Vacuum transmission sealing valve

Abstract

The utility model discloses a vacuum transmission sealing valve which comprises a valve cover, a valve plate arranged in the valve cover and a valve body installed at the bottom of the valve cover, communicated transmission openings are formed in the two sides of the valve cover, a sealing shell is installed at the bottom of the valve body, and a jacking plate and a transmission assembly are arranged in the sealing shell. A driving mechanism is installed at the bottom of the sealing shell, the output end of the driving mechanism penetrates through the sealing shell to be connected with a jacking plate, a supporting rod is fixed in the transmission assembly in a penetrating mode, a spring is arranged between the supporting rod and the jacking plate, and the end, away from the spring, of the supporting rod penetrates through the valve body to be connected with the valve plate; the top of the transmission assembly and the jacking plate are slidably connected with the sealing shell, and the bottom of the transmission assembly is slidably connected with the side plate. According to the vacuum transmission sealing valve, the supporting rod, the spring, the corrugated pipe and the external driving mechanism are arranged, so that the structure of the vacuum transmission sealing valve is greatly simplified, and risks caused by failure of an elastic component or other parts are effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of the semiconductor industry, and particularly relates to a vacuum transmission sealing valve. Background Art

[0002] Vacuum valves are widely used in semiconductor coating equipment, optoelectronic industries and other cluster vacuum systems. Since they can be quickly opened and closed, have a relatively high service life and high airtightness, they play a key role in isolating and connecting each vacuum process chamber.

[0003] A vacuum valve refers to a vacuum system component used to separate and connect each vacuum chamber in a high-vacuum and high-clean environment. It belongs to semiconductor production equipment and is an indispensable key component in the semiconductor manufacturing process. The patent document with the Chinese invention patent application number CN202410188745.9 discloses a sealing device and a vacuum device. In this patent, a built-in driving mechanism drives multiple groups of elastic components, and the multiple groups of elastic components drive the corresponding support rods, so that the sealing plate connected to the support rods seals the opening. The setting of the multiple groups of elastic components and the support rods not only makes the overall structure complex, the assembly cumbersome and the production cost relatively high, but also increases the risk brought by the failure of the elastic components or other components, with a short service life. At the same time, the built-in driving mechanism is difficult to disassemble and assemble, and the maintenance cost is relatively high. Summary of the Utility Model

[0004] Based on this, the purpose of the utility model is to provide a vacuum transmission sealing valve to solve the technical problems of complex overall structure, cumbersome assembly, relatively high production cost and difficult disassembly and assembly.

[0005] To achieve the above purpose, the utility model provides the following technical scheme:

[0006] A vacuum transmission sealing valve includes a valve cover, a valve plate arranged inside the valve cover, and a valve body installed at the bottom of the valve cover. It is characterized in that: communication transfer ports are arranged on both sides of the valve cover, the valve plate is used to seal one side of the transfer port, a sealing housing is installed at the bottom of the valve body, a lifting plate and a transmission assembly are arranged inside the sealing housing, a driving mechanism is installed at the bottom of the sealing housing, the output end of the driving mechanism passes through the sealing housing and is connected to the lifting plate, a support rod is fixedly penetrated inside the transmission assembly, a spring is arranged between the support rod and the lifting plate, one end of the support rod away from the spring passes through the valve body and is connected to the valve plate, side plates are arranged at both ends of the lifting plate, the top of the transmission assembly and the lifting plate are slidably connected to the sealing housing, and the bottom of the transmission assembly is slidably connected to the side plates.

[0007] Further, the transmission assembly includes a movable mounting base, the top of the movable mounting base protrudes from the bottom of the movable mounting base, and the support rod is fixedly penetrated in the movable mounting base.

[0008] Further, at both ends of the top of the movable mounting base, first guide wheels are installed. A first guide groove matching with the first guide wheels is formed on the inner side of the sealing housing. At both ends of the bottom of the movable mounting base, second guide wheels are installed. A second guide groove matching with the second guide wheels is formed on the inner side of the side plate.

