Vacuum coating all-in-one machine for nanometer materials

Through the design of the adjustment components and motor spindle, the problem of fixing the height of the vacuum plate is solved, and the height adjustment of the nanomaterial vacuum coating machine is achieved, ensuring the uniformity of the coating and equipment stability, and improving the coating effect and positioning accuracy.

CN223163469UActive Publication Date: 2025-07-29SUZHOU KAIRUI NANO TECH CO LTD
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Patent Information

Application Number
CN202421951103.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-13
Publication Date
2025-07-29
Estimated Expiration
2034-08-13

AI Technical Summary

Technical Problem

The height of the vacuum plate of the existing nanomaterial vacuum coating machine is fixed, resulting in the uneven film thickness problem.

Method used

By setting up adjustment components, including hydraulic cylinders and vacuum plates, the height adjustment of the vacuum plate is achieved, and combined with the design of the motor spindle and limiting teeth, the rotation adjustment and precise installation of the placing base are achieved to ensure uniform rotation of the sample.

Benefits of technology

Real-time height adjustment is achieved according to different coating materials and process requirements, improving the uniformity of coating effect and the positioning accuracy of the equipment, and preventing components from loosening.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a vacuum coating all-in-one machine for nanometer materials. The vacuum coating all-in-one machine for the nanometer materials comprises a vacuum coating rack, a control box, a vacuumizing piece and a preheating box, the vacuum coating rack is electrically connected with the control box, the vacuumizing piece and the preheating box are installed on the two sides of an inner frame of the vacuum coating rack respectively, an adjusting assembly is further installed in an upper cavity of the preheating box, and the adjusting assembly is electrically connected with the control box. The adjusting assembly comprises a hydraulic cylinder installed at the upper end of the preheating box, the output end of the hydraulic cylinder is connected with a vacuumizing plate, a communicating opening is formed in the vacuumizing plate, and the communicating opening is communicated with a hose arranged at a port of the vacuumizing part. The vertical height of the vacuumizing plate can be adjusted through cooperative use of a plurality of parts in the arranged adjusting assembly, and compared with a traditional mode of fixedly installing the vacuumizing plate, the device can adjust the height of the vacuumizing plate in real time according to different coating materials and process requirements so as to achieve the optimal coating effect.
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Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating devices, in particular to a nano-material vacuum coating integrated machine. Background Art

[0002] The nano-material vacuum coating integrated machine is an important device in the high-end manufacturing industry, which is used to apply nano-level coatings on various materials to improve their performance and durability. This integrated machine mainly uses vacuum coating technology to precisely coat nano-materials on the target object to enhance various physical and chemical properties of its surface, such as increasing hardness, reducing friction, improving corrosion resistance or adjusting the thermal conductivity coefficient, etc.

[0003] A nano-material vacuum coating integrated machine is disclosed in the prior art. This device is provided with an integrated machine case, which is composed of four side plates, a top cover and a bottom plate connected in a sealed manner. An evaporation device, a cracking device, a vacuum coating device and a central processing device are arranged in the integrated machine case. The outlet end of the evaporation device is connected to the inlet end of the cracking device, and the outlet end of the cracking device is connected to the inlet end of the vacuum coating device. This device has strong sealing performance, good coating effect, and the film is not easy to fall off.

[0004] However, this device still has some defects. The vacuum pumping plate in this device is fixedly arranged, and the height of the vacuum pumping plate cannot be adjusted. The distance between the coating material and the sample is fixed, which may cause uneven film thickness at some positions, and it is more obvious when the distance between the evaporation source and the sample is relatively close or far.

[0005] Therefore, it is necessary to provide a nano-material vacuum coating integrated machine to solve the above technical problems. Summary of the Utility Model

[0006] In view of the above situation, in order to overcome the defects of the prior art, the utility model provides a nano-material vacuum coating integrated machine, which can realize the adjustment of the up and down height of the vacuum pumping plate through the cooperation of multiple parts in the set adjustment component, and can adjust the height of the vacuum pumping plate in real time according to different coating materials and process requirements to achieve the best coating effect.

