Transfer device and substrate feeding system
By adopting the design of load transfer equipment and temporary storage stations in semiconductor processing, the fast and efficient load transfer of the substrate is achieved, the high-capacity demand under space limitations is solved, the equipment structure is simplified, and the substrate loading speed is improved.
Patent Information
- Application Number
- CN202422123314.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-30
- Publication Date
- 2025-07-29
- Estimated Expiration
- 2034-08-30
AI Technical Summary
In semiconductor processing, how to achieve fast, efficient and stable load transfer of the substrate in a limited space, especially how to improve the loading speed and production capacity of the substrate.
The load transfer equipment is adopted, including a temporary storage stand, a transport rack and a driving unit. The vertical and horizontal movement of the transport rack between the initial position and the unloading position is achieved to achieve rapid load transfer of the substrate, and the two substrates within a single stroke are realized through the setting of the temporary storage stand.
The feeding speed and production capacity of the substrate are improved, the equipment structure is simplified, the working space is saved, and the stable load transfer of the substrate is achieved.
Smart Images
Figure CN223167456U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor processing, in particular to a transfer device and a substrate loading system. Background Art
[0002] The semiconductor industry has high requirements for production capacity and processing efficiency. At the same time, due to site and space constraints, the number and size of equipment in semiconductor processing workshops are often also limited. Therefore, how to achieve fast, efficient and stable transfer of substrates in a limited space is an urgent problem that needs to be solved in this field. Utility Model Content
[0003] The purpose of the utility model is to provide a transfer device and a substrate loading system, which can save working space and improve production capacity.
[0004] To achieve this purpose, the present invention adopts the following technical solutions:
[0005] A transfer device is used to transfer the substrate from the flower basket clamp to the conveyor mechanism, and the transfer device includes:
[0006] A temporary storage platform, which is arranged between the flower basket clamp and the conveying mechanism;
[0007] A transfer rack, the transfer rack having a first supporting portion and a second supporting portion, wherein the first supporting portion and the second supporting portion are both used to support the substrate;
[0008] The transfer rack has an initial position and a plate unloading position along a first direction. In the initial position, the first supporting portion is vertically opposite to the base plate on the flower basket clamp, and the second supporting portion is vertically opposite to the temporary storage table. In the plate unloading position, the first supporting portion is vertically opposite to the temporary storage table, and the second supporting portion is vertically opposite to the conveying mechanism.
[0009] A driving unit, wherein the transfer rack is arranged on the driving unit, and the driving unit is used to drive the transfer rack to move vertically. The driving unit is also used to drive the transfer rack to move between the initial position and the unloading position along the first direction.
[0010] Preferably, the transfer rack includes a connecting plate and a plurality of first push rods and a plurality of second push rods arranged on both sides of the connecting plate along the first direction, the connecting plate is connected to the driving unit, the plurality of first push rods are arranged on the connecting plate at intervals perpendicular to the first direction, and the plurality of second push rods are arranged on the connecting plate at intervals perpendicular to the first direction;
[0011] A plurality of the first tappets constitute the first supporting portion, and a plurality of the second tappets constitute the second supporting portion.
[0012] Preferably, rubber pads are provided on both the first tappet and the second tappet.
[0013] Preferably, the temporary storage table includes a first bracket and a second bracket arranged on both sides of the transfer rack perpendicular to the first direction, and the first bracket and the second bracket are both provided with a plurality of pillars, and the pillars are used to abut against the substrate.
[0014] Preferably, the support on the first bracket is threadedly connected to the first bracket, and the support on the second bracket is threadedly connected to the second bracket.
[0015] Preferably, the driving unit includes a first driving member and a second driving member, the transfer rack is provided on the first driving member, and the first driving member is capable of driving the transfer rack to move vertically;
[0016] The first driving member is disposed on the second driving member, and the second driving member can drive the first driving member to move along the first direction.
[0017] The substrate loading system includes a conveying mechanism and the above-mentioned transfer equipment.
[0018] Preferably, a side panel of the conveying mechanism is vertically provided with an avoidance gap corresponding to the second supporting part, and the second supporting part can be vertically moved into the avoidance gap so that the substrate on the second supporting part is vertically abutted against the roller of the conveying mechanism.
