Bottle opening sealing piece, liquid taking device and semiconductor liquid changing equipment

Abstract

The utility model discloses a bottle opening sealing piece, a liquid taking device and semiconductor liquid changing equipment, and relates to the technical field of semiconductor production, and the bottle opening sealing piece comprises a sealing piece body and at least two sealing assemblies; the sealing element body is provided with a plunger part; the at least two sealing assemblies are sequentially fixed to the plunger part at intervals from bottom to top. Each sealing assembly comprises at least one sealing ring; the sealing ring is annularly fixed on the peripheral surface of the plunger part; the outer diameter of the sealing ring in the upper sealing assembly is larger than that of the sealing ring in the adjacent lower sealing assembly. The bottle opening sealing piece can meet the sealing requirements of bottle openings of various sizes, the use flexibility is high, the cost is low, and the efficiency of the production process is guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor production, and particularly to a bottle mouth seal, a liquid extractor, and a semiconductor liquid changing device. Background Art

[0002] In the field of semiconductor manufacturing, the wet process is a key step, which involves the use of various chemical reagents, including but not limited to cleaning agents, etching agents, deionized water, etc. During the use of these liquid reagents, their effective components will be consumed due to chemical reactions, resulting in a decrease in the reagent concentration, thereby affecting their cleaning and etching effects, and ultimately affecting the manufacturing quality of the wafers. Therefore, in order to ensure the stability of the manufacturing process and the quality of the products, it is necessary to regularly replace the consumed reagents.

[0003] Traditional liquid changing methods usually require manual intervention, which is not only time-consuming and laborious, but also increases the production cost. With the development of automation technology, automatic liquid changing systems have emerged. For example, a reagent placement component, a wet bench, and an automatic liquid changing system disclosed in Chinese Patent with publication number CN222883508U disconnect the connection between the bottle cap with a liquid extraction tube and the reagent bottle to be replaced through a manipulator, and then transfer it to a new reagent bottle for connection to complete the liquid change. However, this bottle cap design is only applicable to bottle mouths of specific sizes. When the types of reagent bottles are changed (i.e., the bottle mouth sizes are changed), the corresponding matching bottle caps must be replaced, which limits the flexibility of use. At the same time, each type of bottle mouth requires a customized exclusive bottle cap, thus increasing the cost. In addition, the process of replacing the bottle cap also requires stopping the operation of the equipment, which further affects the efficiency of the production process.

[0004] Therefore, there is an urgent need to provide a new design solution to solve the above problems. Summary of the Utility Model

[0005] In view of this, the purpose of the present application is to provide a bottle mouth seal, a liquid extractor, and a semiconductor liquid changing device, which can adapt to the sealing requirements of multiple sizes of bottle mouths, have high flexibility in use, low cost, and ensure the efficiency of the production process.

[0006] To achieve the above technical purpose, the present application provides a bottle mouth seal, including a seal body and at least two seal components;

[0007] The seal body is provided with a plunger part;

[0008] At least two of the seal components are fixedly spaced from bottom to top on the plunger part;

[0009] Each of the seal components includes at least one sealing ring;

[0010] The sealing ring is annularly fixed on the outer peripheral surface of the plunger part;

[0011] The outer diameter of the sealing ring in the upper sealing assembly is larger than that of the sealing ring in the adjacent lower sealing assembly.

[0012] Furthermore, the plunger part is cylindrical.

[0013] Furthermore, the plunger part is frustum-shaped.

[0014] Furthermore, the plunger part includes at least two plunger segments connected in sequence from bottom to top;

[0015] The outer diameter of the upper plunger segment is larger than that of the adjacent lower plunger segment;

[0016] At least two of the sealing assemblies are fixedly mounted on the plunger segments one by one from bottom to top.

[0017] Furthermore, each of the sealing assemblies includes at least two sealing rings.

