Positioning mechanism

Abstract

The utility model discloses a positioning mechanism which comprises a carrier plate, a first positioning plate, a second positioning plate, a first driving part and a second driving part, and the carrier plate is configured to be used for bearing a part to be positioned; the first positioning plate and the second positioning plate are oppositely arranged in the first direction and located on the two sides of the carrier plate respectively. The first driving piece is connected with the first positioning plate, and the first driving piece can drive the first positioning plate to move in the first direction so that the first positioning plate can abut against one side of the to-be-positioned piece in the first direction; the second driving part is connected with the second positioning plate, and the second driving part can drive the second positioning plate to move in the first direction so that the second positioning plate can abut against the other side of the to-be-positioned part in the first direction. According to the positioning mechanism provided by the embodiment of the invention, the first driving piece and the second driving piece can operate at a relatively high speed, so that the positioning time is saved, and the positioning efficiency is improved.

Description

Technical Field

[0001] This application relates to the technical field of positioning devices, and more particularly, to a positioning mechanism. Background Art

[0002] A graphite boat mainly refers to a container or tray made of graphite material, which has characteristics such as high temperature resistance, corrosion resistance, and good electrical conductivity.

[0003] The graphite boat uses graphite as the raw material. In the production process of semiconductor chips, the graphite boat is often used as a container for carrying silicon wafers and plays a key role in high-temperature process steps such as diffusion and annealing; the graphite boat can evenly transfer heat to ensure that the silicon wafers are evenly heated, thereby improving the quality and consistency of the chips. In the manufacturing process of solar panels, the graphite boat is used to carry silicon wafers for processes such as coating and sintering, ensuring that the silicon wafers are not damaged in a high-temperature environment and helping to form a uniform thin film layer, improving the conversion efficiency of solar panels.

[0004] In order to ensure that the silicon wafers carried in the graphite boat can be accurately loaded and unloaded, first of all, the graphite boat must be effectively positioned. Therefore, how to accurately and efficiently position the graphite boat is a technical problem that needs to be solved urgently in the industry. Utility Model Content

[0005] An object of this application is to provide a new technical solution for a positioning mechanism.

[0006] According to the first aspect of this application, a positioning mechanism is provided, and the positioning mechanism includes:

[0007] A carrier plate configured to carry a workpiece to be positioned;

[0008] A first positioning plate and a second positioning plate, the first positioning plate and the second positioning plate are oppositely arranged along a first direction and are respectively located on both sides of the carrier plate;

[0009] A first driving member connected to the first positioning plate, the first driving member can drive the first positioning plate to move along the first direction so that the first positioning plate abuts against one side of the workpiece to be positioned in the first direction;

[0010] A second driving member connected to the second positioning plate, the second driving member can drive the second positioning plate to move along the first direction so that the second positioning plate abuts against the other side of the workpiece to be positioned in the first direction.

[0011] Optionally, a blocking cylinder is provided at the bottom of the carrier plate, and the working end of the blocking cylinder can extend or retract along a third direction;

[0012] The carrier board is provided with a positioning portion, and the positioning portion includes a plurality of positioning holes arranged at intervals in the second direction and positioning blocks correspondingly arranged in the positioning holes. Among them, the positioning blocks are used to cooperate with the working ends of the blocking cylinders for abutting and stopping.

[0013] Optionally, the dimension of the positioning hole in the second direction is longer than the dimension in the first direction.

[0014] Optionally, the first driving member is a cylinder, and the second driving member is a servo motor;

[0015] After the first driving member drives the first positioning plate to abut against one side of the to-be-positioned member, the second driving member drives the second positioning plate to abut against the other side of the to-be-positioned member.

[0016] Optionally, the positioning mechanism further includes a main controller and an alarm, and both the second driving member and the alarm are signal-connected to the main controller; when the driving torque of the second driving member exceeds the torque set value, the main controller controls the alarm to emit an alarm signal.

[0017] Optionally, the positioning mechanism further includes a conveying component, and the conveying component is connected to the carrier board and can drive the carrier board to move in the second direction.

[0018] Optionally, there are two sets of the conveying components, and the two sets of the conveying components are arranged at intervals in the second direction.

