Linear evaporation source
By designing a linear evaporation source of the crucible casing cover with trapezoidal openings, the problem of insufficient binding force between the film and polymer materials is solved, and faster and more stable gas output and higher binding force are achieved.
Patent Information
- Application Number
- CN202422294594.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-20
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-09-20
AI Technical Summary
In the prior art, the bonding force between the film obtained by evaporation and polymer materials is insufficient, and there is room for improvement.
A linear evaporation source is designed, including a crucible body and a crucible casing cover. A trapezoidal opening that penetrates the upper and lower bottom surfaces is provided on the crucible casing cover. The upper top surface outlet of the crucible casing cover is smaller than the lower bottom surface inlet. Upward openings are formed on the crucible casing cover for spraying out the material to be plated, and a narrow trapezoidal structure is combined to improve the stability of gas output.
The bonding force between the film and the material to be plated is improved, ensuring that the evaporated gas output is faster and stable, and improving the quality of the film.
Smart Images
Figure CN223134550U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of evaporation coating, in particular to a linear evaporation source. Background Art
[0002] Evaporation coating refers to a process method in which, under vacuum conditions, a coating material is evaporated by a certain heating evaporation method and vaporized, and the particles fly to the surface of the substrate and condense into a film. Evaporation coating is a gas-phase deposition technology that has been used earlier and has a wide range of applications. It has the advantages of simple film-forming method, high purity and density of the film, and unique film structure and properties. In the process of vacuum coating, after the material to be coated is melted, under vacuum conditions, the melted material to be coated forms on the polymer material for evaporation coating. However, in the current products obtained by evaporation coating, the bonding force between the coated material and the polymer material is still prone to problems. Therefore, the existing technology still needs to be improved. Summary of the Utility Model
[0003] In view of the deficiencies of the above-mentioned prior art, the purpose of the present utility model is to provide a linear evaporation source that can improve the evaporation efficiency.
[0004] To solve the above technical problems, the present utility model adopts the following technical solutions:
[0005] The present utility model provides a linear evaporation source, including a crucible. The crucible includes a crucible body and a crucible cover. The crucible cover is covered on the crucible body. The crucible cover is provided with an opening that penetrates up and down. The outlet of the opening on the upper top surface of the crucible cover is smaller than the inlet of the opening on the lower bottom surface of the crucible cover. On the crucible cover, the cross-section of the opening is trapezoidal.
[0006] Further, for the crucible of the evaporation source, the upper top surface of the crucible cover is circular, the lower bottom surface of the crucible cover is circular, the upper top surface of the crucible cover and the lower bottom surface of the crucible cover are vertically aligned and have equal areas, and the longitudinal section of the opening is rectangular or trapezoidal.
[0007] Further, for the linear evaporation source, a flow dividing plate is arranged in the opening. The lower surface of the flow dividing plate is a convex arc surface, the upper surface of the flow dividing plate is a flat surface, and both ends of the flow dividing plate are respectively fixed on the side walls on both sides inside the opening.
[0008] Further, for the crucible of the evaporation source, the crucible body is in a cylindrical shape, and the diameter of the lower bottom surface of the crucible cover is larger than the diameter of the crucible body.
[0009] Further, for the crucible of the evaporation source, the inner diameter of the crucible body is 100 mm to 120 mm, and the outer diameter of the crucible body is 120 mm to 140 mm.
[0010] Further, for the crucible of the evaporation source, the distance between the upper top surface and the lower bottom surface of the crucible lid is 40 mm to 150 mm.
[0011] Further, for the crucible of the evaporation source, the opening is a rectangular opening.
[0012] Further, for the crucible of the evaporation source, the length of the opening is 30 mm to 100 mm, and the width of the opening is 20 mm to 50 mm.
[0013] Further, for the crucible of the evaporation source, the crucible body is a silicon nitride or silicon carbide crucible body, and the crucible lid is a graphite crucible lid.
[0014] Compared with the prior art, a linear evaporation source provided by the present utility model includes a crucible. The crucible includes a crucible body and a crucible lid. The crucible lid is disposed on the crucible body. A vertically penetrating opening is provided on the crucible lid. The outlet of the opening on the upper top surface of the crucible lid is smaller than the inlet of the opening on the lower bottom surface of the crucible lid. On the crucible lid, the cross-section of the opening is trapezoidal. The linear evaporation source of the present application includes a crucible. A crucible lid is provided above the crucible body. The crucible lid has a certain thickness. An upward opening is formed on the crucible lid. This opening is responsible for allowing the material to be plated in the crucible body to melt and gasify and spray out through this opening, and directly spray onto the target film that needs to be plated. Because there is only this opening on the crucible lid of the crucible body, the internal air pressure is high. Moreover, this long and narrow trapezoidal structure enables the evaporated gas to be output faster and more stably. Such a method is beneficial to making the obtained film have a higher bonding force with the material to be plated. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on the structures shown in these drawings.
