Counter-force counteracting mechanism for impact of voice coil motor on moving platform on frame

Abstract

The utility model relates to the technical field of motion tables, in particular to a counter-force counteracting mechanism aiming at impact of voice coil motors on a frame on a motion table, which comprises the frame and a marble table arranged at the top of the frame, and a plurality of voice coil motors are fixedly mounted on the side surface of the marble table. The surface of the frame is fixedly provided with fixing supports in one-to-one correspondence with the multiple voice coil motors, and an elastic damping unit used for attenuating the impact of the voice coil motors on the frame is arranged between each fixing support and the corresponding voice coil motor. The elastic damping unit comprises a mover support fixedly connected to the voice coil motor and an elastic damping assembly arranged between the mover support and the fixed support. According to the utility model, the elastic damping unit is arranged between the voice coil motor and the frame, and rigid connection is replaced by flexible connection, so that the problems that rigid impact of the voice coil motor interferes with the frame and the marble table, and processing parameters of wafers on the workbench module are not up to the standard are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of motion tables, and particularly relates to a reaction force cancellation mechanism for counteracting the impact of a voice coil motor on a frame on a motion table. Background Art

[0002] In recent years, with the gradual development of advanced chip manufacturing towards functional integration and miniaturization, more and more enterprises use automated equipment for production to improve operation efficiency. Currently, in wafer detection or processing technology, a stable workbench is generally required, and the workbench, such as a carrier stage, generally needs to move. When the workbench moves by a power motor installed on marble (i.e., side beams), the power motor will successively give a reaction force to the marble, which will inevitably cause the marble to vibrate.

[0003] In order to balance the reaction force of the marble, the traditional technology uses a motion table configured with an FC system to balance the reaction force to reduce the vibration of the marble. However, the common FC systems currently mainly use a reaction force external motor (i.e., a voice coil motor). When the reaction force external motor is installed, the stator (magnet) of the reaction force external motor is generally fixed on the marble, and the mover (voice coil) of the reaction force external motor is installed on the motion table frame through a support frame. Therefore, the reaction force external motor in the common FC system and the motion table frame belong to a rigid connection (specifically, reference can be made to a carrier stage system using a voice coil motor with the patent publication number CN114884301B). Due to the rigid connection method, when the voice coil motor in the FC system balances the reaction force of the marble, the voice coil motor will generate a reaction force on the motion table frame, resulting in the vibration of the motion table frame.

[0004] In summary, although the common FC system can attenuate a certain amount of vibration, the overall attenuation effect is not good enough, and there will be a rigid impact, which is still a kind of interference to the marble and the frame, and there is a problem that the wafer processing parameters do not meet the standards due to the vibration of the motion table. Summary of the Utility Model

[0005] The utility model provides a reaction force cancellation mechanism for counteracting the impact of a voice coil motor on a frame on a motion table to solve the problems raised in the above background art.

[0006] To solve the above technical problems, the technical solution adopted by the utility model is:

[0007] A reaction force cancellation mechanism for the impact of a voice coil motor on a frame on a motion table, comprising a frame and a marble table provided on the top of the frame. A plurality of voice coil motors are fixedly installed on the side surface of the marble table. Fixed brackets corresponding to the plurality of voice coil motors one by one are fixedly installed on the surface of the frame. An elastic damping unit for attenuating the impact of the voice coil motor on the frame is provided between each fixed bracket and the corresponding voice coil motor. The elastic damping unit includes a mover bracket fixedly connected to the voice coil motor and an elastic damping component provided between the mover bracket and the fixed bracket;

[0008] A plurality of first limit grooves are formed on one side of the mover bracket close to the fixed bracket. A plurality of second limit grooves corresponding to the plurality of first limit grooves one by one are formed on one side of the fixed bracket close to the mover bracket. A stepped hole communicating with the plurality of first limit grooves one by one is formed on one side surface of the mover bracket. A plurality of weight reduction grooves are formed on the surface of the fixed bracket. Through holes communicating with the second limit grooves are respectively formed on the inner walls of the plurality of weight reduction grooves. The two ends of the elastic damping component are respectively arranged in the first limit groove and the second limit groove. Connection parts are respectively arranged at the two ends of the elastic damping component. The two connection parts respectively extend into the corresponding stepped hole and weight reduction groove. Fixing components for stabilizing the elastic damping component are arranged in both the stepped hole and the weight reduction groove.

