Device for detecting flatness of substrate
Through the combined design of transmission device, sensor and material support unit, the friction damage and operator physical energy consumption in the substrate plane detection device are solved, and the efficient, non-destructive detection and flip of the substrate are achieved.
Patent Information
- Application Number
- CN202521049671.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-27
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2035-05-27
AI Technical Summary
The existing substrate planarity detection device is prone to damage the lower surface of the substrate during clamping, which consumes a lot of physical energy by the operator, and the pallet cannot be completely removed to affect the substrate flip efficiency.
The combination design of transmission device, sensor, plating unit and material cradle unit is adopted, and the ball pallet structure is used to reduce friction resistance, cylinder clamp the substrate, motor flip the substrate, sensor data is transmitted in real time, and the pallet can be removed and flipped for easy flip.
It reduces friction damage on the substrate clamping, reduces physical energy consumption of operators, improves substrate flip efficiency and detection efficiency, and is adapted to substrates of different sizes.
Smart Images
Figure CN223138612U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of plate detection, in particular to a device for detecting the flatness of a substrate plate. Background Technique
[0002] The 3D printing substrate is a key component used to carry the printing object, assist in forming, and affect the printing quality during the 3D printing process. Its material, structure, and functional design need to be highly adapted to the printing process, material characteristics, and application scenarios.
[0003] Before the 3D printing substrate is put into use, it is necessary to detect the flatness of its surface. The more traditional method is mainly to use a vernier caliper to measure the four corners of the substrate. If the measured values of the four corners are close, it is defaulted that the flatness of the substrate is qualified. Obviously, the accuracy of this detection method cannot be guaranteed. With the continuous development of science and technology, in recent years, laser sensors have appeared in the device for detecting the flatness of plates. Multiple laser sensors are installed on the slider in the linear motor slide rail, and then, in cooperation with the operation of other transmission structures, it is possible to control the horizontal, vertical, up, and down movement of the sensors. The laser sensor is vertically displaced to a suitable position above the plate to be detected. The laser of the sensor hits the starting position of the substrate and is reset to zero. Then, the sensor is driven to displace back and forth repeatedly two or more times. The detection data is transmitted to the measurement software in real time. Then, the substrate is flipped, and the flatness of the other surface can be measured. If a larger-sized substrate is to be detected, the horizontal position distribution of the sensor can be adjusted several more times, and several more back-and-forth detections can be carried out repeatedly.
[0004] Although the above-mentioned existing device can accurately detect the flatness of the substrate, during the detection process, in order to ensure the stability of the substrate during detection and the smooth progress of subsequent flipping operations, during the clamping operation of the substrate, there will be a large friction between the lower surface of the substrate and the supporting plate, and there is a high risk of damaging the lower surface of the substrate. Moreover, when fine-tuning the position of the substrate, the operator needs to consume a lot of physical energy. In addition, in the detection device of the prior art, during the subsequent flipping operation of the substrate, the supporting plate will not be completely removed from below the substrate, which will affect the maximum progress of the substrate flipping, and its practical performance needs to be further improved. Content of the Utility Model
[0005] The purpose of the utility model is to provide a device for detecting the flatness of a substrate. When clamping the substrate, the lower surface of the substrate will not be subjected to a large frictional resistance, so that the lower surface of the substrate can be effectively prevented from being damaged. Moreover, during the process of fine-tuning the position of the substrate, the operator does not need to consume a lot of physical energy. In addition, the supporting plate structure that can lift the substrate can be completely removed from below the substrate during the flipping operation of the substrate, which is convenient for the substrate to perform the flipping operation with the maximum progress, and the practical performance of the device is enhanced, so as to solve the problems raised in the above background technique.