[0019] The beneficial effects of the utility model are:
[0020] The transfer device provided by the present invention has the following characteristics: when the transfer rack is in the initial position, since the first support part and the second support part are respectively vertically opposite to the substrate on the flower basket clamp and the temporary storage table, and the driving unit can drive the transfer rack to move vertically, the first support part and the second support part can respectively lift and support the substrate on the flower basket clamp and the substrate on the temporary storage table in the vertical direction; when the transfer rack is in the unloading position, since the first support part and the second support part are respectively vertically opposite to the temporary storage table and the conveying mechanism, the first support part and the second support part can respectively place the supported substrates on the temporary storage table and the conveying mechanism in the vertical direction under the drive of the driving unit; since the driving unit can also drive the transfer rack to move between the initial position and the unloading position, the transfer rack can cyclically transfer the substrate from the flower basket clamp to the temporary storage table The transfer rack is placed on the temporary storage table, and then the substrate is finally transferred from the temporary storage table to the conveying mechanism, thereby realizing rapid transfer of the substrate; since the temporary storage table is provided, each time the transfer rack transfers the substrate, there will always be a substrate placed on the temporary storage table, and each time the transfer rack transfers the substrate on the temporary storage table to the conveying mechanism, the substrate in the basket clamp is transferred to the temporary storage table again, which is equivalent to carrying two substrates in a single stroke, greatly improving the loading speed of the substrate and thus improving the production capacity; at the same time, since the transfer rack has a first supporting part and a second supporting part, the first supporting part and the second supporting part only need to move vertically in the initial position and the unloading position to support or place the substrate, so each time the substrate is transferred, there is no need to rotate or adjust the position of the transfer rack to realize smooth transfer of the substrate, thereby simplifying the equipment and saving the rotating working space.
[0021] The substrate loading system provided by the utility model includes a conveying mechanism and adopts the above-mentioned transfer equipment; the substrate loading system can realize the simultaneous transportation of two substrates within a single stroke of the transfer rack, thereby improving the loading speed of the substrates and further improving the production capacity. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 This is an axonometric diagram of a substrate loading system provided by a specific embodiment of the present utility model;
[0023] Figure 2 It is a side view of a substrate loading system provided by a specific embodiment of the utility model;
[0024] Figure 3 This is an axonometric diagram of the transfer rack and the drive unit provided in a specific embodiment of the present utility model;
[0025] Figure 4 It is a side view of the transfer rack and the drive unit provided in a specific embodiment of the present utility model.
[0026] In the figure:
[0027] 110 - Side panel; 130 - Avoidance notch; 120 - Roller shaft;
[0028] 200 - Substrate;
[0029] 1 - Temporary storage table; 11 - First bracket; 111 - Support pillar; 12 - Second bracket;
[0030] 2 - Transfer rack; 21 - Connecting plate; 22 - First push rod; 23 - Second push rod; 24 - Rubber pad;
[0031] 3 - Driving unit; 31 - First driving member; 32 - Second driving member. Detailed implementation mode
[0032] The present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that, for the sake of convenience of description, only the parts related to the present utility model are shown in the drawings, rather than all the structures.
[0033] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.
[0034] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "above the top", and "on the top" of the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature has a higher horizontal height than the second feature. The first feature being "below", "below the bottom", and "under the bottom" of the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the first feature has a lower horizontal height than the second feature.
[0035] In the description of this embodiment, terms such as "upper," "lower," "right," and "left" are used to refer to positions or locations based on the positions or locations shown in the accompanying drawings. These terms are intended solely to facilitate description and simplify operation, and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.
