Ejector pin assembly and slicing machine

Abstract

The utility model provides an ejector pin assembly and a slicing machine. The ejector pin assembly comprises an ejector pin seat, a plurality of ejector pins and a plurality of fasteners. The ejector pin seat is provided with a top wall and a side wall, and the top wall and the side wall define a containing cavity; the top wall is provided with a plurality of needle holes arranged in an array; the side wall is provided with a plurality of side wall sections located on the different sides of the needle holes and provided with a plurality of penetrating holes, and at least one side wall section is provided with at least two rows of penetrating holes arranged at intervals in the height direction of the side wall. Each ejector pin is arranged in the corresponding pin hole, and the top ends of the ejector pins are flush in height; and each fastener is correspondingly arranged in one penetrating hole, the plurality of fasteners are in one-to-one correspondence with the plurality of thimbles, and the plurality of fasteners can extend into the accommodating cavity from the corresponding penetrating holes to lock and fix the corresponding thimbles. The ejector pin assembly can fix a plurality of ejector pins matched with a large chip, and meanwhile, the fixing stability of the ejector pins is ensured, namely, the pick-up requirement of the large chip is met, and meanwhile, the pick-up quality of the chip is ensured.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and particularly relates to a thimble assembly and a slicing machine. Background Art

[0002] In the semiconductor packaging and testing industry, when slicing a wafer disposed on a blue film or a UV film and then performing semiconductor packaging chip mounting or other operations, generally, a thimble mechanism is required to lift the chip on the blue film or the UV film, and then the chip is adsorbed by a suction nozzle and placed at a specified position to realize operations such as combining the chip with a lead frame. The thimble mechanism adopted in the industry generally includes a thimble base and a plurality of thimbles disposed on the thimble base. In the thimble mechanism for traditional smaller-sized chips, a row of set screws disposed along the side wall of the thimble base is used to fix the thimble from the side of the thimble. However, due to the limited circumferential dimension on the side of the thimble base, this method can only fix a small number of thimbles, generally at most 4 thimbles. With the improvement of product performance, the functions of chips are required to be more and more, and some chips are getting larger and larger. A small number of thimbles can no longer meet the requirements. In related technologies, for chips with a larger area that require more thimbles, generally, a magnetic attraction method is used to fix a plurality of thimbles, that is, the bottom of the thimble is fixed on a magnetic suction base having a magnetic attraction force on the thimble to meet the requirements for picking up larger-area chips. However, when such a magnetic suction base is used, the thimble is likely to be stuck in the inner wall of the thimble base, resulting in thimble jamming, or after the thimble lifts the blue film or the UV film, the blue film or the UV film has viscosity and adsorbs the thimble, affecting the picking up of the next chip. Summary of the Invention

[0003] An embodiment of the present application provides a thimble assembly, which includes:

[0004] A thimble base having a top wall and a side wall, the top wall and the side wall enclosing a receiving cavity; the top wall has a plurality of pin holes arranged in an array; the side wall has a plurality of side wall segments on different sides of the plurality of pin holes, and is provided with a plurality of through holes, and at least one side wall segment is provided with at least two rows of through holes spaced in the height direction of the side wall;

[0005] A plurality of thimbles, each thimble is disposed in a corresponding one of the pin holes, and the top ends of the plurality of thimbles are flush;

[0006] A plurality of fasteners, each of the fasteners is disposed in a corresponding one of the through holes, and the plurality of fasteners correspond to the plurality of thimbles one by one. The plurality of fasteners can extend into the receiving cavity from the corresponding through holes to lock and fix the corresponding thimbles.

[0007] In some embodiments, the plurality of pin holes are arranged in a rectangular array of odd rows and odd columns; wherein, the number of rows and columns of the pin holes is greater than or equal to 3.

[0008] In some embodiments, the sidewall has a first sidewall segment and a third sidewall segment that are opposite to each other in the row direction of the rectangular array, and a second sidewall segment and a fourth sidewall segment that are opposite to each other in the column direction of the rectangular array; wherein,

[0009] the cross-sections of the first sidewall segment, the second sidewall segment, the third sidewall segment, and the fourth sidewall segment in a direction perpendicular to the height direction of the sidewall are arc-shaped and are connected in sequence; or,

[0010] the first sidewall segment, the second sidewall segment, the third sidewall segment, and the fourth sidewall segment are straight, and the sidewall further includes connecting walls connected between any two of the first sidewall segment, the second sidewall segment, the third sidewall segment, and the fourth sidewall segment.

[0011] In some embodiments, the plurality of pinholes are arranged in a square array of five rows and five columns; wherein, in the direction from the first sidewall segment towards the third sidewall segment, the plurality of pinholes are arranged as the first row, the second row, the third row, the fourth row, and the fifth row, and in the direction from the second sidewall segment towards the fourth sidewall segment, the plurality of pinholes are arranged as the first column, the second column, the third column, the fourth column, and the fifth column; wherein, two rows of through holes are respectively provided on each of the first sidewall segment, the second sidewall segment, the third sidewall segment, and the fourth sidewall segment, or three rows of through holes are provided on one of the first sidewall segment, the second sidewall segment, the third sidewall segment, and the fourth sidewall segment, and two rows of through holes are provided on the other three sidewall segments.

