High-performance process cavity lining plate heating module
By using armored heating wire, multi-layer mirror panel and K-type thermocouple design in the heat treatment equipment, the sealing structure is optimized, and the sealing and heating uniformity problems of the heating module are solved, achieving an efficient and stable heat treatment process.
Patent Information
- Application Number
- CN202422159634.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-04
- Publication Date
- 2025-07-18
- Estimated Expiration
- 2034-09-04
AI Technical Summary
In the existing heat treatment equipment, the process chamber lining heating module has shortcomings in terms of sealing, heating uniformity and high temperature resistance, which affects the equipment operation stability and product quality.
The mirror panel with armored heating wire, multi-layer mirror panel device, K-type thermocouple design, optimized sealing structure and sandblasting treatment is adopted to ensure heating uniformity and sealing, and stable connection is achieved through fastening the connection device, and temperature is monitored through the thermocouple.
It improves heating efficiency and uniformity, enhances the accuracy and reliability of temperature monitoring, reduces leakage rates and usage costs, and ensures the safety and stability of the equipment.
Smart Images
Figure CN223118502U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of heat treatment equipment, in particular to a high-performance process chamber liner heating module. Background Art
[0002] In the existing heat treatment equipment, as a key component, the heating efficiency, sealing performance and temperature resistance of the process chamber liner heating module directly affect the effect and stability of the entire heat treatment process. However, the traditional module has deficiencies in sealing performance, heating uniformity and high temperature resistance, which limits its wide application in high-end heat treatment, especially in high temperature and vacuum environments, where problems such as poor sealing, uneven heating or material failure are likely to occur, affecting the operation stability of the overall equipment and product quality. Content of the Utility Model
[0003] To solve some problems existing in the above-mentioned prior art, the utility model provides a high-performance process chamber liner heating module.
[0004] To achieve the above object, the utility model provides a high-performance process chamber liner heating module, including a first liner and a second liner, the first liner and the second liner are vertically connected, heating wires are arranged inside both the first liner and the second liner, and nickel tubes are sleeved outside the heating wires; multi-layer mirror panel devices are arranged on both the first liner and the second liner, fastening connection devices are arranged on the multi-layer mirror panel devices, and they are fixed and connected through the fastening connection devices; a sealing connection device is further arranged at one end of the first liner.
[0005] When the utility model works, first, the heating wire is fixed in the first lining board and the second lining board in a seamless armored manner and coiled starting from the flange wire outlet end, reserving enough wire length to ensure reliable connection. At the same time, a nickel tube is sleeved outside the heating wire. On the first lining board, the first-layer mirror panel of the first lining board, the second-layer mirror panel of the first lining board, and the third-layer mirror panel of the first lining board are sequentially installed from the inside to the outside. The fastening components penetrate through each layer of mirror panel and are fixed on the first lining board. On the second lining board, the first-layer mirror panel of the second lining board, the second-layer mirror panel of the second lining board, and the third-layer mirror panel of the second lining board are sequentially installed from the inside to the outside. Similarly, the fastening components penetrate through each layer of mirror panel and are fixed on the second lining board to ensure that the space between each layer of mirror panel is flat and free of foreign objects. An R pin is installed in the installation hole of the connection component to realize the connection and support between the mirror panels. Then, the cable joint, the electrical protection cover, and the flange are installed in sequence, ensuring the correct installation of the O-ring to achieve radial sealing at the cold end. The thermocouple passes through the flange and is connected to the cable joint, ensuring reliable connection without looseness. And use the corresponding tool to check whether the electrical connection is good, without short circuit or open circuit phenomena. Connect the power supply, gradually increase the voltage, observe the heating condition of the heating wire, ensure that the temperature rise of the module is uniform and there is no abnormal heating point. Adjust the K-type double-branch thermocouple through the control system, monitor and adjust the temperature of the module to ensure that the temperature of the process chamber lining board is kept within the set range and avoid overheating damage to the equipment.
[0006] The beneficial effects of the utility model are as follows: a high-performance heating module for the process chamber lining board. The utility model adopts an armored heating wire, which improves the heating efficiency and uniformity; the double-branch K-type thermocouple design enhances the accuracy and reliability of temperature monitoring; the sealing structure is optimized, reducing the leakage rate and improving the sealing performance; the mirror panels and lining boards treated by sandblasting improve the overall heat conductivity of the module. At the same time, the easy maintainability also reduces the user's usage cost and maintenance difficulty, having a wide market application prospect.