[0006] To achieve the above object, the utility model provides the following technical solutions: a device for detecting the flatness of a substrate, which includes a transmission device, a sensor, and a substrate. A plurality of sensors are provided above the substrate, and the sensors are installed on the transmission device. The substrate is installed on a stacking unit, and a material supporting unit is provided below the substrate. The material supporting unit includes: a pair of vertical plates and a pair of supporting plates. The pair of vertical plates are respectively located on both sides of the substrate, and the pair of supporting plates are respectively located on both sides below the substrate. The upper surface of the supporting plate is slidably clamped with a plurality of balls, and the tops of the plurality of balls are on the same horizontal plane. The tops of the balls are in contact with the substrate. The end of the supporting plate close to the vertical plate is hinged with a cross plate, the bottom end of the cross plate is fixedly connected with a vertical rod, the bottom end of the vertical rod is fixedly connected with a linear slide rail module, the linear slide rail module is vertically arranged, and the linear slide rail module is connected with the vertical plate. A cylinder is fixedly sleeved on the outer wall of the vertical rod, and a pressing plate is rotatably connected to the outer wall of the cylinder. The pressing plate is in contact with the lower surface of the supporting plate, and the bottom end of the vertical plate is connected with a bottom plate.
[0007] Preferably, the stacking unit includes: a pair of clamping plates. A sleeve is rotatably connected to each of the pair of vertical plates. An anti-slip pad is fixedly connected to the surface of the pair of clamping plates close to the substrate, and the anti-slip pad is in tight contact with the substrate. A cylinder is fixedly connected to the surface of the clamping plate away from the substrate, and the outer wall of the cylinder is fixedly connected to the sleeve. A cavity is provided inside the vertical plate, a first toothed ring is provided inside the cavity, a second toothed ring is meshed and connected to the top end of the first toothed ring, a rotating rod is fixedly connected to the inner wall of the second toothed ring, the rotating rod is rotatably connected to the vertical plate through a ball bearing, one end of the rotating rod is fixedly connected to a motor, and the motor is fixedly connected to the vertical plate through a bracket.
[0008] Preferably, a convex rod is fixedly connected to the front surface of the pressing plate, a magnetic attraction block is fixedly connected to the surface of the vertical plate close to the pressing plate. When the pressing plate swings forward around the vertical rod until the convex rod is in contact with the magnetic attraction block, the convex rod and the magnetic attraction block are magnetically attracted.
[0009] Preferably, the vertical plate is connected to the bottom plate through a supporting unit. The supporting unit includes: a square plate, the square plate is fixedly connected to the bottom end of the vertical plate, vertical cylinders are provided at the four corners of the lower surface of the square plate, the bottom ends of the vertical cylinders are in contact with the bottom plate, bolts are inserted into the four corners of the upper surface of the square plate, and a plurality of pairs of threaded holes are provided on both sides of the upper surface of the bottom plate. The bolts sequentially penetrate through the square plate and the vertical cylinders and are threadedly connected to the threaded holes.
[0010] Preferably, the sensor is connected to the transmission device through the mounting unit. The mounting unit includes: a cavity plate, which is a horizontally multi-segmented structure. The multiple segments of the cavity plate are connected by lugs and fasteners. A wire is fixedly connected to the top end of the cavity plate. The wire is electrically connected to the wiring head of the sensor through a switch, and the switch is fixedly connected to the cavity plate. A vertical rod is fixedly connected to the top end of the cavity plate, and the vertical rod is fixedly connected to the transmission device.
[0011] Compared with the prior art, the beneficial effects of the present utility model are as follows: The device for detecting the flatness of the substrate has the following advantages compared with the traditional technology:
[0012] Through the cooperation among the transmission device, the sensor, the substrate, the stacking unit and the material supporting unit, when the operator places the substrate between the two clamping plates, both ends of the lower surface of the substrate will be located above the two supporting plates. Since the tops of the multiple balls on the upper surfaces of the two supporting plates are in the same horizontal state, after the lower surface of the substrate contacts the tops of the multiple balls, the substrate will automatically be in a horizontal state. Moreover, during the process of driving the clamping plates to clamp both ends of the substrate, the balls in the balls can roll, which can greatly reduce the frictional resistance received by the lower surface during the clamping of the substrate. In addition, during the process of fine-tuning the position of the substrate, there is no need for the operator to consume a large amount of physical energy. In addition, before the substrate is turned over, the supporting plate can be completely removed from below the substrate, which is convenient for the substrate to perform the maximum process of turning over operation, and the practical performance of the device is enhanced.