[0016] Figure 1 It is a front view structural schematic diagram of the linear evaporation source provided by the present utility model.
[0017] Figure 2 It is a top view structural schematic diagram of the linear evaporation source provided by the present utility model.
[0018] Figure 3 It is a cross-sectional view structural schematic diagram of the linear evaporation source provided by the present utility model.
[0019] Description of the reference numerals in the drawings:
[0020] Crucible body 10
[0021] Crucible lid 20
[0022] Opening 30
[0023] Flow dividing plate 31 Specific implementation manners
[0024] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.
[0025] It should be noted that if there are directional indications (such as up, down, left, right, front, back,...) involved in the embodiments of the present utility model, then the directional indications are only used to explain the relative positional relationship and movement conditions between components in a specific posture (as shown in the drawings). If the specific posture changes, the directional indications will also change accordingly.
[0026] In addition, if there are descriptions such as "first", "second", etc. involved in the embodiments of the present utility model, then the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement it. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by the present utility model.
[0027] Such as Figure 1 、 Figure 2 and Figure 3As shown in the figure, a linear evaporation source provided by the present utility model includes a crucible, and the crucible includes a crucible body 10 and a crucible lid 20. The crucible lid 20 is covered on the crucible body 10. An opening 30 that penetrates up and down is provided on the crucible lid 20. The outlet of the opening 30 on the upper top surface of the crucible lid 20 is smaller than the inlet of the opening 30 on the lower bottom surface of the crucible lid 20. On the crucible lid 20, the cross-section of the opening 30 is trapezoidal. The linear evaporation source of this application includes a crucible. A crucible lid 20 is arranged above the crucible body 10. The crucible lid 20 has a certain thickness. An upward opening 30 is formed on the crucible lid 20. This opening 30 is responsible for allowing the material to be plated in the crucible body 10 to melt and then gasify and spray out through this opening 30, and directly spray onto the target film that needs to be plated. Because there is only this opening 30 on the crucible lid 20 for the crucible body 10, the internal air pressure is high. Moreover, this long and narrow trapezoidal structure enables the evaporated gas to be output faster and more stably. Such a method is beneficial to making the obtained film have a higher bonding force with the material to be plated. Further, for the crucible used in the evaporation source provided by the present utility model, the upper top surface of the crucible lid 20 is circular, the lower bottom surface of the crucible lid 20 is circular, the upper top surface of the crucible lid 20 and the lower bottom surface of the crucible lid 20 are vertically aligned and have equal areas, and the longitudinal section of the opening 30 is rectangular or trapezoidal.
[0028] Further, for the linear evaporation source provided by the present utility model, the crucible body 10 is in a cylindrical shape, and the diameter of the lower bottom surface of the crucible cover 20 is greater than the diameter of the crucible body 10, so as to facilitate the crucible cover 20 to be covered on the crucible body 10. Further, for the linear evaporation source provided by the present utility model, the inner diameter of the crucible body 10 is 100 mm to 120 mm, and the outer diameter of the crucible body 10 is 120 mm to 140 mm. For example, the inner diameter of the crucible body 10 can be 100 mm, and the outer diameter of the crucible body 10 can be 120 mm. Such a design can ensure that the material to be plated placed in the crucible body 10 will not remain at the bottom of the crucible after plating. Because if it remains at the bottom, after the evaporation plating stops and the crucible cools down, the remaining material to be plated will cool and solidify, which is likely to damage the crucible. Further, for the linear evaporation source provided by the present utility model, the distance between the upper top surface and the lower bottom surface of the crucible cover 20 is 40 mm to 150 mm. Such a height can, on the one hand, help to stabilize the structure of the crucible cover 20, and at the same time prevent the crucible cover 20 from being pushed open by the pressure generated by the heating of the crucible. Further, for the linear evaporation source provided by the present utility model, the length of the opening 30 is 30 mm to 100 mm. Within this range, the evaporation coating efficiency can be improved, and on the other hand, the crucible structure can be stabilized. The width of the opening 30 is 20 mm to 50 mm. Such a range can ensure the highest bonding strength between the material to be plated and the film. Specifically, the length of the opening 30 on the upper top surface can be 50 mm, and the width of the opening 30 on the upper top surface can be 20 mm. Further, for the linear evaporation source provided by the present utility model, the opening 30 is a rectangular opening 30. Further, for the linear evaporation source provided by the present utility model, the crucible body 10 is a silicon nitride or silicon carbide crucible body, and the crucible cover 20 is a graphite crucible cover. Graphite has high heat resistance, and its heat resistance can reach 1500 °C, and it can be used on the crucible for a long time, which can improve the service life of the crucible cover.
