Detection signal amplification circuit and detection equipment

Abstract

The utility model discloses a detection signal amplification circuit and detection equipment. The circuit comprises an amplifier, the input end of the amplifier is used for being connected with a detection unit, and the output end of the amplifier is used for being connected with a processing unit; the gain adjusting module is connected between the input end of the amplifier and the output end of the amplifier, and the control end of the gain adjusting module is used for being connected with a gain control signal end; and the gain adjusting module is used for adjusting the total resistance value of the gain adjusting module according to the received gain control signal. According to the embodiment of the invention, when electron beam signals or optical signals with different intensities are detected, adaptation can be carried out through a gain adjustment mode, and the flexibility and universality of signal detection are improved.

Description

Technical Field

[0001] This application relates to the technical field of electronic circuits, and in particular, to a detection signal amplification circuit and a detection device. Background Art

[0002] Currently, with the continuous development of semiconductor technology. Various technologies involved in the integrated circuit design and manufacturing process also have a wider and wider application space. Taking electron beam defect detection as an example, in an electron beam defect detection device (EBI), after converting an electron beam signal or an optical signal into a voltage signal, the voltage signal can be converted into a final target image signal through ADC sampling.

[0003] However, there are various types of detection units in the related art, such as ET type detection devices, PN type detection devices, etc. The detection unit generates a corresponding current signal based on the detected electron beam current and inputs it into an operational amplifier. After the gain of the operational amplifier, the output is a corresponding voltage signal. However, since the gain of the operational amplifier is a firmware gain, when the electron beam current is large, it will cause the operational amplifier to saturate, resulting in the output voltage signal no longer rising after reaching the saturation value. At this time, the actual gain of the operational amplifier decreases, resulting in distortion of the output signal. Correspondingly, when the electron beam current is small, the output voltage signal may be small and unable to reach the normal acquisition range of the voltage signal, resulting in sampling deviation. That is, when the electron beam current changes, the converted voltage signal may be abnormal. Summary of the Utility Model

[0004] The embodiments of this application provide a detection signal amplification circuit and a detection device, which can improve the technical problem that the output voltage signal is abnormal when the electron beam current changes.

[0005] In a first aspect, the embodiments of this application provide a detection signal amplification circuit, and the detection signal amplification circuit includes:

[0006] An amplifier, the input end of the amplifier is used to connect to the detection unit, and the output end of the amplifier is used to connect to the processing unit;

[0007] A gain adjustment module, the gain adjustment module is connected between the input end and the output end of the amplifier, and the control end of the gain adjustment module is used to connect to the gain control signal end;

[0008] The gain adjustment module is used to adjust the total resistance value of the gain adjustment module according to the received gain control signal.

[0009] Optionally, the amplifier includes:

[0010] An operational amplifier, the inverting input terminal of the operational amplifier is used to connect to a detection unit, the non-inverting input terminal of the operational amplifier is connected to the reference ground, and the output terminal of the operational amplifier is used to connect to a detection signal output terminal.

[0011] Optionally, the gain adjustment module includes:

[0012] At least two gain units, each gain unit is connected between the inverting input terminal of the operational amplifier and the output terminal of the operational amplifier, and is used to adjust to a conducting state or a disconnecting state according to the received gain control signal; wherein,

[0013] The total resistance value of the gain adjustment module is the parallel resistance value of the gain units in the conducting state.

[0014] Optionally, each gain unit includes:

[0015] A gain resistor, the first end of the gain resistor is connected to the inverting input terminal of the operational amplifier;

[0016] A gain switch, the first end of the gain switch is connected to the second end of the gain resistor, the second end of the gain switch is connected to the output terminal of the operational amplifier, and the gain switch is used to conduct or disconnect according to the received gain control signal.

[0017] Optionally, the resistance values of the gain resistors of any two gain units among the multiple gain units are different.

[0018] Optionally, among the multiple gain units, at least two gain units have the same resistance value of the gain resistor.

[0019] Optionally, the gain adjustment module further includes:

[0020] A first capacitor, the first capacitor is connected between the inverting input terminal of the operational amplifier and the output terminal of the operational amplifier.

