Cleaning device and sorting machine

Abstract

The utility model discloses a cleaning device and a sorting machine, and relates to the technical field of semiconductor production equipment, the cleaning device comprises a driving mechanism and a cleaning mechanism, the cleaning mechanism is arranged on the driving mechanism in a sliding mode, the cleaning mechanism is provided with a wiping position, the cleaning mechanism comprises a cleaning unit, a nozzle and a liquid storage box communicated with the nozzle, the nozzle can spray the cleaning agent in the liquid storage box to the cleaning unit; when the cleaning mechanism is located at the wiping position, the cleaning unit abuts against the to-be-wiped part, the driving mechanism can drive the cleaning mechanism to reciprocate, and then the cleaning unit is driven to reciprocate to clean the to-be-wiped part. According to the technical scheme, the technical problem that the production cost is high due to the fact that an existing cleaning device is poor in cleaning effect can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production equipment, in particular to a cleaning device and a sorting machine. Background Art

[0002] In the process of semiconductor production, the swing arm device is used to transport semiconductors. As production progresses, some impurities will be adsorbed on the suction nozzles of the swing arm device. Therefore, it is necessary to clean the suction nozzles regularly. Currently, a cleaning device is mainly used to clean the suction nozzles, but the cleaning effect of the existing cleaning device is poor, and manual assistance is often required for cleaning, which will increase production costs.

[0003] Therefore, it is necessary to provide a new cleaning device and sorting machine to solve the above technical problems. Summary of the Utility Model

[0004] The main purpose of the utility model is to provide a cleaning device and a sorting machine, aiming to solve the technical problem of high production costs caused by the poor cleaning effect of the existing cleaning device.

[0005] To achieve the above purpose, a cleaning device proposed by the utility model includes:

[0006] A driving mechanism;

[0007] A cleaning mechanism, the cleaning mechanism is slidably arranged on the driving mechanism, the cleaning mechanism has a wiping position, the cleaning mechanism includes a cleaning unit, a nozzle and a liquid storage box communicated with the nozzle, and the nozzle can spray the cleaning agent in the liquid storage box onto the cleaning unit;

[0008] When the cleaning mechanism is in the wiping position, the cleaning unit abuts against the component to be wiped, and the driving mechanism can drive the cleaning mechanism to reciprocate, and then drive the cleaning unit to reciprocate to clean the component to be wiped.

[0009] In an embodiment, the cleaning mechanism further includes a base and a mounting block, the cleaning unit includes a cleaning cloth, the base is slidably arranged on the driving mechanism, the mounting block is arranged on the base, the mounting block forms a cavity and an opening communicated with the cavity, the cleaning cloth covers the opening, the liquid storage box is arranged on the base, the nozzle is arranged on the mounting block, and the nozzle has a liquid outlet, and the liquid outlet is arranged in the cavity in a manner facing the opening.

[0010] In an embodiment, the cleaning mechanism further includes a pressing plate, the pressing plate is arranged at the opening, and a relief hole is opened at the position of the pressing plate corresponding to the opening, and the cleaning cloth is arranged between the pressing plate and the mounting block.

[0011] In one embodiment, an annular protrusion is formed along the circumferential direction of the opening, and the annular protrusion is inserted into the avoidance hole.

[0012] In one embodiment, the cleaning device further includes a cleaning brush, the cleaning brush is disposed on the base, and the cleaning mechanism further has a cleaning position;

[0013] When the cleaning mechanism is in the wiping position, the cleaning cloth abuts against the component to be wiped; when the cleaning mechanism is in the cleaning position, the cleaning brush abuts against the component to be cleaned.

[0014] In one embodiment, the driving mechanism is provided with a driving cylinder, the driving cylinder includes a cylinder body and a telescopic rod telescopically disposed in the cylinder body along a first direction, and the telescopic rod is connected to the base;

[0015] When the cleaning mechanism is in the wiping position, the telescopic rod extends out of the cylinder body; when the cleaning mechanism is in the cleaning position, the telescopic rod retracts into the cylinder body.

[0016] In one embodiment, the number of the cleaning brushes is two, and the two cleaning brushes are spaced apart along a second direction.

[0017] In one embodiment, the liquid storage box includes a box body and a cover body, the box body forms a liquid storage cavity and a liquid injection port communicating with the liquid storage cavity, and the cover body is detachably disposed at the liquid injection port.

[0018] In one embodiment, the driving mechanism includes a first driving assembly and a second driving assembly, the first driving assembly includes a first sliding seat, a first sliding block slidably disposed on the first sliding seat, and a first driving member capable of driving the first sliding block to reciprocate along a third direction, the second driving assembly includes a second sliding block disposed on the first sliding block and a second driving member capable of driving the second sliding block to reciprocate along a second direction, and the cleaning mechanism is disposed on the second sliding block.

