Gas vacuumizing mechanism of vacuum cavity

Abstract

The utility model relates to the technical field of vacuum coating, and discloses a gas vacuumizing mechanism of a vacuum cavity. The gas vacuumizing mechanism of the vacuum cavity comprises a connecting pipe, a control valve is fixedly installed on the right side of the middle of the connecting pipe, a pressure detector is fixedly installed in the middle of the connecting pipe, a display meter is fixedly installed at the top of the pressure detector, and a flow speed detector is fixedly installed on the left side of the middle of the connecting pipe. A display screen is fixedly installed at the top of the flow velocity detector, and a connecting sleeve is fixedly installed on one side of the outer side of the connecting pipe. The connecting pipe can be opened or closed through the control valve, the pressure inside the connecting pipe can be detected through the pressure detector and then displayed through the display meter, and the flow velocity inside the connecting pipe can be detected through the flow velocity detector and displayed through the display screen. Therefore, whether the connecting pipe is blocked or not is conveniently detected, the air suction amount is detected, and practicability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a gas evacuation mechanism for a vacuum chamber. Background Art

[0002] Vacuum coating machines mainly refer to a type of coating that needs to be carried out under a relatively high vacuum. Specifically, there are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD pulsed laser deposition, ion beam sputtering, and many others. During the vacuum coating process, a vacuum pumping device is required to evacuate the air in the vacuum coating machine.

[0003] The existing Chinese utility model patent with the reference publication number: CN220057016U discloses a vacuum pumping device and a vacuum coating equipment, including a workbench. On the top surface of the workbench, a vacuum coating machine and a vacuum pump are placed. The vacuum coating machine and the vacuum pump are connected by a hose. The hose is connected to the vacuum coating machine through a valve, and the hose is connected to the vacuum pump through an installation structure. The installation structure includes a connecting pipe, a tightening sleeve, a fastening sleeve, a first sealing ring, a second sealing ring, and a third sealing ring. The beneficial effect is that the vacuum pumping device proposed by the utility model is provided with a filter screen. During the process of the vacuum pump evacuating the vacuum coating machine, impurities drawn out together with the air are filtered out by the filter screen. By screwing the connecting pipe to separate the connecting pipe from the suction pipe, the filter screen can be taken out, and the filter screen is convenient to disassemble.

[0004] Although the above-mentioned vacuum pumping device and vacuum coating equipment solve the problem that the coating material or some impurities in the vacuum coating machine may be drawn out together by setting a filter screen, the filtering effect of the above equipment is not good, and the filter screen is small and prone to blockage, thus affecting the operation of the equipment. Summary of the Utility Model

[0005] (I) Technical Problems to be Solved

[0006] In view of the deficiencies of the prior art, the utility model provides a gas evacuation mechanism for a vacuum chamber, which has the advantages of good filtering effect and not being easily blocked, and solves the above technical problems.

[0007] (II) Technical Solutions

[0008] To achieve the above object, the utility model provides the following technical solution: A gas evacuation mechanism for a vacuum chamber, comprising:

[0009] Connecting pipe, a control valve is fixedly installed on the right side in the middle of the connecting pipe, a pressure detector is fixedly installed in the middle of the connecting pipe, a display meter is fixedly installed on the top of the pressure detector, a flow rate detector is fixedly installed on the left side in the middle of the connecting pipe, a display screen is fixedly installed on the top of the flow rate detector, a connecting sleeve is fixedly installed on one side of the outer side of the connecting pipe, an internal thread is fixedly installed inside the connecting sleeve, a sealing gasket is fixedly installed on one side inside the connecting sleeve, the sealing gasket is in an annular shape, a threaded ring is movably connected inside the connecting sleeve, a mounting ring is fixedly installed on one side of the threaded ring, and a filter barrel is fixedly installed on one side of the mounting ring.

[0010] As a preferred technical solution of the present invention, a connecting ring is fixedly installed on one side of the connecting pipe, the connecting ring is in an annular shape, and the connecting ring is a structure for connection.

[0011] As a preferred technical solution of the present invention, a threaded ring is movably connected inside the connecting ring, a support ring is fixedly installed on one side of the threaded ring, and the support ring is a structure for support.

[0012] As a preferred technical solution of the present invention, a filter screen is fixedly installed on one side of the support ring, and the filter screen is a structure for filtering.

[0013] As a preferred technical solution of the present invention, a vacuum coating machine main body is fixedly installed on the outer side of the connecting pipe, a gas pressure detection device is fixedly installed on one side of the top of the vacuum coating machine main body, and the gas pressure detection device is a structure for detecting gas pressure.

[0014] As a preferred technical solution of the present invention, a bottom plate is fixedly installed at the bottom of the vacuum coating machine main body, a vacuum pump is fixedly installed on one side of the top of the bottom plate, and the vacuum pump is a structure for pumping vacuum.

[0015] As a preferred technical solution of the present invention, an air outlet pipe is fixedly installed on the top of the vacuum pump, a purifier is fixedly installed in the middle of the air outlet pipe, and the purifier is a structure for purifying gas.