[0009] Further, the second guide groove is inclined towards the valve plate side in the height direction.

[0010] Further, at both ends of the lifting plate, third guide wheels are installed. A third guide groove matching with the third guide wheels is formed on the inner side of the sealing housing. The third guide groove and the first guide groove are vertically arranged, and the third guide groove is located below the first guide groove.

[0011] Further, the length of the third guide groove is greater than the length of the first guide groove.

[0012] Further, at both ends of the top of the movable mounting base, rollers are also installed. The rollers are in contact with the inner wall of the sealing housing. The axial direction of the first guide wheel is perpendicular to that of the rollers. The axial direction of the first guide wheel is parallel to those of the second guide wheel and the third guide wheel.

[0013] Further, a spring base is further included. The output end of the driving mechanism passes through the sealing housing and is connected to the spring base. The spring base is connected to the lifting plate. One end of the spring is connected to the spring base, and the other end is connected to the end of the support rod far from the valve plate.

[0014] Further, a corrugated pipe is sleeved outside the support rod. One end of the corrugated pipe is hermetically connected to the valve body, and the other end of the corrugated pipe is hermetically connected to the movable mounting base.

[0015] In summary, the main beneficial effects of the present utility model are as follows:

[0016] By arranging a single set of support rod, spring, corrugated pipe and an external driving mechanism, the present utility model not only simplifies the overall structure of the vacuum transmission sealing valve, reduces the production cost, but also effectively reduces the risk brought by the failure of elastic components or other components, increases the service life, and at the same time reduces the maintenance cost of the driving mechanism;

[0017] By installing rollers at both ends of the top of the movable mounting base and making the rollers contact the inner wall of the sealing housing, the risk of the support rod shaking caused by the spring can be effectively reduced, and the running stability of the support rod can be effectively improved. Brief Description of the Drawings

[0018] Figure 1 Schematic diagram of the overall structure provided by the embodiment of the present invention;

[0019] Figure 2 Schematic diagram of a part of the structure provided by the embodiment of the present invention;

[0020] Figure 3 Schematic diagram of another part of the structure provided by the embodiment of the present invention;

[0021] Figure 4 Overall cross-sectional view provided by the embodiment of the present invention;

[0022] Figure 5 Schematic diagram of the structure when the valve plate is in the initial state provided by the embodiment of the present invention;

[0023] Figure 6 Schematic diagram of the structure when the valve plate is in the moving process provided by the embodiment of the present invention;

[0024] Figure 7 Schematic diagram of the structure when the valve plate is in the fully closed state provided by the embodiment of the present invention.

[0025] In the figure: 1, valve cover; 2, valve plate; 3, valve body; 4, bellows; 5, transfer port; 6, transmission component; 7, spring; 8, lifting plate; 9, side plate; 10, sealing housing; 11, drive mechanism; 12, roller; 13, first guide wheel; 14, movable mounting base; 15, second guide wheel; 16, first guide groove; 17, second guide groove; 18, third guide wheel; 19, spring base; 20, third guide groove; 21, support rod. Detailed Description of the Embodiment

[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0027] Next, the embodiments of the present invention will be described according to the overall structure of the present invention.

