Lifting device of substrate table

Abstract

The utility model discloses a lifting device of a substrate table, which relates to the technical field of semiconductor production and comprises a base and a lifting table, at least one guide rod and at least one lifting cylinder are arranged on each of two sides of the base, the lifting table is slidably connected to the base, linear bearings are arranged on two sides of the lifting table, the linear bearings are in sliding fit with the guide rods, and the lifting cylinders are arranged on the guide rods. A floating connector connected with the lifting table is arranged at the tail end of a piston rod on the lifting air cylinder, the guide rods on the two sides of the base are arranged in a staggered mode in the width direction of the base, in the lifting moving process of the lifting table, the direction error of the piston rod and the guide rods of the lifting air cylinder can be eliminated through swinging of the floating connector, and therefore the installation precision and the part precision are reduced. The cost is reduced, and the problem of unsmooth operation caused by installation errors can be avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a lifting device for a substrate stage. Background Art

[0002] In the coating process of vacuum coating equipment, the substrate table is one of the important parts of the equipment. During the coating process, the substrate for thin film deposition is usually replaced. In order to facilitate the replacement of the substrate, the substrate placement table needs to be raised and lowered when taking and placing the substrate. The current substrate table lifting device uses a lifting cylinder to drive the lifting block to rise and fall, and is guided by a guide rod. The guide rod and the lifting cylinder are difficult to debug during installation. If the coordination is not good enough, it will lead to uneven movement and low fault tolerance. The requirements for the precision and assembly of parts are high, resulting in difficulty in installation and high cost. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a substrate stage lifting device that can reduce the difficulty of installation and avoid the problem of unsmooth operation caused by installation errors.

[0004] A substrate stage lifting device according to an embodiment of the present invention includes:

[0005] The base is provided with at least one guide rod and at least one lifting cylinder at both ends along its length;

[0006] The lifting platform is slidably connected to the base. Linear bearings are provided on both sides of the lifting platform along the length direction of the base. The linear bearings slide with the guide rods. The end of the piston rod on the lifting cylinder is provided with a floating joint connected to the lifting platform. Along the width direction of the base, the guide rods on both sides of the base are staggered.

[0007] According to an embodiment of the present invention, a substrate stage lifting device has at least the following beneficial effects: This embodiment is provided with a base and a lifting platform, wherein at least one guide rod and at least one lifting cylinder are provided at both ends of the base along its length direction, the lifting platform is slidably connected to the base, and linear bearings are provided on both sides of the lifting platform along the length direction of the base, the linear bearings slidingly cooperate with the guide rods, the end of the piston rod on the lifting cylinder is provided with a floating joint connected to the lifting platform, and the guide rods on both sides of the base are staggered along the width direction of the base, which can balance the force on the lifting platform. During the lifting and moving process of the lifting platform, the swinging of the floating joint can eliminate the directional error between the piston rod and the guide rod of the lifting cylinder, thereby reducing the installation accuracy and the accuracy of the parts, which is conducive to reducing costs and can avoid the problem of unsmooth operation caused by installation errors.

[0008] According to some embodiments of the present invention, the lifting platform includes a base frame and a loading portion, the linear bearing is mounted on the base frame, and one end of the floating joint is connected to the base frame.

[0009] According to some embodiments of the present utility model, the loading part includes a first clamping plate and a second clamping plate. Both sides of the first clamping plate are fixedly connected to the chassis, and the second clamping plate is arranged above the first clamping plate.

[0010] According to some embodiments of the present utility model, chassis are arranged on both sides of the bottom of the first clamping plate, and the two chassis are independently arranged.

[0011] According to some embodiments of the present utility model, support members are provided on the chassis, and the support members are fixedly connected to both sides of the second clamping plate.

[0012] According to some embodiments of the present utility model, along the width direction of the base, the floating joint is connected to the middle of the chassis.

[0013] According to some embodiments of the present utility model, the support member includes a vertical plate and a connecting block. The bottom end of the vertical plate is fixed to the chassis, the connecting block is fixed to the top end of the vertical plate, and the connecting block is fixedly connected to the second clamping plate.

[0014] According to some embodiments of the present utility model, extension parts are provided at both ends of the base along its length direction, and the lifting cylinder is fixedly installed on the extension parts.

[0015] According to some embodiments of the present utility model, both the support member and the lifting cylinder are located at both ends of the base along its length direction.

[0016] According to some embodiments of the present utility model, a cushion block is arranged on the extension part, a through hole is provided on the cushion block, a first bolt and a second bolt are provided on the extension part, the first bolt passes through the through hole and is screwed with the lifting cylinder, and the second bolt is threadedly connected to the cushion block.