[0019] In addition, the present utility model further provides a sorting machine, including the cleaning device as described above, a thimble device and a swing arm device which are spaced apart, and the cleaning device can move between the thimble device and the swing arm device.

[0020] The technical solution of the present utility model can clean the component to be wiped by driving the cleaning unit to reciprocate when the cleaning mechanism is in the wiping position through the driving mechanism, and can improve the cleaning effect by spraying a cleaning agent onto the cleaning unit through the nozzle. In this embodiment, the driving mechanism can drive the cleaning mechanism to reciprocate when the cleaning mechanism is in the cleaning position to clean the component to be wiped. The liquid storage box is used to hold cleaning agents such as alcohol and cleaning solution, and the nozzle can spray the cleaning agent in the liquid storage box onto the cleaning unit to improve the cleaning effect. Specifically, when cleaning the component to be wiped, first, the swing arm mechanism drives the suction nozzle to move to the designated position, then the cleaning mechanism moves to the wiping position, and at the same time, the cleaning agent is sprayed onto the cleaning unit through the nozzle. Finally, the driving mechanism drives the cleaning mechanism to reciprocate in the vertical plane, which can drive the cleaning unit to reciprocate in the vertical plane to clean the component to be wiped. Using this cleaning device to clean the component to be wiped can ensure the cleaning effect, and during the cleaning process, no manual assistance is required, which can reduce the labor cost and thus reduce the production cost. This cleaning device is applied to technical fields such as semiconductor production. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following-described drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on the structures shown in these drawings.

[0022] Figure 1 It is a schematic structural diagram of the cleaning device in the embodiment provided by the present utility model;

[0023] Figure 2 It is a schematic structural diagram of the cleaning mechanism in the embodiment provided by the present utility model;

[0024] Figure 3 It is a schematic structural diagram of the cleaning device provided by the present utility model when it is between the thimble device and the swing arm device.

[0025] Explanation of the reference numerals in the drawings:

[0026] 100, cleaning device; 1, driving mechanism; 11, driving cylinder; 12, first driving component; 121, first sliding seat; 122, first sliding block; 13, second driving component; 131, second sliding block; 2, cleaning mechanism; 21, nozzle; 22, liquid storage box; 221, box body; 222, cover body; 23, base; 24, mounting block; 241, cavity; 242, opening; 243, annular protrusion; 25, pressing plate; 251, avoidance hole; 3, cleaning brush;

[0027] 200. Swing arm device; 210. Component to be wiped

[0028] 300. Thimble device; 310. Component to be cleaned

[0029] The realization, functional features and advantages of the present utility model will be further described with reference to the embodiments and the accompanying drawings. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0031] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present utility model are only used to explain the relative positional relationship and movement conditions between components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.

[0032] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present utility model, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears throughout the text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or a solution that satisfies both A and B simultaneously.

[0033] In addition, the technical solutions between the various embodiments of the present utility model can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement them. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by the present utility model.

[0034] In the semiconductor production process, where the semiconductor includes but is not limited to die, wafers, etc., the following will be described taking the die as an example. A swing arm device is required to transport the die. As production progresses, some tiny debris particles will be adsorbed on the suction nozzles of the swing arm device. Therefore, the suction nozzles need to be cleaned regularly. Currently, a cleaning device is mainly used to clean the suction nozzles. However, in the actual production process, the researchers found that the existing cleaning device does not add cleaning agents during cleaning, resulting in poor cleaning effects and often requiring manual assistance in cleaning, which will increase production costs. In addition, during the production process, a thimble device is also required to separate the die from the blue film. As production progresses, some tiny debris particles will also be adsorbed on the thimbles and thimble caps of the thimble device. Therefore, the thimbles and thimble caps also need to be cleaned regularly. However, the existing cleaning device can only clean the suction nozzles, which has great limitations.

[0035] The present utility model provides a cleaning device and a sorting machine, aiming to solve the technical problem of high production costs caused by the poor cleaning effect of the existing cleaning device.

[0036] Please refer to Figure 1 and Figure 2 , in an embodiment of the present utility model, the cleaning device 100 includes a driving mechanism 1 and a cleaning mechanism 2. The cleaning mechanism 2 is slidably disposed on the driving mechanism 1. The cleaning mechanism 2 has a wiping position. The cleaning mechanism 2 includes a cleaning unit, a nozzle 21, and a liquid storage box 22 communicated with the nozzle 21. The nozzle 21 can spray the cleaning agent in the liquid storage box 22 onto the cleaning unit. When the cleaning mechanism 2 is in the wiping position, the cleaning unit abuts against the component to be wiped 210. The driving mechanism 1 can drive the cleaning mechanism 2 to reciprocate, and further drive the cleaning unit to reciprocate to clean the component to be wiped 210.