[0019] Optionally, the conveying component includes a conveying motor and a conveyor belt, the conveying motor is connected to the conveyor belt and drives the conveyor belt to move in the second direction, and the carrier board is arranged on the conveyor belt.

[0020] Optionally, there are two sets of the positioning portions, and the two sets of the positioning portions are arranged at intervals in the first direction, and the blocking cylinders are correspondingly arranged for each set of the positioning portions;

[0021] Among them, a plurality of positioning holes included in one set of the positioning portions have a first spacing in the second direction, and a plurality of positioning holes included in the other set of the positioning portions have a second spacing in the second direction, and the first spacing is not equal to the second spacing.

[0022] The positioning mechanism provided by the embodiment of the present application can achieve the following technical effects:

[0023] In the positioning mechanism provided in the embodiments of the present application, since the graphite boat itself does not need to move in the first direction, that is, the first driving member and the second driving member do not need to directly contact the graphite boat to drive the graphite boat to move, the first driving member and the second driving member can operate at a relatively fast speed, thereby saving positioning time and improving positioning efficiency. Moreover, the first positioning plate and the second positioning plate respectively abut against the graphite boat from both sides in the first direction, thereby providing a relatively accurate positioning effect for the graphite boat in the first direction.

[0024] Other features and advantages of the present application will become clear from the following detailed description of the exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The drawings incorporated in and constituting a part of this specification illustrate embodiments of the present application and, together with the description, serve to explain the principles of the present application.

[0026] Figure 1 Shown is a perspective structural view of a positioning mechanism of the present application;

[0027] Figure 2 Shown is a top structural view of a positioning mechanism of the present application;

[0028] Figure 3 Shown is a partial perspective structural view of a positioning mechanism of the present application;

[0029] Figure 4 Shown is a partial top structural view of a positioning mechanism of the present application;

[0030] Figure 5 Shown is a schematic diagram of the working state of a positioning mechanism of the present application Figure 1 ;

[0031] Figure 6 Shown is a schematic diagram of the working state of a positioning mechanism of the present application Figure 2 。

[0032] Description of the Reference Numerals:

[0033] 1, positioning mechanism; 10, carrier plate; 100, positioning hole; 101, positioning block; 11, first positioning plate; 12, second positioning plate; 13, first driving member; 14, second driving member; 15, conveying assembly; 151, conveying motor; 152, conveyor belt; 16, blocking cylinder. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0034] Now, various exemplary embodiments of the present application will be described in detail with reference to the accompanying drawings. It should be noted that: Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present application.

[0035] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way a limitation on this application or its application or use.

[0036] Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such technologies, methods, and devices should be regarded as part of the specification.

[0037] In all the examples shown and discussed here, any specific values should be construed as merely exemplary and not as a limitation. Thus, other examples of the exemplary embodiments may have different values.

[0038] It should be noted that like reference numerals and letters denote like items in the following figures, and thus, once an item is defined in one figure, it does not need to be further discussed in subsequent figures.

[0039] Referring to Figures 1 to 6 As shown, according to an embodiment of the present application, a positioning mechanism 1 is provided. The positioning mechanism 1 includes a carrier plate 10, a first positioning plate 11, and a second positioning plate 12. The carrier plate 10 is configured to carry a workpiece to be positioned; the first positioning plate 11 and the second positioning plate 12 are oppositely arranged along a first direction and are respectively located on both sides of the carrier plate 10;

[0040] It further includes a first driving member 13 and a second driving member 14. The first driving member 13 is connected to the first positioning plate 11, and the first driving member 13 can drive the first positioning plate 11 to move along the first direction so that the first positioning plate 11 abuts against one side of the workpiece to be positioned in the first direction;

[0041] The second driving member 14 is connected to the second positioning plate 12, and the second driving member 14 can drive the second positioning plate 12 to move along the first direction so that the second positioning plate 12 abuts against the other side of the workpiece to be positioned in the first direction.

[0042] The positioning mechanism provided by the embodiment of the present application can be used to position the workpiece to be positioned at least in the first direction. The workpiece to be positioned can be, for example, a graphite boat 2; generally, the graphite boat 2 needs to be positioned in two directions, the first direction and the second direction. The first direction corresponds to the width direction of the graphite boat 2, and the second direction corresponds to the length direction of the graphite boat 2. The graphite boat 2 is supported on the carrier plate 10, and the graphite boat 2 and the carrier plate 10 are fixed by friction. The top surface of the end of the carrier plate 10 is provided with a surface having a high coefficient of friction, which cooperates with the bottom surface of the graphite boat 2 to prevent relative displacement between the graphite boat 2 and the carrier plate 10.