[0016] Compared with the prior art, the present invention provides a gas vacuum pumping mechanism for a vacuum chamber, and has the following beneficial effects:

[0017] 1. In the present invention, the connecting pipe can be opened or closed through the control valve. After the pressure inside the connecting pipe is detected by the pressure detector, it is displayed through the display meter. The flow rate inside the connecting pipe is detected by the flow rate detector and displayed through the display screen, so as to facilitate detecting whether the connecting pipe is blocked and detecting the gas extraction volume, improving the practicability of the gas vacuum pumping mechanism for the vacuum chamber.

[0018] 2. The utility model is installed on the filter barrel through the fitting connection between the thread ring and the internal thread of the connecting sleeve and sealed by the gasket. The filter barrel can intercept and filter larger impurities and particles. The filter screen is fixed through the fitting connection between the connecting ring and the thread ring. Thus, the filter screen can filter impurities and particles, improving the filtering effect of the gas evacuation mechanism of the vacuum cavity and avoiding the problem of equipment damage caused by dust and impurities entering the vacuum machine. Description of the Drawings

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 It is a schematic diagram of the connecting pipe of the utility model;

[0021] Figure 3 It is a schematic diagram of the connecting ring of the utility model;

[0022] Figure 4 It is a schematic diagram of the connecting sleeve of the utility model;

[0023] Figure 5 It is a schematic diagram of the main body of the vacuum coating machine of the utility model.

[0024] Wherein: 1. Connecting pipe; 11. Control valve; 12. Pressure detector; 13. Display meter; 14. Flow rate detector; 15. Display screen; 2. Connecting ring; 21. Thread ring; 22. Support ring; 23. Filter screen; 3. Connecting sleeve; 31. Internal thread; 32. Gasket; 33. Thread ring; 34. Installation ring; 35. Filter barrel; 4. Main body of the vacuum coating machine; 41. Air pressure detection device; 42. Bottom plate; 43. Vacuum pump; 44. Air outlet pipe; 45. Purifier. Detailed Embodiment

[0025] The following further describes in detail the embodiments of the present utility model in conjunction with the drawings and examples. The following examples are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0026] In the description of the present utility model, unless otherwise specified, the meaning of "a plurality" is two or more; the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0027] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0028] Please refer to Figure 1 - Figure 5 In this embodiment, a gas evacuation mechanism for a vacuum chamber includes: a connecting pipe 1, a control valve 11 is fixedly installed on the middle right side of the connecting pipe 1, a pressure detector 12 is fixedly installed in the middle of the connecting pipe 1, a display meter 13 is fixedly installed on the top of the pressure detector 12, a flow rate detector 14 is fixedly installed on the middle left side of the connecting pipe 1, and a display screen 15 is fixedly installed on the top of the flow rate detector 14.

[0029] Specifically, the on-off of the connecting pipe 1 can be controlled by the control valve 11, the pressure inside the connecting pipe 1 can be detected by the pressure detector 12, the pressure can be displayed by the display meter 13, the flow rate inside the connecting pipe 1 can be detected by the flow rate detector 14, and the flow rate can be displayed by the display screen 15.

[0030] A connecting ring 2 is fixedly installed on one side of the connecting pipe 1, and the connecting ring 2 is in a ring shape.

[0031] A threaded ring 21 is movably connected inside the connecting ring 2, and a support ring 22 is fixedly installed on one side of the threaded ring 21.

[0032] A filter screen 23 is fixedly installed on one side of the support ring 22.

[0033] Specifically, through the fitting connection between the threaded ring 21 and the connecting ring 2, the support ring 22 can be supported, the filter screen 23 can be installed, and the gas can be filtered through the filter screen 23.

[0034] On one side of the outer side of the connecting pipe 1, a connecting sleeve 3 is fixedly installed. Inside the connecting sleeve 3, an internal thread 31 is fixedly installed. On one side inside the connecting sleeve 3, a sealing gasket 32 is fixedly installed. The sealing gasket 32 is in an annular shape. Inside the connecting sleeve 3, a threaded ring 33 is movably connected. On one side of the threaded ring 33, a mounting ring 34 is fixedly installed. On one side of the mounting ring 34, a filter barrel 35 is fixedly installed.

[0035] Specifically, through the fitting connection between the threaded ring 33 and the internal thread 31 inside the connecting sleeve 3, the filter barrel 35 on one side of the mounting ring 34 can be supported. Through the sealing gasket 32, the gap can be sealed. Through the filter barrel 35, the impurities in the gas can be filtered.

[0036] On the outer side of the connecting pipe 1, a vacuum coating machine main body 4 is fixedly installed. On one side of the top of the vacuum coating machine main body 4, a pressure detection device 41 is fixedly installed.

[0037] At the bottom of the vacuum coating machine main body 4, a bottom plate 42 is fixedly installed. On one side of the top of the bottom plate 42, a vacuum pump 43 is fixedly installed.

