Nitrogen charging testing device

Abstract

The utility model belongs to the technical field of chip production testing, and particularly relates to a nitrogen charging testing device. The device comprises a frame, a lower cover, an upper cover, a test probe and a test bench. The lower cover is mounted in the frame and comprises an outer shell, an inner shell nested in the outer shell and an insulating layer filled between the outer shell and the inner shell; the upper cover covers the lower cover in a matched mode so that a sealing cavity can be formed between the upper cover and the lower cover, the top of the upper cover is hoisted to the top of the frame through a driving device, and an air inlet and an air outlet are formed in the upper cover and used for allowing protective gas to enter and exit. The test probe is mounted on the upper cover; and the test board is arranged in the inner shell and is opposite to the test probe. The utility model is used for solving the problem that the chip test is easy to ignite and damage.

Description

Technical Field

[0001] The utility model belongs to the technical field of chip production and testing, and particularly relates to a nitrogen filling testing device. Background Art

[0002] After the chip wafer is manufactured, it usually needs to be tested. The wafer testing refers to the functional and electrical parameter testing of the bare chips on the wafer by the cooperation of probes and a tester. The testing process is roughly that the probes apply voltage to the chips, and then the tester judges whether the functions and performances of the chips meet the design specification requirements.

[0003] During the power-on testing process of the chips, due to the high voltage, it is easy to generate sparks and damage the chips in the testing process. Usually, the testing needs to be carried out in an inert gas. Therefore, there is an urgent need for a nitrogen filling testing device for chips. Summary of the Utility Model

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a nitrogen filling testing device for solving the problem that chips are easily damaged by sparks during testing.

[0005] The technical solution for the utility model to solve the above technical problem is as follows: A nitrogen filling testing device, which includes: a frame;

[0006] A lower cover, installed in the frame. The lower cover includes an outer shell, an inner shell nested in the outer shell, and an insulating layer filled between the outer shell and the inner shell;

[0007] An upper cover, which is matched and covered on the lower cover to form a sealed cavity between the upper cover and the lower cover. The top of the upper cover is hoisted on the top of the frame through a driving device. An air inlet and an air outlet are opened on the upper cover for the entry and exit of protective gas;

[0008] Testing probes, installed on the upper cover;

[0009] A test bench, which is installed in the inner shell and is arranged opposite to the testing probes.

[0010] Compared with the prior art, the above technical solution has the following beneficial effects:

[0011] A sealed cavity is formed by the upper cover and the lower cover. An air inlet is opened on the upper cover, and high-pressure nitrogen can be introduced into the sealed cavity. Then, the chips are tested by the testing probes. Under the protection of high-pressure nitrogen, the chips are prevented from being damaged by sparks. At this time, the test bench in the lower cover contacts the inner shell, and the inner shell and the outer shell are insulated from each other through the insulating layer, preventing the test high voltage from being transmitted to the outer shell, and further preventing the external equipment from being charged. The exhaust port on the upper cover can discharge the high-pressure gas in the sealed cavity after the test is completed, avoiding the instantaneous exhaust impact when the upper cover is opened.

[0012] Based on the above technical solutions, the embodiments of the present application can also be improved as follows:

[0013] In one embodiment, the frame includes: a top plate, a bottom plate arranged at intervals, and a plurality of support rods connecting the top plate and the bottom plate.

[0014] In one embodiment, a slide rail is further included, the slide rail is installed on the bottom plate in the frame, and the lower cover is arranged on the slide rail.

[0015] In one embodiment, the driving device is installed on the top plate of the frame, and the output end of the driving device penetrates through the top plate and is connected to the top of the upper cover through a connecting member.

[0016] In one embodiment, the connecting member includes:

[0017] A gland nut, on the circumferential bottom of which a plurality of fasteners are arranged, the gland nut is arranged at an interval from the upper cover through the fasteners, and the output end of the driving device is screwed to the gland nut;

[0018] A fastening nut, screwed on the output end of the driving device.

[0019] In one embodiment, the test probe includes:

[0020] An insulating sleeve, which is hermetically installed in the upper cover;

[0021] A telescopic probe, buried in the insulating sleeve, and its test end extends into the sealed cavity;

[0022] An insulating cover plate, arranged on the top of the insulating sleeve, and a notch for the wire of the telescopic probe to pass through is formed between the insulating cover plate and the insulating sleeve.

[0023] In one embodiment, an outer protective cover is further included, and the outer protective cover covers the outside of the frame to enclose and cover the lower cover, the lower cover, the driving device and the frame therein.

[0024] In one embodiment, a through hole is formed in the upper edge of the outer protective cover along a contour not smaller than the orthographic projection of the lower cover, and a cover plate is covered on the through hole in a matching manner.

[0025] In one embodiment, a handle is connected to the lower cover, and the cover plate is connected to the lower cover through the handle.

