Silicon carbide reflector with cooling structure

Abstract

The utility model provides a silicon carbide reflector with a cooling structure, which comprises a reflector body, a liquid cooling cavity is arranged on the back of the reflector body, a partition plate is arranged in the liquid cooling cavity, a plurality of heat dissipation columns are further arranged on the back of the reflector body in the liquid cooling cavity, and a liquid inlet and a liquid outlet are formed in the liquid cooling cavity. Through the arrangement of the liquid cooling cavity and the heat dissipation columns, during use, the liquid inlet and the liquid outlet are connected with the circulating cooling liquid hose, so that the temperature of the silicon carbide reflecting mirror can be effectively reduced based on the high thermal conductivity of the silicon carbide material in the liquid cooling cavity, and the situation that the mirror surface is deformed due to the temperature gradient and the precision of the mirror surface is reduced is prevented.

Description

Technical Field

[0001] The present invention belongs to the technical field of mirrors, and particularly relates to a silicon carbide mirror with a cooling structure. Background Art

[0002] Due to its low thermal deformation, high specific stiffness, dimensional stability, radiation resistance and other characteristics, silicon carbide is particularly suitable for applications in space optical systems. A silicon carbide mirror is an optical mirror made of silicon carbide material, which has good mechanical and physical properties and is suitable for optical system mirrors in space satellites, lidar systems, and space telescopes.

[0003] For example, in the silicon carbide mirror with the publication number CN218383446U and the name of "a silicon carbide mirror" applied by the applicant before, in the case of high-power laser applications, since the laser power density acting on the optical mirror can reach dozens of kW / cm2, such a high-intensity laser incidence will cause the temperature of the mirror to rise rapidly, resulting in a large temperature gradient and thermal deformation in the mirror body. The surface shape accuracy of the mirror will drop sharply, ultimately leading to the degradation of the output beam quality of the laser emission telescope and seriously affecting the optical performance of the system.

[0004] Based on this, the present application proposes a silicon carbide mirror with a cooling structure to solve the above-mentioned problems. Summary of the Invention

[0005] The purpose of the present utility model is to provide a silicon carbide mirror with a cooling structure to solve the problems that high-intensity laser incidence will cause the temperature of the mirror to rise rapidly, resulting in a large temperature gradient and thermal deformation in the mirror body, the surface shape accuracy of the mirror will drop sharply, and ultimately lead to the degradation of the output beam quality of the laser emission telescope.

[0006] The technical solution adopted by the present utility model is specifically as follows: a silicon carbide mirror with a cooling structure, including a mirror body, a liquid cooling cavity is arranged on the back of the mirror body, and a partition plate is arranged in the liquid cooling cavity. A plurality of heat dissipation columns are also arranged on the back of the mirror body in the liquid cooling cavity, and a liquid inlet and a liquid outlet are arranged on the liquid cooling cavity.

[0007] As a preferred technical solution, the liquid cooling cavity is sealed by a sealing plate made of silicon carbide material.

[0008] As a preferred technical solution, the sealing plate is fixed to the liquid cooling cavity by secondary sintering.

[0009] As a preferred technical solution, the mirror body, the liquid cooling cavity, the partition plate, and the heat dissipation columns are all made of silicon carbide material and integrally sintered.

[0010] As a preferred technical solution, reinforcing ribs are provided on one side of the sealing plate.

[0011] As a preferred technical solution, the reinforcing ribs include an annular reinforcing rib and a reinforcing plate, and the reinforcing plate is connected to the supporting back plate.

[0012] The technical effects achieved by the present utility model are as follows:

[0013] The silicon carbide mirror provided by the present utility model is provided with a liquid cooling cavity and heat dissipation columns. During use, it is connected to a circulating coolant hose through the liquid inlet and the liquid outlet, so that the circulating coolant is in the liquid cooling cavity. Based on the high thermal conductivity of the silicon carbide material, the temperature of the silicon carbide mirror can be effectively reduced, preventing the mirror surface from deforming due to temperature gradient and reducing the mirror surface accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic structural diagram of the present utility model.

[0015] Figure 2 is a partial schematic diagram of the present utility model after removing the liquid cooling cavity sealing plate.

[0016] In the figure: 1 - mirror body; 2 - liquid cooling cavity; 3 - annular reinforcing rib; 4 - reinforcing plate; 5 - supporting back plate; 6 - liquid inlet; 7 - liquid outlet; 8 - partition plate; 9 - heat dissipation column. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] In order to make the above objects, features, and advantages of the present invention more obvious and understandable, the following detailed description of the specific embodiments of the present invention will be made in conjunction with the accompanying drawings of the specification.