[0012] In some embodiments, when two rows of through holes are respectively provided on each of the first sidewall segment, the second sidewall segment, the third sidewall segment, and the fourth sidewall segment, the first sidewall segment is provided with a first row of through holes and a second row of through holes; the first row of through holes includes five through holes respectively corresponding to the pinholes in the first row, and fasteners respectively provided in the five through holes included in the first row of through holes are respectively used to fix the five ejector pins in the first row of pinholes; the second row of through holes includes three through holes respectively opposite to the three pinholes in the second row and the second column, the second row and the third column, and the second row and the fourth column; and fasteners respectively provided in the three through holes included in the second row of through holes are respectively used to fix the ejector pins in the three pinholes in the second row and the second column, the second row and the third column, and the second row and the fourth column.

[0013] The second side wall segment is provided with a third row of through holes and a fourth row of through holes; the third row of through holes includes three through holes respectively opposite to the three pin holes of the first column of the second row, the first column of the third row, and the first column of the fourth row. Fasteners respectively arranged in the three through holes included in the third row of through holes are respectively used to fix the ejector pins of the pin holes of the first column of the second row, the first column of the third row, and the first column of the fourth row; the fourth row of through holes includes two through holes respectively corresponding to the ejector pins of the second column of the third row and the third column of the third row. Fasteners respectively arranged in the two through holes included in the fourth row of through holes are respectively used to fix the ejector pins arranged in the second column of the third row and the third column of the third row;

[0014] The third side wall segment is provided with a fifth row of through holes and a sixth row of through holes; the arrangement modes of the fifth row of through holes and the sixth row of through holes are respectively the same as the arrangement mode of the first row of through holes and the second row of through holes. Fasteners arranged in each through hole of the third side wall segment are respectively used to fix the ejector pins in all the pin holes of the fifth row, the pin holes of the second column of the fourth row, the third column of the fourth row, and the fourth column of the fourth row;

[0015] The fourth side wall segment is provided with a seventh row of through holes and an eighth row of through holes. The arrangement mode of the seventh row of through holes is the same as that of the third row of through holes. Fasteners arranged in the through holes included in the seventh row of through holes are respectively used to fix the ejector pins in the pin holes of the fifth column of the second row, the fifth column of the third row, and the fifth column of the fourth row; the eighth row of through holes has one through hole, and the fastener arranged in the one through hole is used to fix the ejector pin in the fourth column of the third row.

[0016] In some embodiments, when one of the first side wall segment, the second side wall segment, the third side wall segment, and the fourth side wall segment is provided with three rows of through holes and the other three side wall segments are provided with two rows of through holes; the first side wall segment is provided with a ninth row of through holes and a tenth row of through holes. The ninth row of through holes has five through holes respectively corresponding to all the pin holes of the first row; fasteners respectively arranged in the five through holes included in the ninth row of through holes are respectively used to fix the five ejector pins of the pin holes of the first row; the tenth row of through holes includes three through holes respectively opposite to the three pin holes of the second column of the second row, the third column of the second row, and the fourth column of the second row; fasteners respectively arranged in the three through holes included in the tenth row of through holes are respectively used to fix the ejector pins of the three pin holes of the second column of the second row, the third column of the second row, and the fourth column of the second row;

[0017] The second side wall segment is provided with an eleventh row of through holes and a twelfth row of through holes; the eleventh row of through holes includes three through holes respectively opposite to the three pin holes in the first column of the second row, the first column of the third row, and the first column of the fourth row, and the fasteners respectively arranged in the three through holes included in the third row of through holes are respectively used to fix the ejector pins in the pin holes in the first column of the second row, the first column of the third row, and the first column of the fourth row; the twelfth row of through holes includes one through hole corresponding to the second column of the third row, and the fastener arranged in the through hole included in the twelfth row of through holes is used to fix the ejector pin in the second column of the third row.

[0018] The third side wall segment is provided with a thirteenth row of through holes and a fourteenth row of through holes; the arrangement modes of the thirteenth row of through holes and the fourteenth row of through holes are respectively the same as the arrangement modes of the ninth row of through holes and the tenth row of through holes, and the fasteners respectively arranged in the through holes in the third side wall segment are respectively used to fix the ejector pins in all the pin holes in the fifth row, the second column of the fourth row, the third column of the fourth row, and the fourth column of the fourth row.

[0019] The fourth side wall segment is provided with a fifteenth row of through holes and a sixteenth row of through holes. The arrangement mode of the fifteenth row of through holes is the same as that of the eleventh row of through holes, and the fasteners respectively arranged in the through holes included in the fifteenth row of through holes are respectively used to fix the ejector pins in the fifth column of the second row, the fifth column of the third row, and the fifth column of the fourth row; the sixteenth row of through holes has one through hole, and the fastener arranged in the one through hole is used to fix the ejector pin in the fourth column of the third row.

[0020] The side wall further includes a seventeenth row of through holes arranged in one of the first side wall segment, the second side wall segment, the third side wall segment, and the fourth side wall segment. The seventeenth row of through holes serves as the third row of through holes of the corresponding side wall segment and includes one through hole corresponding to the ejector pin in the third column of the third row. The fastener arranged in the through hole included in the seventeenth row of through holes is used to fix the ejector pin in the third column of the third row.

[0021] In some embodiments, the fastener is a locking screw. The outer wall of the locking screw has an external thread, and the through hole has an internal thread that mates with the external thread.

[0022] In some embodiments, for each fastener, the orthographic projections of the other ejector pins except the ejector pin fixedly corresponding to the fastener on a plane perpendicular to the height direction of the ejector pin seat do not overlap.