[0028] As Figures 1 to 7As shown in the figure, a vacuum transmission sealing valve includes a valve cover 1, a valve plate 2, and a valve body 3. The valve plate 2 is disposed inside the valve cover 1, and the valve body 3 is fixedly installed at the bottom of the valve cover 1. Communicating transfer ports 5 are also provided on both sides of the valve cover 1, and the valve plate 2 is used to seal the transfer port 5 on one side of the valve cover 1. Specifically, a sealing housing 10 is fixedly installed at the bottom of the valve body 3. Inside the sealing housing 10, there are a lifting plate 8, a transmission assembly 6, a bellows 4, a support rod 21, and a spring 7. A drive mechanism 11 is fixedly installed on the outer side of the bottom of the sealing housing 10. The output end of the drive mechanism 11 passes through the sealing housing 10 and is connected to the lifting plate 8. The support rod 21 is fixedly installed through the transmission assembly 6. The spring 7 is disposed between the support rod 21 and the lifting plate 8 and is respectively connected to the support rod 21 and the lifting plate 8. The end of the support rod 21 away from the spring 7 passes through the valve body 3 and is connected to the valve plate 2. Side plates 9 are respectively fixedly installed at both ends of the lifting plate 8. The side plates 9 are located inside the sealing housing 10. The top of the transmission assembly 6 and the lifting plate 8 are slidably connected to the sealing housing 10, and the bottom of the transmission assembly 6 is slidably connected to the side plates 9. The bellows 4 is sleeved outside the support rod 21. One end of the bellows 4 is hermetically connected to the valve body 3, and the other end of the bellows 4 is hermetically connected to the transmission assembly 6. The vacuum transmission sealing valve provided by the present utility model, through the arrangement of a single set of support rod 21, spring 7, bellows 4, and an external drive mechanism 11, not only simplifies the overall structure of the vacuum transmission sealing valve, reduces the production cost, but also effectively reduces the risk brought by the failure of elastic components or other components, increases the service life, and at the same time reduces the maintenance cost of the drive mechanism 11.

[0029] As Figure 2 and Figure 4 shown in the figure, the transmission assembly 6 includes a movable mounting seat 14. The top ends of both sides of the movable mounting seat 14 protrude from the bottom ends of the movable mounting seat 14. Among them, the support rod 21 is fixedly installed through the movable mounting seat 14, and the other end of the bellows 4 is hermetically connected to the movable mounting seat 14. First guide wheels 13 are installed at the top ends of both sides of the movable mounting seat 14. First guide grooves 16 that cooperate with the first guide wheels 13 are provided at both ends of the inner side of the sealing housing 10. Second guide wheels 15 are installed at the bottom ends of both sides of the movable mounting seat 14. Second guide grooves 17 that cooperate with the second guide wheels 15 are respectively provided on the inner sides of the side plates provided at both ends of the lifting plate 8. It should be noted that the second guide grooves 17 are inclined in the height direction, and the inclination angle is towards the valve plate 2. When the valve plate 2 is in the fully open state, the second guide wheels 15 are located at the top of the second guide grooves 17; when the valve plate 2 is in the fully closed state, the second guide wheels 15 are located at the bottom of the second guide grooves 17.

[0030] As Figure 3 and Figure 4As shown, third guide wheels 18 are installed at both ends of the lifting plate 8, and third guide grooves 20 that cooperate with the third guide wheels 13 are provided at both inner ends of the sealing housing 10. It should be noted that both the third guide grooves 20 and the first guide grooves 16 are vertically arranged, the third guide grooves 20 are located below the first guide grooves 16, and the length of the third guide grooves 20 is greater than the length of the first guide grooves 16.

[0031] As Figure 1 and Figure 2 shown, rollers 12 are also installed at both top ends of the movable mounting seat 14, and the rollers 12 are in contact with the inner wall of the sealing housing 10. It should be noted that the axial direction of the first guide wheels 13 is perpendicular to that of the rollers 12, and the axial direction of the first guide wheels 13 is parallel to that of the second guide wheels 15 and the third guide wheels 18. By installing the rollers 12 at both top ends of the movable mounting seat 14 and making the rollers 12 in contact with the inner wall of the sealing housing 10, the risk of the support rod 21 shaking caused by the spring 7 can be effectively reduced, and the running stability of the support rod 21 is effectively improved.

[0032] In an embodiment, the vacuum transmission sealing valve provided by the present utility model further includes a spring base 19. As Figure 1 、 Figure 3 and Figure 4 shown, the output end of the driving mechanism 11 passes through the sealing housing 10 and is fixedly connected to the spring base 19, the spring base 19 is fixedly connected to the lifting plate 8, one end of the spring 7 is connected to the spring base 19, and the other end is connected to the support rod 21 away from the valve plate 2.

