Silicon rod crystal wire adjusting device

By designing a silicon rod crystalline adjustment device, the clamping component driving mechanism is used to realize automatic and precise adjustment of single crystalline silicon rod crystalline, solving the problem of inefficiency in the prior art, improving the adjustment efficiency of silicon rod crystalline, and realizing automated handling.

CN223118586UActive Publication Date: 2025-07-18QINGDAO GAOCE TECH CO LTD
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Patent Information

Application Number
CN202422390128.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-29
Publication Date
2025-07-18
Estimated Expiration
2034-09-29

AI Technical Summary

Technical Problem

In the prior art, the silicon rod crystal wire adjustment efficiency is low, mainly relying on manual observation and adjustment, resulting in low efficiency.

Method used

A silicon rod crystalline adjustment device is designed, including a bracket, a clamping assembly arranged at intervals and a clamping assembly driving mechanism. The clamping assembly driving mechanism realizes synchronous rotation of each clamping assembly, and automatically adjusts the crystalline position of the single crystal silicon rod.

Benefits of technology

Automatic and precise adjustment of the crystalline position of single crystal silicon rods is achieved, adjustment efficiency is improved, and the automatic handling of silicon rods is achieved through AGV trolleys, reducing equipment costs and synchronization problems.

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Abstract

The utility model discloses a silicon rod crystal wire adjusting device which comprises a support, a clamping assembly driving mechanism and at least two clamping assemblies. Each clamping assembly is provided with a clamping position for supporting and clamping a single crystal silicon rod, the clamping assemblies are arranged on the support at intervals, and the clamping positions of the clamping assemblies are located on the same straight line; the clamping assembly driving mechanism is connected with the clamping assemblies and is suitable for driving the clamping assemblies to rotate synchronously. According to the utility model, the silicon single crystal rod is supported and clamped by the at least two clamping assemblies which are arranged at intervals, so that the clamping of the silicon single crystal rod after crystal pulling is finished can be realized, and the clamping assemblies are controlled to synchronously rotate by the clamping assembly driving mechanism, so that all positions of the silicon single crystal rod are driven to synchronously rotate; the automatic and accurate adjustment of the crystal line position of the single crystal silicon rod is realized.
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Description

Technical Field

[0001] The utility model relates to the technical field of silicon rod processing equipment, and particularly relates to a silicon rod crystal line adjusting device. Background Art

[0002] The information provided in this part is only background information related to the present disclosure, and it does not necessarily constitute prior art.

[0003] Silicon wafers used for manufacturing semiconductor electronic components such as integrated circuits are mainly manufactured by slicing single crystal silicon rods pulled by the Czochralski method. After the crystal pulling is completed, the shape of the single crystal silicon rod is nearly cylindrical, and multiple detection crystal lines are evenly distributed at nearly 90°. The existence of the crystal lines indicates that the crystal is growing in the form of a single crystal inside. When the crystal lines disappear, it indicates that the crystal plane of the crystal has deflected, resulting in crystals in different directions. The disconnection of the crystal lines can be used to characterize the transformation of the crystal rod from single crystal growth mode to polycrystal growth mode. Therefore, before the single crystal silicon rod is cut into segments, it is necessary to detect the crystal lines of the single crystal silicon rod after the crystal pulling is completed, and then rotate the single crystal silicon rod to avoid the cutting tool head facing the crystal lines.

[0004] Currently, the method for adjusting the crystal lines is mostly to manually observe the position of the crystal lines and then manually adjust the position of the crystal lines, with low efficiency.

[0005] Therefore, it is very important to develop a crystal line position adjusting device suitable for the single crystal silicon rod after the crystal pulling is completed. Summary of the Utility Model

[0006] Therefore, the technical problem to be solved by the utility model is to overcome the defect of low efficiency of the current crystal line adjustment method, so as to provide a silicon rod crystal line adjusting device.

[0007] To achieve the above object, the technical solution adopted by the utility model is as follows:

[0008] A silicon rod crystal line adjusting device, comprising:

[0009] A bracket;

[0010] At least two clamping components, the clamping components have clamping positions for supporting and clamping the single crystal silicon rod, and the clamping components are arranged at intervals on the bracket, and the clamping positions of the clamping components are located on the same straight line;

[0011] A clamping component driving mechanism, the clamping component driving mechanism is connected to each clamping component and is adapted to drive each clamping component to rotate synchronously.

