LDI automatic exposure system

Abstract

The utility model relates to an LDI automatic exposure system, and belongs to the technical field of ultra-large thin plate exposure. According to the LDI exposure machine, the LDI exposure machine is set to be closed, and meanwhile, the side opening is adopted to enter and exit the plate, so that the contact between the exposure machine and the external environment in the exposure process is reduced, and the cleanliness of the exposure environment is ensured. Moreover, flexible automatic carrying and side feeding exposure are realized through cooperative work of the multi-axis manipulator, the ground rail, the incoming material carrier and the discharging carrier, manual feeding is avoided, full-automatic and closed management is realized, and the cleanliness of the exposure environment is further improved. The problem that in the prior art, cleanliness, temperature and humidity are difficult to guarantee in the feeding, discharging and exposure process of the super-large plate is solved.

Description

Technical Field

[0001] The utility model relates to an LDI automatic exposure system, belonging to the technical field of ultra-large thin plate exposure. Background Art

[0002] With the development of laser direct imaging (LDI) technology, the types of workpieces for exposure are increasing. For example, the LDI exposure system is applied to flat panel displays (FPDs). However, FPDs are usually ultra-large plates. For example, the plate size is 2500mm×1500mm×0.1mm. For ultra-large and thin plates, they are usually manually taken out from the storage area and placed on the processing equipment for loading and unloading, which affects the cleanliness of the exposure space. In addition, during the exposure process of traditional LDI exposure machines, the loading and unloading usually adopt the method of vertically placing the plate, but this method requires the working platform of the LDI exposure machine to be completely open, and the existing working platforms of LDI exposure machines cannot meet this requirement.

[0003] In the prior art, for example, CN105217311A and CN109709773A adopt the method of vertically placing the plate for loading and unloading of the plate. However, in this case, the plate is completely exposed to the air environment during the exposure of the LDI exposure machine, and it is difficult to ensure the cleanliness, temperature and humidity during the exposure process. Summary of the Utility Model

[0004] To solve the above problems, the present application provides an LDI automatic exposure system, which solves the problems that it is difficult to ensure the cleanliness, temperature and humidity during the loading and unloading of ultra-large plates and the exposure process. It includes:

[0005] An LDI exposure machine, which is a closed exposure machine with side openings for plate entry and exit;

[0006] A ground rail is arranged on one side of the side opening of the LDI exposure machine; a multi-axis robot is arranged on the ground rail, and the multi-axis robot is connected with a fork arm suction cup assembly, and the fork arm suction cup assembly is used to adsorb the plate and move the plate into the side opening of the LDI exposure machine; and

[0007] A material handling execution group is arranged on the same side of the LDI exposure machine as the ground rail; the material handling execution group includes a feeding station and a discharging station, and both the feeding station and the discharging station are located below the fork arm suction cup assembly.

[0008] Further, the fork arm suction cup assembly includes a fork arm part connected with the multi-axis robot and a vacuum generator connected with one side of the fork arm part. The fork arm part has a plurality of parallel fork bars, and a plurality of bellows suction cups are installed on each fork bar. Vacuum is generated by the vacuum generator, and the bellows suction cups can perform vacuum adsorption on the plate.

[0009] Further, the multi-axis robot is a six-axis manipulator, the fork arm member is connected to the six-axis manipulator, and the fork arm member can rotate 180° or 360° under the drive of the six-axis manipulator.

[0010] Further, the LDI automatic exposure system further includes a plate temporary storage platform, the plate temporary storage platform is arranged below the fork arm suction cup assembly, and a plurality of strip-shaped grooves adapted to the fork strips are arranged on the surface of the temporary storage table.

[0011] Further, the plate temporary storage platform is a movable plate temporary storage platform, the plate temporary storage platform includes a guide rail, a moving seat installed on the guide rail, and a temporary storage table arranged on the moving seat. The plate temporary storage platform is arranged above the incoming material station and the outgoing material station, and there are space gaps between the temporary storage table and the fork arm suction cup assembly above, the incoming material station and the outgoing material station below.

[0012] Further, the guide rail is arranged in parallel with the ground rail and both are straight tracks, and the temporary storage table moves back and forth between the incoming material station and the outgoing material station along the direction of the guide rail.

[0013] Further, the LDI automatic exposure system further includes a plate positioning component, and the plate positioning component is located at the side opening of the LDI exposure machine.

