Nondestructive testing equipment for hydroxyl content surface distribution in large-caliber quartz glass

Abstract

The utility model relates to detection equipment, in particular to nondestructive detection equipment for hydroxyl content surface distribution in large-caliber quartz glass. The detection equipment is composed of a light shield and a Fourier infrared spectrometer, and the Fourier infrared spectrometer is composed of a base, a clamp, an interferometer, a mid-infrared light source and a detector. The detection equipment does not need destructive processing, so that the cost is reduced. The distance between the Michelson interferometer and the detector can be adjusted, so that the size of a sample to be detected is not limited, and the device can be used for detecting large-caliber quartz glass. According to the method, comprehensive detection of quartz glass hydroxyl content surface distribution can be realized, so that the comprehensiveness and representativeness of a detection result are further improved. The problems that in an existing detection mode, a sample needs to be damaged, only the machining position can be detected, overall comprehensive detection cannot be achieved, and consequently the detection result is not representative are solved.

Description

Technical Field

[0001] The utility model relates to a detection device, in particular to a non-destructive detection device for the surface distribution of hydroxyl content in large-diameter quartz glass. Background Technique

[0002] Quartz glass is mainly composed of high-purity silicon dioxide (SiO2), and usually contains a small amount of impurities such as sodium oxide (Na2O) and potassium oxide (K2O). Due to its relatively large hardness, up to Mohs scale 7; low coefficient of thermal expansion, high heat resistance, good thermal shock resistance; good acid resistance to most acids, and is almost insoluble in water and other solvents except hydrofluoric acid and hot phosphoric acid; high purity, stable chemical properties, and good electrical insulation performance; high transparency, and can transmit ultraviolet rays and infrared rays and a series of excellent physical and chemical properties, it is widely used in the manufacture of high-precision optical components, such as lenses, optical fibers, etc.; the substrates and quartz boats for manufacturing semiconductor devices; the manufacture of solar panels and photovoltaic equipment; the manufacture of various electrical and electronic components; the manufacture of electric light sources, medical equipment and high-temperature and corrosion-resistant chemical instruments and many other industries. Relying on its unique physical and chemical properties, quartz glass plays an important role in many high-tech fields and is known as the "king of glass".

[0003] The excellent performance characteristics of quartz glass mainly depend on the stable [SiO4] tetrahedral structure of quartz glass. The SiO2 molecules are arranged in a random manner to form an amorphous network structure. Specifically, the SiO2 molecules in quartz glass are connected together by silicon-oxygen bonds (Si-O bonds) to form a three-dimensional network.

[0004] In this network, each silicon atom is usually coordinated with four oxygen atoms to form a tetrahedral structure. Each oxygen atom is shared by two silicon atoms, so the coordination number of the oxygen atom is 2. This Si-O-Si bonding pattern recurs in fused silica glass, forming a continuous network. Since fused silica glass is amorphous, its network structure is microscopically irregular and has no long-range periodicity. This amorphous structure results in many unique properties of fused silica glass. However, the presence of hydroxyl groups increases the porosity of fused silica glass, thereby reducing its density and viscosity; breaks the Si-O bonds in the Si-O-Si network, causing the structure of fused silica glass to become more fragile and reducing its mechanical strength; lowers the softening temperature of fused silica glass, making it more prone to deformation at high temperatures; reduces the chemical stability of fused silica glass, making it more vulnerable to chemical corrosion; promotes the crystallization process of fused silica glass, causing it to transform from the amorphous state to the crystalline state; absorbs light of specific wavelengths, thereby reducing the optical transmittance of fused silica glass and affecting its application in optical devices; In summary, hydroxyl groups have a significant impact on the physical, chemical, and optical properties of fused silica glass, and accurately determining the hydroxyl content in fused silica glass is very important. Therefore, it is necessary to strictly control the hydroxyl content during the manufacturing and use processes.