[0012] Further optimizing the technical solution, the clamping component includes:

[0013] A rotating roller bracket, the rotating roller bracket is connected to the side wall of the bracket;

[0014] The first rotating roller, which is rotatably arranged on the rotating roller bracket;

[0015] The second rotating roller, which is rotatably arranged on the rotating roller bracket. There is a gap between the upper part of the second rotating roller and the upper part of the first rotating roller to form the clamping position, and the second rotating roller rotates in the same direction as the first rotating roller.

[0016] Further optimizing the technical solution, the clamping component driving mechanism includes:

[0017] A driving motor;

[0018] A linkage component, which is connected to the output shaft end of the driving motor, and the linkage component is respectively connected to each clamping component.

[0019] Further optimizing the technical solution, the linkage component includes:

[0020] At least two first linkage components, and each first linkage component is respectively connected to one clamping component;

[0021] A first driving shaft, which passes through each rotating roller bracket and is respectively connected to each first linkage component, and the first driving shaft is adapted to drive each first linkage component to run synchronously;

[0022] A first driving shaft connection component, which is connected and arranged between the first driving shaft and the output shaft of the driving motor.

[0023] Further optimizing the technical solution, the first linkage component includes:

[0024] A first rotating roller driving sprocket, which is coaxially connected to the first rotating roller;

[0025] A second rotating roller driving sprocket, which is coaxially connected to the second rotating roller;

[0026] At least one first intermediate sprocket, which is rotatably arranged on the rotating roller bracket;

[0027] A first driving shaft driven sprocket, which is coaxially arranged on the first driving shaft;

[0028] A first chain, which is sleeved on the first driving shaft driven sprocket, the first rotating roller driving sprocket, the second rotating roller driving sprocket and the first intermediate sprocket, so that the first driving shaft is respectively linked with the first driving shaft driven sprocket and the first rotating roller driving sprocket.

[0029] Further optimize the technical solution. A first transition sprocket is arranged at the lower position between the first rotating roller drive sprocket and the second rotating roller drive sprocket. After the first chain bypasses the upper part of the first rotating roller drive sprocket, it bypasses the lower part of this first transition sprocket, and then bypasses the upper part of the second rotating roller drive sprocket, so that there is no interference between the first chain and the clamping position.

[0030] Further optimize the technical solution. The first drive shaft connection assembly includes:

[0031] Two extension frames. The two extension frames are arranged on the side walls of the bracket, and each extension frame corresponds to a rotating roller bracket respectively. The extension frame and the rotating roller bracket are located on both sides of the bracket;

[0032] A second drive shaft, and both ends of the second drive shaft are rotatably arranged on the two extension frames;

[0033] A second linkage assembly, and the second linkage assembly is connected and arranged between the first drive shaft and the second drive shaft;

[0034] A third linkage assembly, and the third linkage assembly is connected and arranged between the second drive shaft and the output shaft of the drive motor.

[0035] Further optimize the technical solution. The second linkage assembly includes:

[0036] A first drive shaft driving sprocket, and the first drive shaft driving sprocket is coaxially connected to the first drive shaft;

[0037] A second drive shaft driven sprocket, and the second drive shaft driven sprocket is coaxially connected to the second drive shaft;

[0038] At least one second transition sprocket, and the second transition sprocket is rotatably arranged on the extension frame;

[0039] A second chain, and the second chain is sleeved on the first drive shaft driving sprocket, the second drive shaft driven sprocket and the second transition sprocket, so that the first drive shaft and the second drive shaft form a linkage.

[0040] Further optimize the technical solution. The third linkage assembly includes:

[0041] A drive motor driving sprocket, and the drive motor driving sprocket is coaxially connected to the output shaft of the drive motor;

[0042] A second drive shaft driving sprocket, and the second drive shaft driving sprocket is coaxially connected to the second drive shaft;

[0043] The third chain is sleeved between the driving motor driving sprocket and the second driving shaft driving sprocket.

[0044] Further optimizing the technical solution, a receiving cavity adapted to receive the first linkage assembly is provided on the rotating roller bracket, and the receiving cavity is sealed by an outer cover.