[0029] Furthermore, for the linear evaporation source provided by the present utility model, a flow dividing plate 31 is disposed within the opening 30. The lower surface of the flow dividing plate 31 is a convex arc surface, and the upper surface of the flow dividing plate 31 is a flat surface. Both ends of the flow dividing plate 31 are respectively fixed on the side walls on both sides inside the opening 30. The flow dividing plate 31 can be disposed at an angle of 45°, and two flow dividing plates can be provided. The two can be arranged in parallel or crosswise. Of course, generally one is sufficient. The provision of the flow dividing plate 31 can reduce the quality requirement of the crucible cover 20. The crucible cover 20 presses on the crucible body 10 by gravity. In order to provide sufficient pressure, the crucible cover 20 is often made heavier. The design of the flow dividing plate 31 can, during evaporation coating, due to heating causing an increase in the internal pressure, form evaporation gas to evaporate outward through the opening 30. When passing through the flow dividing plate 31, the flow rate passing through the upper surface is relatively fast, and the flow rate passing through the lower surface is relatively slow, forming a pressure difference, causing the crucible cover 20 to receive a downward pressure. Therefore, the amount of material used can be reduced, the production cost can be lowered, and the lighter crucible cover 20 is also more convenient to operate.
[0030] In summary, the linear evaporation source of the present utility model includes a crucible. A crucible cover is disposed above the crucible body. The crucible cover has a certain thickness, and an upward opening is formed on the crucible cover. This opening is responsible for allowing the material to be plated in the crucible body to melt and then gasify and spray out through this opening, directly spraying onto the target thin film that needs to be coated. Because there is only this opening on the crucible cover for the crucible body, the internal air pressure is high. Moreover, this long and narrow trapezoidal structure enables the evaporated gas to be output faster and more stably. Such a method is beneficial for making the obtained thin film have a higher bonding force with the material to be plated. Furthermore, for the crucible for the evaporation source provided by the present utility model, the upper top surface of the crucible cover is circular, the lower bottom surface of the crucible cover is circular, the upper top surface of the crucible cover and the lower bottom surface of the crucible cover are vertically aligned and have equal areas, and the longitudinal section of the opening is rectangular or trapezoidal.
[0031] The above are only the preferred embodiments of the present utility model, and do not limit the patent scope of the present utility model accordingly. All equivalent structural transformations made under the inventive concept of the present utility model by using the content of the specification and drawings of the present utility model, or directly / indirectly applied in other related technical fields, are included in the patent protection scope of the present utility model.
Claims
1. A linear evaporation source, characterized in that, It includes a crucible, and the crucible includes a crucible body and a crucible cover. The crucible cover is covered on the crucible body. There is an opening penetrating up and down on the crucible cover. The outlet of the opening on the upper top surface of the crucible cover is smaller than the inlet of the opening on the lower bottom surface of the crucible cover. On the crucible cover, the cross-section of the opening is trapezoidal.
2. The linear evaporation source according to claim 1, wherein The upper top surface of the crucible cover is circular, the lower bottom surface of the crucible cover is circular, the upper top surface of the crucible cover and the lower bottom surface of the crucible cover are vertically aligned and have equal areas, and the longitudinal section of the opening is rectangular or trapezoidal.
3. The linear evaporation source according to claim 2, characterized in that, A flow dividing plate is arranged in the opening. The lower surface of the flow dividing plate is a convex arc surface, the upper surface of the flow dividing plate is a flat surface, and both ends of the flow dividing plate are respectively fixed on the side walls on both sides inside the opening.
4. The linear evaporation source according to claim 3, wherein The crucible body is in a cylindrical shape, and the diameter of the lower bottom surface of the crucible cover is larger than the diameter of the crucible body.
5. The linear evaporation source according to claim 4, characterized in that, The inner diameter of the crucible body is 100 mm to 120 mm, and the outer diameter of the crucible body is 120 mm to 140 mm.
6. The linear evaporation source according to claim 5, characterized in that, The distance between the upper top surface of the crucible cover and the lower bottom surface of the crucible cover is 40 mm to 150 mm.
7. The linear evaporation source according to claim 6, wherein The opening is a rectangular opening.
8. The linear evaporation source according to claim 7, wherein The length of the opening is 30 mm to 100 mm.
9. The linear evaporation source according to claim 8, wherein The width of the opening is 20 mm to 50 mm.
10. The linear evaporation source according to claim 9, characterized in that, The crucible body is a silicon nitride or silicon carbide crucible body, and the crucible cover is a graphite crucible cover.