[0013] Through the cooperation among the transmission device, the sensor, the substrate, the stacking unit and the material supporting unit, the user first horizontally places the substrate to be detected for flatness between the two clamping plates, drives the air cylinder to clamp and fix the substrate with the anti-slip pad surfaces of the two clamping plates. At this time, start the sensor and the transmission device, and let the sensor in the starting state perform a reciprocating motion in the front-back direction above the substrate. During this process, the sensor transmits the detection data to the external measurement software in real time, so as to complete the flatness detection of one side of the substrate. When it is necessary to turn over the substrate to detect the flatness of the other side, the operator drives the motor to rotate the rotating rod and the second toothed ring. The second toothed ring meshes with the first toothed ring to drive, and then drives the sleeve, the air cylinder, the clamping plate and the substrate to perform a 180° turn over, realizing the turning over operation of the substrate. During this period, there is no need for two operators to manually lift the substrate to turn it over. The two-sided detection operation of a single substrate only needs to complete the stacking and unloading operations once each. This not only reduces the physical energy consumption of the operator, but also helps to improve the efficiency of the substrate detection operation.
[0014] Through the cooperation among the transmission unit, the sensor, the substrate, the stacking unit and the support unit, before carrying out the detection operation, the operator can rotate the bolt counterclockwise to separate it from the threaded hole, then pull out the bolt and replace the vertical cylinder. After selecting vertical cylinders of different lengths, the installation height of the substrate can be increased, so as to adapt to substrates with larger longitudinal dimensions.
[0015] Through the cooperation among the transmission device, the sensor and the installation unit, since the cavity plate is a horizontally multi-segmented structure and can be lengthened by the lugs and fasteners, the number of sensors stacked horizontally can be increased. As a result, during a single longitudinal reciprocating movement of the sensor, the upper surface of the substrate can be comprehensively detected without readjusting the horizontal position of the sensor again. This can improve the detection efficiency of the substrate to a certain extent. When detecting a substrate with a relatively narrow width, the switches corresponding to the sensors at both ends can be turned off to reduce the number of operating sensors, thereby reducing the overall operating cost of the detection equipment to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In combination with the accompanying drawings and with reference to the following specific embodiments, the above and other features, advantages and aspects of the various embodiments of the present disclosure will become more apparent. Throughout the accompanying drawings, the same or similar reference numerals denote the same or similar elements. It should be understood that the drawings are schematic and the original components and elements are not necessarily drawn to scale.
[0017] Figure 1 Structural schematic diagram of the utility model;
[0018] Figure 2 is Figure 1 the enlarged view of part A in
[0019] Figure 3 is Figure 2 the enlarged view of part B in
[0020] Figure 4 is Figure 1 the enlarged view of part C in
[0021] Figure 5 is Figure 1 the connection structural schematic diagram of the vertical rod, the cavity plate and the sensor of
[0022] Figure 6 is Figure 5 the partial side sectional view of
[0023] Figure 7 is Figure 1 the top view of the bottom plate;
[0024] Figure 8 is Figure 5 the enlarged view of part D in
[0025] In the figure: 1, transmission device; 2, sensor; 3, substrate; 4, clamping plate; 5, anti-slip pad; 6, cylinder; 7, sleeve; 8, first toothed ring; 9, second toothed ring; 10, rotating rod; 11, motor; 12, bracket; 13, vertical plate; 14, supporting plate; 15, ball; 16, cross plate; 17, vertical rod; 18, linear slide rail module; 19, cylinder; 20, abutting plate; 21, convex rod; 22, magnetic attraction block; 23, square plate; 24, vertical cylinder; 25, bolt; 26, threaded hole; 27, cavity plate; 28, wire; 29, switch; 30, lug; 31, fastener; 32, vertical rod; 33, bottom plate. Specific implementation mode
[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts shall fall within the protection scope of the present invention.
