Positioning and clamping device for three-section graphite crucible

Abstract

The utility model discloses a positioning and clamping device of a three-section graphite crucible, which comprises a horizontally arranged bottom plate, a single crystal furnace thermal field assembly is arranged on the bottom plate, the single crystal furnace thermal field assembly comprises a walking assembly, the walking assembly is used for transporting the three-section graphite crucible, a pneumatic radial clamping assembly is arranged on the walking assembly, and the pneumatic radial clamping assembly is used for clamping the three-section graphite crucible. The pneumatic radial clamping assembly is used for clamping the three-section graphite crucible, and a limiting assembly is installed on the bottom plate and used for positioning and braking the walking assembly. The utility model has the beneficial effects that the structure is simple, the special walking assembly is designed to facilitate the transportation of the three-petal graphite crucible, the pneumatic radial clamping assembly is designed to clamp and fix the three-petal graphite crucible, and the limiting assembly is designed to carry out centering installation on the three-petal graphite crucible, so that the three-petal graphite crucible is ensured to be positioned in the center of a thermal field, and the thermal field is ensured to be stable. The uniformity of thermal field heating is ensured, and the success rate of monocrystalline silicon drawing is improved.

Description

Technical field:

[0001] The utility model relates to the technical field of three-lobe graphite crucible furnace loading, in particular to a positioning and clamping device for a three-lobe graphite crucible. Background technology:

[0002] The three-lobed graphite crucible is one of the core components of the thermal field of the single crystal furnace. When the single crystal furnace is loaded, it is necessary to install the furnace bottom protection plate, insulation tube, electrode, heater, main insulation tube, support rod, tray, three-lobed graphite crucible, guide tube and other single crystal furnace thermal field components in sequence. When installing the three-lobed graphite crucible, it is necessary to place each lobe of the three-lobed graphite crucible on the tray in sequence, and use a ruler to measure the distance between the edge of the three-lobed graphite crucible and the edge of the main insulation tube, and then adjust the position to keep it concentric with the heater and other thermal field components. Keeping it concentric can ensure that the thermal field components are heated evenly, thereby ensuring the successful pulling of single crystal silicon. In the actual loading process, the ruler measurement is inaccurate, and the operator is very likely to forget this operation step, resulting in the three-lobed graphite crucible being installed eccentrically, causing the failure of single crystal silicon pulling, resulting in large losses, and urgent improvement is needed. Utility model content:

[0003] The purpose of the utility model is to provide a positioning and clamping device for a three-lobed graphite crucible to solve the technical problems in the prior art that the three-lobed graphite crucible is easily misaligned when loaded into the furnace, the thermal field is unevenly heated, and the single crystal silicon pulling fails.

[0004] The content of the utility model: A positioning and clamping device for a three-lobed graphite crucible, which includes a horizontally arranged base plate, on which a single crystal furnace thermal field component is installed, and includes a walking component, which is used to transport the three-lobed graphite crucible, and a pneumatic radial clamping component is installed on the walking component, and the pneumatic radial clamping component is used to clamp the three-lobed graphite crucible, and a limiting component is installed on the base plate, and the limiting component is used to position and brake the walking component. When the limiting component brakes the walking component, the pneumatic radial clamping component is located directly above the single crystal furnace thermal field component.

[0005] Furthermore, the walking assembly includes a frame, a track wheel is installed at the bottom end of the frame, two track grooves are opened in parallel on the bottom plate, and the two track grooves are equidistantly arranged on both sides of the single crystal furnace thermal field assembly, and the track wheel walks in the track grooves.

[0006] Furthermore, the starting end of the track groove is a flared groove, and the flared groove is used to guide the track wheel into the track groove.

[0007] Furthermore, the limiting assembly includes a limiting plate, which is installed at the end of the track groove. A magnet column is installed on the limiting plate, and the magnet column is used to magnetically adsorb the walking assembly.

[0008] Furthermore, the pneumatic radial clamping assembly includes a lifting table, which is connected to the piston rod of the first cylinder. The first cylinder is installed on the frame, and more than one mounting groove is evenly distributed along the circumferential direction on the lifting table. A hinged rod is hinged in the mounting groove, and a second cylinder and a compression spring are respectively provided at the upper and lower ends of the hinge point of the hinged rod, and a clamping arc plate is installed at the bottom end of the hinged rod.

[0009] Furthermore, a rubber pad is installed on the inner side of the clamping arc plate.

[0010] The beneficial effects of the present invention are as follows: the present invention has a simple structure, a dedicated walking assembly is designed to facilitate the transportation of the three-lobed graphite crucible, a pneumatic radial clamping assembly is designed to clamp and fix the three-lobed graphite crucible, and a limiting assembly is designed to install the three-lobed graphite crucible in the center, thereby ensuring that the three-lobed graphite crucible is located in the center of the thermal field, ensuring the uniformity of the thermal field heating, and improving the success rate of single crystal silicon pulling. Description of the drawings:

[0011] Figure 1 It is a three-dimensional diagram of the utility model;

[0012] Figure 2 This is the main view of the utility model;

[0013] Figure 3 It is a top view of the utility model;

[0014] Figure 4 for Figure 3 Section view along BB;

[0015] In the figure, the bottom plate 1, the single crystal furnace thermal field assembly 2, the frame 3, the track wheel 4, the limit plate 5, the magnet column 6, the hinge rod 7, the clamping arc plate 8, the rubber pad 9, the first cylinder 10, the lifting table 11, the compression spring 12, the track groove 13, the three-petal graphite crucible 14, the expanding groove 15, the second cylinder 16, and the push handle 17. Specific implementation:

[0016] like Figure 1As shown, a positioning and clamping device for a three-lobed graphite crucible comprises a horizontally arranged bottom plate 1, on which a single crystal furnace thermal field assembly 2 is mounted, comprising a walking assembly for transporting a three-lobed graphite crucible 14, a pneumatic radial clamping assembly mounted on the walking assembly for clamping the three-lobed graphite crucible 14, and a limiting assembly mounted on the bottom plate 1 for positioning and braking the walking assembly. When the limiting assembly brakes the walking assembly, The pneumatic radial clamping assembly is located directly above the single crystal furnace thermal field assembly 2; the walking assembly includes a frame 3, a track wheel 4 is installed at the bottom end of the frame 3, and two parallel track grooves 13 are opened on the bottom plate 1. The two track grooves 13 are equidistantly arranged on both sides of the single crystal furnace thermal field assembly 2, and the track wheel 4 walks in the track groove 13; the starting end of the track groove 13 is a flared groove 15, and the flared groove 15 is used to guide the track wheel 4 into the track groove 13.

[0017] like Figure 2 As shown, the limiting assembly includes a limiting plate 5, which is installed at the end of the track groove 13. A magnet column 6 is installed on the limiting plate 5, and the magnet column 6 is used to magnetically adsorb the walking assembly.

[0018] like Figure 3 and Figure 4 As shown, the pneumatic radial clamping assembly includes a lifting platform 11, which is connected to the piston rod of the first cylinder 10. The first cylinder 10 is installed on the frame 3, and more than two installation grooves are evenly distributed along the circumferential direction on the lifting platform 11. A hinged rod 7 is hinged in the installation groove, and a second cylinder 16 and a compression spring 12 are respectively provided at the upper and lower ends of the hinge point of the hinged rod 7. The second cylinder 16 is installed on the lifting platform 11, and the compression spring 12 is installed in the installation groove. A clamping arc plate 8 is installed at the bottom end of the hinged rod, and a rubber pad 9 is installed on the inner side of the clamping arc plate 8.

[0019] During specific operation, the second cylinder 16 is started to push out the hinged rod 7, so that the clamping arc plate 8 clamps the three-lobed graphite crucible 14 (lifted and lowered by operating the first cylinder 10), and then the push handle 17 is pushed to make the track wheel 4 drive into the track groove 13 until the frame 3 contacts the magnet column 6. The magnet column 6 magnetically adsorbs the frame 3 to complete the braking of the walking assembly. At this time, the three-lobed graphite crucible 14 remains concentric with the single crystal furnace thermal field assembly 2. The first cylinder 10 is started to lower the three-lobed graphite crucible 14, so that the three-lobed graphite crucible 14 is concentrically loaded into the single crystal furnace thermal field assembly 2. The first cylinder 10 is closed to make the clamping arc plate 8 release the three-lobed graphite crucible 14, thus completing the loading of the three-lobed graphite crucible 14 into the furnace.

[0020] The above are only preferred examples of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A positioning and clamping device for a three-lobed graphite crucible, comprising a horizontally arranged bottom plate (1), on which a single crystal furnace thermal field assembly (2) is mounted, characterized in that: The invention comprises a walking assembly, the walking assembly being used to transport a three-lobed graphite crucible (14); a pneumatic radial clamping assembly being installed on the walking assembly, the pneumatic radial clamping assembly being used to clamp the three-lobed graphite crucible (14); a limiting assembly being installed on the bottom plate (1), the limiting assembly being used to position and brake the walking assembly; when the limiting assembly brakes the walking assembly, the pneumatic radial clamping assembly is located directly above the single crystal furnace thermal field assembly (2).

2. The positioning and clamping device for a three-lobed graphite crucible according to claim 1, characterized in that: The walking assembly comprises a frame (3), a track wheel (4) is installed at the bottom end of the frame (3), two track grooves (13) are opened in parallel on the bottom plate (1), and the two track grooves (13) are equidistantly arranged on both sides of the single crystal furnace thermal field assembly (2), and the track wheel (4) walks in the track grooves (13).

3. The positioning and clamping device for a three-lobed graphite crucible according to claim 2, characterized in that: The starting end of the track groove (13) is a flared groove (15), and the flared groove (15) is used to guide the track wheel (4) into the track groove (13).

4. The positioning and clamping device for a three-lobed graphite crucible according to claim 2, characterized in that: The limiting assembly comprises a limiting plate (5), the limiting plate (5) being mounted at the end of the track groove (13), and a magnet column (6) being mounted on the limiting plate (5), the magnet column (6) being used for magnetically adsorbing the walking assembly.

5. The positioning and clamping device for a three-lobed graphite crucible according to claim 2, characterized in that: The pneumatic radial clamping assembly includes a lifting table (11), the lifting table (11) is connected to the piston rod of the first cylinder (10), the first cylinder (10) is installed on the frame (3), and more than two installation grooves are evenly distributed along the circumferential direction on the lifting table (11), a hinge rod (7) is hinged in the installation groove, and a second cylinder (16) and a compression spring (12) are respectively provided at the upper end and the lower end of the hinge point of the hinge rod (7), and a clamping arc plate (8) is installed at the bottom end of the hinge rod.

6. The positioning and clamping device for a three-lobed graphite crucible according to claim 5, characterized in that: A rubber pad (9) is installed on the inner side of the clamping arc plate (8).

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