[0009] Preferably, the type of the elastic damping component includes but is not limited to a spring element, a damper, a damping pad or an airbag.

[0010] Preferably, mounting holes communicating with the plurality of weight reduction grooves one by one are formed through the surface of the fixed bracket.

[0011] Preferably, the fixing component is a nut or a bolt.

[0012] Preferably, the voice coil motor includes a motor magnet as a motor stator and a motor voice coil as a motor mover. The motor magnet is fixedly installed on the marble table, and the motor voice coil is fixedly installed on the mover bracket.

[0013] Preferably, a strip-shaped hole is formed through the mover bracket, and a through hole corresponding to the strip-shaped hole is formed on the motor voice coil.

[0014] Preferably, a strip-shaped block is arranged on one side of the motor voice coil. A threaded hole is formed on the strip-shaped block. The mover bracket and the motor voice coil are fixedly connected through the cooperation of a bolt and the strip-shaped block.

[0015] Preferably, a mounting seat is fixedly connected to one side of the motor magnet, and the mounting seat is fixedly connected to the marble table.

[0016] Preferably, a plurality of vertical waist-shaped holes are formed through the surface of the mounting base, and a plurality of horizontal waist-shaped holes are formed through the surface of the fixing bracket.

[0017] Preferably, four voice coil motors and four fixing brackets are respectively provided. The four voice coil motors are respectively fixedly installed on the front, rear, left, and right end faces of the marble table, and the four fixing brackets are respectively fixedly installed on the front, rear, left, and right end faces of the frame.

[0018] By adopting the above technical solutions, the beneficial effects obtained by the present utility model are as follows:

[0019] In the present utility model, by installing an elastic damping unit between the voice coil motor and the fixing bracket, when the workbench module starts to generate a reaction force on the marble table, the voice coil motor can effectively offset the reaction force of the marble table. And during the process of offsetting the reaction force of the marble table, the elastic damping component will absorb the impact from the voice coil of the motor and attenuate the impact on the frame caused by the inertial force of the voice coil of the motor, thereby reducing the jitter of the workbench module. Therefore, by setting an elastic damping unit between the voice coil motor and the frame and replacing the rigid connection with a flexible connection, the problem that the rigid impact of the voice coil motor causes interference to the frame and the marble table and affects the non-compliance of the wafer processing parameters on the workbench module is solved.

[0020] In the present utility model, through the vertical waist-shaped holes on the mounting base and the horizontal waist-shaped holes on the fixing bracket, the distance difference or height difference between the fixing bracket and the mover bracket can be conveniently adjusted to meet the precise setting of the elastic damping component in the first limiting groove and the second limiting groove for limiting, ensuring the accuracy and stability of the elastic damping component after installation, and prompting the elastic damping component to stably attenuate the impact of the voice coil motor on the frame horizontally in the first limiting groove and the second limiting groove, thereby reducing the jitter of the workbench module. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0022] Figure 2 is a schematic diagram of the partial structure of the present utility model;

[0023] Figure 3 is a schematic diagram of the partial sectional structure of the present utility model;

[0024] Figure 4 is an enlarged schematic diagram of part A of the present utility model;

[0025] Figure 5 is a schematic diagram of the voice coil motor and the fixing bracket structure of the present utility model;

[0026] Figure 6Schematic diagram of the bar-shaped block structure of the present utility model.