[0021] Optionally, the detection signal amplification circuit further includes:

[0022] A logic unit, the signal input terminal of the logic unit is connected to an external control bus, and the gain control signal terminal of the logic unit is connected to the gain unit; the logic unit is used to respectively send a conducting signal or a disconnecting signal to each gain unit according to the received external control signal.

[0023] Optionally, the detection signal amplification circuit further includes:

[0024] A filtering unit, including a first resistor and a second capacitor, the first end of the first resistor is connected to the output terminal of the operational amplifier, the second end of the first resistor is used to connect to the gain control signal terminal, and the second end of the first resistor is connected to the reference ground through the second capacitor.

[0025] Second aspect, an embodiment of the present application provides a detection device, which includes a detection unit, a processing unit, and the detection signal amplification circuit of the first aspect.

[0026] Compared with the prior art, for the detection signal amplification circuit and the detection device provided by the embodiments of the present application, based on the current signal generated by the detection unit, the total resistance value of the gain adjustment module can be adjusted through the gain control signal to achieve the gain adjustment of the amplifier. When the current signal input to the amplifier is large, resulting in the output voltage being the saturation voltage under the current gain of the amplifier, the total resistance value of the gain adjustment module can be adjusted to reduce the gain of the amplifier, so that the output voltage is reduced below the saturation voltage to achieve normal gain output. When the current signal input to the amplifier is small, the total resistance value of the gain adjustment module can be adjusted to increase the gain of the amplifier, so that the output voltage increases to ensure the signal strength of the output signal. When detecting electron beam signals or optical signals of different intensities, it can be adapted by means of gain adjustment, improving the flexibility and universality of signal detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments of the present application. Obviously, the following described drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0028] Figure 1 is a schematic diagram of the module structure of the detection signal amplification circuit provided by an embodiment of the present application;

[0029] Figure 2 is a schematic diagram of the module structure of the detection signal amplification circuit provided by another embodiment of the present application;

[0030] Figure 3 is a schematic diagram of the circuit structure of the detection signal amplification circuit provided by an embodiment of the present application;

[0031] Figure 4 is a schematic diagram of the circuit structure of the detection signal amplification circuit provided by another embodiment of the present application;

[0032] Figure 5 is a schematic diagram of the circuit structure of the detection signal amplification circuit provided by still another embodiment of the present application;

[0033] Figure 6 is a schematic diagram of the circuit structure of the detection signal amplification circuit provided by yet another embodiment of the present application;

[0034] Figure 7 is a schematic diagram of the image content generated according to the amplified detection signal in the related art;

[0035] Figure 8 It is a schematic diagram of image content generated based on the amplified detection signal provided by an embodiment of the present application.

[0036] In the accompanying drawings:

[0037] 10. Amplifier; 20. Gain adjustment module; 21. Gain unit; Rg. Gain resistor; Sg, Gain switch; 30. Filter unit; U1. Operational amplifier; C1. First capacitor; C2. Second capacitor; R1. First resistor; 40. Detection unit; 50. Processing unit; 60. Logic unit. Detailed implementation manners

[0038] Next, the features and exemplary embodiments of various aspects of the present application will be described in detail. For the purpose of making the objectives, technical solutions and advantages of the present application more clear and understandable, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without some of these specific details. The following description of the embodiments is only intended to provide a better understanding of the present application by showing examples of the present application.

[0039] It should be noted that, in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover a non-exclusive inclusion, such that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, the elements defined by the statement "including..." do not exclude the existence of additional identical elements in the process, method, article or device including the said elements.

[0040] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The embodiments will be described in detail below in conjunction with the accompanying drawings.

[0041] Currently, with the continuous development of semiconductor technology. Each technology involved in the integrated circuit design and manufacturing process also has an increasingly wide application space. Taking electron beam defect detection as an example, in an electron beam defect detection device (EBI), after converting an electron beam signal or an optical signal into a voltage signal, the voltage signal can be converted into a final target image signal by means of ADC sampling.

[0042] However, there are various types of detection units in the related art, such as ET type detection devices, PN type detection devices, etc. The detection unit generates a corresponding current signal based on the detected electron beam current and inputs it into an operational amplifier. After the gain of the operational amplifier, the output is a corresponding voltage signal. However, since the gain of the operational amplifier is a firmware gain, when the electron beam current is large, it will cause the operational amplifier to saturate, resulting in the output voltage signal no longer rising after reaching the saturation value. At this time, the actual gain of the operational amplifier decreases, resulting in distortion of the output signal. Correspondingly, when the electron beam current is small, the output voltage signal may be small and unable to reach the normal acquisition range of the voltage signal, resulting in sampling deviation. That is, when the electron beam current changes, the converted voltage signal may be abnormal.