[0023] In some embodiments, the centroids of the openings of the through holes in the same side wall segment on the outer wall of the side wall do not overlap in the orthographic projection on a plane perpendicular to the height direction of the ejector pin seat.

[0024] In some embodiments, one end of the side wall facing away from the top wall has an opening, the ejector pin base includes a base that is liftably disposed at the opening, and the plurality of ejector pins are disposed on the base.

[0025] In some embodiments, the number of the through holes is equal to the number of the pin holes; or,

[0026] the number of the through holes is greater than the number of the pin holes.

[0027] The present application further provides a slicing machine, which includes a suction head assembly and the ejector pin assembly as described above. The suction head assembly and the ejector pin assembly can cooperate to remove the semiconductor structure from the adhesive film layer. Among them, the suction head assembly and the ejector pin assembly are respectively disposed on opposite sides of the adhesive film layer, and the semiconductor structure is located on the adhesive film layer and on the side facing the suction head assembly.

[0028] The main technical effects achieved by the embodiments of the present application are:

[0029] For the ejector pin assembly and the slicing machine provided by the embodiments of the present application, the side wall of the ejector pin base has a plurality of side wall segments on different sides of the plurality of pin holes, and is provided with a plurality of through holes, and the side wall is set such that at least one side wall segment is provided with at least two rows of through holes spaced in the height direction of the side wall, so that more fasteners can be provided on the side wall to fix more ejector pins, so that more ejector pins for fitting a larger chip can be fixed, while ensuring the stability of the ejector pin fixation, that is, while meeting the picking requirements of a larger chip, the quality of chip picking is ensured. Description of the Drawings

[0030] Figure 1 is a working schematic diagram of a slicing machine provided by an exemplary embodiment of the present application;

[0031] Figure 2 is a three-dimensional structural schematic diagram of an ejector pin assembly provided by an exemplary embodiment of the present application;

[0032] Figure 3 is a top view of an ejector pin assembly provided by an exemplary embodiment of the present application;

[0033] Figure 4 is a three-dimensional structural schematic diagram of a partial structure of an ejector pin assembly provided by an exemplary embodiment of the present application;

[0034] Figure 5 is a three-dimensional structural schematic diagram of a perspective view of an ejector pin base provided by an exemplary embodiment of the present application;

[0035] Figure 6It is a schematic perspective view of another angle of a thimble seat provided by an exemplary embodiment of the present application;

[0036] Figure 7 It is a schematic perspective view of yet another angle of a thimble seat provided by an exemplary embodiment of the present application;

[0037] Figure 8 It is a schematic perspective view of still another angle of a thimble seat provided by an exemplary embodiment of the present application;

[0038] Figure 9 It is a top view of another thimble assembly provided by an exemplary embodiment of the present application;

[0039] Figure 10 It is a schematic perspective view of another thimble assembly provided by an exemplary embodiment of the present application;

[0040] Figure 11 It is a top view of another thimble assembly provided by an exemplary embodiment of the present application;

[0041] Figure 12 It is a schematic perspective view of one angle of another thimble seat provided by an exemplary embodiment of the present application;

[0042] Figure 13 It is a top view of yet another thimble assembly provided by an exemplary embodiment of the present application. Detailed Description of the Embodiments

[0043] Here, the exemplary embodiments will be described in detail, and the examples are shown in the accompanying drawings. When the following description refers to the accompanying drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present application as detailed in the appended claims.

[0044] The terms used in the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The singular forms "a", "the", and "said" used in the present application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0045] The following combination Figures 1 to 12 , a detailed description will be given of some embodiments of the thimble assembly and the slicing machine of the present application. Without conflict, the features in the following embodiments can be combined with each other.

[0046] Please refer toFigure 1 , this application provides a slicing machine 1000, which includes a suction head assembly 200 with a suction head 2001 and a thimble assembly 100. The suction head assembly 200 and the thimble assembly 100 can cooperate to remove the semiconductor structure 400 from the adhesive film layer 300; wherein, the suction head assembly 200 and the thimble assembly 100 are respectively arranged on opposite sides of the adhesive film layer 300, and the semiconductor structure 400 is located on the adhesive film layer 300 and on the side facing the suction head assembly 200.

[0047] When the semiconductor structure 400 is removed from the adhesive film layer 300, the thimble assembly 100 is used to adsorb the adhesive film layer 300 from the side of the adhesive film layer 300 facing away from the semiconductor structure 400, and provide a force towards the side of the semiconductor structure 400 facing away from the adhesive film layer 300 to the adhesive film layer 300, so that the part of the adhesive film layer 300 corresponding to the thimble assembly 100 is lifted, and the suction head 2001 of the suction head assembly 200 can smoothly suck the semiconductor structure 400.

[0048] Please refer to Figure 2 , and in combination with Figures 3 to 13 as shown, the thimble assembly 100 includes a thimble base 10, a plurality of thimbles 20 and a plurality of fasteners 30.

[0049] The thimble base 10 has a top wall 11 and a side wall 12, and the top wall 11 and the side wall 12 enclose a receiving cavity 101. The top wall 11 has a plurality of pin holes 110 arranged in an array; the side wall 12 has a plurality of side wall segments located on different sides of the plurality of pin holes 110, and is provided with a plurality of through holes 120, and at least one side wall segment is provided with at least two rows of through holes 120 spaced in the height direction of the side wall 12.