[0027] In the figure: 1, frame; 2, marble table; 4, voice coil motor; 5, fixed bracket; 6, elastic damping unit; 7, mover bracket; 8, elastic damping component; 9, first limiting groove; 10, second limiting groove; 11, stepped hole; 12, weight-reducing groove; 13, through hole; 14, motor magnet; 15, motor voice coil; 16, strip-shaped hole; 17, bar-shaped block; 18, mounting seat; 19, mounting hole. Specific embodiments

[0028] In order to more clearly understand the above-mentioned objects, features and advantages of the present utility model, the following further describes the present utility model with reference to the drawings and embodiments. It should be noted that, without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other.

[0029] In the following description, many specific details are set forth in order to fully understand the present utility model. However, the present utility model can also be implemented in other ways different from those described herein. Therefore, the present utility model is not limited by the specific embodiments disclosed in the following specification. Embodiment

[0030] As Figure 1-6 shown, the present utility model provides a reaction force cancellation mechanism for the impact of a voice coil motor on a frame on a moving table, including a frame 1 and a marble table 2 provided on the top of the frame 1. A plurality of voice coil motors 4 are fixedly installed on the side surface of the marble table 2. Fixed brackets 5 corresponding to the plurality of voice coil motors 4 are fixedly installed on the surface of the frame 1. And an elastic damping unit 6 for attenuating the impact of the voice coil motor 4 on the frame 1 is provided between each fixed bracket 5 and the corresponding voice coil motor 4. The elastic damping unit 6 includes a mover bracket 7 fixedly connected to the voice coil motor 4 and an elastic damping component 8 provided between the mover bracket 7 and the fixed bracket 5;

[0031] A plurality of first limiting grooves 9 are provided on the side of the mover bracket 7 close to the fixed bracket 5. A plurality of second limiting grooves 10 corresponding to the plurality of first limiting grooves 9 are provided on the side of the fixed bracket 5 close to the mover bracket 7. A stepped hole 11 communicating with the plurality of first limiting grooves 9 is provided on one side surface of the mover bracket 7. A plurality of weight-reducing grooves 12 are provided on the surface of the fixed bracket 5. Through holes 13 communicating with the second limiting grooves 10 are respectively provided on the inner walls of the plurality of weight-reducing grooves 12. And the two ends of the elastic damping component 8 are respectively arranged in the first limiting groove 9 and the second limiting groove 10. Connecting parts are respectively provided at the two ends of the elastic damping component 8. The two connecting parts respectively extend into the corresponding stepped hole 11 and weight-reducing groove 12. And fixing components for stabilizing the elastic damping component 8 are provided in both the stepped hole 11 and the weight-reducing groove 12.

[0032] In this embodiment, the types of the elastic damping component 8 include but are not limited to spring members, dampers, damping pads or air bags, and the fixing component can be a nut or a bolt.

[0033] Furthermore, the elastic damping component 8 can be stably placed in the first limiting groove 9 and the second limiting groove 10 for limiting, so as to ensure the accuracy and stability of the elastic damping component 8 after installation, and promote the elastic damping component 8 to laterally and stably attenuate the impact of the voice coil motor 4 on the frame 1. The degrees of freedom of the elastic damping component 8 are not limited, and connection parts for connecting with the voice coil 15 of the motor and the mover bracket 7 are respectively arranged at both ends of the elastic damping component 8. The overall structure of the connection part is integrally formed by a chassis and a positioning shaft column, and the cross section of the connection part can be a "T" shape. The horizontal section of the "T" shape is the chassis, and the vertical section is the positioning shaft column. The positioning shaft columns on both connection parts are external threads or internal threads, or one connection part is an external thread and the other connection part is an internal thread. Therefore, when the positioning shaft columns of the two connection parts respectively extend into the corresponding stepped holes 11 and the weight reduction grooves 12, the elastic damping component 8 can be fixed by operating bolts or nuts.