[0033] In the present utility model, the driving mechanism 11 can be selected from driving devices with lifting functions such as cylinders and electric cylinders.

[0034] In the initial state, the first guide wheel 13 is located at the bottom of the first guide groove 16, the second guide wheel 15 is located at the top of the second guide groove 17, and the third guide wheel 18 is located at the bottom of the third guide groove 20. When the vacuum transmission sealing valve is closed (i.e., the valve plate 2 moves from the initial state to the fully closed state), the output end of the driving mechanism 11 extends, and the output end of the driving mechanism 11 drives the spring base 19 and the lifting plate 8 to move upward synchronously. The spring base 19 drives the support rod 21 and the moving mounting seat 14 to move upward synchronously through the spring 7. During this process, the first guide wheel 13 slides upward in the first guide groove 16, the second guide wheel 15 always remains at the top of the second guide groove 17 without sliding, and the third guide wheel 18 slides upward in the third guide groove 20, thereby compressing the bellows 4 by the moving mounting seat 14 and driving the valve plate 2 to move upward. When the first guide wheel 13 abuts against the top of the first guide groove 16, the valve plate 2 is in a relative state with the transfer port 5 to be tightly sealed on one side of the valve cover 1 (i.e., the valve plate 2 approaches along the vertical direction and moves away from the transfer port 5 to be tightly sealed on one side of the valve cover 1 along the horizontal direction). At this time, the first guide wheel 13 limits the overall movement of the moving mounting seat 14 to stop the upward movement of the moving mounting seat 14. Since the length of the first guide groove 16 is less than the length of the third guide groove 20, when the first guide wheel 13 is located at the top of the first guide groove 16, the output end of the driving mechanism 11 drives the spring base 19 and the lifting plate 8 to continue moving upward, squeezing the spring 7. During this process, the third guide wheel 18 continues to slide upward, and the second guide wheel 15 slides relative to the side plate 9 towards the bottom of the second guide groove 17. When the third guide wheel 18 abuts against the top of the third guide groove 20, the second guide wheel 15 abuts against the bottom of the second guide groove 17. At this time, the valve plate 2 tightly seals the transfer port 5 to be tightly sealed on one side of the valve cover 1, that is, the valve plate 2 is in the fully closed state.When the vacuum transmission sealing valve is opened (i.e., the valve plate 2 moves from the fully closed state to the initial state), the output end of the driving mechanism 11 contracts, and the output end of the driving mechanism 11 drives the spring base 19 and the lifting plate 8 to move downward synchronously. During this process, the support rod 21 and the movable mounting seat 14 do not move, the spring 7 extends, the first guide wheel 13 is always located at the top of the first guide groove 16, the second guide wheel 15 slides relative to the side plate 9 towards the top of the second guide groove 17, and the third guide wheel 18 slides towards the bottom of the third guide groove 20. The valve plate 2 moves horizontally away from the transfer port 5 that it presses and seals. When the second guide wheel 15 slides relative to the side plate 9 to the top of the second guide groove 17, the horizontal movement of the valve plate 2 away from the transfer port 5 that it presses and seals stops, and the valve plate 2 is in a relative state with the transfer port 5 that it presses and seals (i.e., the valve plate 2 moves closer in the vertical direction and away from the transfer port 5 that it presses and seals in the horizontal direction). At this time, the output end of the driving mechanism 11 drives the spring base 19 and the lifting plate 8 to continue moving downward. During this process, the support rod 21 and the movable mounting seat 14 also move downward synchronously with the spring 7. The first guide wheel 13 slides downward in the first guide groove 16, the second guide wheel 15 is always located at the top of the second guide groove 17 and does not slide, the third guide wheel 18 slides downward in the third guide groove 20, the corrugated pipe 4 unfolds, and the valve plate 2 also moves downward synchronously. When the first guide wheel 13 abuts against the bottom of the first guide groove 16 and the third guide wheel 18 abuts against the bottom of the third guide groove 20, the valve plate 2 moves to the initial state.

