Cutting module of full-automatic scribing machine

Abstract

The utility model relates to the technical field of generic semiconductor scribing processing, and discloses a cutting module of a full-automatic scribing machine, which comprises a rack, a Y-axis sliding table is slidably connected onto the rack through a Y-axis sliding rail, the Y-axis sliding table is slidably connected with a Z-axis sliding table through a Z-axis sliding rail, the Z-axis sliding table can realize directional sliding of a Y axis and a Z axis on the rack, and the Z-axis sliding table is slidably connected with a Z-axis sliding table through a Z-axis sliding rail. The Y-axis sliding table is provided with two optoelectronic switches used for feeding back signals that the Z-axis sliding table moves to the limit position along the Z axis, the Z-axis sliding table is provided with a main shaft module through a connecting frame, the output shaft end of the main shaft module is fixedly connected with a cutting edge, and the main shaft module is provided with a cutting water spraying assembly used for spraying and cooling the cutting edge. According to the utility model, the Z-axis driving lead screw is externally mounted, so that the moving stroke is reduced, the moving stability of the Z-axis is effectively ensured, meanwhile, the mounting space is optimized, the structure is compact, the daily maintenance is convenient, and the intellectualization and accuracy of stroke control are integrally realized.

Description

Technical Field

[0001] The utility model relates to the technical field of pan-semiconductor dicing processing, and specifically relates to a cutting module of a full-automatic dicing machine. Background Art

[0002] A wafer refers to a silicon wafer used for fabricating silicon semiconductor integrated circuits and belongs to a type of semiconductor substrate. Since its shape is circular, it is called a wafer; various circuit element structures can be processed and fabricated on the silicon wafer to form an integrated circuit product with specific electrical functions.

[0003] In actual production, the traditional rotary grinding wheel type pan-semiconductor material cutting technology is affected by process limitations, and there are problems such as mechanical stress, cracking, low processing efficiency, and low yield in substrate processing, which greatly limits the development of substrate manufacturing level. The YZ-axis motion module is a key module in the dicing machine responsible for the cutting work. The function of the Y-axis system is to drive the high-speed spindle to perform cutting feed motion, while the Z-axis system drives the high-speed spindle to perform tool lifting and tool lowering motions during the dicing process. This shows that the design of the YZ-axis is to ensure the continuity and accuracy of the cutting process, and the motion of each axis needs to have high precision and high stability. The optimization of its design and function is directly related to the accuracy and efficiency of semiconductor substrate cutting. Content of the Utility Model

[0004] (1) Technical Problems to be Solved

[0005] In view of the deficiencies of the prior art, the utility model provides a cutting module of a full-automatic dicing machine, which solves the problems that the YZ-axis motion module used for cutting and dicing of existing semiconductor substrates is difficult to ensure the continuity and accuracy of the cutting process, and at the same time, the precision and stability of the motion of each axis need to be improved.

[0006] (2) Technical Solutions

[0007] To achieve the above objectives, the utility model is realized through the following technical solutions: A cutting module of a full-automatic dicing machine includes a frame. A Y-axis slide is slidably connected to the frame through a Y-axis slide rail. A Z-axis slide is slidably connected to the Y-axis slide through a Z-axis slide rail. The Z-axis slide can achieve directional sliding of the Y-axis and the Z-axis on the frame. Two photoelectric switches for feeding back the signal that the Z-axis slide moves to the limit position along the Z-axis are arranged on the Y-axis slide. A spindle module is installed on the Z-axis slide through a connecting frame. A cutting edge is fixedly connected to the output shaft end of the spindle module. A cutting water spraying assembly for spraying and cooling the cutting edge is installed on the spindle module.

[0008] Preferably, a Y-axis guide rail is provided on the upper end surface of the frame, and the upper part of the Y-axis slide is slidably connected to the Y-axis guide rail.

[0009] Preferably, an installation protrusion is fixedly arranged on the Y-axis slide table, the Z-axis slide rails are symmetrically arranged on both sides of the installation protrusion, a driving motor is fixedly installed on the installation protrusion, the output shaft end of the driving motor is fixedly connected with a driving lead screw through a coupling, a nut slider is threadedly connected to the driving lead screw, and the nut slider is fixedly connected with the Z-axis slide table.

[0010] Preferably, two limit hooks are symmetrically and fixedly connected to the Y-axis slide table, a limit nut is threadedly connected to the Z-axis slide table, and a load-bearing spring is detachably connected between the limit hook and the limit nut.

[0011] Preferably, two photoelectric switches are fixedly installed on one side of the Y-axis slide table, and a light-shielding sheet matching the photoelectric switches is fixedly arranged on the Z-axis slide table.

