Gate valve and vacuum pump mounting and switching device

Abstract

The utility model discloses a gate valve and vacuum pump installation switching device which comprises a molecular pump and a gate valve, a switching plate is arranged between the molecular pump and the gate valve, a sealing ring with a filter screen is arranged between the molecular pump and the switching plate, and the molecular pump and the switching plate are connected in a locking mode. One side of the gate valve is provided with a central sealing ring and is connected with the cavity cover plate weldment in a locking manner, and the other side of the gate valve is provided with a central sealing ring and is connected with the adapter plate in a locking manner; the adapter plate is connected with the cavity cover plate weldment in a locking mode through a pump fixing pressing plate and a pressing plate bolt, and equal-height positioning columns are arranged between the pump fixing pressing plate and the cavity cover plate weldment. The mounting and switching device for the gate valve and the vacuum pump, provided by the utility model, not only has better sealing performance, can effectively solve the problem of connection between the molecular pump and the gate valve as well as between the molecular pump and the cavity, is suitable for stable operation in a frequent vacuum breaking state, but also is simple in structure and convenient to mount and overhaul.

Description

Technical Field

[0001] The utility model relates to an installation adapter device, in particular to an installation adapter device for a flap valve and a vacuum pump. Background Art

[0002] The start and stop of a molecular pump need to meet certain vacuum conditions to operate normally. To ensure the start and stop conditions, a flap valve needs to be set at the front end of the molecular pump. Since the connecting flanges between the two do not match. Therefore, it is necessary to provide an installation adapter device for a flap valve and a vacuum pump. This adapter plate can be compatible with the connection of the two flanges. Finally, the flap valve needs to be connected to the cavity cover, so a corresponding flange connection port is also required on the cavity cover. In addition, due to the frequent evacuation and breaking of vacuum in the whole system, frequent switching will cause the bolts to loosen. Therefore, how to effectively solve the reliable connection of the flap valve, molecular pump and cavity is crucial. Summary of the Utility Model

[0003] The technical problem to be solved by the utility model is to provide an installation adapter device for a flap valve and a vacuum pump, which not only has good sealing performance, can effectively solve the connection problems of the molecular pump, flap valve and cavity, is suitable for stable operation under the state of frequent vacuum breaking, but also has a simple structure and is convenient for installation and maintenance.

[0004] The technical solution adopted by the utility model to solve the above technical problem is to provide an installation adapter device for a flap valve and a vacuum pump, including a molecular pump and a flap valve. Among them, a transfer plate is arranged between the molecular pump and the flap valve. A filter screen seal ring is arranged between the molecular pump and the transfer plate and is locked and connected. A central seal ring is arranged on one side of the flap valve and is locked and connected with the cavity cover weldment. A central seal ring is arranged on the other side of the flap valve and is locked and connected with the transfer plate. The transfer plate is locked and connected with the cavity cover weldment through a pump fixing pressing plate and a pressing plate bolt. An equal height positioning column is arranged between the pump fixing pressing plate and the cavity cover weldment.

[0005] The utility model has the following beneficial effects compared with the prior art: The installation adapter device for a flap valve and a vacuum pump provided by the utility model has the following advantages: 1. It is suitable for stable operation under the state of frequent vacuum breaking; 2. It has good sealing performance and can effectively solve the connection problems of the molecular pump, flap valve and cavity; 3. The connection structure is simple and convenient for manual disassembly and installation; 4. The structure adopts multiple common parts, which is convenient for installation and maintenance. Brief Description of the Drawings

[0006] Figure 1 It is a schematic structural diagram of the installation adapter device for a flap valve and a vacuum pump of the utility model;

[0007] Figure 2 It is a connection schematic diagram of the flap valve assembly and the high vacuum pump assembly of the utility model;

[0008] Figure 3 Explosion structure schematic diagram of the high vacuum pump assembly of the present utility model;

[0009] Figure 4 Explosion structure schematic diagram of the gate valve assembly of the present utility model.

[0010] The markings in the figure are:

[0011] 1. High vacuum pump assembly; 2. Gate valve assembly; 101. Molecular pump; 102. Filtered seal ring; 103. Pressure plate bolt; 104. Pump locking bolt; 105. Pump fixing pressure plate; 106. Gate valve locking bolt; 107. Adapter plate; 108. Equal height positioning post; 201. Central seal ring; 202. Gate valve; 203. Valve locking bolt; 204. Cavity cover welding part. Specific implementation mode

[0012] The present utility model will be further described below in conjunction with the drawings and embodiments.

