Testing device for semiconductor processing

Abstract

The utility model relates to the technical field of semiconductor processing, in particular to a testing device for semiconductor processing, which comprises an ultrasonic scanning microscope main body, a conveyor belt main body is arranged below a lens of the ultrasonic scanning microscope main body, and the conveyor belt main body is made of flexible materials. An electric telescopic rod is installed at the center of the front portion of the ultrasonic scanning microscope body, and one end of the electric telescopic rod is fixedly connected with an L-shaped push plate. The output shaft of the output motor can always provide rotation output force for the output circular plate, the whole conveying gear rotates when the teeth rotate to be meshed with the output gear, the conveying belt body stops rotating when the teeth are separated from the output gear, and then rotation and rotation stopping of the conveying gear are achieved under the condition that the output motor is not turned off. The process of starting and stopping the output motor is replaced by a mechanical linkage mode, so that the situation that the service life of the output motor is shortened due to frequent starting and stopping of the output motor is prevented, and the practicability of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a testing device for semiconductor processing. Background Art

[0002] Semiconductors refer to materials whose electrical conductivity at room temperature is between that of conductors and insulators. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. Among them, as the main semiconductor component, the wafer will be tested before packaging. The purpose is to eliminate defective chips before packaging. In this process, an ultrasonic scanning microscope is usually used to detect the integrity of the welding pins on it.

[0003] For example, the existing patent publication number CN217963604U provides a testing device for semiconductor processing, including a substrate and a pressing block. The pressing block is fixedly welded at the center of the top of the substrate. Two groups of struts are respectively welded and fixed at both ends of the center of the top of the substrate. A bridging plate is fixedly connected between the tops of the struts. A conveyor belt is installed between the two sides of the top of the substrate. Slots are respectively arranged at both ends of the right side inside the substrate. A rotating handle is movably connected to the top of the slot. By respectively arranging slots at both ends of the right side inside the substrate and twisting the rotating handles at the slots, the threaded sleeves connected above can screw out the lead screws by virtue of the internal threads, so as to jack up or sink the connecting plate and the rollers. After the rollers contact the semiconductors on the conveyor belt, the blower at the top of the box body is immediately turned on, and the dust is sent to the storage box through the trachea through the small holes on the surface of the rollers, solving the problem of not cleaning the surface of the semiconductors.

[0004] In the above technology, the traditional conveying mechanism continuously conveys the products on it. When the products pass under the lens of the inspection device (ultrasonic microscope), in order to ensure the stability when detecting the wafer pins, it is necessary to stop the conveyor belt to make the parts relatively stationary. However, frequent opening and closing control of the conveyor belt output structure will reduce its service life.

[0005] Therefore, a testing device for semiconductor processing is proposed to solve the above problems. Summary of the Utility Model

[0006] In order to make up for the deficiencies of the prior art and solve the problem that in order to ensure the stability when detecting the wafer pins, it is necessary to stop the conveyor belt to make the parts relatively stationary, and frequent opening and closing control of the conveyor belt output structure will reduce its service life, a testing device for semiconductor processing is proposed.

[0007] The technical solution adopted by the present utility model to solve its technical problems is as follows: A testing device for semiconductor processing described in the present utility model includes an ultrasonic scanning microscope main body. Below the lens of the ultrasonic scanning microscope main body, there is a conveyor belt main body. The conveyor belt main body is made of flexible material. At the center of the front part of the ultrasonic scanning microscope main body, an electric telescopic rod is installed. One end of the electric telescopic rod is fixedly connected to an L-shaped push plate. The bottom surface of the L-shaped push plate is close to the top surface of the conveyor belt main body. Inside the inner wall of the conveyor belt main body, a gear chain is installed. At both ends inside the gear chain, transmission gears are meshingly installed. On the outer wall of the shaft rods of the two transmission gears, first circular grooves are opened near the edges at both ends. Below one of the transmission gears, an output assembly is installed, and below the other transmission gear, a support assembly is installed.

[0008] Preferably, the output assembly includes a first base and an output gear. One end of the shaft rod of the output gear is fixedly connected to the shaft rod of the transmission gear.

[0009] Preferably, at one end of the top of the first base, a first bracket is fixedly connected. The circular hole at one end of the first bracket is engaged with one of the first circular grooves. At the other end of the top of the first base, a motor bracket is fixedly connected.