[0045] The technical solution of the present utility model has the following advantages:

[0046] 1. A silicon rod crystal line adjusting device provided by the present utility model is different from the existing device for clamping the end of a single crystal silicon rod. The present utility model supports and clamps the single crystal silicon rod through at least two clamping assemblies arranged at intervals, and can thus clamp the single crystal silicon rod after crystal pulling. The clamping assembly driving mechanism is used to control the synchronous rotation of each clamping assembly, thereby driving the synchronous rotation of each position of the single crystal silicon rod, realizing the automatic and precise adjustment of the crystal line position of the single crystal silicon rod, and improving the crystal line adjustment efficiency.

[0047] Each clamping assembly is arranged at intervals on the bracket, so it can be adapted to an AGV cart. The AGV cart can automatically place the single crystal silicon rod after crystal pulling into the clamping position of each clamping assembly, making the handling of the single crystal silicon rod more convenient.

[0048] 2. A silicon rod crystal line adjusting device provided by the present utility model, the first driving shaft passes through each rotating roller bracket and is respectively connected to each first linkage assembly. The first driving shaft drives each first linkage assembly to run synchronously, avoiding the problem of increasing the equipment manufacturing cost due to each clamping assembly being driven by a separate driving motor, and avoiding the problem of asynchronous operation of each clamping assembly caused by the inability to synchronize the response times of each driving motor when each clamping assembly is driven by a separate driving motor.

[0049] 3. A silicon rod crystal line adjusting device provided by the present utility model, a first transition sprocket is arranged at the lower position between the first rotating roller driving sprocket and the second rotating roller driving sprocket. After the first chain bypasses the upper part of the first rotating roller driving sprocket, it bypasses the lower part of the first transition sprocket and then bypasses the upper part of the second rotating roller driving sprocket, so that the first chain does not occupy the space of the clamping position and does not interfere with the clamping position.

[0050] 4. A silicon rod crystal line adjusting device provided by the present utility model, a receiving cavity is provided on the rotating roller bracket, and the receiving cavity is sealed by an outer cover. The receiving cavity provides an installation space for the first linkage assembly, and after the outer cover is used to block the receiving cavity, the first linkage assembly in the receiving cavity can be dust-proof and protected, extending the service life of the first linkage assembly. Description of the Drawings

[0051] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0052] Figure 1 Structural schematic diagram of a silicon rod crystal wire adjusting device provided by the present invention;

[0053] Figure 2 Rear view of a silicon rod crystal wire adjusting device provided by the present invention.

[0054] Reference numerals:

[0055] 1. Clamping assembly, 11. First rotating roller, 12. Second rotating roller, 13. Clamping position, 14. Rotating roller bracket;

[0056] 2. Driving motor;

[0057] 3. First linkage assembly, 31. First chain, 32. First rotating roller driving sprocket, 33. Second rotating roller driving sprocket, 34. First intermediate sprocket, 35. First driving shaft driven sprocket;

[0058] 4. First driving shaft;

[0059] 5. Second linkage assembly, 51. Second chain, 52. First driving shaft driving sprocket, 53. Second driving shaft driven sprocket, 54. Second intermediate sprocket;

[0060] 6. Second driving shaft;

[0061] 7. Third linkage assembly, 71. Third chain, 72. Driving motor driving sprocket, 73. Second driving shaft driving sprocket;

[0062] 8. Extension frame;

[0063] 9. Bracket;

[0064] 10. Outer cover. Specific embodiments

[0065] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided so that the present disclosure can be more thoroughly understood and the scope of the present disclosure can be fully conveyed to those skilled in the art. It should be noted that the silicon rod crystal line adjusting device of the present utility model, which supports and clamps a single crystal silicon rod by at least two clamping assemblies arranged at intervals and controls the synchronous rotation of each clamping assembly by a clamping assembly driving mechanism, is only a preferred embodiment and does not limit the protection scope of the silicon rod crystal line adjusting device.

[0066] It should be understood that the terms used herein are for the purpose of describing specific example embodiments only and are not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms "a", "an" as used herein may also include the plural forms. The terms "comprising", "including" and "having" are inclusive and thus specify the presence of the stated features, elements and / or components, but do not preclude the presence or addition of one or more other features, elements, components, and / or combinations thereof.

