions, a metal bellows, and a vacuum flange. The connecting rod of the aperture is connected thereto, realizing vacuum sealing while achieving three-dimensional movement. The center of the slide table allows the metal bellows to pass through, and there is a gap between the slide table and the bellows, so that the bellows is not squeezed when the slide table moves.

[0078] Although the specific implementation manners of the present invention have been described above, those skilled in the art should understand that these are only examples. The protection scope of the present invention is defined by the appended claims. Without departing from the principle and essence of the present invention, those skilled in the art can make various changes or modifications to these implementation manners, but these changes and modifications all fall within the protection scope of the present invention.

Claims

1. A beam spot distribution detection device for an electron gun, characterized in that The beam spot distribution detection device includes an experimental device, an aperture device, a fixing adjustment device and a processing device. The front end of the experimental device is connected to the electron gun support assembly, the cathode of the electron gun is opposite to the front end of the experimental device, and an experimental cavity is provided in the experimental device; The aperture device includes an aperture, an aperture connecting rod and a driving motor, the aperture includes a supporting ring and a plurality of blade assemblies, the blade assemblies are arranged on the supporting ring and adjust the aperture of the aperture, the driving motor provides power to the movement of the blade assemblies, the blade assemblies are metal parts and are connected to the processing device through the wire inside the aperture connecting rod; One end of the aperture connecting rod is fixed to the support ring and the other end is fixed to the fixing adjustment device, and the fixing adjustment device adjusts the position of the aperture device in the experimental cavity.

2. The spot distribution detection device according to claim 1, wherein The support ring includes a front cover, a rear cover, a base and a control ring. A positioning pin is provided on one side of the blade in the blade assembly and a toggle pin is provided on the other side. The blade assembly is installed on the base using the positioning pin. A toggle groove is provided on the control ring. When the drive motor drives the control ring to rotate, the toggle groove drives the toggle pin to move. The base and the control ring are coaxially arranged between the front cover and the rear cover.

3. The beam spot distribution detection device according to claim 2, characterized in that The blade assembly includes 5 blades, the blades have the same shape and are all arc-shaped, the positioning pin and the toggle pin are both arranged at one end of the blade, and all the blades are evenly installed on the base.

4. The beam spot distribution detection device according to claim 2, characterized in that, The outer edge of the control ring is provided with gear teeth, the driving motor is meshed with the gear teeth of the control ring through gears, and the front cover and the rear cover are provided with accommodating grooves for the gears.

5. The beam spot distribution detection device according to claim 1, characterized in that, The electron gun support assembly includes an electron gun base assembly, an electron gun insulating section assembly, a vacuum port and a first vacuum flange. The vacuum port is arranged outside the electron gun insulating section assembly. The first vacuum flange is connected to the vacuum flange at the front end of the experimental device.

6. The beam spot distribution detection device according to claim 1, wherein, The experimental device includes a second vacuum flange, a shell, a focusing coil and a third vacuum flange, wherein the second vacuum flange is connected to an electron gun support assembly, the focusing coil is arranged on the outside of the shell, and the third vacuum flange is arranged at the rear end of the experimental device and connected to a fixing and adjusting device.

7. The beam spot distribution detection device according to claim 6, wherein, The rear end of the shell includes a water cooling box, the edge of the water cooling box is connected to the shell, a water cooling cavity is provided inside the water cooling box, a connecting rod through hole is provided on one side of the central axis of the water cooling box, the aperture connecting rod passes through the connecting rod through hole and is connected to the fixed adjustment device, and a water cooling interface is provided on the outside of the water cooling box.

8. The beam spot distribution detection device according to claim 1, wherein The fixed adjustment device includes a fourth vacuum flange, a bellows, a connecting rod fixing and a three-dimensional slide. The fourth vacuum flange is arranged at the front end of the bellows and is connected to the vacuum flange at the rear end of the experimental device. The rear end of the bellows is connected to the connecting rod fixing, and the connecting rod fixing is connected to the three-dimensional slide.

9. The spot distribution detection device according to claim 8, wherein, The three-dimensional sliding table includes an X-direction sliding table, a Y-direction sliding table, and a Z-direction sliding table. The connecting rod fixing member is installed on the X-direction sliding table. The X-direction sliding table is installed on the Y-direction sliding table. The Y-direction sliding table is installed on the Z-direction sliding table. The Z-direction sliding table adjusts its position in the Z direction through a Z-direction adjusting handwheel. The Y-direction sliding table adjusts its position in the Y direction through a Y-direction adjusting handle. The X-direction sliding table adjusts its position in the X direction through an X-direction adjusting handle. A Z-direction fine-tuning handle is further provided on the connecting rod fixing member.

10. An electron gun, characterized in that, The electron gun is connected to the spot distribution detection device according to any one of claims 1 to 9 through an electron gun support assembly.

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