[0050] Each thimble 20 is arranged in a corresponding pin hole 110, and the top ends of the plurality of thimbles 20 are flush.

[0051] Each of the fasteners 30 is correspondingly arranged in a through hole 120, and the plurality of fasteners 30 correspond to the plurality of thimbles 20 one by one. The plurality of fasteners 30 can extend into the receiving cavity 101 from the corresponding through holes 120 to lock and fix the corresponding thimbles 20.

[0052] The side wall 12 of the thimble base 10 has a plurality of side wall segments located on different sides of the plurality of pin holes 110, and is provided with a plurality of through holes 120. The side wall 12 is arranged such that at least one side wall segment is provided with at least two rows of through holes 120 spaced in the height direction of the side wall 12, so that more fasteners can be provided on the side wall, to stagger the fixing of more thimbles 20 located in different rows and columns, thereby enabling the fixation of a larger number of thimbles 20 adapted to a larger chip, while ensuring the stability of thimble fixation, that is, while meeting the requirements for picking up a larger chip, the quality of chip picking is ensured. Moreover, at least one side wall segment is provided with at least two rows of through holes 120 spaced in the height direction of the side wall 12, which can not only stagger the arrangement of the through holes corresponding to different rows and columns of thimbles, but also ensure the strength of the side wall 12 and better avoid the installation interference of the fasteners 30.

[0053] In some embodiments, the fastener 30 is a locking screw, the outer wall of the locking screw has an external thread, and the through hole 120 has an internal thread that mates with the external thread.

[0054] In some embodiments, for each fastener 30, the orthographic projections of the other thimbles 20 other than the thimble 20 fixedly corresponding to the fastener 30 on a plane perpendicular to the height direction h of the thimble base 10 do not overlap, so that when each fastener 30 fixes the corresponding thimble 20, it can avoid the other thimbles 20.

[0055] In some embodiments, at least two rows of through holes 120 provided in the same side wall segment are staggeredly arranged, that is, the centroids of the openings of the through holes on the outer wall of the side wall 12 located in the same side wall segment do not overlap in the orthographic projection on a plane perpendicular to the height direction h of the thimble base 10, so as to ensure that the fixing members provided in the through holes can avoid the other thimbles other than the thimble to be fixedly corresponding, and further ensure the strength of the side wall 12.

[0056] It can be understood that for at least two rows of through holes 120 provided in the same side wall segment that are staggeredly arranged, among the at least two rows of through holes 120 provided in the same side wall segment, the orthographic projections of the openings on the outer wall of the side wall segment on a plane perpendicular to the height direction h of the thimble base 10 may be completely staggered. There may also be partial overlap of the orthographic projections of the openings of some through holes on the outer wall of the side wall segment on a plane perpendicular to the height direction h of the thimble base 10.

[0057] In addition, in some other embodiments, at least two rows of through holes 120 provided in the same side wall segment may not be completely staggeredly arranged. That is, among the at least two rows of through holes 120 provided in the same side wall segment, there may also be complete overlap of the orthographic projections of the openings of some through holes on the outer wall of the side wall segment on a plane perpendicular to the height direction h of the thimble base 10.

[0058] In some embodiments, the plurality of pinholes 110 are arranged in a rectangular array of odd rows and odd columns; wherein, the number of rows and columns of the pinholes 110 are both greater than or equal to 3.

[0059] In the present application, in the rectangular array of the plurality of pinholes 110, the row spacing between every two adjacent rows of pinholes 110 is equal, and the column spacing between every two adjacent columns of pinholes is equal, so that there is a pinhole 110 at the center of the rectangular array formed by the plurality of pinholes 110, so that a thimble can be arranged at the center of the rectangular array.

[0060] Generally, when the semiconductor structure 400 is removed from the self-adhesive film layer 300 by the slicing machine 1000, the centroid of the cross-section of the semiconductor structure 400 to be removed in the direction perpendicular to the direction of the suction head 2001 facing the thimble assembly, the centroid of the top surface of the thimble 20 located at the center of the rectangular array formed by the plurality of pinholes, and the centroid of the side surface of the suction head 2001 facing the semiconductor structure 400 of the semiconductor structure 40, the three need to be collinear. In the present application, the plurality of pinholes 110 are arranged in a rectangular array of odd rows and odd columns; wherein, the number of rows and columns of the pinholes 110 are both greater than or equal to 3, which can ensure the number of pinholes, is applicable to pick up large-size chips, and is beneficial to ensuring the collinearity of the above three centroids and ensuring the chip picking quality.

[0061] In some embodiments, the plurality of pinholes 110 are arranged in a rectangular array of five rows and five columns, as Figures 2 to 12 shown. In other embodiments, the plurality of pinholes 110 are arranged in a rectangular array of three rows and three columns, such as Figure 13 the thimble assembly 700 shown. Of course, in other embodiments, the number of rows and columns of the rectangular array formed by the plurality of pinholes may also be different.

[0062] In some embodiments, the side wall 12 has a first side wall section 121 and a third side wall section 123 that are opposite in the row direction of the rectangular array, and a second side wall section 122 and a fourth side wall section 124 that are opposite in the column direction of the rectangular array.

[0063] In some embodiments, as Figures 2 to 9 shown, the cross-section of the first side wall section 121, the second side wall section 122, the third side wall section 123, and the fourth side wall section 124 in the direction perpendicular to the height direction of the side wall 12 is arc-shaped and connected in sequence.