[0027] Please refer to Figures 1-8 , the present invention provides a technical solution: a device for detecting the flatness of a substrate, including a transmission device 1, a sensor 2 and a substrate 3. A plurality of sensors 2 are arranged above the substrate 3, the sensors 2 are installed on the transmission device 1, the substrate 3 is installed on a stacking unit, and a material supporting unit is arranged below the substrate 3. The material supporting unit includes: a pair of vertical plates 13 and a pair of supporting plates 14. The pair of vertical plates 13 are respectively located on both sides of the substrate 3, the pair of supporting plates 14 are respectively located on the lower sides of both sides of the substrate 3. The upper surface of the supporting plate 14 is slidably clamped with a plurality of balls 15, the tops of the plurality of balls 15 are on the same horizontal plane, the tops of the balls 15 are in contact with the substrate 3, the end of the supporting plate 14 close to the vertical plate 13 is hinged with a cross plate 16, the bottom end of the cross plate 16 is fixedly connected with a vertical rod 17, the bottom end of the vertical rod 17 is fixedly connected with a linear slide rail module 18, the linear slide rail module 18 is arranged vertically, the linear slide rail module 18 is connected with the vertical plate 13, and the outer wall of the vertical rod 17 is fixedly sleeved with a cylinder 19. The outer wall of the cylinder 19 is rotatably connected with an abutting plate 20, the abutting plate 20 is in contact with the lower surface of the supporting plate 14, and the bottom end of the vertical plate 13 is connected with a bottom plate 33.
[0028] In the specific implementation process, it is particularly worth noting that the transmission device 1 is composed of a box body, two groups of linear motor slide rails, brackets, lifting electric push rods and other structures, and can realize the adjustment of multiple sensors 2 in the horizontal, vertical and up-and-down directions. The transmission components in the transmission device 1 are prior art. The brief introduction here is only for easy understanding. The sensor 2 is a laser sensor, and the specific model is not limited, as long as it meets the usage requirements. The laser of the sensor hits the starting position of the substrate 3 and is zeroed. Then, through the transmission of the transmission device 1, multiple sensors 2 are longitudinally transmitted. When returning, after adjusting the horizontal position of the sensor, continue the detection. Repeat two or more back-and-forths, and the detection data is transmitted to the measurement software in real time to realize the detection operation of the flatness of the substrate. The ball 15 is composed of a spherical body and a groove seat. The spherical body can roll inside the groove seat and will not break away from the groove seat. The groove seat is fixedly connected with the support plate 14. The top of the spherical body is in contact with the substrate 3. Since the tops of the multiple balls 15 on the upper surfaces of the two support plates 14 are in the same horizontal state, when the lower surface of the substrate 3 contacts the tops of the multiple balls 15, the substrate 3 will automatically be in a horizontal state. The support plate 14 is hinged to the cross plate 16 through a pin shaft, and the pin shaft is arranged at the bottom position between the support plate 14 and the cross plate 16. The linear slide rail module 18 is composed of a linear guide rail, a transmission component, a driving device and a support structure component, etc., and is a common transmission structural part. The linear slide rail module 18 can be combined with an optoelectronic sensor and an encoder to detect the position and speed of the motor rotor in real time and feedback the information to the servo driver, so as to realize the precise control of position, speed and acceleration. When the linear slide rail module 18 is running, the slider in its transmission component can perform precise linear motion. The bottom end of the vertical rod 17 is fixedly connected with the slider in the linear slide rail module 18, and the height position of the vertical rod 17, the support plate 14 and the ball 15 can be adjusted by driving the linear slide rail module 18, so as to facilitate the alignment of the center of the side wall of the substrate 3 with the clamping plate 4. When necessary, an external laser calibrator can be used to assist the operation. The support structure in the linear slide rail module 18 is fixedly connected with the vertical plate 13, and the abutting plate 20 is rotationally connected with the cylinder 19 through a ball bearing.
[0029] Furthermore, the stacking unit includes: a pair of clamping plates 4. A pair of sleeves 7 are rotatably connected to a pair of vertical plates 13. Anti-slip pads 5 are fixedly connected to the surfaces of the pair of clamping plates 4 facing the substrate 3. The anti-slip pads 5 are in tight contact with the substrate 3. Cylinders 6 are fixedly connected to the surfaces of the clamping plates 4 away from the substrate 3. The outer walls of the cylinders 6 are fixedly connected with the sleeves 7. A cavity is provided inside the vertical plate 13. A first toothed ring 8 is provided inside the cavity. A second toothed ring 9 is meshed and connected to the top of the first toothed ring 8. A rotating rod 10 is fixedly connected to the inner wall of the second toothed ring 9. The rotating rod 10 is rotatably connected to the vertical plate 13 through a ball bearing. One end of the rotating rod 10 is fixedly connected with a motor 11. The motor 11 is fixedly connected to the vertical plate 13 through a bracket 12.