[0014] Further, the LDI automatic exposure system further includes an incoming material carrier arranged at the incoming material station and an outgoing material carrier arranged at the outgoing material station. The incoming material carrier includes a vehicle frame, wheels arranged below the vehicle frame, and a receiving plate arranged above the vehicle frame. The structure of the outgoing material carrier is exactly the same as that of the incoming material carrier, and a plastic separator is laid on the surface of the receiving plate of the incoming material carrier.

[0015] Further, a plurality of stoppers are arranged at the edge of the receiving plate.

[0016] Further, an AGV cart is configured near the incoming material station and the outgoing material station.

[0017] Advantages of the present utility model:

[0018] In this application, the LDI exposure machine is set to be enclosed, and at the same time, the plates enter and exit through the side opening, reducing the contact between the exposure machine and the external environment during the exposure process and ensuring the cleanliness of the exposure environment. Moreover, through the coordinated work of adding a multi-axis manipulator, a ground rail, an incoming material carrier, and an outgoing material carrier to achieve flexible automatic handling and side feeding exposure, manual feeding is avoided, and full-automatic and enclosed management are realized, further improving the cleanliness of the exposure environment. The problems in the prior art that it is difficult to ensure the cleanliness, temperature, and humidity during the feeding and exposure of ultra-large plates are solved. Description of the drawings

[0019] Figure 1 It is a top view of the overall structure of the LDI automatic exposure system in an embodiment of the present utility model;

[0020] Figure 2 It is a front view of the overall structure of the LDI automatic exposure system in an embodiment of the present utility model;

[0021] Figure 3 It is a schematic structural diagram of the fork arm suction cup assembly in an embodiment of the present utility model;

[0022] Figure 4 It is a schematic structural diagram of the incoming material carrier in an embodiment of the present utility model;

[0023] Figure 5 It is a schematic structural diagram of the plate temporary storage platform in an embodiment of the present utility model.

[0024] In the figure: 1. LDI exposure machine; 2. Incoming material station; 3. Outgoing material station; 4. Fork arm suction cup assembly; 5. Plate temporary storage platform; 6. Six-axis manipulator; 7. Plate positioning assembly; 21. Plastic separator; 22. Stopper; 23. Frame; 24. Wheel; 25. Receiving plate; 41. Fork bar; 42. Bellows suction cup; 51. Guide rail; 52. Temporary storage table; 53. Moving seat; 54. Strip-shaped groove. Specific embodiments

[0025] Next, the technical solutions of the present utility model will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0026] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0027] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0028] Embodiment 1

[0029] As Figure 1 and Figure 2 shown, the present utility model provides an LDI automatic exposure system, including:

[0030] An LDI exposure machine 1, where the LDI exposure machine 1 is a closed exposure machine with side openings for plate feeding and discharging. For horizontal plate feeding and discharging, only small notches need to be opened on the side of the LDI, and the internal space of the LDI is relatively sealed, making it easy to ensure environmental control.

[0031] A ground rail is arranged on one side of the side opening of the LDI exposure machine 1; a multi-axis robot 6 is arranged on the ground rail, and the multi-axis robot 6 is connected with a fork arm suction cup assembly 4, and the fork arm suction cup assembly 4 is used to adsorb the plate and move the plate into the side opening of the LDI exposure machine.

[0032] A material handling execution group is arranged on the same side of the LDI exposure machine 1 as the ground rail; the material handling execution group includes a feeding station 2 and a discharging station 3, and both the feeding station 2 and the discharging station 3 are located below the fork arm suction cup assembly 4.

[0033] In this application, a material handling execution group, a fork arm suction cup assembly, etc. located on different height planes are constructed near the closed LDI exposure machine with side openings for plate feeding and discharging to realize a loading and unloading system structure specifically adapted to the exposure process of the plate. Through the coordinated work of the multi-axis manipulator, the ground rail, the feeding carrier, and the discharging carrier, flexible automatic handling and side feeding exposure are realized. While ensuring the exposure cleanliness and temperature and humidity requirements, the work efficiency is improved, and the inconvenience and mistakes of manual operation are reduced.

[0034] A plate positioning component 7 is located at the side opening position of the LDI exposure machine 1, and the plate positioning component 7 can be a CCD camera.