[0043] In the previous process before the positioning mechanism provided in the embodiment of the present application, the graphite boat 2 has completed the pre-positioning operation along the second direction; the positioning mechanism provided in the embodiment of the present application mainly focuses on the positioning operation of the graphite boat 2 along the first direction.

[0044] When using the positioning mechanism provided in the embodiment of the present application to position the graphite boat 2 along the first direction, the first driving member 13 is made to drive the first positioning plate 11 to move close to the graphite boat 2 along the first direction, and the second driving member 14 is made to drive the second positioning plate 12 to move close to the graphite boat 2 along the first direction, so that the first positioning plate 11 abuts against one side of the graphite boat 2 in the first direction, and the second positioning plate 12 abuts against the other side of the to-be-positioned member in the first direction, thereby completing the positioning operation of the graphite boat 2 in the first direction.

[0045] In the above positioning process, since the graphite boat 2 itself does not need to move in the first direction, that is, the first driving member 13 and the second driving member 14 do not need to directly contact the graphite boat 2 to drive the graphite boat 2 to move, the first driving member 13 and the second driving member 14 can operate at a relatively fast speed, thereby saving positioning time and improving positioning efficiency. Moreover, the first positioning plate 11 and the second positioning plate 12 respectively abut against the graphite boat 2 from both sides in the first direction, thereby providing a relatively accurate positioning effect for the graphite boat 2 in the first direction.

[0046] Refer to Figure 1 As shown, in one embodiment, the first driving member 13 is a cylinder or a servo motor; the second driving member 14 is a cylinder or a servo motor.

[0047] In this specific example, the advantage of using a cylinder as the first driving member 13 and / or the second driving member 14 is that the accuracy and stability of the cylinder are relatively high; the advantage of using a servo motor as the first driving member 13 and / or the second driving member 14 is that the torque of the servo motor can be parametrically controlled and the torque adjustment is very convenient.

[0048] Refer to Figure 1 As shown, in one embodiment, the first driving member 13 is a cylinder and the second driving member 14 is a servo motor;

[0049] After the first driving member 13 drives the first positioning plate 11 to abut against one side of the to-be-positioned member, the second driving member 14 drives the second positioning plate 12 to abut against the other side of the to-be-positioned member.

[0050] In this specific example, first, a cylinder is used to drive the first positioning plate 11 to abut against one side of the workpiece to be positioned (the graphite boat 2). The cylinder extends at a relatively fast speed and quickly drives the first positioning plate 11 to move into place first to abut against the graphite boat 2. At this time, the first positioning plate 11 serves as the reference edge for positioning in the first direction. Then, the servo motor drives the second positioning plate 12 to abut against the other side of the graphite boat 2. The torque of the servo motor can be preset as needed, so as to provide accurate positioning for the graphite boat 2 while avoiding applying excessive pressure to the graphite boat 2 and damaging it.

[0051] In one embodiment, the positioning mechanism further includes a main controller and an alarm. The second driving member 14 and the alarm are both signal-connected to the main controller. When the driving torque of the second driving member 14 exceeds the torque setting value, the main controller controls the alarm to emit an alarm signal.

[0052] According to the specific situation of the graphite boat 2, the working torque value of the second driving member 14 is preset in advance. This preset working torque value is the torque setting value. For example, when the graphite boat 2 is cleaned after working for a period of time and the dimension in its width direction (i.e., the first direction) becomes thinner, the torque setting value needs to be readjusted. In this specific example, if the driving torque of the second driving member 14 exceeds the torque setting value, the main controller controls the alarm to emit an alarm signal so that the staff can take corresponding measures, thereby reducing the possibility of the graphite boat 2 being damaged.