[0037] The technical solution of the present utility model can clean the component to be wiped 210 by driving the cleaning unit to reciprocate when the cleaning mechanism 2 is in the wiping position by the driving mechanism 1, and can improve the cleaning effect by spraying the cleaning agent from the nozzle 21 onto the cleaning unit. In this embodiment, the driving mechanism 1 can drive the cleaning mechanism 2 to reciprocate when the cleaning mechanism 2 is in the cleaning position to clean the component to be wiped 210. The liquid storage box 22 is used to hold cleaning agents such as alcohol and cleaning liquid, and the nozzle 21 can spray the cleaning agent in the liquid storage box 22 onto the cleaning unit to improve the cleaning effect. Specifically, taking Figure 1For example, when cleaning the wiping component 210, first, the swing arm mechanism drives the wiping component 210 to move to a designated position. Subsequently, the cleaning mechanism 2 moves to the wiping position, and at the same time, a cleaning agent is sprayed onto the cleaning unit through the nozzle 21. Finally, the driving mechanism 1 drives the cleaning mechanism 2 to reciprocate in the vertical plane, which can drive the cleaning unit to reciprocate in the vertical plane to clean the wiping component 210. Using this cleaning device 100 to clean the wiping component 210 can ensure the cleaning effect. Moreover, during the cleaning process, no manual assistance is required, which can reduce labor costs and thus reduce production costs. This cleaning device 100 is applied to technical fields such as semiconductor production.

[0038] It should be noted that the designated position mentioned above refers to Figure 3 the position where the wiping component 210 in

[0039] Please refer to Figure 2 , in an embodiment of the present utility model, the cleaning mechanism 2 further includes a base 23 and a mounting block 24. The cleaning unit includes a cleaning cloth. The base 23 is slidably arranged on the driving mechanism 1. The mounting block 24 is arranged on the base 23. The mounting block 24 forms a cavity 241 and an opening 242 communicating with the cavity 241. The cleaning cloth covers the opening 242. The liquid storage box 22 is arranged on the base 23. The nozzle 21 is arranged on the mounting block 24. The nozzle 21 has a liquid outlet, and the liquid outlet is arranged in the cavity 241 in a manner facing the opening 242. Specifically, the cleaning mechanism 2 switches positions by sliding, and the liquid outlet of the nozzle 21 is arranged in the cavity 241 in a manner facing the opening 242, which can ensure that when the nozzle 21 sprays the cleaning agent, the cleaning agent can be accurately sprayed onto the cleaning cloth covering the opening 242, thereby ensuring the cleaning effect. In a specific embodiment, the cavity 241 opened in the mounting block 24 can be either a cylindrical cavity or a conical cavity that gradually expands from the end close to the nozzle 21 to the end close to the opening 242.

[0040] In an embodiment of the present utility model, the cleaning mechanism 2 further includes a pressing plate 25. The pressing plate 25 is arranged at the opening 242, and the pressing plate 25 is provided with an avoidance hole 251 corresponding to the position of the opening 242. The cleaning cloth is arranged between the pressing plate 25 and the mounting block 24. In this embodiment, the pressing plate 25 is used to press the cleaning cloth against the mounting block 24, that is, the cleaning cloth is clamped by the pressing plate 25 and the mounting block 24, which can prevent the cleaning cloth from slipping during the cleaning process.

[0041] Please refer to Figure 2, in an embodiment of the present utility model, an annular protrusion 243 is formed along the circumference of the opening 242, and the annular protrusion 243 is inserted into the avoidance hole 251. When installing the cleaning cloth, first cover the cleaning cloth on the opening 242, and then press the outer periphery of the cleaning cloth against the mounting block 24 through the pressing plate 25. During the installation process of the cleaning cloth, the setting of the annular protrusion 243 can make the cleaning cloth taut, thereby improving the cleaning effect.