[0034] Taking the elastic damping component 8 as a spring member as an example: Chassis are respectively connected to both ends of the spring member to ensure the stability of the spring member. Further, after placing the chassis at one end of the spring member in the second limiting groove 10, one end of the positioning shaft column connecting the chassis can extend into the weight reduction groove 12. Similarly, after placing the chassis at the other end of the spring member in the first limiting groove 9, one end of the positioning shaft column of the other chassis can extend into the stepped hole 11. Further, when the positioning shaft column is an external thread, a nut can be threadedly connected to the positioning shaft column to play a role in stabilizing and limiting by means of the nut. When the positioning shaft column is an internal thread, a bolt can be connected to the corresponding thread groove to play a role in stabilizing and limiting by means of the bolt.

[0035] Furthermore, for the design and selection of the elastic damping component 8, the stiffness required to be achieved by the elastic damping component 8 is calculated through the natural frequency calculation formula. At the same time, the stiffness of the elastic damping component 8 should also ensure that when subjected to an inertial force, the deformation generated is sufficient to balance the inertial force. Specifically, combining the vibration isolation efficiency of existing commercial air bags: for example, at 10 Hz, the vibration isolation rate is 80%, that is, 20% of the vibration is not attenuated. In the present utility model, it is desired to increase the vibration isolation rate at 10 Hz. Therefore, the natural frequency of the elastic damping member 8 is designed to be 10 Hz to increase the vibration attenuation of the entire system, and the stiffness of the elastic damping component 8 is designed according to the natural frequency calculation formula, so as to attenuate the vibration with the highest efficiency. For the damping selection of the elastic damping component 8, the design value is 10%. Excessive damping will cause a decrease in the vibration isolation rate of medium and high frequencies. In summary, the natural frequency calculation formula of the spring damping component 8 is: , where, is the natural circular frequency, k is the stiffness coefficient of the spring, and m is the mass of the object.

[0036] In this embodiment, the surface of the fixed bracket 5 is penetrated with mounting holes 19 that communicate with a plurality of weight-reducing grooves 12 one by one.

[0037] In this embodiment, the voice coil motor 4 includes a motor magnet 14 as the motor stator and a motor voice coil 15 as the motor mover. The motor magnet 14 is fixedly installed on the marble table 2, the motor voice coil 15 is fixedly installed on the mover bracket 7, a strip-shaped hole 16 is penetrated through the mover bracket 7, a through hole corresponding to the strip-shaped hole 16 is provided on the motor voice coil 15, and a strip-shaped block 17 is provided on one side of the motor voice coil 15. A threaded hole is provided on the strip-shaped block 17, and the mover bracket 7 and the motor voice coil 15 are fixedly connected by the cooperation of bolts and the strip-shaped block 17.

[0038] Further, a threaded hole is penetrated through the strip-shaped block 17. After using an existing bolt to pass through the strip-shaped hole 16 and the through hole, one end of the bolt can be threadedly connected to the threaded hole on the strip-shaped block 17, so as to realize the fixed connection between the mover bracket 7 and the motor voice coil 15, ensure that after the mover bracket 7 is connected to the voice coil motor 4, the design of the elastic damping component 8 can attenuate the vibration of the voice coil motor 4 on the frame 1, and promote the flexible connection based on the elastic damping component 8 to replace the traditional rigid connection, effectively avoiding the problem that the rigid impact interferes with the marble table 2 and the frame 1 and affects the non-compliance of the wafer processing parameters.

[0039] Furthermore, the design of the strip-shaped hole 16 enables the mover bracket 7 to be vertically adjusted up and down, ensuring that the first limit groove 9 can correspond to the second limit groove 10 after the adjustment of the mover bracket 7, reducing the vertical deviation, and promoting the elastic damping component 8 to stably attenuate the lateral impact force after installation.

[0040] In this embodiment, a mounting seat 18 is fixedly connected to one side of the motor magnet 14. The mounting seat 18 is fixedly connected to the marble table 2 for mounting the voice coil motor 4. After the voice coil motor 4 is mounted through the mounting seat 18, its motor voice coil 15 can correspond to the fixed bracket 5, ensuring that the motor voice coil 15 realizes flexible connection instead of rigid connection under the action of the elastic damping unit 6, promoting the elastic damping component 8 to absorb the impact from the voice coil motor 4, reducing the impact of the inertial force on the frame 1, and further reducing the jitter of the moving table.