[0010] Preferably, on the side of the motor bracket close to the first bracket, a U-shaped bracket is fixedly connected. At the center of the top of the U-shaped bracket, a second bracket is vertically installed. The circular hole at one end of the second bracket is engaged with the other first circular groove.

[0011] Preferably, an output motor is installed on the top of the motor bracket. On the outer wall of the output shaft of the output motor, a second circular groove is opened near the edge at one end. The second circular groove is engaged with the circular hole on the side wall of the U-shaped bracket.

[0012] Preferably, on the outer wall of the output shaft of the output motor, an output circular plate is fixedly connected. There are a plurality of teeth on the outer wall of the output circular plate. The plurality of teeth are equally angularly installed in the extending direction of the outer wall of the output circular plate. The plurality of teeth are close to each other. The teeth are meshed with the output gear.

[0013] Preferably, the support assembly includes a second base. At the top of both ends of the second base, third brackets are fixedly connected. The through holes at one end of the two third brackets are respectively engaged with the two first circular grooves.

[0014] The beneficial effects of the present utility model:

[0015] 1. In the present utility model, the output assembly serves as a structure that provides rotational output force for the conveyor belt main body. The output shaft of its affiliated output motor can continuously provide rotational output force for the output circular plate. When the teeth rotate and engage with the output gear, the conveyor gear rotates as a whole. When the teeth disengage from the output gear, the conveyor belt main body stops rotating. Thus, the rotation and stoppage of the conveyor gear can be achieved without shutting down the output motor, replacing the process of opening and closing the output motor in a mechanical linkage manner, and further preventing the reduction of the service life of the output motor caused by frequent opening and closing, thereby increasing the practicality of the device.

[0016] 2. In the present utility model, the conveyor belt main body is installed through the mutual cooperation between the output assembly and the support assembly. After the wafer is placed above the conveyor belt main body, it can move along with it. When it moves below the lens of the ultrasonic scanning microscope main body, the conveyor belt main body stops rotating. At this time, the ultrasonic scanning microscope main body detects it. The qualified wafers can continue to move with the conveyor belt main body, and the unqualified wafers are pushed out of the ultrasonic scanning microscope main body under the cooperation of the electric telescopic rod and the L-shaped push plate, removing the unqualified products from the device.

[0017] 3. In the present utility model, a circular plate is provided on the side wall of the conveyor gear, which can block and limit both sides of the meshing part during the meshing process between the conveyor gear and the gear chain, preventing the conveyor belt main body from deflecting during rotation. Description of the Drawings

[0018] The drawings described herein are used to provide a further understanding of the present utility model and constitute a part of this application. The schematic embodiments of the present utility model and their descriptions are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:

[0019] Figure 1 is the three-dimensional view of the present utility model;

[0020] Figure 2 is the three-dimensional view of the ultrasonic scanning microscope main body in the present utility model;

[0021] Figure 3 is the three-dimensional view of the split conveyor belt main body and conveyor gear in the present utility model;

[0022] Figure 4 is the three-dimensional view of the split output assembly in the present utility model;

[0023] Figure 5 is the three-dimensional view of the split support assembly in the present utility model;

[0024] Legend Explanation:

[0025] 1. Ultrasonic scanning microscope main body; 2. Conveyor belt main body; 11. Electric telescopic rod; 12. L-shaped push plate; 21. Gear chain; 3. Conveyor gear; 31. First circular groove; 4. Output component; 5. Support component; 41. First base; 42. Output gear; 411. First bracket; 412. Motor bracket; 413. U-shaped bracket; 414. Second bracket; 6. Output motor; 61. Second circular groove; 62. Output circular plate; 63. Teeth; 51. Second base; 52. Third bracket. Detailed implementation mode

[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

[0027] The following gives a specific embodiment.

