External auxiliary structure of Czochralski single crystal main heater

Abstract

The utility model provides an external auxiliary structure of a Czochralski single crystal main heater, which belongs to the field of auxiliary structures of single crystal main heaters, and comprises a shell, a sealing cover is mounted on the shell, a connecting ring is fixedly connected to the side wall of the sealing cover, a guide cylinder is fixedly connected to the inner wall of the sealing cover, a heat preservation shell is fixedly connected to the inner wall of the shell, and the heat preservation shell is fixedly connected to the outer wall of the shell. A rotary lifting assembly is installed on the shell, a heater body is installed on the rotary lifting assembly, a supporting plate is installed on the heater body, a graphite flake set is installed on the supporting plate, and a limiting assembly is installed on the graphite flake set. According to the utility model, the quartz crucible on the supporting plate is fixed and limited, so that the quartz crucible is more stable, the quartz crucible is prevented from shaking or sliding in the straight pulling process, the single crystal production quality is ensured, and meanwhile, the limiting plate can slide on the heat preservation shell, so that the stability of a graphite flake group is improved, and the graphite flake group can be protected.

Description

Technical Field

[0001] The utility model relates to the technical field of auxiliary structures of a single crystal main heater, in particular to an external auxiliary structure of a Czochralski single crystal main heater. Background Art

[0002] The production of single crystal silicon is mainly carried out through the Czochralski process. The cost of the single crystal growth equipment is mainly composed of six parts: furnace body, electrical part, thermal system, water cooling system, vacuum system and argon supply device. The thermal system is mainly composed of a set of components such as guide tube, various graphite parts, quartz crucible, heater and insulation materials.

[0003] When using the existing Czochralski single crystal furnace heater structure, the quartz crucible is generally placed directly on the graphite sheet group. When the Czochralski process is carried out, the heater needs to be rotated and lifted. As the material in the quartz crucible gradually decreases, the friction between the quartz crucible and the heater gradually decreases, and the quartz crucible may shake, which has a certain impact on the quality of single crystal production. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides an external auxiliary structure for a main heater of a Czochralski single crystal.

[0005] The embodiment of the present utility model provides an external auxiliary structure of a Czochralski single crystal main heater, comprising:

[0006] A shell, wherein a sealing cover is mounted on the shell, a connecting ring is fixedly connected to the side wall of the sealing cover, a guide tube is fixedly connected to the inner wall of the sealing cover, and a heat-insulating shell is fixedly connected to the inner wall of the shell, a rotating lifting assembly is mounted on the shell, a heater body is mounted on the rotating lifting assembly, a support plate is mounted on the heater body, a graphite sheet group is mounted on the support plate, a limit assembly is mounted on the graphite sheet group, a quartz crucible is mounted on the support plate, and the quartz crucible is located inside the graphite sheet group;

[0007] A fixing component; the fixing component includes a fixing cavity provided on the support plate, a plurality of high-temperature resistant springs are fixedly connected to the inner wall of the fixing cavity, a sliding plate is fixedly connected to the plurality of high-temperature resistant springs, a clamping block is fixedly connected to the sliding plate, the clamping block is conically arranged, a limiting groove is provided on the support plate, a fixing block is fixedly connected to the quartz crucible, the fixing block and the limiting groove match, a clamping slot is provided on the fixed block, the clamping block slides through the support plate, the clamping block and the clamping slot match, the clamping block is wedge-shaped, a pull rod slides through the support plate and the graphite sheet group, and one end of the pull rod is fixedly connected to the sliding plate.

[0008] Furthermore, the limiting assembly includes multiple connecting plates installed on the side walls of the graphite sheet group, multiple bolts are threaded through the multiple connecting plates, multiple bolts are threadedly connected to the graphite sheet group, and multiple side walls of the connecting plates are fixedly connected to the limiting plates.

[0009] Furthermore, a handle is fixedly connected to the pull rod.

[0010] Furthermore, a plurality of screw blocks are threaded through the connecting ring, and the plurality of screw blocks are all threadedly connected to the shell.

[0011] Furthermore, a thermal insulation cushion layer is provided on the inner wall of the shell.

[0012] Furthermore, a positioning block is fixedly connected to the quartz crucible, and the positioning block and the slot are located on the same horizontal line.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. Place the quartz crucible on the support plate. During the quartz crucible's descent, the side wall of the fixed block will squeeze the card block. When the quartz crucible is fully in contact with the support plate, the card block automatically moves into the card slot to automatically fix the quartz crucible. When the rotary lifting assembly drives the heater body to lift and rotate, the quartz crucible on the support plate is more stable, avoiding shaking or sliding of the quartz crucible during the vertical pulling process, thereby ensuring the quality of single crystal production.