[0018] Furthermore, a clamping groove is annularly provided on the outer peripheral surface of the plunger part;

[0019] The sealing ring is clamped in the clamping groove;

[0020] The thickness of the sealing ring is greater than the depth of the clamping groove.

[0021] Furthermore, the sealing ring is made of polytetrafluoroethylene.

[0022] Furthermore, a pressure detector is provided between the sealing ring and the plunger part.

[0023] This application also discloses a liquid extractor, including a liquid extraction tube, an exhaust pipe, and the bottle mouth seal;

[0024] A liquid extraction channel and an exhaust channel penetrating through itself are provided on the bottle mouth seal;

[0025] The liquid extraction tube communicates with the liquid extraction channel or penetrates through the liquid extraction channel;

[0026] The exhaust pipe communicates with the exhaust channel or penetrates through the exhaust channel.

[0027] This application also discloses a semiconductor liquid changing device, including a manipulator and the liquid extractor;

[0028] The manipulator is used to transfer the liquid extractor among different liquid medicine bottles.

[0029] It can be seen from the above technical solutions that the bottle mouth seal designed in this application has the following beneficial effects:

[0030] 1. The sealing element body is designed with a plunger part to seal the bottle mouth in a plugging manner, which is simpler than the sealing method of a screw cap and is easier to achieve automatic assembly and disassembly.

[0031] 2. At least two sealing components are designed and are arranged at intervals from bottom to top on the plunger part. At the same time, the sealing ring sizes of different sealing components are different and increase sequentially from bottom to top, so that one sealing component can correspond to the sealing of a bottle mouth of one size, which can thus adapt to the sealing of at least two sizes of bottle mouths, with high flexibility in use, no need for frequent replacement, and ensuring the efficiency of the production process.

[0032] 3. According to actual usage needs, the number of sealing components can be increased to meet the sealing requirements of more sizes of bottle mouths; moreover, by changing the outer diameter of the sealing ring in the sealing component (replacing sealing rings of different thicknesses), the sealing adaptation of more sizes of bottle mouths can be achieved, with lower manufacturing costs. Description of the Drawings

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0034] Figure 1 Is a perspective view of a bottle mouth sealing element provided in the present application;

[0035] Figure 2 Is a cross-sectional view of a bottle mouth sealing element provided in the present application;

[0036] Figure 3 Is a partial structural schematic diagram when the sealing ring of a bottle mouth sealing element provided in the present application is detachably connected to the plunger part;

[0037] Figure 4 Is a perspective view of a liquid extractor provided in the present application;

[0038] In the figure: 1. Sealing element body; 11. Plunger part; 111. Plunger section; 12. Column head part; 13. Stop flange; 14. Liquid extraction channel; 15. Exhaust channel; 16. Card slot; 2. Sealing component; 21. Sealing ring; 3. Liquid extraction tube; 31. Immersion tube; 32. Connector tube; 4. Exhaust pipe. Detailed Embodiments

[0039] The technical solutions of the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the protection scope of the embodiments of the present application.

[0040] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of the present application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and should not be construed as indicating or implying relative importance.

[0041] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0042] The embodiments of the present application disclose a bottle mouth seal, a liquid dispenser, and a semiconductor liquid changing device.

[0043] Please refer to Figure 1 , an embodiment of a bottle mouth seal provided in the specific implementation manner of the present application includes:

[0044] A seal body 1 and at least two seal components 2.

[0045] The seal body 1 is provided with a plunger portion 11. The overall structure of the seal body 1 can be designed to vary according to actual needs. The seal body 1 can be designed to include a column head portion 12 and a plunger portion 11. The column head portion 12 and the plunger portion 11 are integrally connected, and a stop flange 13 is provided at the bottom of the outer peripheral surface of the column head portion 12. The stop flange 13 can contact the top of the bottle mouth of the liquid medicine bottle, playing a role of stop and limit, and avoiding the entire seal body 1 from being inserted into the liquid medicine bottle. The stop flange 13 can be annular, without limitation.

