Sealing door plate opening and closing mechanism

Abstract

The utility model discloses a sealing door plate opening and closing mechanism which comprises a machine frame, a door opening and closing assembly and a pressing assembly, and a material opening is formed in the machine frame in a penetrating mode. The opening and closing door assembly is arranged on the rack and comprises an opening and closing door which can move up and down under the action of an opening and closing driving part so as to open or close the material opening; the opening and closing door comprises an inner door and an outer door, and the inner door is connected with the outer door through an elastic piece; the outer door is connected with the opening-closing driving part; the pressing assembly comprises a stopping part and a linkage part, and the stopping part is located above the material opening and used for abutting against the inner door; the linkage part is arranged between the inner door and the outer door and used for driving the inner door to tightly press the material opening. The sealing door plate opening and closing mechanism can enhance the sealing effect on the material opening.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a sealing door panel opening and closing mechanism. Background Art

[0002] In the semiconductor industry, wafers must be stored in a nitrogen atmosphere to prevent oxidation. To meet the demands of automated production, nitrogen-sealed storage vaults are commonly used for wafer storage. These vaults are filled with nitrogen and feature a feed port for the feed box. These ports are typically opened and closed with a device. However, existing devices often provide poor sealing performance, easily leading to nitrogen leaks. Utility Model Content

[0003] In order to overcome the above shortcomings, the purpose of the present invention is to provide a sealing door panel opening and closing mechanism that can enhance the sealing effect of the material opening.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is: a sealed door panel opening and closing mechanism, comprising

[0005] A frame with a material port extending therethrough;

[0006] An opening and closing door assembly is provided on the frame, comprising an opening and closing door capable of being raised and lowered under the action of an opening and closing drive unit to open or close the material port; the opening and closing door comprises an inner door and an outer door, the inner door being connected to the outer door via an elastic member; the outer door being connected to the opening and closing drive unit;

[0007] The pressing assembly includes a stopper and a linkage part. The stopper is located above the material port for the inner door to abut against. The linkage part is arranged between the inner door and the outer door to drive the inner door to press the material port.

[0008] In the process of the opening and closing drive unit driving the outer door to rise, the inner door can rise synchronously with the outer door under the action of the elastic member until the inner door abuts against the stop portion. At this time, the opening and closing drive unit continues to drive the outer door to rise, and the inner door is pressed against the material port under the action of the linkage portion.

[0009] The beneficial effects of the sealing door panel opening and closing mechanism of the utility model are:

[0010] The opening and closing door is driven to move up and down by the opening and closing drive unit to open or close the material port. The double door setting of the inner door and the outer door can cooperate with the action of the clamping component to achieve sealing and compression of the material port, so as to further suppress the risk of nitrogen escaping from the gap between the frame and the inner door when the material port is closed, thereby improving the sealing effect of the opening and closing door on the material port.

[0011] Furthermore, the linkage portion includes connecting rods symmetrically arranged on both sides of the inner door, and both ends of each connecting rod are pivotally connected to the inner door and the outer door respectively; and when the elastic member is in a natural state, the connecting rod is inclined downward from the inner door to the outer door.

[0012] When the inner door rises with the outer door until it abuts the stop part, the inner door no longer moves up due to the stop part, while the outer door continues to move up under the action of the opening and closing drive part. At this time, the end of the connecting rod connected to the outer door moves up accordingly, causing the connecting rod to swing, and the horizontal dimension of the connecting rod becomes larger, thereby pushing the inner door to move away from the outer door, so that the inner door is pressed tightly against the material opening.

[0013] Furthermore, the frame is provided with a sealing ring around the material opening for the inner door to press against. The provision of the sealing ring can enhance the sealing performance when the inner door panel is pressed, further suppressing gas leakage.

[0014] Furthermore, the outer door is provided with at least one waist-shaped groove arranged in the vertical direction; the inner door is provided with a guide block arranged in a one-to-one correspondence with the waist-shaped groove and capable of extending into the corresponding waist-shaped groove; the elastic member is arranged in the waist-shaped groove and located above the guide block, and the two ends of the elastic member are respectively connected to the waist-shaped groove and the guide block, and when the elastic member is in a natural state, a gap is left between the lower end of the guide block and the waist-shaped groove. The cooperation between the waist-shaped groove and the guide block can make the pulling force of the elastic member on the inner door as vertical as possible, so as to avoid the inner door from being displaced in the horizontal direction during the process of rising and falling with the outer door, and the waist-shaped groove can guide the movement of the guide block, and the gap between the guide block and the bottom of the waist-shaped groove can ensure that when the inner door stops on the stop portion, the waist-shaped groove can move upward along the guide block to ensure that the outer door continues to move upward.