[0015] 2. During the rotation and lifting process of the graphite sheet group, the limit plate can slide on the insulation shell, which improves the stability of the graphite sheet group and protects the graphite sheet group. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a structural three-dimensional cross-sectional view of an external auxiliary structure of a Czochralski single crystal main heater described in an embodiment of the present utility model.

[0017] Figure 2 This is a three-dimensional schematic diagram of the graphite sheet group structure of the external auxiliary structure of the Czochralski single crystal main heater described in an embodiment of the present utility model.

[0018] Figure 3 for Figure 1 A magnified view of the structure in the middle.

[0019] Figure 4 This is a three-dimensional schematic diagram of the external structure of the external auxiliary structure of the Czochralski single crystal main heater described in an embodiment of the present utility model.

[0020] In the above drawings: 1 shell, 2 connecting ring, 3 sealing cover, 4 guide tube, 5 insulation shell, 6 rotating lifting assembly, 7 heater body, 8 support plate, 9 quartz crucible, 10 fixed cavity, 11 high temperature resistant spring, 12 sliding plate, 13 clamping block, 14 fixed block, 15 graphite sheet group, 16 connecting plate, 17 bolt, 18 limit plate, 19 handle, 20 positioning block. DETAILED DESCRIPTION

[0021] The technical solution of the present invention is further described below with reference to the accompanying drawings and embodiments.

[0022] like Figure 1-Figure 4 As shown, the embodiment of the present invention proposes an external auxiliary structure of a Czochralski single crystal main heater, comprising:

[0023] The shell 1 has an inner wall provided with an insulation pad, which improves the insulation effect of the device. A sealed cover 3 is installed on the shell 1. The side wall of the sealed cover 3 is fixedly connected to a connecting ring 2. The connecting ring 2 has a plurality of screw blocks threaded through it. The plurality of screw blocks are threadedly connected to the shell 1. The inner wall of the sealed cover 3 is fixedly connected to a guide cylinder 4. The inner wall of the shell 1 is fixedly connected to an insulation shell 5. A rotating lifting assembly 6 is installed on the shell 1. The rotating lifting assembly 6 is a prior art, which is mainly composed of a rotating machine, a cylinder and a connecting rod, which can drive the heater body 7 to rotate and lift. It will not be repeated here. A heater body 7 is installed on the rotating lifting assembly 6. The heater body 7 is a prior art and can deliver current to the graphite sheet group 15, thereby heating the quartz crucible 9. It will not be repeated here.

[0024] A support plate 8 is mounted on the heater body 7, a graphite sheet group 15 is mounted on the support plate 8, a limit assembly is mounted on the graphite sheet group 15, a quartz crucible 9 is mounted on the support plate 8, and the quartz crucible 9 is located in the graphite sheet group 15; a fixing assembly; the fixing assembly includes a fixing cavity 10 provided on the support plate 8, a plurality of high-temperature resistant springs 11 are fixedly connected to the inner wall of the fixing cavity 10, a plurality of high-temperature resistant springs 11 are fixedly connected to a sliding plate 12, a card block 13 is fixedly connected to the sliding plate 12, and the card block 13 is conically arranged. A limit groove is provided on the support plate 8, and a fixed block 14 is fixedly connected to the quartz crucible 9, the fixed block 14 and the limit groove match, a card groove is provided on the fixed block 14, and the card block 13 slides through the support plate 8;

[0025] The card block 13 matches the card slot, and the card block 13 is wedge-shaped. A pull rod is slidably passed through the support plate 8 and the graphite sheet group 15. One end of the pull rod is fixedly connected to the sliding plate 12. A handle 19 is fixedly connected to the pull rod, which is convenient for the user to pull the pull rod and improves the portability of the device. A positioning block 20 is fixedly connected to the quartz crucible 9. The positioning block 20 and the card slot are located on the same horizontal line, which is convenient for the user to align the card slot with the card block 13 and improves the portability of the device. The limiting assembly includes multiple connecting plates 16 installed on the side walls of the graphite sheet group 15. Multiple bolts 17 are threaded through the multiple connecting plates 16. Multiple bolts 17 are threadedly connected to the graphite sheet group 15. The side walls of multiple connecting plates 16 are fixedly connected to the limiting plates 18.