[0005] The hydroxyl content in fused silica glass has a linear relationship with the light absorption intensity at a wavelength of 2.73 μm. According to the national standard GB / T 12442-2019 "Testing Method for Hydroxyl Content in Fused Silica Glass", based on the quantitative test formula for hydroxyl content derived from the Beer-Lambert law, a spectrophotometer or an infrared spectrometer is used to measure the transmittance of the absorption peak spectrum of the fused silica glass sample at 2.73 μm and the transmittance of the baseline spectrum at 2.73 μm or the transmittance of the absorption peak spectrum at 2.60 μm, and the hydroxyl content is calculated.

[0006] However, processing the fused silica glass sample into a suitable test size according to the national standard requirements will damage the finished glass, and the test result only represents the hydroxyl content at the location of the processed sample, and it is impossible to accurately obtain the hydroxyl content distribution area of the entire fused silica glass. Therefore, it is necessary to design a non-destructive testing device for the surface distribution of hydroxyl content in large-diameter fused silica glass to solve the above problems. Summary of the Invention

[0007] The purpose of the present utility model is to provide a non-destructive testing device for the surface distribution of hydroxyl content in large-diameter fused silica glass that can detect the surface distribution of hydroxyl content in large-diameter fused silica glass and ensure the accuracy of the test results.

[0008] The technical solution of the present utility model is:

[0009] A non-destructive testing device for the surface distribution of hydroxyl content in large-diameter quartz glass, which consists of a light-shielding cover and a Fourier transform infrared spectrometer. The Fourier transform infrared spectrometer is arranged inside the light-shielding cover. It is characterized in that: the Fourier transform infrared spectrometer is composed of a base, a fixture, an interferometer, a mid-infrared light source and a detector. A fixture is movably installed on the base through a guiding slide rail. One side of the base is provided with an interferometer through a lifting mechanism, and a mid-infrared light source is arranged on the interferometer; the other side of the base is provided with a detector through a lifting mechanism.

[0010] The fixture includes a sliding seat, lifting slide bars and clamping plates. The two ends of the sliding seat are respectively movably installed with lifting slide bars through limit slide rails, and clamping plates are sleeved on the lifting slide bars; the sliding seat is movably connected with the guiding slide rail.

[0011] The lifting slide bars are fixedly connected to the limit slide rails and the clamping plates respectively through set screws.

[0012] A translation motor is arranged at the end of the base. A translation lead screw is connected to the output shaft of the translation motor, and the translation lead screw is movably connected with the sliding seat through a lead screw nut.

[0013] The lifting mechanism is composed of a support, a lifting motor, a lifting lead screw and a support plate. A lifting motor is arranged on the support, and a lifting lead screw is connected to the output shaft of the lifting motor; a guiding chute is arranged on the side of the support, and a support plate is inserted into the guiding chute. One end of the support plate is connected to the lifting lead screw through a lead screw nut, and the other end of the support plate is fixedly connected to the interferometer or the detector.

[0014] The beneficial effects of the present utility model are as follows:

[0015] The non-destructive testing device for the surface distribution of hydroxyl content in large-diameter quartz glass can meet the requirements of rapid random multi-point testing without destructive processing of the whole quartz glass, making the test results more representative. It does not need to be processed according to the requirements of the sample size of quartz glass in the national standard GB / T12442-2019 "Testing Method for Hydroxyl Content in Quartz Glass". The mid-infrared light source, Michelson interferometer and detector of the Fourier transform infrared spectrometer are located on both sides of the fixture, and the distance between the Michelson interferometer and the detector can be adjusted, so that the size of the sample to be tested is not limited, and it can be used for the detection of large-diameter quartz glass. The lifting mechanism can drive the mid-infrared light source, Michelson interferometer and detector to move vertically, and the translation motor can drive the sample to be tested to move horizontally, which can realize the comprehensive detection of the surface distribution of hydroxyl content in quartz glass, further improving the comprehensiveness and representativeness of the detection results. It solves the problem that the existing detection method can only detect the processing position and cannot detect the whole comprehensively, resulting in unrepresentative detection results. Description of the Drawings

[0016] Figure 1 is a schematic structural diagram of the present utility model;

[0017] Figure 2 is a schematic structural diagram of the Fourier transform infrared spectrometer of the present utility model;

[0018] Figure 3 is a top view schematic diagram of the Fourier transform infrared spectrometer of the present utility model.