[0041] Furthermore, a plurality of vertical waist-shaped holes are penetratingly formed on the surface of the mounting base 18, and a plurality of horizontal waist-shaped holes are penetratingly formed on the surface of the fixing bracket 5. Through the design of the vertical waist-shaped holes on the mounting base 18, the motor magnet 14 on the mounting base 18 can be adjusted up and down according to the height of the fixing bracket 5. And the design of the horizontal waist-shaped holes on the fixing bracket 5 enables the distance between the fixing bracket 5 and the mover bracket 7 to be conveniently adjusted, thereby meeting the precise installation of the elastic damping unit 6 and ensuring that the effectively installed elastic damping unit 6 can reduce the inertial force.

[0042] In this embodiment, four voice coil motors 4 and four fixing brackets 5 are respectively provided. The four voice coil motors 4 are respectively fixedly installed on the front, rear, left, and right end faces of the marble table 2, and the four fixing brackets 5 are respectively fixedly installed on the front, rear, left, and right end faces of the frame 1.

[0043] Furthermore, the voice coil motors 4, the fixing brackets 5, and the elastic damping units 6 on the front and rear end faces of the marble table 2 and the frame 1 can effectively attenuate the X-axis reaction force of the voice coil motor 4 on the frame 1, while the voice coil motors 4, the fixing brackets 5, and the elastic damping units 6 on the left and right end faces of the marble table 2 and the frame 1 can effectively attenuate the Y-axis reaction force of the voice coil motor 4 on the frame 1, prompting that by installing the elastic damping unit 6 between the voice coil motor 4 and the frame 1, the impact from the voice coil motor 4 can be effectively absorbed, and the impact of the inertial force on the frame 1 can be reduced.

[0044] The working principle and usage process of the present utility model: When the moving table inside the marble table 2 is started under force, the marble table 2 will receive the reaction force of the motor that drives the moving table to move. Therefore, through the connection between the voice coil motor 4 and the fixing bracket 5, the voice coil motor 4 can effectively cancel the reaction force of the marble table 2. And during the process of canceling the reaction force, the elastic damping component 8 will attenuate the force transmitted from the motor voice coil 15 to the fixing bracket 5. Furthermore, when the reaction force of the voice coil motor 4 is attenuated by the elastic damping component 8, the vibration of the motor voice coil 15 on the fixing bracket 5 and the frame 1 can be effectively reduced. After the vibration of the frame 1 is reduced, the jitter of the marble table 2 and the frame 1 can be minimized, avoiding the interference caused by the jitter generated by the rigid impact to the marble table 2 and the frame 1, which affects the problem that the wafer processing parameters do not meet the standards.

[0045] In the present utility model, the term "a plurality of" refers to two or more, unless otherwise clearly defined. The term "and / or" used herein includes any and all combinations of one or more of the related listed items. Terms such as "installed", "connected", "joined", "fixed", etc. shall be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; "joined" can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0046] It should be noted that when an element is referred to as being "assembled on", "installed on", "fixed to", or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation.

[0047] In the description of this specification, the descriptions of terms such as "an embodiment", "some embodiments", "specific embodiments", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0048] Although the embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and purposes of the present utility model. The scope of the present utility model is defined by the claims and their equivalents.