[0064] In other embodiments, as Figures 10 to 12As shown, the first side wall segment 121, the second side wall segment 122, the third side wall segment 123, and the fourth side wall segment 124 are straight, and the side wall 12 further includes connecting walls 125 connected between any two of the first side wall segment 121, the second side wall segment 122, the third side wall segment 123, and the fourth side wall segment 124.

[0065] In some embodiments, the plurality of pinholes 110 are arranged in a square array of five rows and five columns. Among them, in the direction from the first side wall segment 121 toward the third side wall segment 123, the plurality of pinholes 110 are arranged as the first row R1, the second row R2, the third row R3, the fourth row R4, and the fifth row R5. In the direction from the second side wall segment 122 toward the fourth side wall segment 124, the plurality of pinholes 110 are arranged as the first column C1, the second column C2, the third column C3, the fourth column C4, and the fifth column C5. Among them, two rows of through holes 120 are respectively provided on each of the first side wall segment 121, the second side wall segment 122, the third side wall segment 123, and the fourth side wall segment 124. Alternatively, three rows of through holes 120 are provided on one of the first side wall segment 121, the second side wall segment 122, the third side wall segment 123, and the fourth side wall segment 124, and two rows of through holes 120 are provided on the other three side wall segments.

[0066] When two rows of through holes 120 are respectively provided on each of the first side wall segment 121, the second side wall segment 122, the third side wall segment 123, and the fourth side wall segment 124, in combination Figures 2 to 8 As shown, in some embodiments, the first side wall segment 121 is provided with a first row of through holes 120 and a second row of through holes 120. Specifically in combination Figure 2 、 Figure 3 and Figure 5 As shown, the first row of through holes 120 includes five through holes 1201 respectively corresponding to the pinholes 110 in the first row R1. Fasteners 30 respectively provided in the five through holes 1201 included in the first row of through holes 120 are respectively used to fix the five ejector pins 20 of the pinholes 110 in the first row R1. The second row of through holes 120 includes three through holes 1202 respectively opposite to the three pinholes 110 in the second column C2, the third column C3, and the fourth column C4 of the second row R2. Fasteners 30 respectively provided in the three through holes 1202 included in the second row of through holes 120 are respectively used to fix the ejector pins 20 of the three pinholes 110 in the second column C2, the third column C3, and the fourth column C4 of the second row R2.

[0067] In combination Figure 2 、 Figure 3 and Figure 6As shown, the second side wall section 122 is provided with a third row of through holes 120 and a fourth row of through holes 120. The third row of through holes 120 includes three through holes 1203 that are respectively opposite to the three pinholes 110 in the first column C1 of the second row R2, the first column C1 of the third row R3, and the first column C1 of the fourth row R4. The three through holes 1203 included in the third row of through holes 120 are respectively provided with fasteners 30 to fix the ejector pins 20 provided in the first column C1 of the second row R2, the first column C1 of the third row R3, and the first column C1 of the fourth row R4. The fourth row of through holes 120 includes two through holes 1204 that respectively correspond to the ejector pins 20 in the second column C2 of the third row R3 and the third column C3 of the third row R3. The fasteners 30 respectively disposed in the two penetration holes 1204 included in the fourth row of penetration holes 120 fix the ejector pins 20 disposed in the second column C2 of the third row R3 and the third column C3 of the third row R3 respectively.

[0068] Combination Figure 2 , Figure 3 and Figure 7 As shown, the third side wall section 123 is provided with a fifth row of through holes 120 and a sixth row of through holes 120. The arrangement of the fifth row of through holes 120 and the sixth row of through holes 120 is the same as that of the first row of through holes 120 and the second row of through holes 120, respectively. The fasteners 30 provided in each through hole 1205 of the fifth row of through holes 120 respectively fix the ejector pins 20 in all the pinholes 110 in the fifth row R5. The fasteners 30 provided in each through hole 1206 of the sixth row of through holes 120 respectively fix the ejector pins 20 in each pinhole 110 in the second column C2 of the fourth row R4, the third column C3 of the fourth row R4, and the fourth column C4 of the fourth row R4.

[0069] It can be understood that the arrangement of the fifth row of perforations 120 and the sixth row of perforations 120 are respectively the same as the arrangement of the first row of perforations 120 and the second row of perforations 120, and the fifth row of perforations 120 and the first row of perforations 120 can be the orthographic projections of the fifth row of perforations 120 and the first row of perforations 120 on the surface of the top wall 11 away from the side wall 12, and are symmetrical about the midline of the upward direction of the surface (such as the straight line where the centroids of the pinholes 120 in the third row R3 are located).

[0070] The orthographic projections of the sixth row of through holes 120 and the second row of through holes 120 on the surface of the top wall 11 away from the side wall 12 are centrosymmetric about the centroid of the surface.

[0071] Of course, in some other embodiments, the orthographic projection of the sixth row of through holes 120 on the surface of the top wall 11 facing away from the side wall 12 may also be symmetric about the midline in the upward direction on the surface (such as the straight line where the centroids of the pin holes 120 in the third row R3 are located). The orthographic projection of the fifth row of through holes 120 on the surface of the top wall 11 facing away from the side wall 12 may also be centrosymmetric about the centroid of the surface.