[0043] To solve the above technical problems, an embodiment of the present application provides a detection signal amplification circuit and a detection device. First, the detection signal amplification circuit provided by the embodiment of the present application will be introduced below.

[0044] Figure 1 FIG. shows a schematic structural diagram of a detection signal amplification circuit provided by an embodiment of the present application. The detection signal amplification circuit includes an amplifier 10 and a gain adjustment module 20.

[0045] The input end of the amplifier 10 can be connected to an external detection unit 40, and the output end of the amplifier 10 can be connected to an external processing unit. The amplifier 10 can receive the current signal generated by the detection unit 40, and after signal amplification processing, output it to the processing unit 50.

[0046] The detection unit 40 can be a PN type sensor that senses electrons. When it senses an electron beam current, the bombardment of electrons will generate a corresponding current signal. The magnitude of this current signal is associated with the energy of the electrons, that is, associated with the acceleration voltage. As an alternative embodiment, the detection unit 40 can also be other types of electron beam sensors or photoelectric sensors.

[0047] The gain adjustment module 20 is connected between the input end and the output end of the amplifier 10. The control end of the gain adjustment module 20 is connected to a gain control signal terminal (not shown).

[0048] The gain control signal terminal can provide a gain control signal. When the gain adjustment module 20 receives the gain control signal, it can adjust the total resistance value of the gain adjustment module 20.

[0049] It is understandable that, whether it is a non-inverting operational amplifier circuit or an inverting operational amplifier circuit, the gain of the operational amplification is associated with the resistance value of the feedback resistor connected in series between the input terminal and the output terminal of the amplifier 10. The gain adjustment module 20 can serve as the feedback resistor, and by adjusting the total resistance value of the gain adjustment module 20, the gain adjustment can be achieved.

[0050] After the detection unit 40 generates a corresponding current signal according to the electron beam current signal or the optical signal, the current signal can be input to the amplifier 10, and after being amplified by the amplifier 10, a voltage signal is generated and output.

[0051] When the input current signal is relatively large, in order to prevent the amplifier 10 from saturating, the total resistance value of the gain adjustment module 20 can be adjusted through the gain control signal to reduce the gain of the amplifier 10, so that the amplified voltage signal does not exceed the saturation output voltage of the amplifier 10. After the amplifier 10 outputs the voltage signal to the processing unit, the processing unit can realize signal acquisition and analysis by sampling the voltage signal, and obtain the analysis result corresponding to the electron beam current.

[0052] Correspondingly, when the input current signal is relatively small, in order to prevent the voltage signal output by the amplifier 10 from being too small, the total resistance value of the gain adjustment module 20 can be adjusted through the gain control signal to increase the gain of the amplifier 10, so that the amplified voltage signal increases to a suitable voltage range to ensure the signal strength of the output voltage signal.

[0053] In this embodiment, based on the current signal generated by the detection unit 40, the total resistance value of the gain adjustment module 20 can be adjusted through the gain control signal to realize the gain adjustment of the amplifier 10. When the current signal input to the amplifier 10 is relatively large, such that the output voltage is the saturation voltage under the current gain effect of the amplifier 10, the total resistance value of the gain adjustment module 20 can be adjusted to reduce the gain of the amplifier 10, so that the output voltage is reduced below the saturation voltage to achieve normal gain output. When the current signal input to the amplifier 10 is relatively small, the total resistance value of the gain adjustment module 20 can be adjusted to increase the gain of the amplifier 10, so that the output voltage increases to ensure the signal strength of the output signal. When detecting electron beam current signals or optical signals of different intensities, it is possible to adapt through the method of gain adjustment, improving the flexibility and universality of signal detection.

[0054] Please refer to Figure 2 , in some embodiments, the above-mentioned amplifier 10 includes an operational amplifier U1. The inverting input terminal of the operational amplifier U1 is connected to the detection unit 40, the non-inverting input terminal of the operational amplifier U1 is connected to the reference ground, and the output terminal of the operational amplifier U1 is connected to the detection signal output terminal.

