Valve time-sharing control structure

Abstract

The utility model belongs to the technical field of semiconductor equipment, and particularly relates to a valve time-sharing control structure, which comprises a valve main body, a power input shaft, a plurality of groups of cams and a transmission component, according to the utility model, through the matching arrangement of the power input shaft and the plurality of groups of cams and transmission components which are arranged in a matching manner, the action can be driven by only one electric driving element, and a plurality of diaphragm pieces can be driven to perform different actions, namely, on the premise that the number of the driving elements is minimum, the working efficiency is greatly improved. Opening and closing time-sharing control of different valve body flow channels can be achieved, the point position function of the valve is richer, cost is lower, and the overall size is smaller. By means of the structural arrangement, the valve can be controlled at any position in the whole stroke, can be suitable for back suction and flow adjusting working conditions, and has the advantages that the opening amount is easy to adjust and control, the range is wide, and response is fast.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor equipment, and particularly relates to a valve time-sharing control structure. Background Art

[0002] In the semiconductor industry, there are a wide variety of valves, and the functions of the valves mainly include on-off, back-suction, and flow regulation combination functions. The internal functions of most valves in the semiconductor industry are mainly realized by two methods: lead screw drive and pneumatic drive.

[0003] Among them, some valve bodies are provided with multiple valve body flow channels, and it is necessary to control each valve body flow channel to open or close in different time periods and to complete complex point functions. At present, in the existing valve bodies, the opening or closing of each valve body flow channel is generally controlled by the corresponding diaphragm movement in the control valve. In the prior art, if a traditional lead screw drive mechanism is used to drive the diaphragm, each diaphragm movement corresponding to each valve body flow channel needs to be driven by a corresponding electrical drive element. The more complex the valve function is, the larger the volume of the body and the higher the cost. If a traditional pneumatic piston is used to control the diaphragm movement in the valve, the movement of the diaphragm in the valve only has 0 position and 1 position, and the movement stroke of the diaphragm needs to be additionally provided with an adjustable limit, which is not flexible in application and is not suitable for back-suction and flow regulation working conditions. Summary of the Utility Model

[0004] Aiming at the above problems, the purpose of the utility model is to provide a valve time-sharing control structure.

[0005] The purpose of the utility model is realized by the following technical solutions:

[0006] A valve time-sharing control structure includes a valve body. Multiple groups of valve body flow channels are opened inside the valve body. Each group of valve body flow channels includes a liquid inlet, a liquid outlet, a liquid inlet channel, a liquid outlet channel, and a diaphragm setting cavity. The liquid inlet of each group of valve body flow channels is used to connect with the corresponding external liquid inlet pipeline, the liquid outlet of each group of valve body flow channels is used to connect with the corresponding external liquid outlet pipeline, one end opening of the liquid inlet channel of each group of valve body flow channels is communicated with the liquid inlet of the same group of valve body flow channels, one end opening of the liquid outlet channel of each group of valve body flow channels is communicated with the liquid outlet of the same group of valve body flow channels, the other end opening of the liquid inlet channel of each group of valve body flow channels and the other end opening of the liquid outlet channel of each group of valve body flow channels are respectively communicated with the diaphragm setting cavity of the same group of valve body flow channels. A diaphragm member for closing or opening the other end opening of the liquid inlet channel of the same group of valve body flow channels is arranged in the diaphragm setting cavity of each group of valve body flow channels. The valve time-sharing control structure further includes a power input shaft, several groups of cooperatively arranged cams, and a transmission component. Several cam setting cavities and several transmission component installation cavities are further arranged inside the valve body. Each transmission component installation cavity corresponds to a cam setting cavity and the diaphragm setting cavity of the corresponding group of valve body flow channels respectively;

[0007] One end of the power input shaft is located outside the valve body and is used for connecting with an external driving member. The other end of the power input shaft extends into the valve body and is rotatably connected to the valve body. The power input shaft sequentially passes through each cam setting cavity. Cams are respectively installed at positions of the power input shaft in each cam setting cavity. The outer peripheral surface of the cam has a large radius section and a small radius section.