[0019] In the figure: 1, light shield; 2, Fourier infrared spectrometer; 201, base; 202, interferometer; 203, mid-infrared light source; 204, detector; 205, guiding slide rail; 206, slide seat; 207, lifting slide rod; 208, clamping plate; 209, limiting slide rail; 210, translation motor; 211, translation lead screw; 212, support; 213, lifting motor; 214, support plate; 215, guiding chute; 3, sample to be measured. Specific embodiments

[0020] The non-destructive testing device for the surface distribution of hydroxyl content in large-diameter quartz glass is composed of a light shield 1 and a Fourier infrared spectrometer 2. The Fourier infrared spectrometer 2 is arranged inside the light shield 1 to detect the sample to be measured through the Fourier infrared spectrometer and determine the surface distribution condition of the hydroxyl content in the sample. The function of the light shield 1 is to shield external light through the light shield 1 to avoid light pollution, thereby ensuring the accuracy of the detection result.

[0021] The Fourier transform infrared spectrometer 2 is composed of a base 201, a fixture, an interferometer 202, a mid-infrared light source 203, and a detector 204. The fixture is movably installed on the base 201 through a guiding slide rail 205 to clamp and fix the sample to be measured by the fixture. Since the fixture is connected to the base 201 through the guiding slide rail 205, the fixture can translate along the guiding slide rail 205, thereby driving the sample to be measured to translate on the base 201. The interferometer 202 (FMD6021 type Michelson interferometer) is installed on one side of the base 201 through a lifting mechanism. The mid-infrared light source 203 (AUT-PL series mid-infrared lasers) is arranged on the interferometer 202 to provide light to the interferometer 202 through the mid-infrared light source 203. Light of a specific wavelength (such as light of 2.73 μm, 2.73 μm, or 2.60 μm) is formed through the interferometer 202. The sample to be measured is irradiated with the light of the specific wavelength, and then the hydroxyl content in the sample to be measured is detected by the transmittance of the light of the specific wavelength. The detector 204 (J19:2.8 type infrared detector) is installed on the other side of the base 201 through a lifting mechanism to receive the light passing through the sample to be measured by the detector 204, and the hydroxyl content at the detection position of the sample to be measured is detected by the attenuation change before and after the light transmission. The function of the lifting mechanism is to drive the interferometer 202, the mid-infrared light source 203, and the detector 204 to lift through the lifting mechanism, so that the interferometer 202, the mid-infrared light source 203, and the detector 204 can move relative to the sample to be measured in the vertical direction. At the same time, since the sample to be measured can translate on the base 201, the sample to be measured can translate relative to the interferometer 202, the mid-infrared light source 203, and the detector 204, so that the interferometer 202, the mid-infrared light source 203, and the detector 204 can detect any position of the sample to be measured by moving in the vertical and horizontal directions relative to the sample to be measured, thereby comprehensively detecting the sample to be measured. The lifting mechanism on one side of the interferometer 202 and the mid-infrared light source 203 cooperates with the lifting mechanism on one side of the detector 204 to drive the interferometer 202 and the mid-infrared light source 203 to lift synchronously with the detector 204, ensuring that the detector 204 can receive the light passing through the sample to be measured, thereby detecting the sample to be measured.