[0055] When the inverting input terminal of the operational amplifier U1 is connected to the detection unit 40, the gain formula of the inverting operational amplifier U1 is:

[0056] Av = -(Rf / Ri);

[0057] Where Av is the gain multiple, Rf is the resistance value between the inverting input terminal and the output terminal of the operational amplifier U1, that is, the feedback resistance; Ri is the load resistance.

[0058] Based on the above gain formula, by increasing the total resistance value of the gain adjustment module 20, that is, equivalently increasing the feedback resistance Rf, the gain multiple can be increased. Correspondingly, by decreasing the total resistance value of the gain adjustment module 20, the gain multiple can be decreased.

[0059] Please continue to refer to Figure 2 , in some embodiments, the above gain adjustment module 20 includes at least two gain units 21. Each gain unit 21 can be connected between the inverting input terminal of the operational amplifier U1 and the output terminal of the operational amplifier U1. The gain unit 21 can be adjusted to an on state or an off state according to the received gain control signal.

[0060] In the above embodiment, the operational amplifier U1 is an inverting amplifier, which can invert and amplify the current signal generated by the detection unit 40. In another embodiment, the operational amplifier U1 can also be a non-inverting amplifier.

[0061] When the gain adjustment module 20 includes multiple gain units 21, the gain control signal can adjust the on-off states of each gain unit 21 respectively. That is, the gain control signal can control one or more of the multiple gain units 21 to be turned on.

[0062] When the gain adjustment module 20 includes multiple gain units 21, since each gain unit 21 is connected in parallel with each other, the total resistance value of the gain adjustment module 20 is the parallel resistance of the gain units 21 in the on state. For example, when the gain adjustment module 20 includes 8 gain units 21, if at a certain moment 3 gain units 21 are in the on state, the total resistance value of the gain adjustment module 20 is the parallel resistance value of these 3 gain units 21.

[0063] Please refer to Figure 3 , in some embodiments, the above gain unit 21 can include a gain resistor Rg and a gain switch Sg.

[0064] The first end of the gain resistor Rg is connected to the inverting input terminal of the operational amplifier U1, the first end of the gain switch Sg is connected to the second end of the gain resistor Rg, and the second end of the gain switch Sg is connected to the output terminal of the operational amplifier U1.

[0065] Gain switch Sg can be turned on or off based on the received gain control signal. When gain switch Sg is turned on, the corresponding gain resistor Rg is connected between the inverting input and output of operational amplifier U1. When gain switches Sg of multiple gain units 21 are turned on, the total resistance value connected between the inverting input and output of operational amplifier U1 is the parallel resistance value of the gain resistors Rg corresponding to the turned-on gain switches Sg.

[0066] In some embodiments, among the multiple gain units 21 of the gain adjustment module 20 , the resistance values of the gain resistors Rg of any two gain units 21 are different.

[0067] Please refer to Figure 4 When the gain adjustment module 20 includes n gain units 21 , the first gain unit 21 includes a gain resistor Rg1 and a gain switch Sg1 , . . . , and the nth gain unit 21 includes a gain resistor Rgn and a gain switch Sgn.

[0068] By setting the resistance values of each gain resistor Rg to be different, when there are n gain units 21 in the gain adjustment module 20, by individually turning on n gain units 21, the gain adjustment module 20 can support n different resistance values, thereby providing n different gain multiples. By turning on 2, 3, ..., n of the n gain units 21, more different gain multiples can be provided, thereby improving the range of signal amplification. Moreover, since the selectable gain multiples are greatly increased, by selecting the appropriate gain multiple, the output voltage signal can be made close to the upper limit of the voltage sampling interval, avoiding a large error ratio caused by a small output voltage signal, thereby improving the accuracy of signal amplification.

[0069] In some embodiments, among the multiple gain units 21 of the gain adjustment module 20 , the gain resistors Rg of at least two gain units 21 have the same resistance value.

[0070] By setting the gain resistors Rg of at least two gain units 21 to have the same resistance value, when there are a large number of gain units 21, each gain unit 21 can use the same gain resistor Rg, thereby avoiding the need for too many types of resistor components. It is understandable that if the resistance values and types of gain resistors Rg are too many, it will greatly increase the difficulty of component management during the production process. If a certain type of gain resistor Rg is in short supply, it may affect production efficiency. Therefore, when some gain units 21 can use gain resistors Rg with the same resistance value, the number of component types can be reduced, improving production management efficiency.