[0007] To achieve the above purpose, the technical scheme adopted by the utility model is as follows:

[0008] The nano-material vacuum coating integrated machine includes: a vacuum coating machine frame, a control box, a vacuum pumping component, and a preheating box. The vacuum coating machine frame is electrically connected to the control box. The vacuum pumping component and the preheating box are respectively installed on both sides of the inner frame of the vacuum coating machine frame. An adjusting component is also installed in the upper cavity of the preheating box. The adjusting component includes a hydraulic cylinder installed at the upper end of the preheating box. The output end of the hydraulic cylinder is connected to a vacuum pumping plate. A communication port is installed on the vacuum pumping plate. The communication port is communicated with a hose provided at the port of the vacuum pumping component. A coating placement component is also installed in the preheating box. The coating placement component includes a placement base. The placement base is installed in a chute provided on the base of the preheating box. A support column is installed at the upper end of the placement base. Placement plates are fixedly sleeved on the support column in an array.

[0009] Preferably, the coating placement component further includes a motor main shaft installed at the lower end of the placement base. The motor main shaft is sleeved and installed with a limit card tooth provided at the output end and a limit card slot provided at the bottom of the placement base.

[0010] Preferably, the limit card tooth provided at the output end of the motor main shaft and the limit card slot provided at the bottom of the placement base are of suitable size and are detachably fitted and fixedly installed.

[0011] Preferably, a threaded hole is also installed on the placement base. The bottom of the support column is designed with a threaded structure. The support column is spirally installed in the threaded hole provided on the placement base.

[0012] Preferably, a connecting block is further provided at the output end of the hydraulic cylinder. A fixing port is provided at the upper end of the vacuum pumping plate. The connecting block provided at the output end of the hydraulic cylinder is fixedly connected to the vacuum pumping plate by a positioning bolt.

[0013] Preferably, a plurality of holes are also opened on the placement plates installed on the support column. The plurality of holes are arranged in an array and are communicated through.

[0014] Compared with the prior art, the present utility model has the following beneficial effects:

[0015] (1) By the combined use of multiple parts in the adjusting component provided in the present utility model, the adjustment of the up and down height of the vacuum pumping plate can be realized. Compared with the traditional fixed installation method of the vacuum pumping plate, this device can adjust the height of the vacuum pumping plate in real time according to different coating materials and process requirements to achieve the best coating effect;

[0016] (2) By using the placement base and the motor spindle provided in the present utility model in combination, the rotational adjustment of the placement base can be achieved. During use, the placement base controlled by the motor spindle can achieve precise rotational speed adjustment. This speed regulation function enables the sample to rotate evenly under the drive of the motor spindle during the coating process. At the same time, through the cooperation of the limit teeth provided at the output end of the motor spindle and the limit card slots provided at the lower end of the placement base, the quick installation and disassembly of the motor spindle and the placement base can be realized;

[0017] (3) The limit teeth provided at the output end of the motor spindle of the present utility model are engaged with the limit card slots provided at the bottom of the placement base, which can ensure the precise docking of the motor spindle and the base during the installation process, improve the positioning accuracy of the equipment. At the same time, through the snap-fit installation, the connection between the motor spindle and the base can be made more stable, preventing loosening between components during high-speed operation or under external impact. Brief Description of the Drawings

[0018] Figure 1 It is a schematic diagram of the overall structure of the nano-material vacuum coating machine provided by the present utility model;

[0019] Figure 2 It is a schematic diagram of the preheating box structure of the nano-material vacuum coating machine provided by the present utility model;

[0020] Figure 3 It is a schematic diagram of the installation structure of the coating placement component of the nano-material vacuum coating machine provided by the present utility model;

[0021] Figure 4 It is a schematic diagram of the connection structure of the support column, placement base, and motor spindle of the nano-material vacuum coating machine provided by the present utility model;

[0022] Figure 5 It is a schematic diagram of the installation structure of the motor spindle and the placement base of the nano-material vacuum coating machine provided by the present utility model;

[0023] Figure 6 It is a schematic diagram of the connection structure between the vacuum pumping plate and the hydraulic cylinder of the nano-material vacuum coating machine provided by the present utility model.

[0024] Among them, the names corresponding to the reference numerals are: 100, vacuum coating machine frame; 200, control box; 300, vacuum pumping component; 400, preheating box; 500, adjustment component; 501, hydraulic cylinder; 502, vacuum pumping plate; 503, fixed port; 504, communication port; 600, coating placement component; 601, placement base; 602, support column; 603, placement plate; 604, hole; 605, threaded structure; 607, limit teeth; 608, limit card slot. Detailed implementation mode

[0025] The present utility model will be further described below in conjunction with the accompanying drawings and embodiments. The implementation modes of the present utility model include but are not limited to the following embodiments.