[0067] Although the terms first, second, etc. may be used in the text to describe multiple elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms can only be used to distinguish one element, component, region, layer or section from another region, layer or section. Unless the context clearly indicates otherwise, terms such as "first", "second" and other numerical terms do not imply an order or sequence when used in the text. In addition, in the description of the present utility model, unless otherwise clearly specified and defined, the terms "arranged", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0068] For ease of description, spatial relative relationship terms may be used in the text to describe the relationship of one element or feature shown in the figure with respect to another element or feature. These relative relationship terms are, for example, "front", "rear", "middle", "inner", "longitudinal", "lateral", "side", "vertical", "outer", etc. Such spatial relative relationship terms are intended to include different orientations of the mechanism during use or operation in addition to the orientations depicted in the figure. For example, if the mechanism in the figure is flipped, then an element described as "below other elements or features" or "beneath other elements or features" will subsequently be oriented as "above other elements or features" or "over other elements or features". Thus, the exemplary term "below" can include both upper and lower orientations. The mechanism can be oriented otherwise (rotated 90 degrees or in other directions) and the spatial relative relationship descriptors used in the text are accordingly interpreted.

[0069] The specific embodiments of the present invention will be elaborated in detail below in conjunction with the silicon rod crystal line adjusting device of the first aspect of the present invention.

[0070] It should be noted that the silicon rod crystal line adjusting device of the first aspect of the present invention is only a preferred embodiment of the present invention. The silicon rod crystal line adjusting device of the present invention can either adopt the silicon rod crystal line adjusting device of the first aspect of the present invention or other structures. For the convenience of elaboration, the following will be elaborated in detail through the silicon rod crystal line adjusting device of the first aspect of the present invention.

[0071] Combined Figure 1 and Figure 2 As shown, this embodiment discloses a silicon rod crystal line adjusting device, which includes a bracket 9, a clamping assembly 1, and a clamping assembly driving mechanism. There are at least two clamping assemblies 1. The top of the clamping assembly 1 has a clamping position 13 for supporting and clamping a single crystal silicon rod. Each clamping assembly 1 is arranged at intervals on the bracket 9, and the clamping positions 13 of each clamping assembly 1 are located on the same straight line. The clamping assembly driving mechanism is connected to each clamping assembly 1 and is adapted to drive each clamping assembly 1 to rotate synchronously.

[0072] The above-mentioned silicon rod crystal line adjusting device is different from the existing device for clamping the end of a single crystal silicon rod. In this embodiment, at least two clamping assemblies 1 arranged at intervals are used to support and clamp the single crystal silicon rod, so as to realize the clamping of the single crystal silicon rod after crystal pulling. The clamping assembly driving mechanism is used to control each clamping assembly 1 to rotate synchronously, thereby driving each position of the single crystal silicon rod to rotate synchronously, realizing the automatic and precise adjustment of the crystal line position of the single crystal silicon rod, and improving the crystal line adjustment efficiency.

[0073] Each clamping component 1 in the above silicon rod crystal line adjusting device is arranged at intervals on the bracket 9. Therefore, it can be adapted to the AGV cart. The single crystal silicon rod after crystal pulling can be automatically placed at the clamping position 13 of each clamping component 1 by the AGV cart. The specific process is as follows: The single crystal silicon rod after crystal pulling is transported to the AGV cart. The AGV cart moves to the feeding area of the silicon rod crystal line adjusting device, so that the fork on the AGV cart is staggered with each clamping component 1. The fork on the AGV cart rises (the rising height of the AGV cart is higher than the topmost end of the clamping component 1), and the fork is pushed forward by the pushing mechanism on the AGV cart. Then the AGV cart descends. Because the fork on the AGV cart is staggered with each clamping component 1, the single crystal silicon rod on it will be supported by the clamping position 13 of each clamping component 1 when the fork on the AGV cart descends. Finally, the AGV cart drives away from the feeding area of the silicon rod crystal line adjusting device, completing the automatic feeding of the single crystal silicon rod.

[0074] In some embodiments, the clamping component 1 includes a rotating roller bracket 14, a first rotating roller 11, and a second rotating roller 12. The rotating roller bracket 14 is connected to the side wall of the bracket 9. The first rotating roller 11 is rotatably arranged on the rotating roller bracket 14. The second rotating roller 12 is rotatably arranged on the rotating roller bracket 14. There is a spacing between the upper part of the second rotating roller 12 and the upper part of the first rotating roller 11 to form the clamping position 13.

[0075] In this embodiment, the second rotating roller 12 rotates in the same direction as the first rotating roller 11, thereby providing a rotating force for the single crystal silicon rod to rotate in one direction, enabling the clamped single crystal silicon rod to rotate and realizing the adjustment of the crystal line of the single crystal silicon rod.