[0012] Preferably, an installation component is fixedly connected to the spindle module, a moving air cylinder is fixedly connected to the installation component, the piston end of the moving air cylinder is fixedly connected with a moving frame, the moving frame is slidably connected to the installation component, and the cutting water spraying component is respectively arranged on the moving frame and the installation component.

[0013] (III) Beneficial effects

[0014] The present utility model has the following beneficial effects:

[0015] For the cutting module of the full-automatic dicing saw, through the provided Y-axis slide rail and Z-axis slide rail, in cooperation with the linear motor and the driving lead screw, it can stably drive the Y-axis slide table to move stably along the Y-axis direction and the Z-axis slide table to move stably along the Z-axis direction; through the provided photoelectric switches, during the feed and retraction of the cutting edge, it can intelligently and precisely control the moving stroke of the entire Z-axis slide table in the middle, so as to perform feed and retraction accurately and stably, ensuring accurate dicing of the wafer; through the provided cutting water spraying component, it can spray and cool the heated cutting edge, avoid the reduction of tool hardness caused by heating, effectively extend the service life of the tool; wash away debris and impurities, reduce surface contamination; control the cutting environment, stabilize the cutting conditions; extend the service life of the equipment. Description of the drawings

[0016] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0017] Figure 2 is a schematic diagram of the layout structure of the Y-axis slide table and the Z-axis slide table of the present utility model;

[0018] Figure 3 is a schematic diagram of the split structure of the Y-axis slide table and the Z-axis slide table of the present utility model;

[0019] Figure 4This is a schematic diagram of the layout structure of the cooling spray component of the present utility model.

[0020] In the figure: 1, frame; 2, Y-axis slide rail; 3, Y-axis guide rail; 4, Y-axis slide table; 5, Z-axis slide table; 6, Z-axis slide rail; 7, mounting protrusion; 8, drive motor; 9, nut slider; 10, drive lead screw; 11, limit hook; 12, load-bearing spring; 13, limit nut; 14, photoelectric switch; 15, light-shielding piece; 16, connecting frame; 17, spindle module; 18, cutting edge; 19, mounting component; 20, moving cylinder; 21, moving frame; 22, cutting water spray component. Specific embodiments

[0021] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0022] Please refer to Figure 1 , the present utility model provides a technical solution: a cutting module of a fully automatic dicing machine, including a frame 1, a Y-axis slide table 4 is slidably connected to the frame 1 through a Y-axis slide rail 2, a Z-axis slide table 5 is slidably connected to the Y-axis slide table 4 through a Z-axis slide rail 6, and the Z-axis slide table 5 can achieve directional sliding of the Y-axis and the Z-axis on the frame 1. Two photoelectric switches 14 for feeding back the signal that the Z-axis slide table moves to the limit position along the Z-axis are arranged on the Y-axis slide table 4. A spindle module 17 is installed on the Z-axis slide table 5 through a connecting frame 16. A cutting edge 18 is fixedly connected to the output shaft end of the spindle module 17, and a cutting water spray component 22 for spraying and cooling the cutting edge 18 is installed on the spindle module 17.

[0023] In the present utility model, through the provided Y-axis slide rail 2 and Z-axis slide rail 6, in cooperation with the linear motor, the Y-axis slide table 4 can be stably driven along the Y-axis direction, and the external drive lead screw can make the Z-axis slide table 5 move stably along the Z-axis direction; through the provided photoelectric switch 14, when the cutting edge 18 performs feed and retraction, the movement stroke of the entire Z-axis slide table 5 can be accurately controlled intelligently in the middle, so as to perform feed and retraction accurately and stably, and ensure accurate cutting and scribing of the wafer; through the provided cutting water spray component 22, the heated cutting edge 18 can be sprayed and cooled to avoid the reduction of the tool hardness caused by heating and effectively extend the service life of the tool.

[0024] Refer to Figure 1 And 2As shown in the figure, in this embodiment, a Y-axis guide rail 3 is provided on the upper end surface of the frame 1, and the upper part of the Y-axis slide 4 is slidably connected to the Y-axis guide rail 3. By installing a high-precision Y-axis guide rail 3 above the frame 1, the load-bearing capacity of the Y-axis slide 4 is greatly enhanced, ensuring the stability of the Z-axis during operation, thereby significantly reducing wear and maintenance requirements and ensuring the long-term durability of the equipment.

[0025] Refer to Figure 3 As shown in the figure, in this embodiment, an installation protrusion 7 is fixedly provided on the Y-axis slide 4. The Z-axis slide rails 6 are symmetrically arranged on both sides of the installation protrusion 7. A driving motor 8 is fixedly installed on the installation protrusion 7. The output shaft end of the driving motor 8 is fixedly connected to a driving lead screw 10 through a coupling. A nut slider 9 is threadedly connected to the driving lead screw 10, and the nut slider 9 is fixedly connected to the Z-axis slide 5. By installing the driving motor 8 and the driving lead screw 10 externally on the Y-axis slide 4, the driving components of the entire Z-axis can be externally installed, simplifying assembly and debugging and optimizing space utilization to save internal space.