[0042] Please refer to Figure 2 , in an embodiment of the present utility model, the cleaning device 100 further includes a cleaning brush 3. The cleaning brush 3 is disposed on the base 23, and the cleaning mechanism 2 further has a cleaning position; when the cleaning mechanism 2 is in the wiping position, the cleaning cloth abuts against the component 210 to be wiped; when the cleaning mechanism 2 is in the cleaning position, the cleaning brush 3 abuts against the component 310 to be cleaned. Specifically, the cleaning brush 3 is used to clean the component 310 to be cleaned. When the cleaning mechanism 2 is in the cleaning position, the cleaning brush 3 abuts against the component 310 to be cleaned, and the driving mechanism 1 can drive the cleaning mechanism 2 to reciprocate, thereby driving the cleaning brush 3 to reciprocate to clean the component 310 to be cleaned. That is to say, the cleaning device 100 can not only clean the component 210 to be wiped when the cleaning mechanism 2 is in the wiping position, but also clean the component 310 to be cleaned when the cleaning mechanism 2 is in the cleaning position, which can reduce the limitations of the cleaning device 100 and improve the applicable range of the cleaning device 100. In this embodiment, the component 310 to be cleaned includes a thimble and a thimble cap. It should be noted that the thimble device 300 in the sorting machine is spaced apart from the swing arm device 200. When performing the cleaning work, move the cleaning device 100 between the thimble device 300 and the swing arm device 200, and switch the cleaning mechanism 2 to the wiping position by sliding, so that the cleaning cloth can abut against the component 210 to be wiped, and then under the drive of the driving mechanism 1, the component 210 to be wiped can be cleaned; similarly, by sliding the cleaning mechanism 2 to the cleaning position, the cleaning brush 3 can be made to abut against the component 310 to be cleaned, and then under the drive of the driving mechanism 1, the component 310 to be cleaned can be cleaned.

[0043] Please refer to Figure 1 , in an embodiment of the present utility model, the driving mechanism 1 is provided with a driving cylinder 11. The driving cylinder 11 includes a cylinder body and a telescopic rod telescopically arranged in the cylinder body along a first direction. The telescopic rod is connected to the base 23; when the cleaning mechanism 2 is in the wiping position, the telescopic rod extends out of the cylinder body; when the cleaning mechanism 2 is in the cleaning position, the telescopic rod retracts into the cylinder body, wherein the first direction refers to Figure 1 the direction indicated by X in

[0044] In an embodiment of the present utility model, the number of the cleaning brushes 3 is two, and the two cleaning brushes 3 are arranged at intervals along the second direction, where the second direction refers to Figure 1 the direction indicated by Z in

[0045] . In this embodiment, the component to be cleaned 310 includes a thimble and a thimble cap, and the two cleaning brushes 3 are respectively used to clean the thimble and the thimble cap. Specifically, the cleaning process of the thimble is as follows: First, the driving mechanism 1 drives the cleaning mechanism 2 to move, so that the corresponding cleaning brush 3 of the cleaning mechanism 2 is aligned with the thimble. Subsequently, the cleaning mechanism 2 slides to the cleaning position under the drive of the driving cylinder 11. Finally, the driving mechanism 1 drives the cleaning mechanism 2 to reciprocate in the vertical plane, which can drive the cleaning unit to reciprocate in the vertical plane to clean the component to be wiped 210; the cleaning process of the thimble cap is similar to that of the thimble, and will not be elaborated here one by one.

[0046] Please refer to Figure 1 , in an embodiment of the present utility model, the liquid storage box 22 includes a box body 221 and a cover body 222. The box body 221 is formed with a liquid storage cavity and a liquid injection port communicated with the liquid storage cavity, and the cover body 222 is detachably arranged at the liquid injection port. Specifically, the liquid storage cavity of the box body 221 is used to store the cleaning agent, and the arrangement of the liquid injection port facilitates the worker to add the cleaning agent into the liquid storage cavity. In a specific embodiment, the cleaning agent can be one of various cleaning reagents such as alcohol and cleaning liquid.

[0047] Please refer to Figure 1 , in an embodiment of the present utility model, the driving mechanism 1 includes a first driving component 12 and a second driving component 13. The first driving component 12 includes a first sliding seat 121, a first sliding block 122 slidably arranged on the first sliding seat 121, and a first driving member capable of driving the first sliding block 122 to reciprocate along the third direction. The second driving component 13 includes a second sliding block 131 arranged on the first sliding block 122 and a second driving member capable of driving the second sliding block 131 to reciprocate along the second direction. The cleaning mechanism 2 is arranged on the second sliding block 131, where the third direction refers to Figure 1The direction indicated by Y in []. Specifically, the first driving member can drive the first slider 122 to reciprocate in the third direction, and then drive the second slider 131 to reciprocate, so as to drive the cleaning brush 3 and the cleaning cloth of the cleaning mechanism 2 to reciprocate; the second driving member can drive the second slider 131 to reciprocate in the second direction, and then drive the cleaning brush 3 and the cleaning cloth of the cleaning mechanism 2 to reciprocate.