[0017] Some additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The following further describes the present utility model in conjunction with the drawings and embodiments, where:

[0019] Figure 1 is an axonometric view of a substrate table lifting device in an embodiment of the present utility model;

[0020] Figure 2 is a cross-sectional view of a substrate table lifting device in an embodiment of the present utility model;

[0021] Figure 3 is Figure 2 an enlarged view of A in

[0022] Reference numerals:

[0023] Base 100; guide rod 101; lifting cylinder 102; cylinder block 103; piston rod 104; extension part 105; cushion block 106; first bolt 107; second bolt 108; through hole 109;

[0024] Lifting platform 110; chassis 111; linear bearing 112; first clamping plate 113; second clamping plate 114; support member 115; vertical plate 116; connecting block 117; floating joint 118. Detailed implementation mode

[0025] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, in which the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation of the present invention.

[0026] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention.

[0027] In the description of the present invention, the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, exceeding, etc. are understood as not including the present number, and above, below, within, etc. are understood as including the present number. If the first and second are described only for the purpose of distinguishing technical features, they should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0028] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific content of the technical solution.

[0029] Refer to Figure 1 and Figure 2, in a lifting device of a substrate table according to an embodiment of the present invention, it includes a base 100 and a lifting table 110. The base 100 is fixedly arranged, and the lifting table 110 is arranged below the base 100 and slidably connected to the base 100. At least one guide rod 101 and at least one lifting cylinder 102 are provided at both ends of the base 100 along its length direction. The lifting table 110 moves up and down on the base 100 by sliding connection with the guide rod 101. Specifically, linear bearings 112 are provided on both sides of the lifting table 110 along the length direction of the base 100, and the linear bearings 112 are slidably matched with the guide rod 101. The end of the piston rod 104 on the lifting cylinder 102 is provided with a floating joint 118 connected to the lifting table 110. During the lifting movement of the lifting table 110, the direction error between the piston rod 104 of the lifting cylinder 102 and the guide rod 101 can be eliminated by the swing of the floating joint 118, thereby reducing the installation accuracy and part accuracy, being beneficial to cost reduction, and being able to avoid the problem of unsmooth operation caused by installation errors.

[0030] It can be understood that the lifting cylinder 102 is selected as a single-rod cylinder, and moreover, one lifting cylinder 102 is provided at both ends of the base 100 along its length direction. The piston rod 104 of one lifting cylinder 102 is connected to the lifting table 110 through a floating joint 118, so that the swings of the two floating joints 118 do not interfere with each other.

[0031] Furthermore, along the width direction of the base 100, guide rods 101 are provided on both sides of the base 100. It can be understood that two guide rods 101 can be provided at both ends of the base 100 along the length direction. In this embodiment, one guide rod 101 is provided at both ends of the base 100 along the length direction, avoiding the problem that the parallelism accuracy of the two guide rods 101 at the same end of the base 100 is insufficient due to installation errors, resulting in unsmooth lifting of the lifting table 110. Therefore, setting one guide rod 101 at one end of the base 100 in this embodiment helps to simplify the structure and avoid the problem of unsmooth operation, and can effectively reduce the material cost.

[0032] It can be understood that the lifting table 110 includes a chassis 111 and a loading part. The linear bearing 112 is installed on the chassis 111, and one end of the floating joint 118 is connected to the chassis 111. Furthermore, along the width direction of the base 100, the floating joint 118 is connected to the middle of the chassis 111, which is beneficial to ensuring the balanced force of the cylinder and the lifting stability of the lifting table 110.

[0033] It can be understood that since the floating joint 118 is connected to the middle of the chassis 111 and the guide rod 101 is arranged on one side of the lifting platform 110, there is an offset between the floating joint 118 and the guide rod 101. As a result, during the lifting process, the sliding resistance generated between the linear bearing 112 and the guide rod 101 generates an overturning torque in one direction on the chassis 111. Therefore, along the width direction of the base 100, the guide rods 101 on both sides of the base 100 are arranged in a staggered manner, which helps to cancel out the torques at both ends of the lifting platform 110 along the length direction of the base 100, thereby achieving the force balance of the lifting platform 110.