[0076] In some embodiments, the clamping component driving mechanism includes a driving motor 2 and a linkage component. The linkage component is connected to the output shaft end of the driving motor 2, and the linkage component is respectively connected to each clamping component 1.

[0077] The linkage component includes a first linkage component 3, a first driving shaft 4, and a first driving shaft connection component. There are at least two first linkage components 3. Each first linkage component 3 is respectively connected to a clamping component 1. The first driving shaft 4 passes through each rotating roller bracket 14 and is respectively connected to each first linkage component 3. The first driving shaft 4 is adapted to drive each first linkage component 3 to run synchronously. The first driving shaft connection component is connected between the first driving shaft 4 and the output shaft of the driving motor 2. In this embodiment, when the first driving shaft 4 rotates, it can drive each first linkage component 3 to rotate, thereby driving multiple rows of clamping components 1 to rotate synchronously, avoiding the problem of increasing the equipment manufacturing cost due to each clamping component 1 being driven by a separate driving motor 2, and avoiding the problem that the response times of the driving motors 2 cannot be synchronized, resulting in the asynchronous operation of each clamping component 1.

[0078] More specifically, the first linkage assembly 3 includes a first rotating roller drive sprocket 32, a second rotating roller drive sprocket 33, a first intermediate sprocket 34, a first drive shaft driven sprocket 35, and a first chain 31. The first rotating roller drive sprocket 32 is coaxially connected to the first rotating roller 11. The second rotating roller drive sprocket 33 is coaxially connected to the second rotating roller 12. At least one first intermediate sprocket 34 is provided, and the first intermediate sprocket 34 is rotatably provided on the rotating roller bracket 14. The first drive shaft driven sprocket 35 is coaxially provided on the first drive shaft 4. The first chain 31 is sleeved on the first drive shaft driven sprocket 35, the first rotating roller drive sprocket 32, the second rotating roller drive sprocket 33, and the first intermediate sprocket 34, so that the first drive shaft 4 is linked with the first drive shaft driven sprocket 35 and the first rotating roller drive sprocket 32 respectively. In this embodiment, when the first drive shaft 4 rotates, it can drive the first chain 31 to rotate, and then drive the first rotating roller drive sprocket 32 and the second rotating roller drive sprocket 33 to rotate synchronously.

[0079] When the first chain 31 is arranged, if the first chain 31 directly bypasses from above the first rotating roller drive sprocket 32 and the second rotating roller drive sprocket 33, it will occupy the space of the clamping position 13, resulting in the single crystal silicon rod being unable to pass through this position. To solve this technical problem, in some embodiments, a first intermediate sprocket 34 is provided at the lower position between the first rotating roller drive sprocket 32 and the second rotating roller drive sprocket 33. After the first chain 31 bypasses from above the first rotating roller drive sprocket 32, it bypasses from below this first intermediate sprocket 34, and then bypasses from above the second rotating roller drive sprocket 33, so that the first chain 31 does not occupy the space of the clamping position 13 and there is no interference between the first chain 31 and the clamping position 13.

[0080] In some embodiments, the first drive shaft connection assembly includes an extension bracket 8, a second drive shaft 6, a second linkage assembly 5, and a third linkage assembly 7. Two extension brackets 8 are provided, and the two extension brackets 8 are provided on the side walls of the bracket 9. Each extension bracket 8 corresponds to a rotating roller bracket 14 respectively, and the extension bracket 8 and the rotating roller bracket 14 are located on both sides of the bracket 9. The two ends of the second drive shaft 6 are rotatably provided on the two extension brackets 8 respectively. The second linkage assembly 5 is connected between the first drive shaft 4 and the second drive shaft 6. The third linkage assembly 7 is connected between the second drive shaft 6 and the output shaft of the drive motor 2.

[0081] More specifically, the second linkage assembly 5 includes a first drive shaft driving sprocket 52, a second drive shaft driven sprocket 53, a second idler sprocket 54, and a second chain 51. The first drive shaft driving sprocket 52 is coaxially connected to the first drive shaft 4. The second drive shaft driven sprocket 53 is coaxially connected to the second drive shaft 6. At least one second idler sprocket 54 is provided, and the second idler sprocket 54 is rotatably arranged on the extension bracket 8. The second chain 51 is sleeved on the first drive shaft driving sprocket 52, the second drive shaft driven sprocket 53, and the second idler sprocket 54, so that the first drive shaft 4 and the second drive shaft 6 are linked.