[0046] At least two sealing components 2 are fixedly spaced from bottom to top in sequence on the plunger portion 11; the number of the sealing components 2 can be variably designed according to the range of bottle mouth sizes adapted to actual needs. For example, as shown in the attached drawings of this application Figure 1 as shown, four sealing components 2 are designed; at the same time, the spacing distance can also be variably designed according to actual needs without limitation.

[0047] Each sealing component 2 includes at least one sealing ring 21, and the sealing ring 21 is annularly fixed on the outer peripheral surface of the plunger portion 11.

[0048] The outer diameter of the sealing ring 21 in the sealing component 2 located above is greater than the outer diameter of the sealing ring 21 in the adjacent sealing component 2 located below. It should be noted that the outer diameters of the sealing rings 21 in the same sealing component 2 are the same, but the outer diameters of the sealing rings 21 in different sealing components 2 are different and are designed to gradually increase from bottom to top. Thus, the sealing component 2 located below can adapt to the sealing of a relatively small-sized bottle mouth, while the sealing component 2 located above can adapt to the sealing of a relatively large-sized bottle mouth. The difference in the outer diameters between the sealing rings 21 of adjacent sealing components 2 can be variably designed according to actual needs without limitation.

[0049] The bottle mouth seal designed in this application has the following beneficial effects:

[0050] 1. By adopting the plugging method, the sealing of the bottle mouth is effectively achieved. Compared with the traditional screw cap sealing method, this sealing method not only has a simpler structure but also has significant advantages in automatic installation and disassembly, greatly improving the operation convenience and efficiency.

[0051] 2. At least two sealing components 2 are additionally designed, and these sealing components 2 are carefully spaced from bottom to top in sequence on the plunger portion 11. Different sealing components 2 are equipped with sealing rings 21 of different outer diameter sizes, and the sizes are designed to increase in sequence from the lowermost sealing component 2 to the uppermost sealing component 2. This design enables each sealing component 2 to seal a specific-sized bottle mouth, so that the seal can flexibly adapt to at least two different-sized bottle mouths. This design avoids the need to frequently replace the sealing components 2, ensures the continuity and efficiency of the production process, and reduces the maintenance cost at the same time.

[0052] 3. In this design of this application, the number of sealing components 2 can be increased according to needs, thereby further expanding the range of bottle mouth sizes that the seal can adapt to. In addition, by replacing the sealing rings 21 of different thicknesses, the sealing adaptation to more-sized bottle mouths can be easily achieved. This design not only improves the versatility of the seal but also simplifies the manufacturing process, thus reducing the manufacturing cost while ensuring the high performance and reliability of the seal.

[0053] The above is the first embodiment of a bottle mouth seal provided by the embodiment of the present application. The following is the second embodiment of a bottle mouth seal provided by the embodiment of the present application. For details, please refer to Figures 1 to 3 .

[0054] Based on the solution of the above first embodiment:

[0055] Further, the plunger portion 11 can be designed in a cylindrical shape. At this time, the inner diameters of the sealing rings 21 of different sealing assemblies 2 are the same, and different outer diameters can be achieved by different thicknesses.

[0056] Further, the plunger portion 11 can also be designed in a frustum shape. At this time, the inner diameters of the sealing rings 21 of different sealing assemblies 2 are different, and different outer diameters can be achieved by the same thickness.

[0057] Further, as Figure 1 and Figure 2 shown, the plunger portion 11 can also be designed to include at least two plunger segments 111 connected in sequence from bottom to top, that is, composed of a plurality of plunger segments 111 integrally connected.

[0058] The outer diameter of the upper plunger segment 111 is larger than the outer diameter of the adjacent lower plunger segment 111; it can be understood that the outer diameters between different plunger segments 111 are different, presenting a stepped arrangement as a whole.