[0072] Combined with Figure 2 、 Figure 3 and Figure 8 As shown, the fourth side wall segment 124 is provided with a seventh row of through holes 120 and an eighth row of through holes 120. The arrangement of the seventh row of through holes 120 is the same as that of the third row of through holes 120. The fasteners 30 provided in the through holes 1207 included in the seventh row of through holes 120 are respectively arranged to fix the ejector pins 20 in the pin holes 110 at the fifth column C5 of the second row R2, the fifth column C5 of the third row R3, and the fifth column C5 of the fourth row R4. The eighth row of through holes 120 has one through hole 1208. The fastener 30 provided in the one through hole 1208 is arranged to fix the ejector pin 20 in the fourth column C4 of the third row R3.

[0073] It can be understood that the arrangement of the seventh row of through holes 120 being the same as that of the third row of through holes 120 may mean that the orthographic projection of the seventh row of through holes 120 on the surface of the top wall 11 facing away from the side wall 12 is symmetric about the midline in the column direction on the surface (such as the straight line where the centroids of the pin holes 120 in the third column C3 are located).

[0074] It should be noted that Figure 3 In the top view of a kind of ejector pin assembly 100 shown, there are directed virtual line segments indicating the corresponding fasteners 30. The directed virtual line segments in other top views are similar.

[0075] As Figure 9 shown, in some other embodiments, the fourth row of through holes 120 of the ejector pin assembly 500 includes one through hole 1204 corresponding to the ejector pin 20 in the second column C2 of the third row R3. The fasteners 30 provided in the two through holes 1204 included in the fourth row of through holes 120 are arranged to fix the ejector pin 20 in the second column C2 of the third row R3. And the eighth row of through holes 120 has two through holes 1208. The fasteners 30 provided in the two through holes 1208 are respectively arranged to fix the ejector pins 20 in the two pin holes at the fourth column C4 and the third column C3 of the third row R3. As Figures 2 to 8In the embodiment, one of the two through holes included in the fourth row of through holes 120 is used to fix the thimble 20 located at the center of the rectangular array. And Figure 9 In the thimble assembly 500 shown in Figure 9 , one of the two through holes included in the eighth row of through holes 120 is used to fix the thimble 20 located at the center of the rectangular array.

[0076] When three rows of through holes 120 are provided in one of the first side wall segment 121, the second side wall segment 122, the third side wall segment 123 and the fourth side wall segment 124, and two rows of through holes 120 are provided in the other three side wall segments, as Figures 10 to 12 shown, in some embodiments, in the thimble assembly 600, the first side wall segment 121 is provided with a ninth row of through holes 120 and a tenth row of through holes 120. The ninth row of through holes 120 has five through holes 1209 respectively corresponding to all the pin holes 110 in the first row R1. Fasteners 30 respectively provided in the five through holes 1209 included in the ninth row of through holes 120 fix the five thimbles 20 provided in the pin holes 110 of the first row R1. The tenth row of through holes 120 includes three through holes 1210 respectively opposite to the three pin holes 110 in the second column C2, the third column C3 and the fourth column C4 of the second row R2. Fasteners 30 respectively provided in the three through holes 1210 included in the tenth row of through holes 120 fix the thimbles 20 provided in the three pin holes 110 in the second column C2, the third column C3 and the fourth column C4 of the second row R2.

[0077] The second side wall segment 122 is provided with an eleventh row of through holes 120 and a twelfth row of through holes 120. The eleventh row of through holes 120 includes three through holes 1211 respectively opposite to the three pin holes 110 in the first column C1 of the second row R2, the first column C1 of the third row R3 and the first column C1 of the fourth row R4. Fasteners 30 respectively provided in the three through holes 1211 included in the third row of through holes 120 fix the thimbles 20 provided in the pin holes 110 in the first column C1 of the second row R2, the first column C1 of the third row R3 and the first column C1 of the fourth row R4. The twelfth row of through holes 120 includes one through hole 1212 corresponding to the second column C2 of the third row R3. The fastener 30 provided in the through hole 1212 included in the twelfth row of through holes 120 fixes the thimble 20 provided in the second column C2 of the third row R3.

[0078] The third side wall segment 123 is provided with a thirteenth row of through holes 120 and a fourteenth row of through holes 120. The arrangement patterns of the thirteenth row of through holes 120 and the fourteenth row of through holes 120 are the same as those of the ninth row of through holes 120 and the tenth row of through holes 120 respectively. The fasteners 30 arranged in the respective through holes 1213 of the thirteenth row of through holes 120 respectively fix the ejector pins 20 in all the pin holes 110 in the fifth row R5. The fasteners arranged in the respective set holes 1214 of the fourteenth row of through holes 120 respectively fix the ejector pins 20 in the pin holes 110 in the second column C2, the third column C3, and the fourth column C4 of the fourth row R4.

[0079] The fourth side wall segment 124 is provided with a fifteenth row of through holes 120 and a sixteenth row of through holes 120. The arrangement pattern of the fifteenth row of through holes 120 is the same as that of the eleventh row of through holes 120. The fasteners 30 arranged in the through holes 121215 included in the fifteenth row of through holes 120 respectively fix the ejector pins 20 in the pin holes 110 in the fifth column C5 of the second row R2, the third row R3, and the fourth row R4. The sixteenth row of through holes 120 has one through hole 1216. The fastener 30 arranged in the one through hole 1216 fixes the ejector pin 20 in the fourth column C4 of the third row R3.