[0013] Please refer to Figures 1-4 , The gate valve and vacuum pump installation adapter device provided by the present utility model includes a molecular pump 101 and a gate valve 202. Among them, an adapter plate 107 is arranged between the molecular pump 101 and the gate valve 202. A filtered seal ring 102 is arranged between the molecular pump 101 and the adapter plate 107 and is locked and connected. A central seal ring 201 is arranged on one side of the gate valve 202 and is locked and connected to the cavity cover welding part 204. A central seal ring 201 is arranged on the other side of the gate valve 202 and is locked and connected to the adapter plate 107. The adapter plate 107 is locked and connected to the cavity cover welding part 204 through a pump fixing pressure plate 105 and a pressure plate bolt 103. An equal height positioning post 108 is arranged between the pump fixing pressure plate 105 and the cavity cover welding part 204.

[0014] Since the start and stop of the molecular pump 101 need to meet certain vacuum conditions to operate normally, in order to ensure the start and stop conditions, a gate valve 202 is provided at the front end of the molecular pump 101. Since the connection flanges between the two do not match, an adapter plate 107 is designed to ensure that they can be tightly connected together. Since the entire system frequently evacuates and breaks the vacuum, and frequent switching will cause the bolts to loosen, a pump fixing pressure plate 105 is installed. The pump fixing pressure plate 105 is locked to the cavity cover weldment 204 in the gate valve assembly 2 by the pressure plate bolts 103. In order to prevent problems such as overpressure and uneven stress on the central sealing ring, an equal-height positioning post 108 is designed between the pump fixing pressure plate 105 and the cavity cover weldment 204. Since the entire system needs to operate stably in a vacuum environment and ensure the sealing performance of the system, a filter-sealed ring 102 is installed between the molecular pump 101, the adapter plate 107, and the gate valve 202. This component mainly plays the role of sealing and fixing the molecular pump 101 to the gate valve assembly 2;

[0015] The gate valve assembly 2 of the present utility model mainly plays the role of sealing and fixing the gate valve 202. The flange opening of the cavity cover weldment 204 is designed to protrude from the entire cavity cover, which is convenient for the locking valve bolts 203 to lock the gate valve 202 upward, facilitating the operation of workers, and effectively connecting the gate valve 202 to the cavity cover weldment 204. Corresponding threaded holes are opened on both the cavity cover weldment 204 and the gate valve 202, ensuring that the high-vacuum pump assembly 1 is firmly locked together.

[0016] In summary, the gate valve and vacuum pump installation adapter device provided by the present utility model has the following advantages:

[0017] 1. The equal-height positioning post 108 is newly added to prevent problems such as overpressure and uneven stress on the central sealing ring, effectively protecting some sealing parts and playing a certain overpressure protection role for the structure;

[0018] 2. The pressure plate bolts 103 and the pump fixing pressure plate 105 are newly added to prevent the loosening of the screws caused by the vibration of the pump, having a certain seismic resistance;

[0019] 3. The adapter plate 107 is designed to realize the connection of different standard parts. Installation holes can be added and reserved on the adapter plate 107, which can be compatible with the replacement and maintenance of different brands;

[0020] 4. The overall design structure is compact, facilitating maintenance and repair, and extending the service life of each component.

[0021] Although the present utility model has been disclosed above with preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications and improvements without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model shall be defined by the claims.

Claims

1. An installation adapter device for a gate valve and a vacuum pump, comprising a molecular pump (101) and a gate valve (202), characterized in that, A transfer plate (107) is provided between the molecular pump (101) and the gate valve (202). A filter-equipped sealing ring (102) is provided between the molecular pump (101) and the transfer plate (107) and is tightly connected. A central sealing ring (201) is provided on one side of the gate valve (202) and is tightly connected to the cavity cover welding part (204). A central sealing ring (201) is provided on the other side of the gate valve (202) and is tightly connected to the transfer plate (107); the transfer plate (107) is tightly connected to the cavity cover welding part (204) through a pump fixing pressing plate (105) and a pressing plate bolt (103), and an equal-height positioning post (108) is provided between the pump fixing pressing plate (105) and the cavity cover welding part (204).

2. The plug valve and vacuum pump installation adapter device according to claim 1, characterized in that The flange opening of the cavity cover welding part (204) protrudes from the entire cavity cover, and the gate valve (202) is tightly locked by an upward lock valve bolt (203).

3. The plug valve and vacuum pump installation adapter device according to claim 1, characterized in that, The filter-equipped sealing ring (102) is tightly connected to the transfer plate (107) through a pump locking bolt (104).

4. The plug valve and vacuum pump installation adapter device according to claim 1, characterized in that Fixed ears are formed on the outer periphery of the transfer plate (107), and the pressing plate bolt (103) passes through the fixed ears, the equal-height positioning post (108) and the cavity cover welding part (204) and is tightly connected.

5. The plug valve and vacuum pump installation adapter device according to claim 4, characterized in that The number of the equal-height positioning posts (108) is 3 - 4.

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