[0026] The detailed working process of this utility model is as follows:

[0027] When installing the quartz crucible 9, the user first aligns the positioning block 20 on the quartz crucible 9 with the handle 19, and then moves the quartz crucible 9 downward. During the descent of the quartz crucible 9, the side wall of the fixed block 14 squeezes the card block 13, and the high-temperature resistant spring 11 located in the fixed cavity 10 contracts. The sliding plate 12 slides in the fixed cavity 10, causing the card block 13 to temporarily contract into the fixed cavity 10. When the card slot on the fixed block 14 is facing the card block 13, the high-temperature resistant spring 11 automatically resets, causing the card block 13 located in the fixed cavity 10 to automatically move into the card slot, thereby achieving the quartz crucible 9. Automatic fixation allows the rotating lifting assembly 6 to drive the heater body 7 to lift and rotate. Since the quartz crucible 9 on the support plate 8 is limited by the block 13, the quartz crucible 9 rotates more stably, avoiding shaking or sliding of the quartz crucible 9 during the straight pulling process, thereby ensuring the quality of single crystal production. The user can fix the connecting plate 16 on the graphite sheet group 15 through the bolts 17, so that during the rotation and lifting process of the graphite sheet group 15, the limiting plate 18 on the connecting plate 16 can slide on the inner wall of the insulation shell 5, thereby improving the stability of the graphite sheet group 15 and protecting the graphite sheet group 15.

[0028] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model and are not limiting. Although the utility model is described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the purpose and scope of the technical solution of the utility model, which should be included in the scope of the claims of the utility model.

Claims

1. An external auxiliary structure for a Czochralski single crystal main heater, characterized in that: include: A shell (1), wherein a sealed cover (3) is mounted on the shell (1), a connecting ring (2) is fixedly connected to the side wall of the sealed cover (3), a guide tube (4) is fixedly connected to the inner wall of the sealed cover (3), a heat-insulating shell (5) is fixedly connected to the inner wall of the shell (1), a rotating lifting assembly (6) is mounted on the shell (1), a heater body (7) is mounted on the rotating lifting assembly (6), a support plate (8) is mounted on the heater body (7), a graphite sheet group (15) is mounted on the support plate (8), a limiting assembly is mounted on the graphite sheet group (15), a quartz crucible (9) is mounted on the support plate (8), and the quartz crucible (9) is located inside the graphite sheet group (15); A fixing assembly; the fixing assembly includes a fixing cavity (10), the inner wall of the fixing cavity (10) is fixedly connected with a plurality of high-temperature resistant springs (11), the plurality of high-temperature resistant springs (11) are fixedly connected with a sliding plate (12), the sliding plate (12) is fixedly connected with a clamping block (13), the clamping block (13) is arranged in a conical shape, a limiting groove is opened on the support plate (8), a fixing block (14) is fixedly connected to the quartz crucible (9), the fixing block (14) and the limiting groove match, a clamping slot is opened on the fixing block (14), the clamping block (13) slides through the support plate (8), the clamping block (13) and the clamping slot match, the clamping block (13) is wedge-shaped, a pull rod slides through the support plate (8) and the graphite sheet group (15), and one end of the pull rod is fixedly connected to the sliding plate (12).

2. The external auxiliary structure of the Czochralski single crystal main heater according to claim 1, characterized in that: in: The limiting assembly comprises a plurality of connecting plates (16), a plurality of bolts (17) are threadedly passed through the plurality of connecting plates (16), the plurality of bolts (17) are threadedly connected to the graphite sheet group (15), and the side walls of the plurality of connecting plates (16) are fixedly connected to the limiting plates (18).

3. The external auxiliary structure of the Czochralski single crystal main heater according to claim 1, characterized in that: in: A handle (19) is fixedly connected to the pull rod.

4. The external auxiliary structure of the Czochralski single crystal main heater according to claim 1, characterized in that: in: The connecting ring (2) is threaded with a plurality of screw blocks, and the plurality of screw blocks are all threadedly connected to the housing (1).

5. The external auxiliary structure of the Czochralski single crystal main heater according to claim 1, characterized in that: in: The inner wall of the shell (1) is provided with a heat-insulating cushion layer.

6. The external auxiliary structure of the Czochralski single crystal main heater according to claim 2, characterized in that: in: A positioning block (20) is fixedly connected to the quartz crucible (9), and the positioning block (20) and the clamping slot are located on the same horizontal line.

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