[0030] In the specific implementation process, it is particularly worth noting that the anti-slip mat 5 is made of rubber material, which can greatly improve the stability of the substrate 3 after being clamped by the splint 4. The air source joint of the air cylinder 6 is connected to an external air supply device through an air supply pipeline to provide power for its operation. The output end of the air cylinder 6 is fixedly connected to the splint 4, and the casing of the air cylinder 6 is fixedly connected to the sleeve 7. The sleeve 7 is rotatably connected to the vertical plate 13 through a ball bearing. In this application, a first toothed ring 8 is provided inside one of the vertical plates 13. The rotating rod 10 is fixedly connected to the output shaft of the motor 11. The casing of the motor 11 is fixedly connected to the bracket 12. The bracket 12 is fixedly connected to the vertical plate 13. The power cord of the motor 11 is connected to an external power supply device to provide the required electric energy for its operation. The motor 11 is a servo motor. The servo motor can achieve rotational or linear motion, can accurately control the angular velocity, position, speed and acceleration. There is an encoder inside it, which is used to detect the position and speed of the motor rotor and feedback this information to the servo driver. The encoder is a key component for the servo system to achieve closed-loop control, and its accuracy directly affects the control accuracy of the servo system. Since the transmission ratio of the first toothed ring 8 and the second toothed ring 9 is a fixed value, the rotation of the first toothed ring 8 by 180° can be accurately determined by adjusting the number of turns of the output shaft of the servo motor.
[0031] Further, a convex rod 21 is fixedly connected to the front surface of the abutting plate 20, and a magnetic attraction block 22 is fixedly connected to the surface of the vertical plate 13 facing the abutting plate 20. When the abutting plate 20 swings forward around the vertical rod 17 until the convex rod 21 fits with the magnetic attraction block 22, the convex rod 21 and the magnetic attraction block 22 are magnetically attracted.
[0032] In the specific implementation process, it is particularly worth noting that the convex rod 21 is a galvanized metal iron rod. After the abutting plate 20 rotates forward around the vertical rod 17 and separates from the supporting plate 14, and when the convex rod 21 fits with the magnetic attraction block 22, the convex rod 21 can be attached to the magnetic attraction block 22. The magnetic attraction block 22 is a magnet, which can generate an attractive force on the convex rod 21 to maintain the stability of the abutting plate 20.
[0033] Further, the vertical plate 13 is connected to the bottom plate 33 through a support unit. The support unit includes: a square plate 23, the square plate 23 is fixedly connected to the bottom end of the vertical plate 13. Vertical cylinders 24 are provided at the four corners of the lower surface of the square plate 23. The bottom ends of the vertical cylinders 24 are in contact with the bottom plate 33. Bolts 25 are inserted into the four corners of the upper surface of the square plate 23. A plurality of pairs of threaded holes 26 are opened on both sides of the upper surface of the bottom plate 33. The bolts 25 sequentially penetrate through the square plate 23 and the vertical cylinders 24 and are threadedly connected to the threaded holes 26.
[0034] In the specific implementation process, it is particularly worth noting that the threaded rod part of the bolt 25 has a clearance fit with the through hole of the square plate 23 and the inner wall of the vertical cylinder 24. The head of the bolt 25 abuts against the vertical plate 13. There are multiple threaded holes 26. By adjusting the threaded connection position of the bolt 25 with different threaded holes 26, the distance between the two vertical plates 13 can be adjusted to adapt to substrates 3 of different widths.
[0035] Furthermore, the sensor 2 is connected to the transmission device 1 through the installation unit. The installation unit includes: the sensor 2 is connected to the transmission device 1 through the installation unit. The installation unit includes: a cavity plate 27, which is a horizontally multi-segmented structure. The multiple cavity plates 27 are connected by lugs 30 and fasteners 31. A wire 28 is fixedly connected to the top end of the cavity plate 27. The wire 28 is electrically connected to the wiring terminal of the sensor 2 through a switch 29. The switch 29 is fixedly connected to the cavity plate 27. A vertical rod 32 is fixedly connected to the top end of the cavity plate 27. The vertical rod 32 is fixedly connected to the transmission device 1.