[0028] Please refer to Figure 1 - Figure 5 , the present invention provides a test device for semiconductor processing, including an ultrasonic scanning microscope main body 1. A conveyor belt main body 2 is arranged below the lens of the ultrasonic scanning microscope main body 1. The conveyor belt main body 2 is made of flexible material. An electric telescopic rod 11 is installed at the front center of the ultrasonic scanning microscope main body 1. One end of the electric telescopic rod 11 is fixedly connected with an L-shaped push plate 12. The bottom surface of the L-shaped push plate 12 is close to the top surface of the conveyor belt main body 2. A gear chain 21 is installed on the inner wall of the conveyor belt main body 2. Both ends inside the gear chain 21 are meshed with a conveyor gear 3. First circular grooves 31 are opened on the outer walls of the shaft rods of the two conveyor gears 3 near the edges at both ends. An output component 4 is installed below one of the conveyor gears 3, and a support component 5 is installed below the other conveyor gear 3. The conveyor gears 3 meshed with the gear chain 21 inside the conveyor belt main body 2 are respectively installed below the lens of the ultrasonic scanning microscope main body 1 after being matched with the output component 4 and the support component 5. The wafer parts are placed at equal intervals on the top of the ultrasonic scanning microscope main body 1 and can rotate following its rotation. When the ultrasonic scanning microscope main body 1 detects the wafer parts, the conveyor gear 3 stops rotating. After the detection is completed, the conveyor gear 3 resumes rotation. The wafer parts in the next position up and down the conveyor belt main body 2 move to the detection range of the ultrasonic scanning microscope main body 1. Among them, the qualified wafer parts move with the conveyor gear 3, and the unqualified wafer parts are pushed out of the conveyor gear 3 under the cooperation of the electric telescopic rod 11 and the L-shaped push plate 12;

[0029] Such as Figure 1 , Figure 3 andFigure 4 As shown, the output component 4 includes a first base 41 and an output gear 42. One end of the shaft rod of the output gear 42 is fixedly connected to the shaft rod of the transmission gear 3. One end of the top of the first base 41 is fixedly connected with a first support 411. The circular hole at one end of the first support 411 is engaged with one of the first circular grooves 31. The other end of the top of the first base 41 is fixedly connected with a motor support 412. A U-shaped support 413 is fixedly connected to the side of the motor support 412 close to the first support 411. A second support 414 is vertically installed at the center of the top of the U-shaped support 413. The circular hole at one end of the second support 414 is engaged with the other first circular groove 31. A U-shaped support 413 is fixedly connected to the side of the motor support 412 close to the first support 411. A second support 414 is vertically installed at the center of the top of the U-shaped support 413. The circular hole at one end of the second support 414 is engaged with the other first circular groove 31. An output circular plate 62 is fixedly connected to the outer wall of the output shaft of the output motor 6. There are a plurality of teeth 63 on the outer wall of the output circular plate 62. The plurality of teeth 63 are equally angularly installed along the direction of the outer wall of the output circular plate 62. The plurality of teeth 63 are close to each other. The teeth 63 are meshed with the output gear 42. The output component 4 is linked with the transmission gear 3 through the cooperation of the first support 411 and the second support 414 on the first base 41 and the first circular groove 31. After the output motor 6 is supported by the motor support 412, through the meshing between the teeth 63 on the output circular plate 62 at one end of its output shaft and the output gear 42, a rotational output force is provided for the transmission gear 3. When the teeth 63 are disengaged from the output gear 42, the transmission gear 3 stops rotating. Among them, the output motor 6 is engaged with the circular hole on the side wall of the U-shaped support 413 through the second circular groove 61 to maintain the relative state between the output circular plate 62 and the output gear 42, increasing the rationality of the device structure;

[0030] As Figure 1 and Figure 5 shown, the support component 5 includes a second base 51. Third supports 52 are fixedly connected to the tops of both ends of the second base 51. The through holes at one ends of the two third supports 52 are respectively engaged with the two first circular grooves 31. The support component 5 cooperates with the first circular groove 31 through the third support 52 on the second base 51 to play an auxiliary supporting role for the other end of the transmission gear 3 while not affecting the rotation of the conveyor belt main body 2, the gear chain 21 and the transmission gear 3;