[0080] The side wall 12 further includes a seventeenth row of through holes 120 provided in the first side wall segment 121. The seventeenth row of through holes 120 serves as the third row of through holes of the corresponding side wall segment. The seventeenth row of through holes 120 includes one through hole 1217 corresponding to the ejector pin 20 in the third column C3 of the third row R3. The fastener 30 arranged in the through hole 1217 included in the seventeenth row of through holes 120 fixes the ejector pin 20 in the third column C3 of the third row R3.

[0081] It can be understood that in some other embodiments, the seventeenth row of through holes 120 can also be provided in one of the side wall segments of the second side wall segment 122, the third side wall segment 123, and the fourth side wall segment 124. The seventeenth row of through holes 120 serves as the third row of through holes of the corresponding side wall segment.

[0082] In some embodiments, the plurality of ejector pins 20 can be raised and lowered and have an initial state and an ejection state. In the initial state, the top ends of the plurality of ejector pins 20 are all located below the outer surface of the top wall 11, for example, the top ends of the plurality of ejector pins 20 can be flush with the outer surface of the top wall 11. Of course, they can also be lower than the outer surface of the top wall 11. In the ejection state, the top ends of the plurality of ejector pins 20 pass through the corresponding pinholes 110 and are located outside the outer surface of the top wall 11, so as to provide a force to the adhesive film layer 300 toward the side of the semiconductor structure 400 away from the adhesive film layer 300.

[0083] In some embodiments, one end of the side wall 12 facing away from the top wall 11 has an opening, and the ejector seat 10 includes a base 13 that can be raised and lowered at the opening, and the plurality of ejectors 20 are disposed on the base 13 .

[0084] In some embodiments, the ejector assembly may further include a driving structure (not shown) for driving the ejector seat 10 to move up and down, thereby achieving the lifting and lowering of the ejector.

[0085] In some embodiments, the number of the through holes 120 is equal to the number of the pinholes 110 .

[0086] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the disclosure disclosed herein. The present application is intended to cover any modification, use or adaptation of the present application, which follows the general principles of the present application and includes common knowledge or customary techniques in the art that are not disclosed in the present application. The specification and examples are intended to be exemplary only, and the true scope and spirit of the present application are indicated by the following claims.

[0087] It should be understood that the present application is not limited to the precise structures that have been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present application is limited only by the appended claims.

Claims

1. A thimble assembly, characterized in that, Comprising: A thimble base having a top wall and a side wall, the top wall and the side wall enclosing a receiving cavity; The top wall has a plurality of pin holes arranged in an array; The side wall has a plurality of side wall segments located on different sides of the plurality of pin holes, and is provided with a plurality of through holes, and at least one side wall segment is provided with at least two rows of through holes spaced in the height direction of the side wall; A plurality of thimbles, each thimble being disposed in a corresponding one of the pin holes, and the top ends of the plurality of thimbles being flush; A plurality of fasteners, each of the fasteners being correspondingly disposed in one of the through holes, and the plurality of fasteners corresponding to the plurality of thimbles one by one, and the plurality of fasteners can extend into the receiving cavity from the corresponding through holes to lock and fix the corresponding thimbles.

2. The thimble assembly according to claim 1, characterized in that The plurality of pin holes are arranged in a rectangular array of odd rows and odd columns; wherein, the number of rows and columns of the pin holes is greater than or equal to 3.

3. The thimble assembly according to claim 2, characterized in that, The side wall has a first side wall segment and a third side wall segment opposite in the row direction of the rectangular array, and a second side wall segment and a fourth side wall segment opposite in the column direction of the rectangular array; wherein, The cross section of the first side wall segment, the second side wall segment, the third side wall segment and the fourth side wall segment in a direction perpendicular to the height direction of the side wall is arc-shaped and connected in sequence; or, The first side wall segment, the second side wall segment, the third side wall segment and the fourth side wall segment are straight, and the side wall further includes connecting walls connected between two of the first side wall segment, the second side wall segment, the third side wall segment and the fourth side wall segment.

4. The thimble assembly according to claim 3, characterized in that, The plurality of pin holes are arranged in a square array of five rows and five columns; wherein, in the direction from the first side wall segment towards the third side wall segment, the plurality of pin holes are arranged as the first row, the second row, the third row, the fourth row and the fifth row, and in the direction from the second side wall segment towards the fourth side wall segment, the plurality of pin holes are arranged as the first column, the second column, the third column, the fourth column and the fifth column; wherein, the first side wall segment, the second side wall segment, the third side wall segment and the fourth side wall segment are each provided with two rows of through holes, or one of the first side wall segment, the second side wall segment, the third side wall segment and the fourth side wall segment is provided with three rows of through holes, and the other three side wall segments are provided with two rows of through holes.