[0036] like Figure 1 and Figure 2As shown, the utility model provides a transfer device for transferring a substrate 200 from a flower basket clamp to a conveying mechanism, the transfer device includes a temporary storage table 1, a transfer rack 2 and a drive unit 3, the temporary storage table 1 is arranged between the flower basket clamp and the conveying mechanism; the transfer rack 2 has a first supporting portion and a second supporting portion, both of which are used to support the substrate 200; the transfer rack 2 has an initial position and a board unloading position along a first direction, in the initial position, the first supporting portion is arranged vertically opposite to the substrate 200 on the flower basket clamp, and the second supporting portion is arranged vertically opposite to the temporary storage table 1; in the board unloading position, the first supporting portion is arranged vertically opposite to the temporary storage table 1, and the second supporting portion is arranged vertically opposite to the conveying mechanism; the transfer rack 2 is arranged on the drive unit 3, the drive unit 3 is used to drive the transfer rack 2 to move vertically, and the drive unit 3 is also used to drive the transfer rack 2 to move between the initial position and the board unloading position along the first direction. In this embodiment, when the transfer rack 2 is in the initial position, since the first supporting portion and the second supporting portion are respectively opposite to the substrate 200 on the flower basket clamp and the temporary storage table 1 in the vertical direction, and the driving unit 3 can drive the transfer rack 2 to move vertically, the first supporting portion and the second supporting portion can respectively lift and support the substrate 200 on the flower basket clamp and the substrate 200 on the temporary storage table 1 in the vertical direction; when the transfer rack 2 is in the unloading position, since the first supporting portion and the second supporting portion are respectively opposite to the temporary storage table 1 and the conveying mechanism in the vertical direction, the first supporting portion and the second supporting portion can respectively place the supported substrates 200 vertically on the temporary storage table 1 and the conveying mechanism under the drive of the driving unit 3; since the driving unit 3 can also drive the transfer rack 2 to move between the initial position and the unloading position, the transfer rack 2 can cyclically transfer the substrate 200 from the flower basket clamp to the temporary storage table 1, and then from the temporary storage table 1 The substrate 200 is finally transferred to the conveying mechanism, thereby realizing the rapid transfer of the substrate 200; since the temporary storage table 1 is provided, each time the transfer rack 2 transfers the substrate 200, there will always be a substrate 200 placed on the temporary storage table 1, and each time the transfer rack 2 transfers the substrate 200 on the temporary storage table 1 to the conveying mechanism, the substrate 200 in the flower basket clamp is transferred to the temporary storage table 1, which is equivalent to carrying two substrates 200 in a single stroke, greatly improving the loading speed of the substrate 200 and thus improving the production capacity; at the same time, since the transfer rack 2 has a first supporting part and a second supporting part, the first supporting part and the second supporting part only need to move vertically in the initial position and the unloading position to support or place the substrate 200, so each time the substrate 200 is transferred, there is no need to rotate or adjust the position of the transfer rack 2 to realize the smooth transfer of the substrate 200, thereby simplifying the equipment and saving the rotating working space. Specifically, the transfer device is used to transfer the substrate 200 transported by the flower basket clamp to the roller 120 of the conveying mechanism. The roller 120 of the conveying mechanism rotates to transport the substrate 200 to a designated area to be processed for subsequent processing.
[0037] Further, if Figure 3 As shown, the transfer rack 2 includes a connecting plate 21 and a plurality of first push rods 22 and a plurality of second push rods 23 arranged on both sides of the connecting plate 21 along a first direction. The connecting plate 21 is connected to the drive unit 3. The plurality of first push rods 22 are arranged on the connecting plate 21 at intervals perpendicular to the first direction, and the plurality of second push rods 23 are arranged on the connecting plate 21 at intervals perpendicular to the first direction. The plurality of first push rods 22 constitute a first support portion, and the plurality of second push rods 23 constitute a second support portion. In this embodiment, the transfer rack 2 has an H-shaped structure, the connecting plate 21 is connected to the drive unit 3, and two first push rods 22 and two second push rods 23 are provided. The first push rods 22 and the second push rods 23 are respectively arranged on both sides of the connecting plate 21 along the first direction. The two first push rods 22 are arranged at intervals perpendicular to the first direction, and the two second push rods 23 are arranged at intervals perpendicular to the first direction, so as to stably support the substrate 200.
[0038] Specifically, if Figure 3 As shown, rubber pads 24 are provided on both the first push rod 22 and the second push rod 23. In this embodiment, when the transfer rack 2 transfers the substrate 200, the rubber pads 24 abut against the substrate 200. The rubber pads 24 can increase the friction between the substrate 200 and the first push rod 22 and the second push rod 23, thereby preventing the substrate 200 from sliding relative to the first push rod 22 or the second push rod 23 during transfer, thereby ensuring the accuracy and effectiveness of the transfer.
[0039] Further, if Figure 1 and Figure 2 As shown, the temporary storage table 1 includes a first bracket 11 and a second bracket 12, which are arranged perpendicularly to a first direction on either side of the transfer rack 2. Each of the first bracket 11 and the second bracket 12 is provided with a plurality of struts 111, which are used to abut against the substrate 200. In this embodiment, the first bracket 11 and the second bracket 12 are respectively arranged on either side of the drive unit 3, and the substrate 200 is placed on the struts 111 of the first bracket 11 and the second bracket 12. Specifically, the distance between the first bracket 11 and the second bracket 12 is greater than the width of the transfer rack 2 and less than the length of the substrate 200, so that the transfer rack 2 can vertically support the substrate 200 upward from between the first bracket 11 and the second bracket 12.