[0031] ​Working principle: The conveyor gears 3 meshed with the gear chain 21 inside the conveyor belt main body 2 are respectively installed under the lens of the ultrasonic scanning microscope main body 1 after being cooperated with the output assembly 4 and the support assembly 5. The wafer parts are placed at equal intervals on the top of the ultrasonic scanning microscope main body 1 and can rotate following its rotation. When the ultrasonic scanning microscope main body 1 detects the wafer parts, the conveyor gears 3 stop rotating. After the detection is completed, the conveyor gears 3 resume rotating, and the wafer parts one position up and down the conveyor belt main body 2 move into the detection range of the ultrasonic scanning microscope main body 1. Among them, the qualified wafer parts move with the conveyor gears 3, and the unqualified wafer parts are pushed out of the conveyor gears 3 under the cooperation of the electric telescopic rod 11 and the L-shaped push plate 12. The output assembly 4 is linked with the conveyor gears 3 through the cooperation of the first support 411 and the second support 414 on the first base 41 and the first annular groove 31. After the output motor 6 is supported by the motor support 412, the meshing between the teeth 63 on the circular plate 62 at one end of its output shaft and the output gear 42 provides a rotational output force for the conveyor gears 3. When the teeth 63 are disengaged from the output gear 42, the conveyor gears 3 stop rotating. Among them, the output motor 6 is engaged with the circular hole on the side wall of the U-shaped support 413 through the second annular groove 61 to maintain the relative state between the output circular plate 62 and the output gear 42. The support assembly 5 is cooperated with the first annular groove 31 through the third support 52 on the second base 51, and plays an auxiliary supporting role for the other end of the conveyor gears 3 while not affecting the rotation of the conveyor belt main body 2, the gear chain 21 and the conveyor gears 3.

[0032] The above shows and describes the basic principle, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed.

Claims

1. A testing device for semiconductor processing, characterized in that: It includes an ultrasonic scanning microscope main body (1). Below the lens of the ultrasonic scanning microscope main body (1), a conveyor belt main body (2) is provided. The conveyor belt main body (2) is made of flexible material. At the center of the front part of the ultrasonic scanning microscope main body (1), an electric telescopic rod (11) is installed. One end of the electric telescopic rod (11) is fixedly connected to an L-shaped push plate (12). The bottom surface of the L-shaped push plate (12) is close to the top surface of the conveyor belt main body (2). Inside the wall of the conveyor belt main body (2), a gear chain (21) is installed. At both ends inside the gear chain (21), transmission gears (3) are meshingly installed. At the outer wall of the shafts of the two transmission gears (3), first circular grooves (31) are opened near both ends of the edges. Below one of the transmission gears (3), an output assembly (4) is installed. Below the other transmission gear (3), a support assembly (5) is installed.

2. The testing device for semiconductor processing according to claim 1, wherein: The output assembly (4) includes a first base (41) and an output gear (42). One end of the shaft of the output gear (42) is fixedly connected to the shaft of the transmission gear (3).

3. The testing device for semiconductor processing according to claim 2, characterized in that: At one end of the top of the first base (41), a first bracket (411) is fixedly connected. The round hole at one end of the first bracket (411) is engaged with one of the first circular grooves (31). At the other end of the top of the first base (41), a motor bracket (412) is fixedly connected.

4. A testing device for semiconductor processing according to claim 3, wherein: The motor bracket (412) is fixedly connected with a U-shaped bracket (413) on the side close to the first bracket (411). At the center of the top of the U-shaped bracket (413), a second bracket (414) is vertically installed. The round hole at one end of the second bracket (414) is engaged with the other first circular groove (31).

5. The test device for semiconductor processing according to claim 4, characterized in that: An output motor (6) is installed on the top of the motor bracket (412). At the outer wall of the output shaft of the output motor (6), a second circular groove (61) is opened near one end of the edge. The second circular groove (61) is engaged with the round hole on the side wall of the U-shaped bracket (413).

6. The test device for semiconductor processing according to claim 5, characterized in that: On the outer wall of the output shaft of the output motor (6), an output circular plate (62) is fixedly connected. On the outer wall of the output circular plate (62), a plurality of teeth (63) are provided. The plurality of teeth (63) are equally angularly installed in the extending direction of the outer wall of the output circular plate (62). The plurality of teeth (63) are close to each other. The teeth (63) are meshed with the output gear (42).

7. A testing device for semiconductor processing according to claim 1, wherein: The support assembly (5) includes a second base (51). At both ends of the top of the second base (51), third brackets (52) are fixedly connected. The through holes at one end of the two third brackets (52) are respectively engaged with the two first circular grooves (31).

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