[0071] As an alternative embodiment, among the multiple gain units 21, the number of gain resistors Rg with each resistance value is at least 2. That is, for any one gain unit 21, there must be another gain unit 21 with the same resistance value of the gain resistor Rg. Since the gain resistor Rg with any resistance value is not unique, the adaptability of each type of resistance value can be improved.

[0072] Please continue to refer to Figure 4 , in some embodiments, the gain adjustment module 20 may further include a first capacitor C1. The first capacitor C1 may be connected between the inverting input terminal and the output terminal of the operational amplifier U1.

[0073] When at least one gain switch Sg of the gain unit 21 is turned on, the gain adjustment module 20 can be equivalent to a resistor. The first capacitor C1 and the equivalent resistor can form an RC circuit, which can play a role in weakening the self-oscillation of the operational amplifier U1 and suppressing high-frequency interference noise.

[0074] Please refer to Figure 5 , in some embodiments, the detection signal amplification circuit may further include a logic unit 60.

[0075] The signal input terminal of the logic unit 60 is connected to the external control bus, and the gain control signal terminal of the logic unit 60 is connected to each gain unit 21.

[0076] The external control bus can provide corresponding external control signals according to the current signal generated by the detection unit 40. After receiving the external control signal, the logic unit 60 can determine the target state of each gain unit 21 according to the external control signal, and the target state can be an on state or an off state. The logic unit 60 can send corresponding on signals or off signals to each gain unit 21 respectively according to the target state of each gain unit 21, so that some gain units 21 are turned on. The above external control signal can be output by an external MCU (Microcontroller Unit). For example, when the gain adjustment module 20 includes 8 gain units 21, the on-off states of the 8 gain units 21 can be represented by an 8-bit binary data.

[0077] Please refer to Figure 6 , in some embodiments, the detection signal amplification circuit may further include a filtering unit 30.

[0078] The filtering unit 30 may include a first resistor R1 and a second capacitor C2. The first end of the first resistor R1 is connected to the output terminal of the operational amplifier U1, the second end of the first resistor R1 is connected to the gain control signal terminal, and the second end of the first resistor R1 is connected to the reference ground through the second capacitor C2.

[0079] The first resistor R1 and the second capacitor C2 can form an RC filter circuit to achieve the function of low-pass filtering, filter out the interference noise signals with higher frequencies, and avoid the interference signals from affecting the signal acquisition.

[0080] As an alternative embodiment, the circuit bandwidth can be calculated according to the relevant parameters of each device in the detection signal amplification circuit. For example, the calculation formula of the circuit bandwidth can be:

[0081]

[0082] where C TOT is the parasitic capacitance of the detection unit 40, R F is the total resistance value of the gain adjustment module, and CBWP is the gain-bandwidth product of the operational amplifier U1.

[0083] As an illustrative embodiment, when the gain-bandwidth product of the operational amplifier U1 is 790 MHZ, the parasitic capacitance of the detection unit 40 is 1.5 pf, and the total resistance value of the gain adjustment module is 10 Kohm, the calculated circuit bandwidth is 91.57735468 MHz. The signal rising edge in the above embodiment is 4 ns.

[0084] Please refer to Figure 7 and Figure 8 , Figure 7 which is the image generated by the detection device in the related art according to the received voltage signal, Figure 8 and Figure 7 is the image generated by the detection device including the detection signal amplification circuit in the above embodiment according to the received voltage signal. By comparing the two images, it can be seen that Figure 8 the image in

[0085] has ghosting and is relatively blurred;

[0086] the image in Figure 8 has no ghosting and is relatively clear. Therefore, by adopting the detection signal amplification circuit in the above embodiment, the signal quality of the detection signal can be improved.

[0085] The embodiment of the present application further provides a detection device, which may include a detection unit, a processing unit, and a detection signal amplification circuit. The detection signal amplification circuit may include the detection signal amplification circuit provided in the above embodiment of the present application. The detection unit is connected to the input end of the amplifier of the detection signal amplification circuit, and the processing unit is connected to the output end of the amplifier of the detection signal amplification circuit.