[0008] One set of the transmission components is respectively arranged in each transmission component installation cavity. Each set of the transmission components has a power input end and a power output end. The power output end of each set of the transmission components extends out of the corresponding transmission component installation cavity and is connected to a diaphragm member in the diaphragm setting cavity of a corresponding valve body flow channel. The power input end of each set of the transmission components abuts against the outer peripheral surface of a cooperatively arranged cam.

[0009] The valve body includes a valve body flow channel setting block, a transmission component installation block and a power input shaft installation block that are sequentially connected. Each group of the valve body flow channels is arranged on the valve body flow channel setting block. Each of the transmission component installation cavities is arranged on the transmission component installation block. Each of the cam setting cavities is arranged on the power input shaft installation block.

[0010] The valve body further includes a cover plate, which is used to cover the power input shaft installation block and seal each cam setting cavity.

[0011] The cover plate, the power input shaft installation block, the transmission component installation block and the valve body flow channel setting block are fixedly connected by a plurality of screws to form the valve body.

[0012] A plurality of rotating bearings are installed on the power input shaft installation block. Each of the rotating bearings is rotatably connected to the power input shaft.

[0013] Each set of the transmission components includes a guide shaft and a spring. A ring-shaped flange portion extends outward from the top end of the guide shaft of each set of the transmission components. The top end of the guide shaft of each set of the transmission components serves as the power input end of this set of the transmission components and is located in the corresponding transmission component installation cavity. The top surface of the guide shaft of each set of the transmission components abuts against the outer peripheral surface of a cooperatively arranged cam. The bottom end of the guide shaft of each set of the transmission components serves as the power output end of this set of the transmission components and extends out of the corresponding transmission component installation cavity and is connected to the corresponding diaphragm member. A spring of the same set of the transmission components is sleeved on the outside of the guide shaft of each set of the transmission components and below the ring-shaped flange portion of the guide shaft. The top end of the spring of each set of the transmission components abuts against the ring-shaped flange portion of the guide shaft of the same set of the transmission components. The bottom end of the spring of each set of the transmission components abuts against the inner wall of the corresponding transmission component installation cavity.

[0014] The axial centerlines of the guide shafts of all sets of the transmission components are parallel to each other and perpendicular to the axial centerline of the power input shaft.

[0015] In the middle of the top surface of each diaphragm member, a connecting stud portion protrudes upward. The connecting stud portion of each diaphragm member is connected to the bottom end of the guide shaft of the corresponding set of transmission components by threads, and the middle of the bottom surface of each diaphragm member is used to directly close or open the other end opening of the liquid inlet passage of the corresponding valve body flow passage.

[0016] The diaphragm setting cavities of each valve body flow passage are all opened on the top surface of the valve body flow passage setting block. On the top surface of the valve body flow passage setting block and outside each diaphragm setting cavity, a diaphragm positioning ring groove is opened. At the outer periphery of each diaphragm member, a ring-shaped positioning protrusion extends downward, and the ring-shaped positioning protrusions of each diaphragm member are respectively embedded in the corresponding diaphragm positioning ring grooves.

[0017] On the bottom surface of the transmission component mounting block, corresponding to each diaphragm positioning ring groove, a ring-shaped pressing protrusion protrudes respectively. When the transmission component mounting block is connected to the valve body flow passage setting block, each ring-shaped pressing protrusion of the transmission component mounting block presses the outer periphery of a corresponding diaphragm member from above.

[0018] The advantages and positive effects of the present utility model are as follows:

[0019] 1. Through the cooperation of one power input shaft, several sets of cooperatively arranged cams and transmission components, the present utility model can achieve the driving action by only one electrical driving element, and can drive multiple diaphragm members to perform different actions. That is, under the premise of the least number of driving elements, the on-off time-sharing control of different valve body flow passages can be realized, the point position function of the valve is richer, the cost is lower, and the overall volume is smaller.