[0034] Furthermore, the loading part includes a first clamping plate 113 and a second clamping plate 114. Both the first clamping plate 113 and the second clamping plate 114 are used for placing workpieces. Both sides of the first clamping plate 113 are fixedly connected to the chassis 111, and the second clamping plate 114 is arranged above the first clamping plate 113. Further, chassis 111 are arranged on both sides of the bottom of the first clamping plate 113, and the two chassis 111 are independently arranged, which helps to reduce material consumption, reduce the weight of the lifting platform 110 while reducing costs, and helps to improve the operating efficiency of the equipment. Further, a support member 115 for installing the second clamping plate 114 is provided on the chassis 111, and the support member 115 is fixedly connected to both sides of the second clamping plate 114. In some embodiments, the support member 115 includes a vertical plate 116 and a connecting block 117. The bottom end of the vertical plate 116 is fixed to the chassis 111, the connecting block 117 is fixed to the top end of the vertical plate 116, and the connecting block 117 is fixedly connected to the second clamping plate 114 to realize the fixed installation of the second clamping plate 114 on the chassis 111 and provide a space for replacing workpieces between the first clamping plate 113 and the second clamping plate 114. Further, both the support member 115 and the lifting cylinder 102 are located at both ends of the base 100 along its length direction. Along the length direction of the base 100, the support member 115 is located inside the lifting cylinder 102, which helps to make the structure compact and thus save space.

[0035] It can be understood that extension parts 105 are provided at both ends of the base 100 along its length direction, and the lifting cylinder 102 is fixedly installed on the extension parts 105 to reserve enough space for placing and replacing workpieces on the first clamping plate 113 and the second clamping plate 114. Further, a cushion block 106 is arranged on the extension part 105, and the other side of the cushion block 106 is fixedly connected to the cylinder block 103 of the lifting cylinder 102, which helps to extend the lifting cylinder 102 towards the lifting platform 110 to reserve enough space for material replacement. Further, referring to Figure 3, the spacer block 106 is provided with a through hole 109, and the extension part 105 is provided with a first bolt 107 and a second bolt 108. The first bolt 107 passes through the through hole 109 and is screwed to the lifting cylinder 102, and the second bolt 108 is threadedly connected to the spacer block 106. It can be understood that there are two through holes 109, and the two through holes 109 are located on both sides of the second bolt 108. The first bolt 107 is used to directly fix the cylinder block 103 and the extension part 105, and can clamp the spacer block 106 while the cylinder block 103 and the extension part 105 are fixedly connected. The second bolt 108 is screwed onto the spacer block 106 to further fix the spacer block 106, so as to achieve the stability of the connection.

[0036] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the scope of knowledge possessed by those of ordinary skill in the art.

Claims

1. A lifting device for a substrate table, characterized in that, Including: A base, at least one guide rod and at least one lifting cylinder are provided at both ends along its length direction; A lifting platform, slidably connected to the base. Linear bearings are provided on both sides of the lifting platform along the length direction of the base. The linear bearings are slidably matched with the guide rods. The end of the piston rod on the lifting cylinder is provided with a floating joint connected to the lifting platform. Along the width direction of the base, the guide rods on both sides of the base are arranged in a staggered manner.

2. The lifting device of a substrate stage according to claim 1, wherein, The lifting platform includes a bottom frame and a loading part. The linear bearings are installed on the bottom frame, and one end of the floating joint is connected to the bottom frame.

3. The lifting device of a substrate stage according to claim 2, wherein, The loading part includes a first clamping plate and a second clamping plate. Both sides of the first clamping plate are fixedly connected to the bottom frame, and the second clamping plate is arranged above the first clamping plate.

4. The lifting device of a substrate table according to claim 3, wherein Both sides of the bottom of the first clamping plate are provided with the bottom frames, and the two bottom frames are independently arranged.

5. The lifting device of a substrate stage according to claim 3, characterized in that, A support member is provided on the bottom frame, and the support member is fixedly connected to both sides of the second clamping plate.

6. The lifting device of a substrate stage according to claim 2, characterized in that, Along the width direction of the base, the floating joint is connected to the middle of the bottom frame.

7. The lifting device of a substrate stage according to claim 5, characterized in that, The support member includes a vertical plate and a connecting block. The bottom end of the vertical plate is fixed to the bottom frame, the connecting block is fixed to the top end of the vertical plate, and the connecting block is fixedly connected to the second clamping plate.

8. The lifting device of a substrate stage according to claim 1, characterized in that, Extension parts are provided at both ends of the base along its length direction, and the lifting cylinders are fixedly installed on the extension parts.

9. The lifting device of a substrate stage according to claim 5, wherein The support member and the lifting cylinders are both located at both ends of the base along its length direction.

10. The lifting device of a substrate table according to claim 8, characterized in that, A cushion block is provided on the extension part. The cushion block is provided with a through hole. A first bolt and a second bolt are provided on the extension part. The first bolt passes through the through hole and is screwed with the lifting cylinder, and the second bolt is threadedly connected with the cushion block.

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