[0082] The third linkage assembly 7 includes a drive motor driving sprocket 72, a second drive shaft driving sprocket 73, and a third chain 71. The drive motor driving sprocket 72 is coaxially connected to the output shaft of the drive motor 2. The second drive shaft driving sprocket 73 is coaxially connected to the second drive shaft 6. The third chain 71 is sleeved between the drive motor driving sprocket 72 and the second drive shaft driving sprocket 73.

[0083] In some embodiments, a receiving cavity adapted to receive the first linkage assembly 3 is provided on the rotating roller bracket 14, and the receiving cavity is sealed by an outer cover 10. In this embodiment, by providing an installation space for the first linkage assembly 3 through the receiving cavity and using the outer cover 10 to block the receiving cavity, the first linkage assembly 3 in the receiving cavity can be dust-proof and protected, and the service life of the first linkage assembly 3 is extended.

[0084] The specific working process of the above silicon rod crystal wire adjusting device is as follows:

[0085] Place the single crystal silicon rod after crystal pulling on the clamping position 13 of the clamping assembly 1. The method of placing the clamping assembly 1 includes manual placement or automatic conveyance through a conveying system.

[0086] Perform crystal wire detection on the single crystal silicon rod placed on the clamping position 13.

[0087] When it is necessary to adjust the crystal line of the single-crystal silicon rod clamped at the clamping position 13, the control drives the motor 2 to start. The drive motor 2 drives the drive motor driving sprocket 72 to rotate. The drive motor driving sprocket 72 drives the second drive shaft driving sprocket 73 to rotate through the third chain 71, and then drives the second drive shaft 6 to rotate. When the second drive shaft 6 rotates, it drives the second drive shaft driven sprocket 53 to rotate. The second drive shaft driven sprocket 53 drives the first drive shaft driving sprocket 52 to rotate through the second chain 51, and then drives the first drive shaft 4 to rotate. Since the first drive shaft 4 is coaxially connected to the first drive shaft driven sprockets 35 of each first linkage assembly 3 respectively, the first drive shaft driven sprockets 35 of each first linkage assembly 3 rotate synchronously, and drive the first rotating roller driving sprockets 32 and the second rotating roller driving sprockets 33 of each first linkage assembly 3 to rotate synchronously, thereby driving the first rotating roller 11 and the second rotating roller 12 to rotate synchronously, driving the single-crystal silicon rod clamped at the clamping position 13 to rotate, and realizing the adjustment of the crystal line of the single-crystal silicon rod.

[0088] And when adjusting the crystal line of the single-crystal silicon rod, the precise adjustment of the crystal line position of the single-crystal silicon rod can be realized by controlling the operation process of the drive motor 2. When there is a deviation between the crystal line position of the exposed single-crystal silicon rod and the crystal line position to be detected, direct forward and reverse adjustment can be carried out through the drive motor 2.

[0089] Obviously, the above embodiments are only examples clearly described and not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or variations can be made based on the above description. It is not necessary and impossible to list all the implementation manners here. And the obvious changes or variations derived therefrom are still within the protection scope of the present invention.

Claims

1. A silicon rod crystal wire adjusting device, characterized in that, Comprising: A bracket (9); At least two clamping assemblies (1), on which there are clamping positions (13) for supporting and clamping a single crystal silicon rod, each of the clamping assemblies (1) is arranged at intervals on the bracket (9), and the clamping positions (13) of each of the clamping assemblies (1) are located on the same straight line; A clamping assembly driving mechanism, which is connected to each of the clamping assemblies (1) and is adapted to drive each of the clamping assemblies (1) to rotate synchronously.

2. The silicon rod crystal wire adjusting device according to claim 1, characterized in that, The clamping assembly (1) includes: A rotating roller bracket (14), which is connected to the side wall of the bracket (9); A first rotating roller (11), which is rotatably arranged on the rotating roller bracket (14); A second rotating roller (12), which is rotatably arranged on the rotating roller bracket (14), there is a spacing between the upper part of the second rotating roller (12) and the upper part of the first rotating roller (11) to form the clamping position (13), and the second rotating roller (12) rotates in the same direction as the first rotating roller (11).