[0053] Refer to Figures 3 to 4 As shown, in one embodiment, a blocking cylinder 16 is provided at the bottom of the carrier plate 10, and the working end of the blocking cylinder 16 can extend or retract along the third direction;

[0054] The carrier plate 10 is provided with a positioning portion, and the positioning portion includes a plurality of positioning holes 100 arranged at intervals along the second direction and positioning blocks 101 correspondingly arranged in the positioning holes 100. Among them, the positioning blocks 101 are used to cooperate with the working end of the blocking cylinder 16 for abutting and stopping.

[0055] The positioning mechanism further includes a conveying component 15. The conveying component 15 is connected to the carrier plate 10 and can drive the carrier plate 10 to move along the second direction. When the working end of the blocking cylinder 16 extends along the third direction and directly or indirectly abuts against the inner wall of any positioning hole 100 along the second direction, the conveying component 15 drives the carrier plate 10 to move into place along the second direction.

[0056] In this specific example, since the graphite boat 2 has completed the pre-positioning operation in the second direction in the previous process, in this embodiment, the conveying assembly 15 is used to drive the carrier plate 10 together with the graphite boat 2 to move in the second direction, and the positioning of the graphite boat 2 in the second direction is finally completed through the blocking effect of the blocking cylinder 16 on the carrier plate 10.

[0057] When the blocking cylinder 16 blocks the carrier plate 10, specifically, the working end of the blocking cylinder 16 extends into the positioning hole 100 opened on the carrier plate 10. When the conveying assembly 15 drives the carrier plate 10 to move until the inner wall of the positioning hole 100 in the second direction directly or indirectly abuts against the working end of the blocking cylinder 16, the blocking cylinder 16 exerts a blocking effect to stop the movement of the carrier plate 10, so that the graphite boat 2 is positioned in the second direction.

[0058] The so-called direct abutment of the working end of the blocking cylinder 16 against the inner wall of the positioning hole 100 in the second direction means that the working end of the blocking cylinder 16 directly abuts against the inner wall of the positioning hole 100 without the transfer action of other devices; the so-called indirect abutment of the working end of the blocking cylinder 16 against the inner wall of the positioning hole 100 in the second direction means that other devices can be arranged in the positioning hole 100, the device contacts the inner wall of the positioning hole 100 in the second direction, and the working end of the blocking cylinder 16 abuts against the device.

[0059] The reason for arranging a plurality of positioning holes 100 at intervals in the second direction is that: the graphite boat 2 has multiple rows of accommodating grooves for placing silicon wafers in the second direction, and each positioning hole 100 corresponds to a row of accommodating grooves; for example, the blocking cylinder 16 first cooperates with the first positioning hole 100 to stop, and at this time, the silicon wafers in the first accommodating groove are loaded and unloaded. After the loading and unloading operations of the silicon wafers in the first accommodating groove are completed, the conveying assembly 15 drives the carrier plate 10 together with the graphite boat 2 to move one grid in the second direction (before moving, the first positioning plate 11 and the second positioning plate 12 first release the graphite boat 2). After the graphite boat 2 moves in place in the second direction, the first positioning plate 11 and the second positioning plate 12 are used to position the graphite boat 2 in the first direction again, and at this time, the blocking cylinder 16 cooperates with the second positioning hole 100 to stop, so as to perform the loading and unloading operations on the silicon wafers in the second row of accommodating grooves... and so on.

[0060] Refer to Figures 3 to 4 As shown in the figure, in one embodiment, the conveying assembly 15 includes a conveying motor 151 and a conveyor belt 152. The conveying motor 151 is connected to the conveyor belt 152 and drives the conveyor belt 152 to move in the second direction. The carrier plate 10 is arranged on the conveyor belt 152.

[0061] In this specific example, the conveying assembly 15 includes a conveying motor 151 and a conveyor belt 152, which has a simple structure, low cost, and can achieve stable conveyance of the carrier plate 10.

[0062] Referring to Figures 3 to 4 As shown, in one embodiment, two sets of the conveying assemblies 15 are provided, and the two sets of the conveying assemblies 15 are arranged at intervals in the second direction.

[0063] In this specific example, two sets of the conveying assemblies 15 are arranged at intervals in the second direction, and the two sets of the conveying assemblies 15 work independently; in this way, after the carrier plate 10 leaves the front conveyor belt 152, the next carrier plate can immediately enter the positioning area where the conveyor belt 152 is located; at the same time, the rear conveyor belt 152 can separately convey the carrier plate 10 to the next working station without waiting for the carrier plate 10 to leave the rear conveyor belt 152, thereby improving work efficiency.