[0018] In the following description, many specific details are set forth in order to fully understand the present invention. However, the present invention can also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

[0019] In the description of the following embodiments, terms such as "upper and lower", "left and right", "one side", "the other side", etc., which are used to describe directions and positions, are only for the convenience of explanation based on the accompanying drawings of the specification. The embodiments and the scope of protection of the present invention are not limited by the relevant terms.

[0020] Please refer to Figure 1-2As shown in the figure, a silicon carbide mirror with a cooling structure includes a mirror body 1 made of silicon carbide material. A liquid cooling cavity 2 is provided on the back of the mirror body 1, and a partition plate 8 is arranged in the liquid cooling cavity 2. The partition plate 8 diverts the coolant entering the liquid cooling cavity 2 to ensure that the coolant contacts the largest area as much as possible, improving the cooling effect. At the same time, a number of heat dissipation columns 9 are also arranged in the liquid cooling cavity 2 on the back of the mirror body 1. The heat dissipation columns 9 are integrally arranged with the mirror body 1 and can effectively dissipate heat. An inlet 6 and an outlet 7 are provided on the liquid cooling cavity 2. In this embodiment, the inlet 6 and the outlet 7 are arranged on the sealing plate. Of course, those skilled in the art should understand that the inlet 6 and the outlet 7 are only for facilitating the circulation of the coolant in and out of the liquid cooling cavity 2. Therefore, the structure and the position of the inlet 6 and the outlet 7 are not limited to this and should not be used as a limitation of the protection scope of the invention.

[0021] In a preferred embodiment, the liquid cooling cavity 2 is sealed by a sealing plate made of silicon carbide material. The sealing plate is sintered by silicon carbide material and then secondarily sintered and fixed after matching with the liquid cooling cavity on the back of the mirror body 1.

[0022] In a preferred embodiment, the mirror body 1, the liquid cooling cavity 2, the partition plate 8, and the heat dissipation columns 9 are all made of silicon carbide material and integrally sintered. This is convenient for material selection and processing, and the silicon carbide mirror integrally sintered has higher structural strength and quality.

[0023] In a preferred embodiment, a reinforcing rib is provided on one side of the sealing plate. The reinforcing rib includes an annular reinforcing rib 3 and a reinforcing plate 4, and the reinforcing plate 4 is connected to the support back plate 5. By providing the reinforcing rib, the structural strength can be further improved, the influence of the assembly stress on the accuracy of the mirror body is reduced, and the instability of the connection of each component is reduced.

[0024] When the present utility model is in use, by providing a liquid cooling cavity and heat dissipation columns, during use, it is connected to a circulating coolant hose through the inlet and the outlet, so that the coolant circulates in the liquid cooling cavity. Based on the high thermal conductivity of the silicon carbide material, the temperature of the silicon carbide mirror can be effectively reduced, preventing the mirror surface from deforming due to temperature gradient and reducing the mirror surface accuracy.

[0025] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and retouches can be made, and these improvements and retouches should also be regarded as the protection scope of the present invention. The structures, devices, and operation methods not specifically described and explained in the present invention, unless otherwise specified and limited, are implemented according to the conventional means in the art.

Claims

1. A silicon carbide mirror with a cooling structure, characterized in that: It includes a mirror body, a liquid cooling cavity is arranged on the back surface of the mirror body, a partition plate is arranged in the liquid cooling cavity, a plurality of heat dissipation columns are further arranged on the back surface of the mirror body within the liquid cooling cavity, and a liquid inlet and a liquid outlet are arranged on the liquid cooling cavity.

2. The silicon carbide mirror with a cooling structure according to claim 1, wherein: The liquid cooling cavity is sealed by a sealing plate made of silicon carbide material.

3. The silicon carbide mirror with a cooling structure according to claim 2, characterized in that: The sealing plate is fixedly sintered with the liquid cooling cavity for the second time.

4. The silicon carbide mirror with a cooling structure according to claim 1, characterized in that: The mirror body, the liquid cooling cavity, the partition plate, and the heat dissipation columns are all made of silicon carbide material and integrally sintered.

5. The silicon carbide mirror with a cooling structure according to claim 2, wherein: One surface of the sealing plate is provided with reinforcing ribs.

6. The silicon carbide mirror with a cooling structure according to claim 5, wherein: The reinforcing ribs include annular reinforcing ribs and reinforcing plates, and the reinforcing plates are connected to the support back plate.

Images