[0038] On the top of the vacuum pump 43, an air outlet pipe 44 is fixedly installed. In the middle of the air outlet pipe 44, a purifier 45 is fixedly installed.

[0039] Specifically, through the bottom plate 42, the bottom can be supported. Through the pressure detection device 41, the air pressure inside the vacuum coating machine main body 4 can be detected, so as to control the air pressure inside the device. Through the air outlet pipe 44, the gas extracted from the inside of the vacuum pump 43 can be discharged. Through the purifier 45, the gas can be purified and then discharged.

[0040] In use, first, by operating the vacuum pump 43 on the left side at the top of the bottom plate 42, the air inside the vacuum chamber of the vacuum coating machine main body 4 can be pumped out through the connecting pipe 1. The on-off of the connecting pipe 1 can be controlled by the control valve 11. The pressure inside the connecting pipe 1 can be detected by the pressure detector 12, and the pressure can be displayed by the display meter 13. The flow rate inside the connecting pipe 1 can be detected by the flow rate detector 14 and displayed on the display screen 15, so as to detect and control the data during vacuum pumping, avoiding the problem that it is inconvenient to detect when the equipment is blocked or fails, and improving the practicability of the gas vacuum pumping mechanism of the vacuum chamber. The connecting sleeve 3 is installed on the right side outside the connecting pipe 1, and at the same time, the connecting sleeve 3 is on one side inside the vacuum coating machine main body 4. It is fitted and connected through the thread ring 33 and the internal thread 31 inside the connecting sleeve 3, so as to support the filter barrel 35 on one side of the mounting ring 34. The gap can be sealed by the sealing gasket 32. The impurities in the gas can be filtered by the filter barrel 35. It is fitted and connected through the thread ring 21 and the connecting ring 2, so as to support the support ring 22, and then the filter screen 23 can be installed, and the gas can be filtered by the filter screen 23. The gas inside the vacuum coating machine main body 4 can be pumped out through the connecting pipe 1 by operating the vacuum pump 43. After the air is filtered by the filter barrel 35 to remove large impurities and particles, it is filtered again by the internal filter screen 23, avoiding impurities and dust from entering the inside of the vacuum pump 43 and affecting the operation of the equipment, and improving the practicability of the gas vacuum pumping mechanism of the vacuum chamber. The filter barrel 35 can be rotated, so that the thread ring 33 rotates inside the connecting sleeve 3, and then the filter barrel 35 can be disassembled and cleaned. By rotating the filter screen 23, the thread ring 21 can be rotated inside the connecting ring 2, and then the filter screen 23 can be disassembled, improving the practicability and convenience of the gas vacuum pumping mechanism of the vacuum chamber.

[0041] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A gas evacuation mechanism for a vacuum chamber, characterized in that, The gas evacuation mechanism of the vacuum chamber includes a connecting pipe (1). A control valve (11) is fixedly installed on the right side in the middle of the connecting pipe (1). A pressure detector (12) is fixedly installed in the middle of the connecting pipe (1). A display meter (13) is fixedly installed on the top of the pressure detector (12). A flow rate detector (14) is fixedly installed on the left side in the middle of the connecting pipe (1). A display screen (15) is fixedly installed on the top of the flow rate detector (14). A connecting sleeve (3) is fixedly installed on one side of the outer side of the connecting pipe (1). An internal thread (31) is fixedly installed inside the connecting sleeve (3). A sealing gasket (32) is fixedly installed on one side inside the connecting sleeve (3). The sealing gasket (32) is in an annular shape. A threaded ring (33) is movably connected inside the connecting sleeve (3). An installation ring (34) is fixedly installed on one side of the threaded ring (33). A filter barrel (35) is fixedly installed on one side of the installation ring (34).

2. The gas evacuation mechanism for a vacuum chamber according to claim 1, wherein: A connecting ring (2) is fixedly installed on one side of the connecting pipe (1). The connecting ring (2) is in an annular shape.

3. The gas evacuation mechanism for a vacuum chamber according to claim 2, characterized in that: A threaded ring (21) is movably connected inside the connecting ring (2). A support ring (22) is fixedly installed on one side of the threaded ring (21).

4. The gas evacuation mechanism of a vacuum chamber according to claim 3, characterized in that: A filter screen (23) is fixedly installed on one side of the support ring (22).

5. The gas evacuation mechanism for a vacuum chamber according to claim 1, wherein: A vacuum coating machine main body (4) is fixedly installed on the outer side of the connecting pipe (1). An air pressure detection device (41) is fixedly installed on one side of the top of the vacuum coating machine main body (4).

6. The gas evacuation mechanism of a vacuum chamber according to claim 5, characterized in that: A bottom plate (42) is fixedly installed at the bottom of the vacuum coating machine main body (4). A vacuum pump (43) is fixedly installed on one side of the top of the bottom plate (42).

7. The gas evacuation mechanism for a vacuum chamber according to claim 6, characterized in that: An air outlet pipe (44) is fixedly installed on the top of the vacuum pump (43). A purifier (45) is fixedly installed in the middle of the air outlet pipe (44).

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