[0059] At least two sealing assemblies 2 are fixedly arranged on the plunger segments 111 one by one from bottom to top, that is, one sealing assembly 2 is designed on each plunger segment 111.

[0060] The plunger segment 111 can be a cylindrical segment or a frustum segment, and there is no specific limitation.

[0061] Through the design of multiple plunger segments 111, a stepped surface can be formed between adjacent plunger segments 111, and the formed stepped surface can be used to abut against the top of the bottle mouth, thereby improving the sealing performance.

[0062] Further, as Figures 1 to 3 shown, in order to increase the contact area and thus improve the sealing effect, each sealing assembly 2 includes at least two sealing rings 21. The number of the sealing rings 21 can be variably designed according to actual needs, or a sealing ring 21 with a wide outer circumferential surface can be directly designed, without limitation.

[0063] Further, as Figure 3 shown, in order to facilitate the installation and removal of the sealing ring 21, a clamping groove 16 is annularly arranged on the outer circumferential surface of the plunger portion 11, and the sealing ring 21 is detachably clamped in the clamping groove 16; the thickness of the sealing ring 21 is greater than the depth of the clamping groove 16 to ensure that the sealing ring 21 protrudes from the clamping groove 16 and can play a role in extrusion sealing.

[0064] Of course, as Figure 2As shown, the sealing ring 21 can also be integrally connected to the plunger portion 11 or directly integrally formed, without specific limitation.

[0065] Furthermore, the sealing ring 21 is made of polytetrafluoroethylene. The polytetrafluoroethylene material has good corrosion resistance, high temperature resistance and sealing performance, which can effectively ensure the reliability and durability of the seal. In addition, the polytetrafluoroethylene material also has good elasticity and wear resistance, and can adapt to the shapes and sizes of different bottle mouths, thus ensuring the sealing effect.

[0066] Furthermore, a pressure detector (not shown in the figure) is provided between the sealing ring 21 and the plunger portion 11. Specifically, a piezoresistive thin film or a piezoelectric sensor (such as a PVDF piezoelectric thin film) can be embedded between the sealing ring 21 and the sealing surface. When the thin film is pressed, the resistance or charge changes, and is converted into a contact pressure value through a signal conditioning circuit.

[0067] Through this pressure detector, the sealing pressure between the sealing ring 21 and the bottle mouth can be monitored in real time to ensure that the sealing effect meets the preset requirements. When the sealing pressure is insufficient, the sealing component 2 with a larger-sized sealing ring 21 can be inserted continuously for sealing, or the sealing component 2 can be adjusted or replaced in time, so as to avoid problems such as liquid medicine leakage caused by poor sealing.

[0068] As Figure 1 and Figure 4 shown, the present application also discloses a liquid dispenser, which includes a liquid extraction tube 3, an exhaust tube 4 and a bottle mouth seal.

[0069] The bottle mouth seal is provided with a liquid extraction channel 14 and an exhaust channel 15 that penetrate through itself.

[0070] The liquid extraction tube 3 communicates with the liquid extraction channel 14 or penetrates through the liquid extraction channel 14. It can be understood that taking the design of communicating with the liquid extraction channel 14 as an example, the liquid extraction tube 3 can be divided into two parts (the immersion tube 31 and the joint tube 32). The immersion tube 31 is directly a tube structure, which connects the inlet of the liquid extraction channel 14 (located at the bottom of the plunger portion 11) and is used to extend into the liquid medicine bottle to contact the liquid medicine. The joint tube 32 is a tube structure connected with a joint, which connects the outlet of the liquid extraction channel 14 (located at the top of the seal body 1) and is used to connect a liquid pumping power device such as a liquid suction pump. Taking the design of penetrating through the liquid extraction channel 14 as an example, at this time, the whole liquid extraction tube 3 passes through the liquid extraction channel 14, one end extends into the liquid medicine bottle through the inlet of the liquid extraction channel 14, and the other end extends out of the outlet of the liquid extraction channel 14 and is used to connect a liquid pumping power device such as a liquid suction pump.