[0007] As a further improvement of the utility model, in order to reflect the heat generated by the heating wire back to the lining board or the process chamber, make the heat be more fully utilized, reduce the waste of energy, and improve the efficiency of the heating module; the multi-layer mirror panel device includes the first-layer mirror panel of the first lining board, the second-layer mirror panel of the first lining board, and the third-layer mirror panel of the first lining board sequentially arranged from the inside to the outside on the first lining board; the multi-layer mirror panel device also includes the first-layer mirror panel of the second lining board, the second-layer mirror panel of the second lining board, and the third-layer mirror panel of the second lining board sequentially arranged from the inside to the outside on the second lining board.
[0008] As a further improvement of the utility model, in order to optimize the sealing structure, reduce the leakage rate, and improve the sealing performance; the sealing connection device includes a cable joint, a flange, and an O-ring, and an electrical protection cover is also arranged between the cable joint and the flange.
[0009] As a further improvement of the present utility model, in order to monitor the temperature of the process chamber liner heating module in real time and ensure that the heating process is carried out within the set temperature range; a thermocouple is also cooperatively arranged in the first liner and the second liner, and the thermocouple is arranged in a K-type double-branch manner.
[0010] As a further improvement of the present utility model, in order to ensure the overall stability of the structure and guarantee the normal operation of the overall equipment; the fastening connection device includes a fastening component and a connecting component, and several of each are provided; the fastening component is fixed on the first liner by passing through the first mirror panel, the second mirror panel and the third mirror panel of the first liner, and the fastening component is fixed on the second liner by passing through the first mirror panel, the second mirror panel and the third mirror panel of the second liner; the connecting component includes a mounting hole, an R pin is arranged in the mounting hole, and the connection and support between the mirror panels are realized through the R pin; the multi-layer mirror panel device can be separately disassembled and replaced through the fastening connection device.
[0011] As a further improvement of the present utility model, in order to avoid displacement caused by shaking and increase the installation stability; a plurality of grooves with different shapes and sizes are further arranged at the lower end of the third mirror panel of the first liner.
[0012] As a further improvement of the present utility model, in order to improve the corrosion resistance and extend the service life; emery is sprayed on the surfaces of the first liner and the second liner, and the roughness is not less than Ra10; the multi-layer mirror panel device is subjected to sandblasting mirror treatment.
[0013] As a further improvement of the present utility model, in order to improve the sealing performance of the cold end and reduce the leakage rate; the thermocouple and the heating wire jointly pass through the flange and are connected to the cable joint, and radial sealing of the cold end is realized through an O-ring and an electrical protective cover.
[0014] As a further improvement of the present utility model, in order to adapt to different process requirements and facilitate installation and maintenance; the heating wire is fixed in the module in a seamless armored manner, starts to coil from the flange outlet end, and a sufficient length of wire is reserved to ensure reliable connection.
[0015] As a further improvement of the present utility model, in order to ensure the safety and stability of the equipment operation; the maximum operating temperature of the module should be less than 650 °C. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] For the convenience of those skilled in the art to understand, the present utility model will be further described below with reference to the accompanying drawings:
[0017] Figure 1 It is the front view of the present utility model.
[0018] Figure 2 This is the left view of the present utility model.
[0019] Figure 3 This is the side view of the present utility model.
[0020] Figure 4 This is the Figure 1 enlarged view of part A in the present utility model.