[0035] Although the embodiments of the present invention have been shown and described, the specific embodiments are only explanations of the present invention and are not limitations thereof. The specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. After reading this specification, those skilled in the art can make modifications, substitutions, and variations that do not contribute creatively to the embodiments according to their needs, but as long as they are within the scope of the claims of the present invention, they are protected by the patent law.

Claims

1. A vacuum transmission sealing valve, comprising a valve cover (1), a valve plate (2) disposed inside the valve cover (1), and a valve body (3) installed at the bottom of the valve cover (1), characterized in that: On both sides of the valve cover (1), there are communicating transfer ports (5). The valve plate (2) is used to seal the transfer port (5) on one side. A sealing housing (10) is installed at the bottom of the valve body (3). Inside the sealing housing (10), there is a lifting plate (8) and a transmission component (6). A driving mechanism (11) is installed at the bottom of the sealing housing (10). The output end of the driving mechanism (11) passes through the sealing housing (10) and is connected to the lifting plate (8). A support rod (21) is fixedly penetrated inside the transmission component (6). A spring (7) is arranged between the support rod (21) and the lifting plate (8). One end of the support rod (21) away from the spring (7) passes through the valve body (3) and is connected to the valve plate (2). Side plates (9) are arranged at both ends of the lifting plate (8). The top of the transmission component (6) and the lifting plate (8) are slidably connected to the sealing housing (10), and the bottom of the transmission component (6) is slidably connected to the side plates (9).

2. The vacuum transfer sealing valve according to claim 1, wherein: The transmission component (6) includes a movable mounting base (14). The top of the movable mounting base (14) protrudes from the bottom of the movable mounting base (14). The support rod (21) is fixedly penetrated inside the movable mounting base (14).

3. The vacuum transfer sealing valve according to claim 2, characterized in that: At both ends of the top of the movable mounting base (14), first guide wheels (13) are installed. First guide grooves (16) matching with the first guide wheels (13) are formed on the inner side of the sealing housing (10). At both ends of the bottom of the movable mounting base (14), second guide wheels (15) are installed. Second guide grooves (17) matching with the second guide wheels (15) are formed on the inner side of the side plate.

4. The vacuum transmission sealing valve according to claim 3, characterized in that: The second guide groove (17) is inclined towards the valve plate (2) side in the height direction.

5. The vacuum transfer seal valve according to claim 3, characterized in that: Third guide wheels (18) are installed at both ends of the lifting plate (8). Third guide grooves (20) matching with the third guide wheels (18) are formed on the inner side of the sealing housing (10). The third guide grooves (20) and the first guide grooves (16) are vertically arranged, and the third guide grooves (20) are located below the first guide grooves (16).

6. The vacuum transfer sealing valve according to claim 5, characterized in that: The length of the third guide groove (20) is greater than the length of the first guide groove (16).

7. The vacuum transfer sealing valve according to claim 5, characterized in that: At both ends of the top of the movable mounting base (14), rollers (12) are also installed. The rollers (12) are in contact with the inner wall of the sealing housing (10). The axial direction of the first guide wheels (13) is perpendicular to that of the rollers (12). The axial directions of the first guide wheels (13), the second guide wheels (15), and the third guide wheels (18) are parallel.

8. The vacuum transmission sealing valve according to claim 1, characterized in that: It further includes a spring base (19). The output end of the driving mechanism (11) passes through the sealing housing (10) and is connected to the spring base (19). The spring base (19) is connected to the lifting plate (8). One end of the spring (7) is connected to the spring base (19), and the other end is connected to one end of the support rod (21) away from the valve plate (2).

9. The vacuum transfer sealing valve according to claim 2, characterized in that: A corrugated pipe (4) is sleeved outside the support rod (21). One end of the corrugated pipe (4) is hermetically connected to the valve body (3), and the other end of the corrugated pipe (4) is hermetically connected to the movable mounting seat (14).

Images