[0071] The exhaust pipe 4 communicates with the exhaust passage 15 or penetrates through the exhaust passage 15. Similarly, it can be understood that, taking the design of communicating with the exhaust passage 15 as an example, the exhaust pipe 4 can be a pipe body structure with a joint, and it can be connected to the outlet of the exhaust passage 15 (located at the top of the seal body 1). Taking the design of penetrating through the exhaust passage 15 as an example, at this time, the entire exhaust pipe 4 passes through the exhaust passage 15, one end extends out of the inlet of the exhaust passage 15 (located at the bottom of the plunger portion 11) but does not contact the solution in the medicine bottle, and the other end extends out of the outlet of the exhaust passage 15.

[0072] The present application also discloses a semiconductor liquid changing device, including a manipulator and a liquid extractor. The manipulator is used to transfer the liquid extractor among different medicine bottles. The specific liquid changing process is as follows: The manipulator grabs the seal body 1 and pulls it out from the bottle mouth position, then moves to the bottle mouth of a new medicine bottle and inserts it.

[0073] The above has introduced in detail a bottle mouth seal, a liquid extractor, and a semiconductor liquid changing device provided by the present application. For those of ordinary skill in the art, according to the idea of the embodiments of the present application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A bottle mouth seal, characterized in that, It includes a seal body (1) and at least two seal assemblies (2); The seal body (1) is provided with a plunger portion (11); At least two of the seal assemblies (2) are fixedly spaced from bottom to top on the plunger portion (11); Each of the seal assemblies (2) includes at least one sealing ring (21); The sealing ring (21) is annularly fixed on the outer peripheral surface of the plunger portion (11); The outer diameter of the sealing ring (21) in the upper seal assembly (2) is larger than the outer diameter of the sealing ring (21) in the adjacent lower seal assembly (2).

2. The bottle mouth seal according to claim 1, characterized in that, The plunger portion (11) is cylindrical.

3. The bottle mouth seal according to claim 1, characterized in that, The plunger portion (11) is frustum-shaped.

4. The bottle mouth seal according to claim 1, characterized in that, The plunger portion (11) includes at least two plunger segments (111) connected in sequence from bottom to top; The outer diameter of the upper plunger segment (111) is larger than the outer diameter of the adjacent lower plunger segment (111); At least two of the seal assemblies (2) are fixedly and correspondingly arranged on the plunger segments (111) from bottom to top.

5. The bottle mouth seal according to claim 1, characterized in that, Each of the seal assemblies (2) includes at least two sealing rings (21).

6. The bottle mouth seal according to claim 1, characterized in that, A clamping groove (16) is annularly arranged on the outer peripheral surface of the plunger portion (11); The sealing ring (21) is clamped in the clamping groove (16); The thickness of the sealing ring (21) is greater than the depth of the clamping groove (16).

7. The bottle mouth seal according to claim 1, characterized in that, The sealing ring (21) is made of polytetrafluoroethylene.

8. The bottle mouth seal according to claim 1, characterized in that, A pressure detector is arranged between the sealing ring (21) and the plunger portion (11).

9. Pipettor, characterized in that, It includes a liquid extraction tube (3), an exhaust pipe (4) and a bottle mouth seal as described in any one of claims 1 to 8; The bottle mouth seal is provided with a liquid extraction channel (14) and an exhaust channel (15) penetrating through itself; The liquid extraction tube (3) communicates with the liquid extraction channel (14) or penetrates through the liquid extraction channel (14); The exhaust pipe (4) communicates with the exhaust channel (15) or penetrates through the exhaust channel (15).

10. A semiconductor liquid changing device, characterized in that, It includes a manipulator and a liquid extractor as described in claim 9; The manipulator is used to transfer the liquid extractor among different medicine bottles.

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