[0020] 2. The structural setting of the present utility model can also achieve controllability at any position within the entire stroke of the valve, and can be applicable to the back suction and flow regulation working conditions, having the advantages of easy regulation of the opening amount, wide range, and fast response. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic diagram of the external structure of the present utility model;

[0022] Figure 2 is one of the schematic sectional views of the present utility model;

[0023] Figure 3 is another schematic sectional view of the present utility model;

[0024] Figure 4 is a schematic diagram of the action state of the cam and the transmission component when the valve body flow passage is closed in the present utility model;

[0025] Figure 5 This is a schematic diagram of the operating state of the cam and transmission assembly when the valve body flow channel of the present utility model is opened;

[0026] Figure 6 It is Figure 3 an enlarged view of part A of

[0027] In the figure: 1 is the valve body flow channel setting block, 101 is the liquid inlet, 102 is the liquid outlet, 103 is the liquid inlet channel, 104 is the liquid outlet channel, 105 is the diaphragm setting cavity, and 106 is the diaphragm positioning ring groove;

[0028] 2 is the transmission assembly mounting block, 201 is the transmission assembly mounting cavity, and 202 is the annular pressing projection;

[0029] 3 is the power input shaft mounting block, and 301 is the cam setting cavity;

[0030] 4 is the cover plate, 5 is the diaphragm part, 501 is the connecting stud part, 502 is the annular positioning projection, 6 is the power input shaft, 7 is the cam, 701 is the large radius section, 702 is the small radius section, 8 is the rotating bearing, 9 is the guide shaft, 901 is the annular flange part, and 10 is the spring. Specific embodiments

[0031] The following will further elaborate on the present utility model in conjunction with the attached Figures 1-6 drawings.

[0032] A valve time-sharing control structure, as shown in Figures 1-6As shown in the figure, this embodiment includes a valve body. Two groups of valve body flow channels are provided inside the valve body. Each group of valve body flow channels includes a liquid inlet 101, a liquid outlet 102, a liquid inlet channel 103, a liquid outlet channel 104, and a diaphragm setting cavity 105. The liquid inlet 101 of each group of valve body flow channels is used to connect to the corresponding external liquid inlet pipeline, and the liquid outlet 102 of each group of valve body flow channels is used to connect to the corresponding external liquid outlet pipeline. One end opening of the liquid inlet channel 103 of each group of valve body flow channels is connected to the liquid inlet 101 of the same group of valve body flow channels, and one end opening of the liquid outlet channel 104 of each group of valve body flow channels is connected to the liquid outlet 102 of the same group of valve body flow channels. The other end opening of the liquid inlet channel 103 of each group of valve body flow channels and the other end opening of the liquid outlet channel 104 of each group of valve body flow channels are respectively connected to the diaphragm setting cavity 105 of the same group of valve body flow channels. A diaphragm member 5 for closing or opening the other end opening of the liquid inlet channel 103 of the same group of valve body flow channels is provided in the diaphragm setting cavity 105 of each group of valve body flow channels. The specific number of valve body flow channels can be arbitrarily set according to the use requirements by using the existing technology. Generally, only one diaphragm setting cavity 105 is provided for each valve body flow channel. The number of liquid inlets 101, liquid outlets 102, liquid inlet channels 103, and liquid outlet channels 104 of each valve body flow channel can be arbitrarily set according to the use requirements by using the existing technology, and the functions of one-to-one, one-to-many, and many-to-many for liquid inlet and outlet can be realized.

[0033] The valve time-sharing control structure in this embodiment further includes a power input shaft 6, two groups of cooperatively arranged cams 7, and a transmission component. Two cam setting cavities 301 and two transmission component installation cavities 201 are further provided inside the valve body. Each transmission component installation cavity 201 corresponds to a cam setting cavity 301 and the diaphragm setting cavity 105 of the corresponding group of valve body flow channels respectively.

[0034] One end of the power input shaft 6 is located outside the valve body and is used to connect to an external driving member, and the connection method with the external driving member adopts the existing technology. In this embodiment, the power input shaft 6 can be connected to an external driving member such as a servo motor to achieve precise control. The other end of the power input shaft 6 extends into the valve body and is rotatably connected to the valve body. The power input shaft 6 sequentially passes through each cam setting cavity 301. Cams 7 are respectively installed at positions of the power input shaft 6 in each cam setting cavity 301. The outer peripheral surface of the cam 7 has a large radius section 701 and a small radius section 702.