[0086] The functional blocks shown in the above-described structural block diagrams can be implemented as hardware, software, firmware, or a combination thereof. When implemented in hardware, it can be, for example, an electronic circuit, an application-specific integrated circuit (ASIC), appropriate firmware, a plug-in, a function card, and so on. When implemented in software, the elements of the present application are programs or code segments used to perform the required tasks. The program or code segment can be stored in a machine-readable medium or transmitted via a data signal carried in a carrier wave over a transmission medium or a communication link. A "machine-readable medium" can include any medium capable of storing or transmitting information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROM, flash memory, erasable ROM (EROM), floppy disks, CD-ROMs, optical discs, hard disks, fiber optic media, radio frequency (RF) links, and so on. The code segment can be downloaded via a computer network such as the Internet, an intranet, and so on.

[0087] It should be noted that in this article, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0088] Specific examples are used in this article to elaborate on the principles and implementation manners of the present application. The description of the above examples is only used to help understand the method and its core idea of the present application. The above are only the preferred implementation manners of the present application. It should be noted that due to the limited nature of written expression and objectively existing infinite specific structures, for those of ordinary skill in the art, without departing from the principle of the present application, several improvements, refinements or changes can be made, or the above technical features can be combined in an appropriate manner; these improvements, refinements, changes or combinations, or directly applying the concept and technical solution of the present application to other occasions without improvement, should all be regarded as the protection scope of the present application.

Claims

1. A detection signal amplification circuit, characterized in that, The detection signal amplification circuit includes: An amplifier, the input end of the amplifier is used to connect to the detection unit, and the output end of the amplifier is used to connect to the processing unit; A gain adjustment module, the gain adjustment module is connected between the input end and the output end of the amplifier, and the control end of the gain adjustment module is used to connect to the gain control signal terminal; The gain adjustment module is used to adjust the total resistance value of the gain adjustment module according to the received gain control signal.

2. The detection signal amplification circuit according to claim 1, characterized in that, The amplifier includes: An operational amplifier, the inverting input end of the operational amplifier is used to connect to the detection unit, the non-inverting input end of the operational amplifier is connected to the reference ground, and the output end of the operational amplifier is used to connect to the detection signal output terminal.

3. The detection signal amplification circuit according to claim 2, wherein The gain adjustment module includes: At least two gain units, each gain unit is connected between the inverting input end and the output end of the operational amplifier, and is used to be adjusted to a conducting state or a disconnected state according to the received gain control signal; wherein, The total resistance value of the gain adjustment module is the parallel resistance value of the gain units in the conducting state.

4. The detection signal amplification circuit according to claim 3, wherein Each gain unit includes: A gain resistor, the first end of the gain resistor is connected to the inverting input end of the operational amplifier; A gain switch, the first end of the gain switch is connected to the second end of the gain resistor, the second end of the gain switch is connected to the output end of the operational amplifier, and the gain switch is used to conduct or disconnect according to the received gain control signal.

5. The detection signal amplification circuit according to claim 4, wherein The resistance values of the gain resistors of any two of the multiple gain units are different.

6. The detection signal amplification circuit according to claim 4, characterized in that Among the multiple gain units, at least two gain units have the same resistance value for their gain resistors.

7. The detection signal amplification circuit according to claim 3, characterized in that, The gain adjustment module further includes: A first capacitor, the first capacitor is connected between the inverting input end and the output end of the operational amplifier.

8. The detection signal amplification circuit according to any one of claims 3-7, characterized in that The detection signal amplification circuit further includes: A logic unit, the signal input end of the logic unit is connected to the external control bus, and the gain control signal end of the logic unit is connected to the gain unit; the logic unit is used to respectively send a conducting signal or a disconnecting signal to each gain unit according to the received external control signal.

9. The detection signal amplification circuit according to any one of claims 2-7, characterized in that, The detection signal amplification circuit further includes: A filtering unit, including a first resistor and a second capacitor, the first end of the first resistor is connected to the output end of the operational amplifier, the second end of the first resistor is used to connect to the gain control signal terminal, and the second end of the first resistor is connected to the reference ground through the second capacitor.

10. A detection device, characterized in that, The detection device includes a detection unit, a processing unit, and the detection signal amplification circuit according to any one of claims 1-9.

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