[0048] The present utility model further provides a sorting machine, which includes the above-mentioned cleaning device 100, a thimble device 300 and a swing arm device 200 arranged at intervals, and the cleaning device 100 can move between the thimble device 300 and the swing arm device 200. For the specific structure of the cleaning device 100, refer to the above-mentioned embodiments. Since this sorting machine adopts all the technical solutions of the above-mentioned embodiments, it has at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be elaborated here one by one. Among them, when it is necessary to clean the thimble, the thimble cap of the thimble device 300 and the suction nozzle of the swing arm device 200, the cleaning device 100 can be moved between the thimble device 300 and the swing arm device 200 by the driving mechanism 1 or an external driving device, so as to clean the thimble, the thimble cap and the suction nozzle.

[0049] The above are only exemplary embodiments of the present utility model, and do not limit the patent scope of the present utility model. Any equivalent structural transformation made under the technical concept of the present utility model by using the content of the specification and drawings of the present utility model, or any direct / indirect application in other related technical fields is included in the patent protection scope of the present utility model.

Claims

1. A cleaning device, characterized in that, Comprising: A driving mechanism; A cleaning mechanism, the cleaning mechanism being slidably disposed on the driving mechanism, the cleaning mechanism having a wiping position, the cleaning mechanism including a cleaning unit, a nozzle, and a liquid storage box communicating with the nozzle, the nozzle being capable of spraying a cleaning agent in the liquid storage box onto the cleaning unit; When the cleaning mechanism is in the wiping position, the cleaning unit abuts against the component to be wiped, and the driving mechanism can drive the cleaning mechanism to reciprocate, thereby driving the cleaning unit to reciprocate to clean the component to be wiped.

2. The cleaning device according to claim 1, characterized in that, The cleaning mechanism further includes a base and a mounting block, the cleaning unit includes a cleaning cloth, the base is slidably disposed on the driving mechanism, the mounting block is disposed on the base, the mounting block forms a cavity and an opening communicating with the cavity, the cleaning cloth covers the opening, the liquid storage box is disposed on the base, the nozzle is disposed on the mounting block, the nozzle has a liquid outlet, and the liquid outlet is disposed in the cavity in a manner facing the opening.

3. The cleaning device according to claim 2, wherein, The cleaning mechanism further includes a pressing plate, the pressing plate is disposed at the opening, and the pressing plate is provided with an avoidance hole corresponding to the position of the opening, and the cleaning cloth is disposed between the pressing plate and the mounting block.

4. The cleaning device according to claim 3, wherein A circular protrusion is formed along the circumference of the opening, and the circular protrusion passes through the avoidance hole.

5. The cleaning device according to claim 2, characterized in that, The cleaning device further includes a cleaning brush, the cleaning brush is disposed on the base, and the cleaning mechanism further has a cleaning position; When the cleaning mechanism is in the wiping position, the cleaning cloth abuts against the component to be wiped; when the cleaning mechanism is in the cleaning position, the cleaning brush abuts against the component to be cleaned.

6. The cleaning device according to claim 5, characterized in that, The driving mechanism is provided with a driving cylinder, the driving cylinder includes a cylinder body and a telescopic rod telescopically disposed in the cylinder body along a first direction, and the telescopic rod is connected to the base; When the cleaning mechanism is in the wiping position, the telescopic rod extends out of the cylinder body; when the cleaning mechanism is in the cleaning position, the telescopic rod retracts into the cylinder body.

7. The cleaning device according to claim 5, characterized in that, The number of the cleaning brushes is two, and the two cleaning brushes are spaced along a second direction.

8. The cleaning device according to any one of claims 1 to 7, characterized in that, The liquid storage box includes a box body and a cover body, the box body forms a liquid storage cavity and a liquid injection port communicating with the liquid storage cavity, and the cover body is detachably disposed at the liquid injection port.

9. The cleaning device according to any one of claims 1 to 7, characterized in that, The driving mechanism includes a first driving component and a second driving component, the first driving component includes a first sliding seat, a first slider slidably disposed on the first sliding seat, and a first driving member capable of driving the first slider to reciprocate along a third direction, the second driving component includes a second slider disposed on the first slider and a second driving member capable of driving the second slider to reciprocate along a second direction, and the cleaning mechanism is disposed on the second slider.

10. A sorting machine, characterized in that, Including the cleaning device according to any one of claims 1 to 9, a thimble device and a swing arm device arranged at intervals, and the cleaning device can move between the thimble device and the swing arm device.

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