[0035] A set of transmission components is provided in each transmission component installation cavity 201. Each set of transmission components has a power input end and a power output end. The power output end of each set of transmission components extends out of the corresponding transmission component installation cavity 201 and is connected to the diaphragm member 5 in the diaphragm setting cavity 105 of the corresponding valve body flow channel. The power input end of each set of transmission components abuts against the outer peripheral surface of the cooperatively arranged cam 7. When the large radius section 701 of the outer peripheral surface of the cam 7 abuts against the power input end of the corresponding set of transmission components, this set of transmission components tends to drive the diaphragm member 5 to close the other end opening of the liquid inlet channel 103 of the corresponding valve body flow channel; when the small radius section 702 of the outer peripheral surface of the cam 7 abuts against the power input end of the corresponding set of transmission components, this set of transmission components tends to drive the diaphragm member 5 to open the other end opening of the liquid inlet channel 103 of the corresponding valve body flow channel. The outer peripheral surface contours of the respective cams 7 can be designed separately according to the usage requirements and can be of different shapes, so that under the drive of the same power input shaft 6, the respective cams 7 generate different abutting states on the corresponding transmission components, thereby realizing the time-sharing control of the opening and closing of the respective valve body flow channels and realizing the control of the opening amount of the diaphragm member 5; it is also possible to make the structures of the two cams 7 completely the same and arrange them at a differential phase on the power input shaft 6, that is, there is a certain angle between the length direction lines of the two cams 7, and this angle can be adjusted arbitrarily according to the usage needs, and it can also play the role of realizing the time-sharing control of the opening and closing of the respective valve body flow channels.

[0036] Specifically, in this embodiment, the valve body includes a valve body flow channel setting block 1, a transmission component installation block 2, and a power input shaft installation block 3 that are connected in sequence. Each group of valve body flow channels is arranged on the valve body flow channel setting block 1. Each transmission component installation cavity 201 is provided on the transmission component installation block 2, and each cam setting cavity 301 is provided on the power input shaft installation block 3. The specific opening method of the valve body flow channel on the valve body flow channel setting block 1 adopts the prior art.

[0037] Specifically, in this embodiment, four rotating bearings 8 are installed on the power input shaft installation block 3. Each rotating bearing 8 is rotatably connected to the power input shaft 6 to ensure the stable and reliable rotation of the power input shaft 6. The valve body further includes a cover plate 4. The cover plate 4 is used to cover the power input shaft installation block 3 and seal each cam setting cavity 301 to protect the internal structure of the cam setting cavity 301 and prevent dust. The cover plate 4, the power input shaft installation block 3, the transmission component installation block 2, and the valve body flow channel setting block 1 are fixedly connected into a valve body by at least four screws, which is convenient for disassembly and assembly.

[0038] Specifically, in this embodiment, each set of transmission components includes a guide shaft 9 and a spring 10. The top end of the guide shaft 9 of each set of transmission components extends outward to form an annular flange portion 901. The top end of the guide shaft 9 of each set of transmission components serves as the power input end of the corresponding set of transmission components and is located in the corresponding transmission component installation cavity 201. And the top surface of the guide shaft 9 of each set of transmission components abuts against the outer peripheral surface of the cooperating cam 7. The bottom end of the guide shaft 9 of each set of transmission components extends out of the corresponding transmission component installation cavity 201 as the power output end of the corresponding set of transmission components and is connected to the corresponding diaphragm member 5. A spring 10 of the same set of transmission components is sleeved outside the guide shaft 9 of each set of transmission components and below the annular flange portion 901 of the guide shaft 9. The top end of the spring 10 of each set of transmission components abuts against the annular flange portion 901 of the guide shaft 9 of the same set of transmission components, and the bottom end of the spring 10 of each set of transmission components abuts against the inner wall of the corresponding transmission component installation cavity 201.

[0039] The axial centerlines of the guide shafts 9 of all sets of transmission components are parallel to each other and are all perpendicular to the axial centerline of the power input shaft 6, which is convenient for processing and assembly and ensures accurate movement of the overall internal structure.