5. The thimble assembly according to claim 4, characterized in that, When the first side wall segment, the second side wall segment, the third side wall segment and the fourth side wall segment are each provided with two rows of through holes, the first side wall segment is provided with a first row of through holes and a second row of through holes; the first row of through holes includes five through holes respectively corresponding to the pin holes in the first row, and the fasteners respectively arranged in the five through holes included in the first row of through holes respectively fix the five thimbles arranged in the first row of pin holes; the second row of through holes includes three through holes respectively opposite to the three pin holes in the second row and second column, the second row and third column, and the second row and fourth column; the fasteners respectively arranged in the three through holes included in the second row of through holes respectively fix the thimbles arranged in the three pin holes in the second row and second column, the second row and third column, and the second row and fourth column; The second side wall segment is provided with a third row of through holes and a fourth row of through holes; the third row of through holes includes three through holes respectively opposite to the three pin holes in the first column of the second row, the first column of the third row, and the first column of the fourth row. Fasteners respectively arranged in the three through holes included in the third row of through holes are respectively used to fix the ejector pins in the pin holes in the first column of the second row, the first column of the third row, and the first column of the fourth row; the fourth row of through holes includes two through holes respectively corresponding to the ejector pins in the second column of the third row and the third column of the third row. Fasteners respectively arranged in the two through holes included in the fourth row of through holes are respectively used to fix the ejector pins in the second column of the third row and the third column of the third row; The third side wall segment is provided with a fifth row of through holes and a sixth row of through holes; the arrangement modes of the fifth row of through holes and the sixth row of through holes are respectively the same as the arrangement modes of the first row of through holes and the second row of through holes. Fasteners arranged in the through holes in the third side wall segment are respectively used to fix the ejector pins in all the pin holes in the fifth row, the second column of the fourth row, the third column of the fourth row, and the fourth column of the fourth row; The fourth side wall segment is provided with a seventh row of through holes and an eighth row of through holes. The arrangement mode of the seventh row of through holes is the same as that of the third row of through holes. Fasteners arranged in the through holes included in the seventh row of through holes are respectively used to fix the ejector pins in the fifth column of the second row, the fifth column of the third row, and the fifth column of the fourth row; the eighth row of through holes has one through hole, and the fastener arranged in the one through hole is used to fix the ejector pin in the fourth column of the third row.

6. The thimble assembly according to claim 4, wherein, When one of the first side wall segment, the second side wall segment, the third side wall segment, and the fourth side wall segment is provided with three rows of through holes and the other three side wall segments are provided with two rows of through holes; the first side wall segment is provided with a ninth row of through holes and a tenth row of through holes. The ninth row of through holes has five through holes respectively corresponding to all the pin holes in the first row; fasteners respectively arranged in the five through holes included in the ninth row of through holes are respectively used to fix the five ejector pins in the pin holes in the first row; the tenth row of through holes includes three through holes respectively opposite to the three pin holes in the second column of the second row, the third column of the second row, and the fourth column of the second row; fasteners respectively arranged in the three through holes included in the tenth row of through holes are respectively used to fix the ejector pins in the three pin holes in the second column of the second row, the third column of the second row, and the fourth column of the second row; The second side wall section is provided with an eleventh row of through holes and a twelfth row of through holes; the eleventh row of through holes includes three through holes respectively opposite to the three pin holes of the first column of the second row, the first column of the third row, and the first column of the fourth row. The fasteners provided in the three through holes included in the third row of through holes respectively fix the ejector pins of the first column of the second row, the first column of the third row, and the first column of the fourth row; the twelfth row of through holes includes one through hole corresponding to the second column of the third row. The fastener provided in the through hole included in the twelfth row of through holes fixes the ejector pin of the second column of the third row. The third side wall section is provided with a thirteenth row of through holes and a fourteenth row of through holes; the arrangement modes of the thirteenth row of through holes and the fourteenth row of through holes are respectively the same as the arrangement modes of the ninth row of through holes and the tenth row of through holes. The fasteners provided in the through holes of the third side wall section respectively fix the ejector pins in all the pin holes of the fifth row, the second column of the fourth row, the third column of the fourth row, and the fourth column of the fourth row. The fourth side wall section is provided with a fifteenth row of through holes and a sixteenth row of through holes. The arrangement mode of the fifteenth row of through holes is the same as that of the eleventh row of through holes. The fasteners provided in the through holes included in the fifteenth row of through holes respectively fix the ejector pins in the fifth column of the second row, the fifth column of the third row, and the fifth column of the fourth row. The sixteenth row of through holes has one through hole, and the fastener provided in the one through hole fixes the ejector pin in the fourth column of the third row. The side wall further includes a seventeenth row of through holes provided in one of the first side wall section, the second side wall section, the third side wall section, and the fourth side wall section. The seventeenth row of through holes serves as the third row of through holes of the corresponding side wall section and includes one through hole corresponding to the ejector pin of the third column of the third row. The fastener provided in the through hole included in the seventeenth row of through holes fixes the ejector pin of the third column of the third row.

7. The thimble assembly according to claim 1, characterized in that, The fastener is a locking screw. The outer wall of the locking screw has an external thread, and the through hole has an internal thread that mates with the external thread.

8. The thimble assembly according to any one of claims 1 to 7, characterized in that For each fastener, the orthographic projections of the other ejector pins other than the ejector pin fixedly corresponding to the fastener on a plane perpendicular to the height direction of the ejector pin seat do not overlap.

9. The thimble assembly according to claim 8, characterized in that, The centroids of the openings of the through holes on the outer wall of the side wall in the same side wall section do not overlap in the orthographic projection on a plane perpendicular to the height direction of the ejector pin seat.

10. The thimble assembly according to claim 1, wherein, One end of the side wall facing away from the top wall has an opening. The ejector pin seat includes a base that is liftably provided at the opening, and the plurality of ejector pins are provided on the base.

11. A slicing machine, characterized in that, It includes a suction head assembly and the ejector pin assembly according to any one of claims 1 to 10. The suction head assembly and the ejector pin assembly can cooperate to remove the semiconductor structure from the adhesive film layer; wherein, the suction head assembly and the ejector pin assembly are respectively arranged on opposite sides of the adhesive film layer, and the semiconductor structure is located on the adhesive film layer and on the side facing the suction head assembly.

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