[0021] Wherein, 1 is a heating wire, 2 is a first lining plate, 3 is a second lining plate, 4 is the first layer mirror panel of the second lining plate, 5 is the second layer mirror panel of the second lining plate, 6 is the third layer mirror panel of the second lining plate, 7 is the first layer mirror panel of the first lining plate, 8 is the second layer mirror panel of the first lining plate, 9 is the third layer mirror panel of the first lining plate, 10 is a fastening assembly, 11 is a connecting assembly, 12 is a mounting hole, 13 is an R pin, 14 is a thermocouple, 15 is a flange, 16 is an electrical protective cover, 17 is a cable joint, 18 is a groove, 19 is an O-ring. Detailed implementation manners
[0022] As Figures 1-4A high-performance process chamber liner heating module as shown, comprising a first liner 2 and a second liner 3, the first liner 2 and the second liner 3 are vertically connected, heating wires 1 are arranged inside both the first liner 2 and the second liner 3, and nickel tubes are sleeved outside the heating wires 1; multilayer mirror panel devices are arranged on both the first liner 2 and the second liner 3, fastening connection devices are arranged on the multilayer mirror panel devices, and are fixed and connected through the fastening connection devices; one end of the first liner 2 is also provided with a sealing connection device; the multilayer mirror panel device includes a first-layer mirror panel 7 of the first liner, a second-layer mirror panel 8 of the first liner, and a third-layer mirror panel 9 of the first liner which are sequentially arranged from the inside to the outside on the first liner 2; the multilayer mirror panel device further includes a first-layer mirror panel 4 of the second liner, a second-layer mirror panel 5 of the second liner, and a third-layer mirror panel 6 of the second liner which are sequentially arranged from the inside to the outside on the second liner 3; the sealing connection device includes a cable joint 17, a flange 15 and an O-ring 19, and an electrical protective cover 16 is also arranged between the cable joint 17 and the flange 15; thermocouples 14 are also arranged in cooperation inside the first liner 2 and the second liner 3, and the thermocouples 14 are arranged in a K-type double-branch manner; the fastening connection device includes fastening components 10 and connection components 11, and several of each of the fastening components 10 and the connection components 11 are provided; the fastening components 10 are fixed on the first liner 2 by passing through the first-layer mirror panel 7 of the first liner, the second-layer mirror panel 8 of the first liner, and the third-layer mirror panel 9 of the first liner, and the fastening components 10 are fixed on the second liner 3 by passing through the first-layer mirror panel 4 of the second liner, the second-layer mirror panel 5 of the second liner, and the third-layer mirror panel 6 of the second liner; the connection component 11 includes a mounting hole 12, an R-pin 13 is arranged inside the mounting hole 12, and the connection and support between the mirror panels are realized through the R-pin 13; the multilayer mirror panel device can be separately disassembled and replaced through the fastening connection device; several grooves 18 with different shapes and sizes are also arranged at the lower end of the third-layer mirror panel 9 of the first liner; the surfaces of the first liner 2 and the second liner 3 are sprayed with emery, and the roughness is not less than Ra10; the multilayer mirror panel device is subjected to sandblasting mirror treatment; the thermocouples 14 and the heating wires 1 jointly pass through the flange 15 to be connected with the cable joint, and the cold-end radial sealing is realized through the O-ring 19 and the electrical protective cover 16; the heating wires 1 are fixed in the module in a seamless armored manner, start to coil from the wire outlet end of the flange 15, and a sufficient length of wire is reserved to ensure reliable connection; the maximum operating temperature of the module should be less than 650 °C.
[0023] When the utility model works, first, the heating wire 1 is fixed in the first lining plate 2 and the second lining plate 3 in a seamless armored manner, and is coiled starting from the wire outlet end of the flange 15, leaving enough wire length to ensure reliable connection. At the same time, a nickel tube is sleeved outside the heating wire 1. On the first lining plate 2, the first-layer mirror panel 7 of the first lining plate, the second-layer mirror panel 8 of the first lining plate, and the third-layer mirror panel 9 of the first lining plate are sequentially installed from the inside to the outside. The fastening components pass through each layer of mirror panels and are fixed on the first lining plate 2. On the second lining plate 3, the first-layer mirror panel 4 of the second lining plate, the second-layer mirror panel 5 of the second lining plate, and the third-layer mirror panel 6 of the second lining plate are sequentially installed from the inside to the outside. Similarly, the fastening components pass through each layer of mirror panels and are fixed on the second lining plate 2 to ensure that the surfaces between each layer of mirror panels are flat and free of foreign objects. An R pin 13 is installed in the mounting hole of the connecting component to realize the connection and support between the mirror panels. Then, the cable connector 17, the electrical protection cover 16, and the flange 15 are installed in sequence, ensuring the correct installation of the O-ring 19 to achieve radial sealing at the cold end. The thermocouple 14 passes through the flange 15 and is connected to the cable connector, ensuring reliable connection without looseness. And use the corresponding tool to check whether the electrical connection is good, without short circuit or open circuit. Connect the power supply, gradually increase the voltage, observe the heating condition of the heating wire 1, ensure that the temperature rise of the module is uniform and there are no abnormal heating points. Adjust the K-type double-branch thermocouple 14 through the control system, monitor and adjust the temperature of the module to ensure that the temperature of the process chamber lining plate is maintained within the set range and avoid over-temperature damage to the equipment.