[0022] The fixture consists of a sliding seat 206, a lifting slide bar 207, and a clamping plate 208. The two ends of the sliding seat 206 are respectively and movably installed with lifting slide bars 207 through limit slide rails 209, and the clamping plate 208 is sleeved on the lifting slide bars 207. The lifting slide bars 207 can slide along the limit slide rails 209, and the lifting slide bars 207 can drive the clamping plate 208 to move during the sliding process, so as to drive the clamping plates 208 at both ends of the sliding seat 206 to move relatively, enabling the clamping plates 208 at both ends of the sliding seat 206 to approach each other. Thus, the clamping plates 208 that approach each other clamp and fix the sample to be tested on the sliding seat 206. Since the clamping plate 208 is sleeved and connected to the lifting slide bar 207, the clamping plate 208 can move up and down along the lifting slide bar 207, so as to adjust the relative height between the clamping plate 208 and the sliding seat 206, making the height of the clamping plate 208 match the diameter of the sample to be tested and ensuring that the clamping plate 208 can clamp and fix the sample to be tested. The sliding seat 206 is movably connected to the guiding slide rail 205, enabling the sliding seat 206 to slide along the guiding slide rail 205, so that the sliding seat 206 can translate. Thus, during the translation of the sliding seat 206, the sample to be tested is driven to translate successively through the limit slide rail 209, the lifting slide bar 207, and the clamping plate 208.

[0023] The lifting slide bar 207 and the limit slide rail 209, as well as the lifting slide bar 207 and the clamping plate 208, are fixedly connected to each other through set screws (not shown in the figure). After adjusting the relative positions between the lifting slide bar 207 and the limit slide rail 209, as well as between the lifting slide bar 207 and the clamping plate 208, the set screws are used to lock the connections between the lifting slide bar 207 and the limit slide rail 209, and between the lifting slide bar 207 and the clamping plate 208, so as to maintain the clamping state of the sample to be tested, enabling the sliding seat 206 to drive the sample to be tested to move accurately and making it difficult for the sample to be tested to shift during the movement.

[0024] A translation motor 210 (servo motor) is provided at the end of the base 201. A translation lead screw 211 is connected to the output shaft of the translation motor 210, and the translation lead screw 211 is movably connected to the sliding seat 206 through a lead screw nut. The function of the translation motor 210 is to drive the translation lead screw 211 to rotate through the translation motor 210, and then drive the sliding seat 206 to move through the interaction between the rotating translation lead screw 211 and the lead screw nut, thereby driving the sample to be tested to translate.

[0025] The lifting mechanism is composed of a support 212, a lifting motor 213, a lifting screw and a support plate 214. The support 212 is provided with a lifting motor 213, and the output shaft of the lifting motor 213 is connected with a lifting screw (not shown in the figure); a guide slot 215 is provided on the side of the support 212, and a support plate 214 is inserted on the guide slot 215. One end of the support plate 214 is connected to the lifting screw through a screw nut, and the other end of the support plate 214 is fixedly connected to the interferometer 202 or the detector 204. The function of the lifting motor 213 is to drive the lifting screw to rotate through the lifting motor 213, and then drive the support plate 214 to rise and fall through the interaction between the lifting screw and the screw nut during the rotation of the lifting screw, thereby driving the interferometer 202 or the detector 204 to rise and fall, so that the mid-infrared light source 203, the interferometer 202 or the detector 204 can be lifted and lowered relative to the sample to be measured, so that it can cooperate with the translation of the sample to be measured and scan various parts of the sample to be measured.

[0026] When the nondestructive testing equipment for the surface distribution of hydroxyl content in large-caliber quartz glass is working, the sample to be tested is clamped and fixed on the fixture. After the sample to be tested is fixed, the horizontal position of the sample to be tested is adjusted by the translation motor 210 and the infrared light source 203, the interferometer 202, and the detector 204 are adjusted by the lifting motor 213, so that the infrared light source 203, the interferometer 202, and the detector 204 stay at different positions of the sample to be tested, and the stay positions include the first stay position, the second stay position, the third stay position until the Nth stay position, and the Nth stay position is the last stay position. According to the coordinates of the stay positions, the absorption peak spectral transmittance at 2.73 μm, the baseline spectral transmittance at 2.73 μm, and the absorption peak spectral transmittance at 2.60 μm of the quartz glass to be tested at all stay positions are obtained by the infrared light source 203, the interferometer 202, and the detector 204, and the hydroxyl content of each stay position is calculated by the infrared spectral transmittance.