[0035] As Figure 3As shown in the figure, the fork arm suction cup assembly 4 of the present application includes a fork arm member connected to a multi-axis robot 6 and a vacuum generator connected to one side of the fork arm member. The fork arm member has a plurality of parallel fork bars 41, and a plurality of bellows suction cups 42 are installed on each fork bar 41. Vacuum is generated by the vacuum generator, and the bellows suction cups can perform vacuum adsorption on the plate. In the present application, the fork arm member is set as the fork bar 41. Compared with the traditional integral plate suction cup structure, the weight of the fork bar is small, which is beneficial to the movement of the manipulator. At the same time, compared with the integral plate suction cup assembly, less materials are used and the cost is lower.

[0036] In addition, the multi-axis robot of the present application is a six-axis manipulator, and the fork arm member is connected to the six-axis manipulator 6. The fork arm member can rotate 180° or 360° under the drive of the six-axis manipulator 6, so as to drive the adsorbed plate to be turned over, realizing the automatic turning function of the plate, and further enabling double-sided exposure of the plate, expanding the application scenario of fully automated LDI.

[0037] Referring to Figure 1 and Figure 2 , the LDI automated exposure system further includes a plate temporary storage platform 5, and the plate temporary storage platform 5 is arranged below the fork arm suction cup assembly 4. Referring to Figure 5 , a plurality of strip-shaped grooves 54 adapted to the fork bars 41 are arranged on the surface of the temporary storage table 52. After the six-axis manipulator 6 adsorbs the plate and performs a 180° flip, the plate is then placed on the temporary storage table 53. At this time, the plate is flipped, and the fork bars 41 of the six-axis manipulator are also placed in the strip-shaped grooves 54. Then, the vacuum of the plate is released, the fork bars 41 are withdrawn from the strip-shaped grooves 54, moved above the plate and flipped, and the plate is re-adsorbed. Finally, the six-axis manipulator 6 moves through the ground rail and places the plate into the side opening of the exposure machine to complete the feeding after the plate is turned over. The present application uses the cooperation of the plate temporary storage platform and the fork arm member as a transfer and temporary storage place in the double-sided exposure process, which can ensure that the plate can be easily flipped without damaging the plate.

[0038] In addition, as Figure 5 shown, the plate temporary storage platform 5 is a movable plate temporary storage platform. The plate temporary storage platform 5 includes a guide rail 51, a moving seat 53 installed on the guide rail 51, and a temporary storage table 52 arranged on the moving seat. The plate temporary storage platform 5 is arranged above the incoming material station 2 and the outgoing material station 3. There are space gaps between the temporary storage table 52 and the fork arm suction cup assembly 4 above, the incoming material station 2 below, and the outgoing material station 3. Since the movable plate temporary storage platform does not occupy much space, it can save at least the floor area of one plate size. Compared with extra-large plates, it can save space.

[0039] Furthermore, as Figure 1As shown in the figure, the present application further includes a plate positioning component 7, which is located at the side opening of the LDI exposure machine 1. The plate positioning component 7 can be a CCD camera or an object induction sensor to determine whether the plate is placed in place. By setting the positioning component, the placement position of the plate can be positioned, avoiding the situation where the plate is exposed before reaching the predetermined position, resulting in incorrect exposure patterns and scrapped plates.

[0040] Further, the guide rail 51 is arranged parallel to the ground rail and both are straight tracks. The temporary storage table 52 moves back and forth between the incoming material station 2 and the outgoing material station 3 along the direction of the guide rail 51.

[0041] Further, referring to Figure 4 , the LDI automatic exposure system further includes an incoming material carrier arranged at the incoming material station 2 and an outgoing material carrier arranged at the outgoing material station 3. The incoming material carrier includes a vehicle frame 23, wheels 24 arranged below the vehicle frame 23, and a receiving plate 25 arranged above the vehicle frame 23. The structure of the outgoing material carrier is exactly the same as that of the incoming material carrier. A plastic separator paper 21 is laid on the surface of the receiving plate 25.

[0042] Further, a plurality of stoppers 22 are arranged at the edge of the receiving plate 25.

[0043] Further, AGV trolleys are configured near the incoming material station 2 and the outgoing material station 3.