[0026] Refer to Figure 3 As shown in the figure, in this embodiment, two limit hooks 11 are symmetrically and fixedly connected to the Y-axis slide 4. A limit nut 13 is threadedly connected to the Z-axis slide 5. A load-bearing spring 12 is detachably connected between the limit hook 11 and the limit nut 13. By providing the load-bearing spring 12, it can cooperate with the limit hook 11 and the limit bolt to stably hang the counterweight spring, ensuring the smooth movement of the entire Z-axis slide 5 and guaranteeing the balance and stability of the entire system.

[0027] Refer to Figure 3 As shown in the figure, in this embodiment, two photoelectric switches 14 are fixedly installed on one side of the Y-axis slide 4. A light-shielding piece 15 that matches the photoelectric switches 14 is fixedly provided on the Z-axis slide 5. The light-shielding piece 15 is fixed on the Z-axis slide 5, and two photoelectric switches 14 are installed on the side edge of the Y-axis slide. Once the light-shielding piece 15 reaches the lower photoelectric switch 14, it means that the driving lead screw has reached its maximum stroke limit, realizing the intelligence and precision of stroke control.

[0028] Refer to Figure 4As shown, in this embodiment, an installation component 19 is fixedly connected to the main shaft module 17, a moving air cylinder 20 is fixedly connected to the installation component 19, a piston end of the moving air cylinder 20 is fixedly connected to a moving frame, the moving frame is slidably connected to the installation component 19, and the cutting water spray components 22 are respectively arranged on the moving frame and the installation component. By arranging the cutting water spray components 22 on both the left and right sides of the cutting edge, the cutting edge 18 can be effectively and efficiently sprayed and cooled, while flushing away debris and impurities, reducing surface contamination; controlling the cutting environment, stabilizing the cutting conditions, and prolonging the service life of the equipment. By arranging the moving air cylinder 20, the distance between the cutting water spray component 22 and the cutting edge 18 on the main shaft module 17 can be driven to adjust the moving frame, so as to adapt to the cutting and scribing cooling requirements of cutting edges 18 of different sizes.

[0029] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover a non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation. An element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0030] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cutting module of a fully automatic dicing machine, comprising a frame, characterized in that: On the frame, a Y-axis slide table is slidably connected through a Y-axis slide rail. The Y-axis slide table is slidably connected with a Z-axis slide table through a Z-axis slide rail. The Z-axis slide table can achieve directional sliding in the Y-axis and Z-axis directions on the frame. On the Y-axis slide table, two photoelectric switches are arranged for feeding back the signal that the Z-axis slide table moves to the limit position along the Z-axis. On the Z-axis slide table, a spindle module is installed through a connecting frame. A cutting edge is fixedly connected to the output shaft end of the spindle module. A cutting water spraying assembly for spraying and cooling the cutting edge is installed on the spindle module.

2. The cutting module of a fully automatic dicing machine according to claim 1, wherein: A Y-axis guide rail is provided on the upper end surface of the frame. The upper part of the Y-axis slide table is slidably connected with the Y-axis guide rail.

3. The cutting module of a fully automatic dicing machine according to claim 2, wherein: An installation protrusion is fixedly provided on the Y-axis slide table. The Z-axis slide rails are symmetrically arranged on both sides of the installation protrusion. A driving motor is fixedly installed on the installation protrusion. The output shaft end of the driving motor is fixedly connected with a driving lead screw through a coupling. A nut slider is threadedly connected to the driving lead screw. The nut slider is fixedly connected with the Z-axis slide table.

4. The cutting module of a fully automatic dicing machine according to claim 3, characterized in that: Two limit hooks are symmetrically and fixedly connected to the Y-axis slide table. A limit nut is threadedly connected to the Z-axis slide table. A load-bearing spring is detachably connected between the limit hook and the limit nut.

5. The cutting module of a fully automatic dicing machine according to claim 4, characterized in that: The two photoelectric switches are fixedly installed on one side of the Y-axis slide table. A light-shielding sheet matching the photoelectric switch is fixedly provided on the Z-axis slide table.

6. The cutting module of a fully automatic dicing machine according to any one of claims 1-5, characterized in that: An installation assembly is fixedly connected to the spindle module. A moving cylinder is fixedly connected to the installation assembly. The piston end of the moving cylinder is fixedly connected with a moving frame. The moving frame is slidably connected with the installation assembly. The cutting water spraying assembly is respectively arranged on the moving frame and the installation assembly.

Images