[0027] The non-destructive testing equipment for the surface distribution of hydroxyl content in large-diameter fused silica does not need to be processed according to the requirements for the size of fused silica samples in the national standard GB / T 12442-2019 "Testing Method for Hydroxyl Content in Fused Silica". Without the need for destructive processing of the whole piece of fused silica, it meets the requirements of rapid random multi-point testing, making the test results more representative. The mid-infrared light source, Michelson interferometer and detector of the Fourier transform infrared spectrometer are located on both sides of the fixture, and the distance between the Michelson interferometer and the detector can be adjusted, so that the size of the sample to be tested is not restricted, and it can be used for the detection of large-diameter fused silica. The lifting mechanism can drive the mid-infrared light source, Michelson interferometer and detector to move vertically, and the translation motor can drive the sample to be tested to move horizontally, which can realize the comprehensive detection of the surface distribution of hydroxyl content in fused silica, further improving the comprehensiveness and representativeness of the detection results. It solves the problem that the existing detection method needs to damage the sample, and can only detect the processing position, and cannot conduct overall comprehensive detection, resulting in unrepresentative detection results.

Claims

1. A non-destructive testing device for the surface distribution of hydroxyl content in large-diameter quartz glass, which is composed of a light-shielding cover (1) and a Fourier transform infrared spectrometer (2). The Fourier transform infrared spectrometer (2) is arranged inside the light-shielding cover (1). It is characterized in that: The Fourier transform infrared spectrometer (2) described above is composed of a base (201), a fixture, an interferometer (202), a mid-infrared light source (203), and a detector (204). A fixture is movably installed on the base (201) through a guiding slide rail (205). The interferometer (202) is installed on one side of the base (201) through a lifting mechanism, and a mid-infrared light source (203) is arranged on the interferometer (202). The detector (204) is installed on the other side of the base (201) through a lifting mechanism.

2. The non-destructive testing device for the surface distribution of hydroxyl content in large-diameter quartz glass according to claim 1, characterized in that: The fixture described above is composed of a sliding seat (206), a lifting slide rod (207), and a clamping plate (208). The two ends of the sliding seat (206) are respectively movably installed with lifting slide rods (207) through limit slide rails (209), and a clamping plate (208) is sleeved on the lifting slide rod (207). The sliding seat (206) is movably connected to the guiding slide rail (205).

3. The non-destructive testing device for the surface distribution of hydroxyl content in large-diameter quartz glass according to claim 2, wherein: The lifting slide rod (207) is fixedly connected to the limit slide rail (209) and the clamping plate (208) through set screws.

4. The non-destructive testing device for the surface distribution of hydroxyl content in large-diameter quartz glass according to claim 2, wherein: A translation motor (210) is arranged at the end of the base (201). A translation lead screw (211) is connected to the output shaft of the translation motor (210), and the translation lead screw (211) is movably connected to the sliding seat (206) through a lead screw nut.

5. The non-destructive testing device for the surface distribution of hydroxyl content in large-diameter quartz glass according to claim 1, wherein: The lifting mechanism is composed of a support (212), a lifting motor (213), a lifting lead screw, and a support plate (214). The lifting motor (213) is arranged on the support (212), and the output shaft of the lifting motor (213) is connected to the lifting lead screw. A guiding chute (215) is arranged on the side of the support (212), and the support plate (214) is inserted into the guiding chute (215). One end of the support plate (214) is connected to the lifting lead screw through a lead screw nut, and the other end of the support plate (214) is fixedly connected to the interferometer (202) or the detector (204).

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