3. The silicon rod crystal wire adjusting device according to claim 2, wherein, The clamping assembly driving mechanism includes: A driving motor (2); A linkage assembly, which is connected to the output shaft end of the driving motor (2), and the linkage assembly is respectively connected to each of the clamping assemblies (1).

4. The silicon rod crystal wire adjusting device according to claim 3, characterized in that, The linkage assembly includes: At least two first linkage assemblies (3), each of the first linkage assemblies (3) is respectively connected to a clamping assembly (1); A first driving shaft (4), which passes through each of the rotating roller brackets (14) and is respectively connected to each of the first linkage assemblies (3), and the first driving shaft (4) is adapted to drive each of the first linkage assemblies (3) to operate synchronously; A first driving shaft connection assembly, which is connected and arranged between the first driving shaft (4) and the output shaft of the driving motor (2).

5. The silicon rod crystal wire adjusting device according to claim 4, wherein, The first linkage assembly (3) includes: A first rotating roller driving sprocket (32), which is coaxially connected to the first rotating roller (11); A second rotating roller driving sprocket (33), which is coaxially connected to the second rotating roller (12); At least one first intermediate sprocket (34), which is rotatably arranged on the rotating roller bracket (14); A first driving shaft driven sprocket (35), which is coaxially arranged on the first driving shaft (4); A first chain (31), which is sleeved on the first driving shaft driven sprocket (35), the first rotating roller driving sprocket (32), the second rotating roller driving sprocket (33) and the first intermediate sprocket (34), so that the first driving shaft (4) is respectively in linkage with the first driving shaft driven sprocket (35) and the first rotating roller driving sprocket (32).

6. The silicon rod crystal wire adjusting device according to claim 5, characterized in that, A first transition sprocket (34) is arranged at a position below between the first rotating roller drive sprocket (32) and the second rotating roller drive sprocket (33). After the first chain (31) bypasses from the upper part of the first rotating roller drive sprocket (32), it bypasses from the lower part of this first transition sprocket (34), and then bypasses from the upper part of the second rotating roller drive sprocket (33), so as to prevent interference between the first chain (31) and the clamping position (13).

7. The silicon rod crystal wire adjusting device according to claim 4, characterized in that, The first drive shaft connection assembly includes: Two extension frames (8). The two extension frames (8) are arranged on the side walls of the bracket (9). Each extension frame (8) corresponds to a rotating roller bracket (14) respectively. The extension frame (8) and the rotating roller bracket (14) are located on both sides of the bracket (9); A second drive shaft (6). Both ends of the second drive shaft (6) are rotatably arranged on the two extension frames (8); A second linkage assembly (5). The second linkage assembly (5) is connected and arranged between the first drive shaft (4) and the second drive shaft (6); A third linkage assembly (7). The third linkage assembly (7) is connected and arranged between the second drive shaft (6) and the output shaft of the drive motor (2).

8. The silicon rod crystal wire adjusting device according to claim 7, characterized in that, The second linkage assembly (5) includes: A first drive shaft driving sprocket (52). The first drive shaft driving sprocket (52) is coaxially connected with the first drive shaft (4); A second drive shaft driven sprocket (53). The second drive shaft driven sprocket (53) is coaxially connected with the second drive shaft (6); At least one second transition sprocket (54). The second transition sprocket (54) is rotatably arranged on the extension frame (8); A second chain (51). The second chain (51) is sleeved on the first drive shaft driving sprocket (52), the second drive shaft driven sprocket (53) and the second transition sprocket (54), so as to form a linkage between the first drive shaft (4) and the second drive shaft (6).

9. The silicon rod crystal wire adjusting device according to claim 7, characterized in that The third linkage assembly (7) includes: A drive motor driving sprocket (72). The drive motor driving sprocket (72) is coaxially connected with the output shaft of the drive motor (2); A second drive shaft driving sprocket (73). The second drive shaft driving sprocket (73) is coaxially connected with the second drive shaft (6); A third chain (71). The third chain (71) is sleeved between the drive motor driving sprocket (72) and the second drive shaft driving sprocket (73).

10. The silicon rod crystal wire adjusting device according to any one of claims 4-9, characterized in that, A receiving cavity suitable for receiving the first linkage assembly (3) is arranged on the rotating roller bracket (14), and the receiving cavity is sealed by an outer cover (10).