[0064] Referring to Figure 1 、 Figure 2 As shown, in one embodiment, the positioning portion includes positioning blocks 101, the positioning blocks 101 are correspondingly arranged in the positioning holes 100 one by one, and the positioning blocks 101 are used for abutting against the working end of the blocking cylinder 16.

[0065] In this specific example, the positioning blocks 101 are arranged in the positioning holes 100, and the working end of the blocking cylinder 16 is abutted and stopped by the positioning blocks 101; in this way, it is avoided that the working end of the blocking cylinder 16 frequently abuts against the inner wall of the positioning hole 100, causing wear to the carrier plate 10. And the processing difficulty of the carrier plate 10 can be reduced, and the required dimensions can be adjusted through the positioning blocks 101; in addition, the positioning blocks 101 can be made of a material with higher hardness to extend the service life of the carrier plate 10.

[0066] For example, for the lightweight design of this positioning mechanism, the carrier plate 10 can be made of a material with a relatively light mass, such as an aluminum alloy material; while the positioning blocks 101 can be made of a material with better wear resistance, such as a stainless steel material.

[0067] Referring to Figure 2 As shown, in one embodiment, the dimension of the positioning hole 100 in the second direction is longer than the dimension in the first direction.

[0068] That is to say, when the working end of the blocking cylinder 16 extends in the third direction and directly or indirectly abuts against one inner wall of the positioning hole 100 in the second direction, there is a gap between the working end of the blocking cylinder 16 and the other inner wall of the positioning hole 100 in the second direction.

[0069] In this specific example, the positioning hole 100 has a larger dimension in the second direction. That is to say, the positioning hole 100 is not a circular hole but an elongated hole. In this way, the positioning hole 100 can reserve time for the working end of the blocking cylinder 16 to rise. That is, while the working end of the blocking cylinder 16 rises and enters the positioning hole 100, the carrier plate 10 and the graphite boat 2 move along the second direction, thereby improving the positioning efficiency.

[0070] Referring to Figure 1 , Figure 2 As shown, in one embodiment, two sets of the positioning parts are provided, and the two sets of the positioning parts are arranged at intervals in the first direction. Corresponding to each set of the positioning parts, the blocking cylinder 16 is provided;

[0071] Among them, a plurality of positioning holes 100 included in one set of the positioning parts have a first spacing in the second direction, and a plurality of positioning holes 100 included in the other set of the positioning parts have a second spacing in the second direction, and the first spacing is not equal to the second spacing.

[0072] In this specific example, the two sets of positioning parts arranged at intervals in the first direction can be respectively applicable to two different sizes of graphite boats 2 (graphite boats 2 of different sizes are used to adapt to silicon wafers of different sizes), thereby improving the compatibility of the positioning mechanism.

[0073] The positioning method of the positioning mechanism provided by the embodiment of the present application is as follows:

[0074] The first driving member 13 drives the first positioning plate 11 to move along the first direction to approach one side of the to-be-positioned member; and,

[0075] The second driving member 14 drives the second positioning plate 12 to move along the first direction to approach the other side of the to-be-positioned member;

[0076] The second driving member 14 stops the driving action. After the first driving member 13 drives the first positioning plate 11 to abut against one side of the to-be-positioned member, the second driving member 14 drives the second positioning plate 12 to abut against the other side of the to-be-positioned member.

[0077] In the positioning method of the positioning mechanism provided in the embodiment of the present application, first, the first driving member 13 and the second driving member 14 act simultaneously to drive the first positioning plate 11 and the second positioning plate 12 to move closer to the workpiece to be positioned (graphite boat 2) at the same time; then when approaching the workpiece to be positioned, the second driving member 14 stops driving, and at this time, the first driving member 13 continues to drive the first positioning plate 11 until the first positioning plate 11 abuts against one side of the workpiece to be positioned. At this time, the first positioning plate 11 serves as the reference edge for positioning in the first direction; then the second driving member 14 drives the second positioning plate 12 to move closer to the workpiece to be positioned again until the second positioning plate 12 abuts against the other side of the workpiece to be positioned, that is, the positioning of the workpiece to be positioned in the first direction is completed.