[0026] First embodiment:

[0027] As Figure 1-6 shown, the nano-material vacuum coating integrated machine provided by the present utility model includes: a vacuum coating machine frame 100, a control box 200, a vacuum pumping component 300, and a preheating box 400. The vacuum coating machine frame 100 is electrically connected to the control box 200. The vacuum pumping component 300 and the preheating box 400 are respectively installed on both sides of the inner frame of the vacuum coating machine frame 100. An adjusting component 500 is further installed in the upper cavity of the preheating box 400. The adjusting component 500 includes a hydraulic cylinder 501 installed at the upper end of the preheating box 400. The output end of the hydraulic cylinder 501 is connected to a vacuum pumping plate 502. A communication port 504 is installed on the vacuum pumping plate 502. The communication port 504 is communicated with a hose provided at the port of the vacuum pumping component 300. A coating placement component 600 is further installed in the preheating box 400. The coating placement component 600 includes a placement base 601. The placement base 601 is installed in a chute provided at the base of the preheating box 400. A support column 602 is installed at the upper end of the placement base 601. A placement tray 603 is fixedly sleeved on the support column 602 in an array. During use, the sample to be coated is placed on the placement tray 603. The preheating box 400 is closed. By starting the hydraulic cylinder 501, the vacuum pumping plate 502 is driven to move up and down by the hydraulic cylinder 501. The hose at the port of the vacuum pumping component 300 is communicated with the communication port 504 provided on the vacuum pumping plate 502. When the vacuum pumping plate 502 is adjusted to an appropriate distance, the vacuum pumping component 300 is started through the control box 200 to pump the inside of the preheating box 400 to the required vacuum degree. Then, the temperature inside the preheating box 400 is adjusted through the control box 200. Finally, the preheating box 400 is opened, and the coated sample can be taken out.

[0028] Through the coordinated use of multiple parts in the provided adjusting component 500, the up and down height adjustment of the vacuum pumping plate 502 can be realized. Compared with the traditional way of fixedly installing the vacuum pumping plate 502, this device can adjust the height of the vacuum pumping plate 502 in real time according to different coating materials and process requirements to achieve the best coating effect.

[0029] Second embodiment:

[0030] As Figure 3-5 shown, the coating placement component 600 further includes a motor spindle 606 installed at the lower end of the placement base 601. The motor spindle 606 is sleeved and installed with a limit card tooth 607 provided at the output end and a limit card slot 608 provided at the bottom of the placement base 601.

[0031] Through the combined use of the set placement base 601 and the motor main shaft 606, the rotational adjustment of the placement base 601 can be achieved. During use, the placement base 601 controlled by the motor main shaft 606 can achieve precise rotational speed adjustment. This speed regulation function enables the sample to rotate evenly under the drive of the motor main shaft 606 during the coating process. At the same time, through the limiting engagement teeth 607 provided at the output end of the motor main shaft 606 and the limiting engagement slots 608 provided at the lower end of the placement base 601, through the combined use of the limiting engagement teeth 607 and the limiting engagement slots 608, the rapid installation and disassembly of the motor main shaft 606 and the placement base 601 can be achieved.

[0032] Third Embodiment:

[0033] As Figure 5 shown, the size of the limiting engagement teeth 607 provided at the output end of the motor main shaft 606 is adapted to the size of the limiting engagement slots 608 provided at the bottom of the placement base 601, and the two are detachably fitted and installed and fixed.

[0034] By engaging the limiting engagement teeth 607 provided at the output end of the motor main shaft 606 with the limiting engagement slots 608 provided at the bottom of the placement base 601, it can ensure the precise docking of the motor main shaft 606 and the placement base 601 during the installation process, improve the positioning accuracy of the equipment. At the same time, through the fitted installation, it can ensure the more stable connection between the motor main shaft 606 and the placement base 601, preventing loosening between the components during high-speed operation or under external impact.

[0035] Fourth Embodiment:

[0036] As Figure 3-4 shown, the placement base 601 is also provided with threaded holes, and the bottom of the support column 602 is designed with a threaded structure 605. The support column 602 is helically installed in the threaded holes provided in the placement base 601. During use, the staff only needs to align the bottom of the support column 602 with the threaded holes provided in the placement base 601, and then fix the support column 602 by screwing the support column 602.