[0040] The middle part of the bottom surface of each diaphragm member 5 is used to directly close or open the other end opening of the liquid inlet hole 103 of the corresponding valve body flow channel. A connecting stud portion 501 protrudes upward from the middle part of the top surface of each diaphragm member 5. The connecting stud portion 501 of each diaphragm member 5 is connected to the bottom end of the guide shaft 9 of the corresponding set of transmission components by a thread, which is convenient for disassembly, installation and maintenance.

[0041] When the large radius section 701 of the outer peripheral surface of the cam 7 pushes the corresponding guide shaft 9 downward, it overcomes the reverse elastic force of the spring 10, causing the diaphragm member 5 to move downward and tend to close the other end opening of the liquid inlet hole 103 of the corresponding valve body flow channel; when the small radius section 702 of the outer peripheral surface of the cam 7 abuts against the guide shaft 9, the guide shaft 9 moves upward under the action of the elastic force of the spring 10, causing the diaphragm member 5 to move upward and thus tend to open the other end opening of the liquid inlet hole 103 of the corresponding valve body flow channel. The spring 10 can effectively reset the guide shaft 9 and ensure the response speed.

[0042] Specifically, as Figure 3 and Figure 6As shown, in this embodiment, the diaphragm setting cavities 105 of each valve body flow channel are all opened on the top surface of the valve body flow channel setting block 1. A diaphragm positioning ring groove 106 is opened on the top surface of the valve body flow channel setting block 1 and outside each diaphragm setting cavity 105. A ring-shaped positioning protrusion 502 extends downward at the outer periphery of each diaphragm member 5. The ring-shaped positioning protrusions 502 of each diaphragm member 5 are respectively embedded in the corresponding diaphragm positioning ring grooves 106, which facilitates the installation and positioning of each diaphragm member 5. Ring-shaped pressing protrusions 202 protrude respectively at the bottom surface of the transmission component mounting block 2 corresponding to each diaphragm positioning ring groove 106. When the transmission component mounting block 2 is connected to the valve body flow channel setting block 1, the ring-shaped pressing protrusions 202 of the transmission component mounting block 2 respectively press the outer periphery of a corresponding diaphragm member 5 from above, ensuring the stable and reliable installation of the diaphragm member 5.

Claims

1. A valve time-sharing control structure, comprising a valve body. Multiple groups of valve body flow channels are provided inside the valve body. Each group of valve body flow channels includes a liquid inlet (101), a liquid outlet (102), a liquid inlet passage (103), a liquid outlet passage (104), and a diaphragm setting cavity (105). The liquid inlet (101) of each group of valve body flow channels is used to connect to a corresponding external liquid inlet pipeline, and the liquid outlet (102) of each group of valve body flow channels is used to connect to a corresponding external liquid outlet pipeline. One end opening of the liquid inlet passage (103) of each group of valve body flow channels is communicated with the liquid inlet (101) of the same group of valve body flow channels, and one end opening of the liquid outlet passage (104) of each group of valve body flow channels is communicated with the liquid outlet (102) of the same group of valve body flow channels. The other end opening of the liquid inlet passage (103) of each group of valve body flow channels and the other end opening of the liquid outlet passage (104) of each group of valve body flow channels are respectively communicated with the diaphragm setting cavity (105) of the same group of valve body flow channels. A diaphragm member (5) for closing or opening the other end opening of the liquid inlet passage (103) of the same group of valve body flow channels is provided in the diaphragm setting cavity (105) of each group of valve body flow channels. It is characterized in that: It further includes a power input shaft (6), several groups of cooperatively arranged cams (7) and transmission components. Inside the valve body, there are also several cam setting cavities (301) and several transmission component installation cavities (201). Each of the transmission component installation cavities (201) corresponds to one of the cam setting cavities (301) and the diaphragm setting cavity (105) of the corresponding group of valve body flow channels. One end of the power input shaft (6) is located outside the valve body and is used to connect with an external driving part. The other end of the power input shaft (6) extends into the valve body and is rotatably connected to the valve body. The power input shaft (6) sequentially passes through each of the cam setting cavities (301). The cams (7) are respectively installed at positions of the power input shaft (6) in each of the cam setting cavities (301). The outer peripheral surface of the cam (7) has a large radius section (701) and a small radius section (702). Each of the transmission component installation cavities (201) is respectively provided with a group of the transmission components. Each group of the transmission components has a power input end and a power output end. The power output end of each group of the transmission components extends out of the corresponding transmission component installation cavity (201) and is connected to the diaphragm part (5) in the diaphragm setting cavity (105) of the corresponding valve body flow channel. The power input end of each group of the transmission components abuts against the outer peripheral surface of the cooperatively arranged cam (7).