[0040] Specifically, the support 111 on the first bracket 11 is threadedly connected to the first bracket 11, and the support 111 on the second bracket 12 is threadedly connected to the second bracket 12. In this embodiment, the support 111 is threadedly connected to the first bracket 11 and the second bracket 12, so that the levelness and height of the substrate 200 placed on the temporary storage table 1 can be adjusted.
[0041] Further, if Figure 3 and Figure 4As shown, the drive unit 3 includes a first drive member 31 and a second drive member 32. The transfer rack 2 is mounted on the first drive member 31, which can drive the transfer rack 2 to move vertically. The first drive member 31 is mounted on the second drive member 32, which can drive the first drive member 31 to move in the first direction. In this embodiment, the first drive member 31 and the second drive member 32 are both electric cylinders commonly used in the art. The second drive member 32 is mounted along the first direction, and the first drive member 31 is mounted vertically on the push rod of the second drive member 32. Therefore, the second drive member 32 can drive the first drive member 31 to move in the first direction. The transfer rack 2 is mounted on the push rod of the first drive member 31. Therefore, the first drive member 31 can drive the transfer rack 2 to move vertically. In another embodiment, the first drive member 31 and the second drive member 32 are both pneumatic cylinders.
[0042] like Figure 1 and Figure 2 As shown, the present invention also provides a substrate loading system, which includes a conveying mechanism and the above-mentioned transfer device. In this embodiment, Figure 1 and Figure 2 In the figure, two substrate loading systems are symmetrically assembled together; the substrate loading system can realize the simultaneous transportation of two substrates 200 within a single stroke of the transfer rack 2, thereby improving the loading speed of the substrates 200 and further improving the production capacity.
[0043] Specifically, if Figure 1As shown, an avoidance notch 130 corresponding to the second support portion is vertically formed in the side enclosure plate 110 of the transfer mechanism. The second support portion can move vertically into the avoidance notch 130 so that the substrate 200 on the second support portion abuts against the roller shaft 120 of the transfer mechanism vertically. In this embodiment, the transfer mechanism is used to transfer the substrate 200 to a specified area to be processed. The transfer mechanism has a side enclosure plate 110 and roller shafts 120. There are multiple roller shafts 120, and the multiple roller shafts 120 are arranged at intervals perpendicular to the first direction. The side enclosure plate 110 is arranged on the side of the roller shafts 120 to enclose and protect the roller shafts 120 and the substrate 200 transported thereon. An avoidance notch 130 is formed in the side enclosure plate 110 corresponding to the gap between two adjacent roller shafts 120. The avoidance notch 130 is used to accommodate the second support portion. When the transfer rack 2 moves to the plate unloading position, the transfer rack 2 can move vertically downward to make the second support portion move into the avoidance notch 130. At this time, the height of the second support portion is lower than the height of the roller shaft 120, and the substrate 200 on the second support portion is then supported by the roller shaft 120. Specifically, two avoidance notches 130 are formed corresponding to the second push rods 23, and the avoidance notches 130 are directly opposite to the gap between two adjacent roller shafts 120. After the two second push rods 23 move vertically into the two avoidance notches 130 respectively, the second push rods 23 are located between two adjacent roller shafts 120, so the normal operation of the transfer mechanism is not interfered. At the same time, the substrate 200 on the second push rods 23 is supported by the roller shaft 120 higher than the second push rods 23, thus completing the transfer of the substrate 200.
[0044] The working process of the substrate loading system provided in this embodiment is roughly as follows:
[0045] First, the transfer rack 2 is located at the initial position and its height is lower than the height of the first substrate 200 on the flower basket clamp. Subsequently, the driving unit 3 drives the transfer rack 2 to move vertically upward, and then the first support portion of the transfer rack 2 jacks up and supports the first substrate 200 on the flower basket clamp. Since the width of the second support portion is smaller than the distance between the first bracket 11 and the second bracket 12, the second support portion synchronously rises with the first support portion in the space between the first bracket 11 and the second bracket 12.
[0046] After that, the transfer rack 2 moves along the first direction to the plate unloading position under the drive of the driving unit 3. At this time, the first support portion is vertically aligned with the space between the first bracket 11 and the second bracket 12, and the second support portion is vertically aligned with the transfer mechanism. Subsequently, the driving unit 3 drives the transfer rack 2 to move vertically downward, and the first substrate 200 on the first support portion also descends accordingly until the height of the first support portion is lower than that of the first bracket 11 and the second bracket 12, so that the first substrate 200 abuts against the first bracket 11 and the second bracket 12, thereby placing the first substrate 200 on the temporary storage table 1.