Claims

1. A reaction force cancellation mechanism for the impact of a voice coil motor on a frame on a motion table, characterized in that, It includes a frame (1) and a marble table (2) arranged on the top of the frame (1). A plurality of voice coil motors (4) are fixedly installed on the side surface of the marble table (2). Fixed brackets (5) corresponding to the plurality of voice coil motors (4) one by one are fixedly installed on the surface of the frame (1). And an elastic damping unit (6) for attenuating the impact of the voice coil motor (4) on the frame (1) is arranged between each fixed bracket (5) and the corresponding voice coil motor (4). The elastic damping unit (6) includes a mover bracket (7) fixedly connected to the voice coil motor (4) and an elastic damping component (8) arranged between the mover bracket (7) and the fixed bracket (5); A plurality of first limiting grooves (9) are formed on one side of the mover bracket (7) close to the fixed bracket (5). A plurality of second limiting grooves (10) corresponding to the plurality of first limiting grooves (9) one by one are formed on one side of the fixed bracket (5) close to the mover bracket (7). A stepped hole (11) communicating with the plurality of first limiting grooves (9) one by one is formed on one side surface of the mover bracket (7). A plurality of weight-reducing grooves (12) are formed on the surface of the fixed bracket (5). Through holes (13) communicating with the second limiting grooves (10) are respectively formed on the inner walls of the plurality of weight-reducing grooves (12). And two ends of the elastic damping component (8) are respectively arranged in the first limiting groove (9) and the second limiting groove (10). Two ends of the elastic damping component (8) are respectively provided with connecting parts. The two connecting parts respectively extend into the corresponding stepped hole (11) and weight-reducing groove (12). And fixing components for stabilizing the elastic damping component (8) are arranged in both the stepped hole (11) and the weight-reducing groove (12).

2. The reaction force cancellation mechanism for the impact of the voice coil motor on the frame on the motion table according to claim 1, characterized in that, The types of the elastic damping component (8) include but are not limited to spring elements, dampers, damping pads or air bags.

3. The reaction force cancellation mechanism for the impact of the voice coil motor on the frame on the motion table according to claim 1, wherein, Mounting holes (19) communicating with the plurality of weight-reducing grooves (12) one by one are formed through the surface of the fixed bracket (5).

4. A reaction force cancellation mechanism for the impact of a voice coil motor on a frame on a motion table according to claim 1, characterized in that, The fixing component is a nut or a bolt.

5. The reaction force cancellation mechanism for the impact of the voice coil motor on the frame on the motion table according to claim 1, characterized in that The voice coil motor (4) includes a motor magnet (14) serving as a motor stator and a motor voice coil (15) serving as a motor mover. The motor magnet (14) is fixedly installed on the marble table (2). The motor voice coil (15) is fixedly installed on the mover bracket (7).

6. The reaction force cancellation mechanism for the impact of the voice coil motor on the frame on the moving table according to claim 5, characterized in that, A strip-shaped hole (16) is formed through the mover bracket (7). A through hole corresponding to the strip-shaped hole (16) is formed on the motor voice coil (15).

7. A reaction force cancellation mechanism for the impact of a voice coil motor on a frame on a motion table according to claim 6, characterized in that, A strip-shaped block (17) is arranged on one side of the motor voice coil (15). A threaded hole is formed on the strip-shaped block (17). The mover bracket (7) and the motor voice coil (15) are fixedly connected through the cooperation of a bolt and the strip-shaped block (17).

8. A reaction force cancellation mechanism for the impact of a voice coil motor on a frame on a motion table according to claim 5, characterized in that, A mounting seat (18) is fixedly connected to one side of the motor magnet (14). The mounting seat (18) is fixedly connected to the marble table (2).

9. The reaction force cancellation mechanism for the impact of the voice coil motor on the frame on the motion table according to claim 8, characterized in that, A plurality of vertical waist-shaped holes are formed through the surface of the mounting seat (18). And a plurality of horizontal waist-shaped holes are formed through the surface of the fixed bracket (5).

10. The reaction force cancellation mechanism for the impact of the voice coil motor on the frame on the motion table according to claim 1, wherein, The voice coil motors (4) and the fixed brackets (5) are respectively provided with four. The four voice coil motors (4) are respectively fixedly installed on the front, rear, left, and right end faces of the marble table (2), and the four fixed brackets (5) are respectively fixedly installed on the front, rear, left, and right end faces of the frame (1).

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