2. The valve time-sharing control structure according to claim 1, characterized in that: The valve body includes a valve body flow channel setting block (1), a transmission component installation block (2) and a power input shaft installation block (3) that are connected in sequence. Each group of the valve body flow channels is arranged on the valve body flow channel setting block (1). Each of the transmission component installation cavities (201) is provided on the transmission component installation block (2). Each of the cam setting cavities (301) is provided on the power input shaft installation block (3).

3. The valve time-sharing control structure according to claim 2, characterized in that: The valve body further includes a cover plate (4). The cover plate (4) is used to cover the power input shaft installation block (3) and close each of the cam setting cavities (301).

4. A valve time-sharing control structure according to claim 3, characterized in that: The cover plate (4), the power input shaft installation block (3), the transmission component installation block (2) and the valve body flow channel setting block (1) are fixedly connected by several screws to form the valve body.

5. A valve time-sharing control structure according to claim 2, characterized in that: Several rotating bearings (8) are installed on the power input shaft installation block (3). Each of the rotating bearings (8) is rotatably connected to the power input shaft (6).

6. The valve time-sharing control structure according to claim 2, wherein: Each of the transmission components in each group includes a guide shaft (9) and a spring (10). The top end of the guide shaft (9) of each group of transmission components extends outwardly to form an annular flange portion (901). The top end of the guide shaft (9) of each group of transmission components serves as the power input end of the transmission component in that group and is located in the corresponding transmission component installation cavity (201). And the top surface of the guide shaft (9) of each group of transmission components abuts against the outer peripheral surface of the cooperating cam (7). The bottom end of the guide shaft (9) of each group of transmission components serves as the power output end of the transmission component in that group and extends out of the corresponding transmission component installation cavity (201) and is connected to the corresponding diaphragm member (5). A spring (10) of the same group of transmission components is sleeved on the outside of the guide shaft (9) of each group of transmission components and below the annular flange portion (901) of the guide shaft (9). The top end of the spring (10) of each group of transmission components abuts against the annular flange portion (901) of the guide shaft (9) of the same group of transmission components, and the bottom end of the spring (10) of each group of transmission components abuts against the inner wall of the corresponding transmission component installation cavity (201).

7. The valve time-sharing control structure according to claim 6, characterized in that: The axial centerlines of the guide shafts (9) of all groups of transmission components are parallel to each other and are all perpendicular to the axial centerline of the power input shaft (6).

8. A valve time-sharing control structure according to claim 6, characterized in that: A connecting stud portion (501) protrudes upwardly from the middle of the top surface of each diaphragm member (5). The connecting stud portion (501) of each diaphragm member (5) is connected to the bottom end of the guide shaft (9) of the corresponding group of transmission components by threads. The middle of the bottom surface of each diaphragm member (5) is used to directly close or open the other end opening of the liquid inlet passage (103) of the corresponding valve body flow passage.

9. A valve time-sharing control structure according to claim 2, characterized in that: The diaphragm setting cavities (105) of each valve body flow passage are all opened on the top surface of the valve body flow passage setting block (1). A diaphragm positioning ring groove (106) is opened on the top surface of the valve body flow passage setting block (1) and outside each diaphragm setting cavity (105). An annular positioning protrusion (502) extends downwardly from the outer periphery of each diaphragm member (5). The annular positioning protrusions (502) of each diaphragm member (5) are respectively inserted into the corresponding diaphragm positioning ring grooves (106).

10. A valve time-sharing control structure according to claim 9, characterized in that: Annular pressing protrusions (202) protrude respectively from the bottom surface of the transmission component installation block (2) at positions corresponding to each diaphragm positioning ring groove (106). When the transmission component installation block (2) is connected to the valve body flow passage setting block (1), each of the annular pressing protrusions (202) of the transmission component installation block (2) presses the outer periphery of the corresponding diaphragm member (5) from above.

Images