[0047] After that, the driving unit 2 drives the transfer rack 2 to return to the initial position along the first direction and repeats the above operations. At this time, since the first substrate 200 is placed on the temporary storage table 1, when the transfer rack 2 moves upward at the initial position, the first supporting portion jacks up the second substrate 200 on the flower basket clamp, and the second supporting portion jacks up the first substrate 200 on the temporary storage table 1. Subsequently, the transfer rack 2 drives the first substrate 200 and the second substrate 200 to move to the unloading position. At this time, the first substrate 200 and the second substrate 200 are respectively aligned with the conveying mechanism and the temporary storage table 1 in the vertical direction. Therefore, when the driving unit 3 drives the transfer rack 2 to descend, the first substrate 200 and the second substrate 200 will respectively fall onto the conveying mechanism and the temporary storage table 1, thus completing the simultaneous transfer of the two substrates 200.
[0048] After the transfer of the first substrate 200 and the second substrate 200 is completed, the transfer rack 2 will return to the initial position again under the drive of the driving unit 3 and repeat the above steps, thereby realizing the transfer of the substrate 200 between the flower basket clamp and the conveying mechanism.
[0049] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention and are not intended to limit the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.
Claims
1. Transfer device, characterized in that, For transferring a substrate (200) from a flower basket clamp to a conveying mechanism, the transfer device includes: A temporary storage table (1) disposed between the flower basket clamp and the conveying mechanism; A transfer rack (2) having a first supporting portion and a second supporting portion, both the first supporting portion and the second supporting portion being configured to support the substrate (200); The transfer rack (2) has an initial position and a plate unloading position along a first direction. At the initial position, the first supporting portion is vertically aligned with the substrate (200) on the flower basket clamp, and the second supporting portion is vertically aligned with the temporary storage table (1); at the plate unloading position, the first supporting portion is vertically aligned with the temporary storage table (1), and the second supporting portion is vertically aligned with the conveying mechanism; A driving unit (3), the transfer rack (2) is disposed on the driving unit (3), the driving unit (3) is configured to drive the transfer rack (2) to move vertically, and the driving unit (3) is further configured to drive the transfer rack (2) to move between the initial position and the plate unloading position along the first direction.
2. The transfer device according to claim 1, characterized in that, The transfer rack (2) includes a connecting plate (21) and a plurality of first ejector rods (22) and a plurality of second ejector rods (23) disposed on both sides of the connecting plate (21) along the first direction. The connecting plate (21) is connected to the driving unit (3). The plurality of first ejector rods (22) are spaced apart from each other perpendicular to the first direction on the connecting plate (21), and the plurality of second ejector rods (23) are spaced apart from each other perpendicular to the first direction on the connecting plate (21); The plurality of first ejector rods (22) constitute the first supporting portion, and the plurality of second ejector rods (23) constitute the second supporting portion.
3. The transfer device according to claim 2, wherein, Rubber pads (24) are provided on both the first ejector rod (22) and the second ejector rod (23).
4. The transfer device according to claim 1, characterized in that The temporary storage table (1) includes a first bracket (11) and a second bracket (12) disposed on both sides of the transfer rack (2) perpendicular to the first direction. A plurality of support columns (111) are provided on both the first bracket (11) and the second bracket (12), and the support columns (111) are configured to abut against the substrate (200).
5. The transfer device according to claim 4, wherein, The support columns (111) on the first bracket (11) are threadedly connected to the first bracket (11), and the support columns (111) on the second bracket (12) are threadedly connected to the second bracket (12).
6. The transfer device according to claim 1, wherein The driving unit (3) includes a first driving member (31) and a second driving member (32). The transfer rack (2) is disposed on the first driving member (31), and the first driving member (31) is capable of driving the transfer rack (2) to move vertically; The first driving member (31) is disposed on the second driving member (32), and the second driving member (32) is capable of driving the first driving member (31) to move along the first direction.
7. Substrate loading system, characterized in that, A conveying mechanism and the transfer device according to any one of claims 1-6.
8. The substrate loading system according to claim 7, wherein An avoidance notch (130) corresponding to the second supporting part is vertically formed in a side wall plate (110) of the conveying mechanism, and the second supporting part can vertically move into the avoidance notch (130) so that a substrate (200) on the second supporting part abuts against a roller shaft (120) of the conveying mechanism vertically.