[0078] During the above positioning process, since the graphite boat 2 itself does not need to move in the first direction, that is, the first driving member 13 and the second driving member 14 do not need to directly contact the graphite boat 2 to drive the graphite boat 2 to move. Therefore, the first driving member 13 and the second driving member 14 can operate at a relatively high speed, thereby saving the positioning time and improving the positioning efficiency. Moreover, the first positioning plate 11 and the second positioning plate 12 respectively abut against the graphite boat 2 from both sides in the first direction, thereby providing a relatively accurate positioning effect for the graphite boat 2 in the first direction.

[0079] Although some specific embodiments of the present application have been described in detail by way of examples, those skilled in the art should understand that the above examples are only for illustration and not for limiting the scope of the present application. Those skilled in the art should understand that the above embodiments can be modified without departing from the scope and spirit of the present application. The scope of the present application is defined by the appended claims.

Claims

1. A positioning mechanism, characterized in that, The positioning mechanism includes: a carrier plate (10), which is configured to carry the part to be positioned; a first positioning plate (11) and a second positioning plate (12), the first positioning plate (11) and the second positioning plate (12) are arranged opposite to each other along a first direction and are respectively located on both sides of the carrier plate (10); a first driving member (13), the first driving member (13) is connected to the first positioning plate (11), and the first driving member (13) can drive the first positioning plate (11) to move along the first direction so that the first positioning plate (11) abuts against one side of the part to be positioned in the first direction; a second driving member (14), the second driving member (14) is connected to the second positioning plate (12), and the second driving member (14) can drive the second positioning plate (12) to move along the first direction so that the second positioning plate (12) abuts against the other side of the part to be positioned in the first direction.

2. The positioning mechanism according to claim 1, wherein a blocking cylinder (16) is provided at the bottom of the carrier plate (10), and the working end of the blocking cylinder (16) can extend or retract along a third direction; the carrier plate (10) is provided with a positioning portion, the positioning portion includes a plurality of positioning holes (100) arranged at intervals along a second direction and positioning blocks (101) arranged in the positioning holes (100) one by one, wherein the positioning blocks (101) are used to cooperate with the working end of the blocking cylinder (16) for abutting and stopping.

3. The positioning mechanism according to claim 2, wherein, The dimension of the positioning hole (100) along the second direction is longer than the dimension along the first direction.

4. The positioning mechanism according to claim 1, wherein The first driving member (13) is a cylinder, and the second driving member (14) is a servo motor; After the first driving member (13) drives the first positioning plate (11) to abut against one side of the part to be positioned, the second driving member (14) drives the second positioning plate (12) to abut against the other side of the part to be positioned.

5. The positioning mechanism according to claim 4, wherein The positioning mechanism further includes a main controller and an alarm, and both the second driving member (14) and the alarm are signal-connected to the main controller; when the driving torque of the second driving member (14) exceeds the torque set value, the main controller controls the alarm to emit an alarm signal.

6. The positioning mechanism according to claim 1, characterized in that, The positioning mechanism further includes a conveying assembly (15), the conveying assembly (15) is connected to the carrier plate (10) and can drive the carrier plate (10) to move along the second direction.

7. The positioning mechanism according to claim 6, wherein There are two sets of the conveying assemblies (15), and the two sets of the conveying assemblies (15) are arranged at intervals along the second direction.

8. The positioning mechanism according to claim 6 or 7, characterized in that The conveying assembly (15) includes a conveying motor (151) and a conveyor belt (152), the conveying motor (151) is connected to the conveyor belt (152) and drives the conveyor belt (152) to move along the second direction, and the carrier plate (10) is arranged on the conveyor belt (152).

9. The positioning mechanism according to claim 2, wherein There are two sets of the positioning portions, and the two sets of the positioning portions are arranged at intervals along the first direction, and the blocking cylinder (16) is provided corresponding to each set of the positioning portions; Among a set of the positioning parts, a plurality of positioning holes (100) included therein have a first pitch in a second direction, and among the other set of the positioning parts, a plurality of positioning holes (100) included therein have a second pitch in the second direction, and the first pitch is not equal to the second pitch.

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