[0026] In one embodiment, at least one limiting rod parallel to the output end of the driving device is further included, one end of the limiting rod is connected to the upper cover, and the other end penetrates through the top plate. Description of the Drawings

[0027] To more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0028] Figure 1 It is a schematic diagram of the overall structure of the present utility model.

[0029] Figure 2 For Figure 1 It is a rear view structure schematic diagram after removing the outer protective cover in

[0030] Reference numerals:

[0031] 1, frame; 2, lower cover; 3, upper cover; 4, driving device; 5, test probe; 6, test bench;

[0032] 101, top plate; 102, bottom plate; 103, support rod;

[0033] 201, outer shell; 202, insulating layer; 203, inner shell;

[0034] 501, insulating sleeve; 502, telescopic probe; 503, insulating cover plate;

[0035] 7, air inlet; 8, air outlet;

[0036] 9, connecting piece; 901, gland nut; 902, fastening nut;

[0037] 10, slide rail;

[0038] 11, outer protective cover;

[0039] 12, cover plate;

[0040] 13, handle;

[0041] 14, limiting rod;

[0042] 15, positioning pin. Specific embodiments

[0043] The following will describe in detail the embodiments of the technical solutions of the present utility model in conjunction with the drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present utility model, so they are only examples and cannot be used to limit the protection scope of the present utility model.

[0044] It should be noted that, unless otherwise specified, the technical terms or scientific terms used in this application shall have the ordinary meanings understood by those skilled in the art to which this utility model belongs.

[0045] In the description of this application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing this utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to this utility model.

[0046] In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. In the description of this utility model, "a plurality of" means two or more unless otherwise specifically defined.

[0047] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected to", "fixed", etc. shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0048] Embodiment

[0049] As Figure 1-2 shown, a nitrogen filling test device provided by this utility model includes: a frame, a lower cover, an upper cover, test probes, and a test bench.

[0050] The lower cover is installed in the frame. The lower cover includes an outer shell, an inner shell nested in the outer shell, and an insulating layer filled between the outer shell and the inner shell. The outer shell, the insulating layer, and the inner shell are nested tightly in sequence and are fixed to each other by fasteners. Among them, the outer shell is square in this embodiment, the insulating layer is embedded in the center of the top surface of the outer shell, and the inner shell is fitted and embedded in the middle of the top of the insulating layer to form a nested structure with each other. The upper cover is fitted and covered on the lower cover to form a sealed cavity between the upper cover and the lower cover. The top of the upper cover is hoisted on the top of the frame by a driving device, and the driving device drives the upper cover to move up or down to cooperate with the lower cover for sealing. An air inlet and an air outlet are opened on the upper cover for the entry and exit of the protective gas. In this embodiment, the protective gas can be nitrogen.

[0051] The test probe is installed on the upper cover, and the test bench is installed in the inner shell, arranged opposite to the test probe. The test bench is used to place the chip. After the chip is placed on the test bench, the upper test probe can align with the chip and move down to make contact, facilitating testing. Among them, the test bench is made of conductive metal material and is used to apply voltage to the anode and cathode of the chip for conduction.

[0052] A sealed cavity is formed by the upper cover and the lower cover. An air inlet is opened on the upper cover, and high-pressure nitrogen can be introduced into the sealed cavity. Then, the chip is tested using the test probe. Under the protection of high-pressure nitrogen, the chip is prevented from being damaged by sparking. At this time, the test bench in the lower cover is in contact with the inner shell, and the inner shell and the outer shell are insulated from each other through an insulating layer, preventing the test high voltage from being transmitted to the outer shell, and thus avoiding the external equipment from being charged. The exhaust port on the upper cover can discharge the high-pressure gas in the sealed cavity after the test is completed, avoiding the instantaneous exhaust impact when the upper cover is opened.

[0053] Specifically, the frame includes: a top plate, a bottom plate arranged at intervals, and several support rods connecting the top plate and the bottom plate. The support rods are four double-headed screws, and both ends of the support rods are fixedly connected to the four corners of the top plate and the bottom plate to form a frame. The lower cover is installed on the bottom plate, and the upper cover is hoisted on the top plate through a driving device.

[0054] It further includes a slide rail. The slide rail is installed on the bottom plate in the frame, and the lower cover is arranged on the slide rail. By setting the slide rail, the lower cover can be pulled out of the frame, facilitating the placement and removal of the chip.

[0055] Two positioning pins are arranged on the lower cover, and positioning holes corresponding to the positioning pins are opened at the bottom of the upper cover. The positioning holes are not shown in the figure. The positioning pins are located on the outer shell, facilitating the accuracy of positioning when the upper cover moves down to match the lower cover.

[0056] The driving device is installed on the top plate of the frame. The output end of the driving device penetrates the top plate and is connected to the top of the upper cover through a connecting piece. The driving device can specifically be implemented by a cylinder, an oil cylinder, an electric push rod, etc. It is installed on the top of the top plate, and the telescopic rod of the driving device penetrates the top plate and is connected to the upper cover.

[0057] Among them, the connecting piece includes: a gland nut and a fastening nut.