[0044] The working principle of the present utility model:

[0045] First, the AGV trolley transports the incoming material carrier carrying the Invar plate to the loading station 2 (at this time, the A side of the plate is facing up and the B side is facing down); subsequently, the six-axis manipulator 6 controls the fork arm suction cup assembly 4 to above the plate, fully adsorbs the A side of the plate through the bellows suction cup 42, then withdraws from the receiving plate and lifts the plate, and positions it through the plate positioning component 7; then, the six-axis manipulator 6 controls the fork arm suction cup assembly 4 to carry the plate and move it into the side opening of the LDI exposure machine 1 for exposing the A side; after the exposure of the A side is completed, the temporary storage table 52 of the plate temporary storage platform 5 moves above the incoming material station 2. The six-axis manipulator 6 controls the fork arm suction cup assembly 4 to carry the plate to be flipped through the axis seat closest to the fork arm suction cup assembly 4, so that the B side is facing up, and places the plate on the temporary storage table 52. At this time, the fork bar 41 just fits into the strip-shaped groove 54; then, the fork arm suction cup assembly 4 stops adsorbing, the six-axis manipulator 6 controls the fork arm suction cup assembly 4 to withdraw, moves to a non-interfering space area for individual flipping, and then moves to the temporary storage table 52 to adsorb the B side of the plate, and then carries the plate to the LDI exposure machine 1 for exposing the B side; after the exposure of the B side is completed, the fork arm suction cup assembly 4 carries the plate to the outgoing material carrier at the outgoing material station 3, and finally when the outgoing material carrier is full, it is moved out by the AGV trolley.

[0046] Although the present utility model has been disclosed above with the preferred embodiments, it is not intended to limit the present utility model. Any person skilled in this technology can make various modifications and alterations without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model should be defined by the claims.

Claims

1. An LDI automated exposure system, characterized in that, Including: An LDI exposure machine, which is a closed exposure machine with side openings for plate feeding and discharging; A ground rail, arranged on one side of the side opening of the LDI exposure machine; a multi-axis robot is arranged on the ground rail, and the multi-axis robot is connected with a fork arm suction cup assembly, and the fork arm suction cup assembly is used to adsorb a plate and move the plate into the side opening of the LDI exposure machine; and A material handling execution group, arranged on the same side of the LDI exposure machine as the ground rail; the material handling execution group includes a feeding station and a discharging station, and both the feeding station and the discharging station are located below the fork arm suction cup assembly.

2. The LDI automated exposure system according to claim 1, characterized in that, The fork arm suction cup assembly includes a fork arm part connected with a multi-axis robot and a vacuum generator connected with one side of the fork arm part. The fork arm part has a plurality of parallel fork bars, and a plurality of bellows suction cups are installed on each fork bar.

3. The LDI automated exposure system according to claim 2, wherein, The multi-axis robot is a six-axis manipulator, the fork arm part is connected with the six-axis manipulator, and the fork arm part can rotate 180° or 360° under the drive of the six-axis manipulator.

4. The LDI automated exposure system according to claim 3, characterized in that, The LDI automatic exposure system further includes a plate temporary storage platform, which is arranged below the fork arm suction cup assembly, and a plurality of strip-shaped grooves adapted to the fork bars are arranged on the surface of the plate temporary storage platform.

5. An LDI automated exposure system according to claim 4, wherein, The plate temporary storage platform is a movable plate temporary storage platform, which includes a guide rail, a moving seat installed on the guide rail, and a temporary storage table arranged on the moving seat. The plate temporary storage platform is arranged above the feeding station and the discharging station, and there are space gaps between the temporary storage table and the fork arm suction cup assembly above, the feeding station and the discharging station below.

6. The LDI automated exposure system according to claim 5, wherein The guide rail is arranged parallel to the ground rail and both are straight tracks, and the temporary storage table moves back and forth between the feeding station and the discharging station along the direction of the guide rail.

7. An LDI automated exposure system according to any one of claims 1-6, characterized in that, The LDI automatic exposure system further includes a plate positioning assembly, which is located at the side opening of the LDI exposure machine.

8. An LDI automated exposure system according to claim 7, wherein The LDI automatic exposure system further includes a feeding carrier arranged at the feeding station and a discharging carrier arranged at the discharging station. The feeding carrier includes a vehicle frame, wheels arranged below the vehicle frame, and a receiving plate arranged above the vehicle frame. The discharging carrier has the same structure as the feeding carrier, and a plastic separator is laid on the surface of the receiving plate of the feeding carrier.

9. An LDI automated exposure system according to claim 8, characterized in that, A plurality of stoppers are arranged at the edge of the receiving plate.

10. An LDI automated exposure system according to claim 8 or 9, characterized in that, AGV cars are configured near the feeding station and the discharging station.

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