[0036] In the specific implementation process, it is particularly worth noting that the lug 30 is fixedly connected to the cavity plate 27. The fastener 31 is composed of a screw and a nut and can be used to connect the fitting lugs 30 to realize the installation of the multi-segmented cavity plate 27. The end of the wire 28 far from the switch 29 is connected to an external power supply device. When the switch 29 is closed, the circuit is turned on, and the sensor 2 can be controlled to be in an operating state. When the switch 29 is turned off, the circuit is disconnected, and the sensor 2 stops operating. The top end of the vertical rod 32 is fixedly connected to the slider of one of the linear motor slides in the transmission device 1.
[0037] Working principle:
[0038] Stacking and fixing operation of the substrate:
[0039] When the operator places the substrate 3 between the two clamping plates 4, the two ends of the lower surface of the substrate 3 will be above the two supporting plates 14. Since the tops of the multiple balls 15 on the upper surface of the two supporting plates 14 are at the same horizontal level, when the lower surface of the substrate 3 contacts the tops of the multiple balls 15, the substrate 3 will automatically be in a horizontal state. Moreover, during the process of driving the clamping plates 4 to clamp the two ends of the substrate 3, the operator does not need to manually maintain the stability of the substrate 3. Then, drive the cylinder 6 to make the surfaces of the two clamping plates 4 with anti-slip pads 5 clamp and fix the substrate 3, and the stacking and fixing operation of the substrate 3 can be completed.
[0040] Flatness detection operation of the substrate:
[0041] Start the sensor 2 and the transmission device 1, and let the sensor 2 in the startup state move back and forth in the front and rear directions above the substrate 3. During this process, the sensor 2 transmits the detection data to the external measurement software in real time, thereby completing the flatness detection of one side of the substrate 3.
[0042] Flip operation of the substrate:
[0043] When it is necessary to flip the substrate 3 to detect the flatness of the other side, the operator needs to rotate the backing plate 20 by 90°, and the backing plate 20 is separated from the supporting plate 14. At this time, the supporting plate 14 can rotate around the pin shaft, and the convex rod 21 is attracted to the magnetic suction block 22, which can prevent the supporting plate 14 from hindering the subsequent rotation of the substrate 3. The operator drives the motor 11 to rotate the rotating rod 10 and the second gear ring 9. The second gear ring 9 meshes with the first gear ring 8 for transmission, and then drives the sleeve 7, the cylinder 6, the clamping plate 4 and the substrate 3 to perform a 180° flip, realizing the flip operation of the substrate 3. During this period, there is no need for two operators to manually lift the substrate 3 for flipping. The two-sided detection operation of a single substrate 3 only needs to complete the stacking and unloading operations once each. This not only reduces the physical consumption of the operator, but also helps to improve the efficiency of the substrate detection operation.
[0044] Operation of increasing or decreasing the number of sensors:
[0045] Since the cavity plate 27 is a horizontally multi-segmented structure and can be lengthened by the lugs 30 and the fasteners 31, thereby increasing the horizontal stacking number of the sensors 2, so that during a single longitudinal reciprocating movement of the sensors 2, the upper surface of the substrate 3 can be comprehensively detected without adjusting the horizontal position of the sensors 2 again. This can improve the detection efficiency of the substrate 3 to a certain extent. When detecting a substrate 3 with a relatively narrow width, the switches 29 corresponding to the sensors 2 at both ends can be closed to reduce the number of operating sensors 2, thereby reducing the overall operating cost of the detection equipment to a certain extent.
[0046] Final work of the detection operation:
[0047] After completing the flatness detection operation of both sides of the substrate 3, after the operator holds the substrate 3, the cylinder 6 is driven to move both clamping plates 4 away from the substrate 3. At this time, the detected substrate 3 can be removed. Then the motor 11 is driven to reset the sleeve 7 to rotate 180°, and then the backing plate 20 is newly attached to the lower surface of the supporting plate 14 to facilitate the detection operation of the next substrate 3.