[0024] The above is only the preferred embodiment of the utility model. The protection scope of the utility model is not limited to the above embodiments. All technical solutions within the idea of the utility model belong to the protection scope of the utility model. It should be pointed out that for those of ordinary skill in the art in this technical field, several improvements and refinements made without departing from the principle of the utility model should also be regarded as the protection scope of the utility model.
Claims
1. A high-performance process chamber liner heating module, comprising a first liner (2) and a second liner (3), characterized in that: The first liner (2) and the second liner (3) are vertically connected. Heating wires (1) are arranged inside both the first liner (2) and the second liner (3), and nickel tubes are sleeved outside the heating wires (1). Multiple layers of mirror panel devices are arranged on both the first liner (2) and the second liner (3). A fastening connection device is arranged on the multiple layers of mirror panel devices and is fixed and connected through the fastening connection device. One end of the first liner (2) is also provided with a sealing connection device.
2. The high-performance process chamber liner heating module according to claim 1, wherein: The multiple layers of mirror panel devices include a first-layer mirror panel of the first liner (7), a second-layer mirror panel of the first liner (8), and a third-layer mirror panel of the first liner (9) which are sequentially arranged from inside to outside on the first liner (2). The multiple layers of mirror panel devices also include a first-layer mirror panel of the second liner (4), a second-layer mirror panel of the second liner (5), and a third-layer mirror panel of the second liner (6) which are sequentially arranged from inside to outside on the second liner (3).
3. A high-performance process chamber liner heating module according to claim 1, characterized in that: The sealing connection device includes a cable joint (17), a flange (15), and an O-ring (19). An electrical protection cover (16) is also arranged between the cable joint (17) and the flange (15).
4. A high-performance process chamber liner heating module according to claim 1, characterized in that: Thermocouples (14) are also arranged in cooperation inside the first liner (2) and the second liner (3), and the thermocouples (14) are arranged in a K-type double-branch manner.
5. A high-performance process chamber liner heating module according to claim 1 or 2, characterized in that: The fastening connection device includes fastening components (10) and connection components (11), and several of each are arranged. The fastening components (10) are fixed on the first liner (2) by passing through the first-layer mirror panel of the first liner (7), the second-layer mirror panel of the first liner (8), and the third-layer mirror panel of the first liner (9). The fastening components (10) are fixed on the second liner (3) by passing through the first-layer mirror panel of the second liner (4), the second-layer mirror panel of the second liner (5), and the third-layer mirror panel of the second liner (6). The connection components (11) include mounting holes (12), and R pins (13) are arranged inside the mounting holes (12), and the connection and support between the mirror panels are realized through the R pins (13). The multiple layers of mirror panel devices can be individually disassembled and replaced through the fastening connection device.
6. The high-performance process chamber liner heating module according to claim 2, wherein: Several grooves (18) with different shapes and sizes are also arranged at the lower end of the third-layer mirror panel of the first liner (9).
7. The high-performance process chamber liner heating module according to claim 1, characterized in that: Emery is sprayed on the surfaces of the first liner (2) and the second liner (3), and the roughness is not less than Ra10. The multiple layers of mirror panel devices are subjected to sandblasting and mirror treatment.
8. The high-performance process chamber liner heating module according to claim 4, characterized in that: The thermocouples (14) and the heating wires (1) jointly pass through the flange (15) to be connected to the cable joint, and the cold-end radial seal is realized through the O-ring (19) and the electrical protection cover (16).
9. A high-performance process chamber liner heating module according to claim 1 or 3, characterized in that: The heating wires (1) are fixed in the module in a seamless armored manner, start to be coiled from the wire outlet end of the flange (15), and enough wire length is reserved to ensure reliable connection.
10. The high-performance process chamber liner heating module according to claim 1, wherein: The maximum operating temperature of the module should be less than 650 °C.