[0037] Through the helically installed support column 602, when it is necessary to replace coating samples of different sizes, it is convenient to replace the support column 602 and the placement plate 603 subsequently, thereby increasing the usability of the equipment.

[0038] Fifth Embodiment:

[0039] As Figure 6 shown, a connection block is also provided at the output end of the hydraulic cylinder 501, and a fixing port 503 is provided at the upper end of the vacuum pumping plate 502. The connection block provided at the output end of the hydraulic cylinder 501 is fixedly connected to the vacuum pumping plate 502 by means of a positioning bolt.

[0040] Sixth Embodiment:

[0041] As shown Figure 3 in the figure, the placement plate 603 installed on the support column 602 is also provided with a plurality of holes 604. The plurality of holes 604 are arranged in an array and penetrate through. During use, the coating sample is placed on the placement plate 603. Through the arrangement of the holes 604, the vapor of the coating material can pass through the placement plate 603 more evenly, thereby ensuring that all parts of the sample can receive the deposition of the coating material evenly.

[0042] Working principle: During use, the sample to be coated is placed on the placement plate 603. The preheating box 400 is closed. By starting the hydraulic cylinder 501, the vacuum pumping plate 502 is driven to move up and down by the hydraulic cylinder 501. The hose at the port of the vacuum pumping member 300 is communicated with the communication port 504 provided on the vacuum pumping plate 502. When the vacuum pumping plate 502 is adjusted to an appropriate distance, the vacuum pumping member 300 is started through the control box 200 to pump the inside of the preheating box 400 to the required vacuum degree. Then, the temperature inside the preheating box 400 is adjusted through the control box 200. Finally, the preheating box 400 is opened, and the coated sample can be taken out.

[0043] The above embodiments are only one of the preferred embodiments of the present invention and should not be used to limit the protection scope of the present invention. Any meaningless modifications or polishings made on the main design concept and spirit of the present invention, as long as the technical problems solved are still the same as those of the present invention, should be included in the protection scope of the present invention.

Claims

1. A nano-material vacuum coating integrated machine, characterized in that, Including: A vacuum coating machine frame (100), a control box (200), a vacuum pumping component (300), and a preheating box (400). The vacuum coating machine frame (100) is electrically connected to the control box (200). The vacuum pumping component (300) and the preheating box (400) are respectively installed on both sides of the inner frame of the vacuum coating machine frame (100). An adjusting component (500) is further installed in the upper cavity of the preheating box (400). The adjusting component (500) includes a hydraulic cylinder (501) installed at the upper end of the preheating box (400). The output end of the hydraulic cylinder (501) is connected to a vacuum pumping plate (502). A communication port (504) is installed on the vacuum pumping plate (502). The communication port (504) is communicated with a hose provided at the port of the vacuum pumping component (300). A coating placement component (600) is also installed in the preheating box (400). The coating placement component (600) includes a placement base (601). The placement base (601) is installed in a chute provided on the base of the preheating box (400). A support column (602) is installed at the upper end of the placement base (601). Placement trays (603) are fixedly sleeved on the support column (602) in an array.

2. The integrated vacuum coating machine for nanomaterials according to claim 1, wherein The coating placement component (600) further includes a motor main shaft (606) installed at the lower end of the placement base (601). The motor main shaft (606) is sleeved and installed with a limit tooth (607) provided at the output end and a limit slot (608) provided at the bottom of the placement base (601).

3. The one - body vacuum coating machine for nano - materials according to claim 2, wherein, The limit tooth (607) provided at the output end of the motor main shaft (606) and the limit slot (608) provided at the bottom of the placement base (601) are of suitable sizes and are detachably fitted and installed and fixed.

4. A nano-material vacuum coating integrated machine according to claim 2, characterized in that, Threaded holes are also installed on the placement base (601). The bottom of the support column (602) is designed with a threaded structure (605). The support column (602) is screwed and installed in the threaded holes provided on the placement base (601).

5. A nano-material vacuum coating integrated machine according to claim 1, wherein, A connecting block is further provided at the output end of the hydraulic cylinder (501). A fixing port (503) is provided at the upper end of the vacuum pumping plate (502). The connecting block provided at the output end of the hydraulic cylinder (501) is fixedly connected to the vacuum pumping plate (502) by a positioning bolt.

6. The integrated vacuum coating machine for nanomaterials according to claim 4, wherein, A plurality of holes (604) are also opened on the placement trays (603) installed on the support column (602). The plurality of holes (604) are arranged in an array and are drilled through.