[0048] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. Device for detecting the flatness of a substrate, comprising a transmission device (1), a sensor (2) and a substrate (3), wherein a plurality of sensors (2) are arranged above the substrate (3), and the sensors (2) are mounted on the transmission device (1), characterized in that: The substrate (3) is mounted on a stacking unit, and a material supporting unit is provided below the substrate (3). The material supporting unit includes: a pair of vertical plates (13) and a pair of supporting plates (14). The pair of vertical plates (13) are respectively located on both sides of the substrate (3), and the pair of supporting plates (14) are respectively located on both lower sides of the substrate (3). A plurality of balls (15) are slidably clamped on the upper surface of the supporting plate (14). The tops of the plurality of balls (15) are on the same horizontal plane, and the tops of the balls (15) are in contact with the substrate (3). A cross plate (16) is hinged to the end of the supporting plate (14) close to the vertical plate (13). A vertical rod (17) is fixedly connected to the bottom end of the cross plate (16). A linear slide rail module (18) is fixedly connected to the bottom end of the vertical rod (17). The linear slide rail module (18) is vertically arranged and is connected to the vertical plate (13). A cylinder (19) is fixedly sleeved on the outer wall of the vertical rod (17). An abutting plate (20) is rotatably connected to the outer wall of the cylinder (19). The abutting plate (20) is in contact with the lower surface of the supporting plate (14). The bottom end of the vertical plate (13) is connected to a bottom plate (33).
2. The device for detecting the flatness of a substrate according to claim 1, wherein: The stacking unit includes: a pair of clamping plates (4). A sleeve (7) is rotatably connected to each of the pair of vertical plates (13). An anti-slip pad (5) is fixedly connected to the surface of the pair of clamping plates (4) close to the substrate (3). The anti-slip pad (5) is in tight contact with the substrate (3). A cylinder (6) is fixedly connected to the surface of the clamping plate (4) away from the substrate (3). The outer wall of the cylinder (6) is fixedly connected to the sleeve (7). A cavity is provided inside the vertical plate (13). A first toothed ring (8) is provided inside the cavity. A second toothed ring (9) is meshed and connected to the top end of the first toothed ring (8). A rotating rod (10) is fixedly connected to the inner wall of the second toothed ring (9). The rotating rod (10) is rotatably connected to the vertical plate (13) through a ball bearing. One end of the rotating rod (10) is fixedly connected to a motor (11). The motor (11) is fixedly connected to the vertical plate (13) through a bracket (12).
3. The device for detecting the flatness of a substrate according to claim 1, characterized in that: A convex rod (21) is fixedly connected to the front surface of the abutting plate (20). A magnetic attraction block (22) is fixedly connected to the surface of the vertical plate (13) close to the abutting plate (20). When the abutting plate (20) swings forward around the vertical rod (17) until the convex rod (21) is in contact with the magnetic attraction block (22), the convex rod (21) is magnetically attracted to the magnetic attraction block (22).
4. The device for detecting the flatness of a substrate according to claim 1, wherein: The vertical plate (13) is connected to the bottom plate (33) through a supporting unit. The supporting unit includes: a square plate (23). The square plate (23) is fixedly connected to the bottom end of the vertical plate (13). Vertical cylinders (24) are provided at the four corners of the lower surface of the square plate (23). The bottom ends of the vertical cylinders (24) are in contact with the bottom plate (33). Bolts (25) are inserted into the four corners of the upper surface of the square plate (23). A plurality of pairs of threaded holes (26) are provided on both sides of the upper surface of the bottom plate (33). The bolts (25) sequentially pass through the square plate (23) and the vertical cylinders (24) and are threadedly connected to the threaded holes (26).
5. The device for detecting the flatness of a substrate according to claim 1, wherein: The sensor (2) is connected to the transmission device (1) through a mounting unit, and the mounting unit includes: a cavity plate (27), the cavity plate (27) is a horizontally multi-segmented structure, and multiple segments of the cavity plate (27) are connected by lugs (30) and fasteners (31). A wire (28) is fixedly connected to the top end of the cavity plate (27), and the wire (28) is electrically connected to the terminal of the sensor (2) through a switch (29). The switch (29) is fixedly connected to the cavity plate (27). A vertical rod (32) is fixedly connected to the top end of the cavity plate (27), and the vertical rod (32) is fixedly connected to the transmission device (1).