[0058] Several fasteners are circumferentially arranged at the bottom of the gland nut. The fasteners are three screws, arranged circumferentially, with one end fixedly connected to the bottom of the gland nut and the other end fixedly connected to the upper cover, so that there is a gap between the gland nut and the upper cover. The output end of the driving device is screwed to the gland nut; an external thread is provided at the output end of the driving device, and the fastening nut is screwed onto the output end of the driving device, and the fastening nut abuts against the gland nut and cooperates with the gland nut to lock.

[0059] In this embodiment, the test probe includes: an insulating sleeve, a telescopic probe, and an insulating cover plate.

[0060] The insulating sleeve is hermetically installed in the upper cover. The bottom of the insulating sleeve extends into the sealed cavity. The telescopic probe is embedded in the insulating sleeve, and its test end extends into the sealed cavity. The insulating cover plate is arranged on the top of the insulating sleeve, and a notch for the wire of the telescopic probe to pass through is formed between the insulating cover plate and the insulating sleeve. Since the test probe needs to be connected to an external test device, the wire extends out through the notch between the insulating sleeve and the insulating cover plate.

[0061] In this embodiment, to play a protective role, an outer protective cover is provided. The outer protective cover covers the outside of the frame to enclose and cover the lower cover, the lower cover, the driving device, and the frame therein.

[0062] A through hole is opened on the upper edge of the outer protective cover not less than the contour of the orthographic projection of the lower cover. This through hole facilitates the removal of the lower cover. A cover plate is matched and covered on the through hole. When in test use, the cover plate covers the through hole.

[0063] Since the lower cover is connected to the bottom plate through a slide rail, the contour of the through hole is not less than the outer contours of the lower cover and the slide rail, so that the lower cover can be easily pulled out through the slide rail.

[0064] A handle is connected to the lower cover. The handle can facilitate the pulling out of the lower cover. The cover plate is connected to the lower cover through the handle. When the lower cover is pushed in place by the handle, the cover plate can be matched and covered on the through hole.

[0065] In this embodiment, at least one limiting rod parallel to the output end of the driving device is further included. One end of the limiting rod is connected to the upper cover, and the other end penetrates through the top plate. The limiting rod can slide in the vertical direction parallel to the output end of the driving device, thereby restricting the circumferential rotation of the upper cover and only allowing it to move up and down.

[0066] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A nitrogen filling test device, characterized in that, Comprising: Frame; Lower cover, installed in the frame, the lower cover includes a housing, an inner housing nested in the housing, and an insulating layer filled between the housing and the inner housing; Upper cover, matingly covering the lower cover to form a sealed cavity between the upper cover and the lower cover, the top of the upper cover is hoisted at the top of the frame by a driving device, and an air inlet and an air outlet are provided on the upper cover for the entry and exit of protective gas; Test probe, installed on the upper cover; Test bench, the test bench is installed in the inner housing and is arranged opposite to the test probe.

2. The nitrogen charging test device according to claim 1, wherein The frame includes: a top plate, a bottom plate arranged at intervals, and a plurality of support rods connecting the top plate and the bottom plate.

3. The nitrogen filling test device according to claim 2, wherein, It further includes a slide rail, the slide rail is installed on the bottom plate in the frame, and the lower cover is arranged on the slide rail.

4. The nitrogen filling test device according to claim 2, wherein, The driving device is installed on the top plate of the frame, and the output end of the driving device penetrates through the top plate and is connected to the top of the upper cover through a connecting member.

5. The nitrogen filling test device according to claim 4, wherein The connecting member includes: Compression cap nut, a plurality of fasteners are circumferentially arranged at the bottom thereof, the compression cap nut is spaced from the upper cover through the fasteners, and the output end of the driving device is screwed to the compression cap nut; Lock nut, screwed to the output end of the driving device.

6. The nitrogen filling test device according to claim 1, characterized in that The test probe includes: Insulating sleeve, the insulating sleeve is hermetically installed in the upper cover; Retractable probe, buried in the insulating sleeve, and its test end extends into the sealed cavity; Insulating cover plate, arranged on the top of the insulating sleeve, and a notch for the wire of the retractable probe to pass through is formed between the insulating cover plate and the insulating sleeve.

7. The nitrogen charging test device according to claim 1, wherein It further includes an outer protective cover, the outer protective cover covers the outside of the frame to enclose and cover the lower cover, lower cover, driving device and frame therein.

8. The nitrogen charging test device according to claim 7, characterized in that, A through hole is provided on the upper edge of the outer protective cover not less than the contour of the orthographic projection of the lower cover, and a cover plate is matched and covered on the through hole.

9. The nitrogen filling test device according to claim 8, wherein, A handle is connected to the lower cover, and the cover plate is connected to the lower cover through the handle.

10. The nitrogen filling test device according to claim 2, wherein It further includes at least one limit rod parallel to the output end of the driving device, one end of the limit rod is connected to the upper cover, and the other end penetrates through the top plate.

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