[0015] Furthermore, a door panel stopper located above the outer door is provided on a side of the inner door facing the outer door, and the outer door abuts against the door panel stopper. The upward movement of the outer door can be stopped by the provision of the door panel stopper.

[0016] Specifically, when the outer door abuts the door panel stop, the lower end of the guide block abuts the waist-shaped groove, and the connecting rod swings horizontally or tilts downward from the inner door toward the outer door. At this point, the inner door is pressed against the material opening. The door panel stop, waist-shaped groove, and guide block cooperate to provide dual upward and downward control of the outer door's position, ensuring the outer door's positional stability when the material opening is sealed and pressed.

[0017] Furthermore, the upper end of the outer door is provided with a clearance notch for avoiding the stop portion. The provision of the clearance notch can prevent the outer door from abutting against the stop portion during the synchronous upward movement of the outer door and the inner door, thereby ensuring that the outer door can continue to move upward.

[0018] Specifically, two sets of opening and closing drive units are provided, one on each side of the inner door panel. Each set of opening and closing drive units includes a lifting cylinder, a lifting plate, and a lifting rail. The lifting rail is vertically arranged on the frame, and the lifting plate slides on the lifting rail and is connected to the piston rod of the lifting cylinder. The lifting plate is connected to the outer door. The cooperation between the lifting rail and the lifting plate guides the movement of the lifting plate and the outer door.

[0019] Furthermore, the lifting plate includes a U-shaped plate held on the door panel, and the U-shaped plate can partially cover a side of the outer door away from the inner door to suppress lateral displacement of the outer door. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a structural diagram of the sealing door panel opening and closing mechanism according to an embodiment of the present utility model;

[0021] Figure 2 for Figure 1 A partial enlarged view of part A in the middle;

[0022] Figure 3 This is a structural schematic diagram of the opening and closing mechanism when the material port is closed in an embodiment of the utility model.

[0023] In the picture:

[0024] 1-frame; 11-feeding port;

[0025] 21 - opening and closing drive unit; 211 - lifting cylinder; 212 - lifting plate; 213 - lifting slide rail; 22 - inner door; 221 - guide block; 222 - door panel stopper; 23 - outer door; 231 - waist groove; 232 - clearance notch; 24 - elastic member;

[0026] 31-stop part; 32-linkage part; 321-connecting rod;

[0027] 4-Sealing ring. DETAILED DESCRIPTION

[0028] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more precise definition of the protection scope of the present invention.

[0029] Example

[0030] See attached Figure 1-3 As shown, a sealing door panel opening and closing mechanism of the utility model includes a frame 1, an opening and closing door assembly, and a pressing assembly, wherein a material port 11 connected to the left and right is provided through the frame 1. The opening and closing door assembly is provided on the frame 1, and includes an opening and closing door that can be raised and lowered to open or close the material port 11 under the action of an opening and closing drive unit 21. The opening and closing door includes an inner door 22 and an outer door 23 arranged in sequence along the left and right directions, and the inner door 22 is arranged close to the material port 11. The inner door 22 is connected to the outer door 23 through an elastic member 24, and the outer door 23 is connected to the opening and closing drive unit 21. The pressing assembly includes a stopper 31 and a linkage part 32, and the stopper 31 is located above the material port 11 for the inner door 22 to abut against. The linkage part 32 is provided between the inner door 22 and the outer door 23 to drive the inner door 22 to press the material port 11.

[0031] During the process of the opening and closing drive unit 21 driving the opening and closing door to rise and close the material port 11, the inner door 22 can rise synchronously with the outer door 23 under the action of the elastic member 24 until the inner door 22 abuts against the stopper 31. At this time, due to the stopper 31, the inner door 22 no longer rises, while the outer door 23 can still rise under the action of the opening and closing drive unit 21. At this time, the outer door 23 can apply force to the linkage part 32 to swing the linkage part 32, and the linkage part 32 then drives the inner door 22 to move away from the outer door 23 and press against the material port 11. The opening and closing drive unit 21 drives the opening and closing door to rise and fall, thereby opening or closing the material port 11. Then, the double door arrangement of the inner door 22 and the outer door 23 can cooperate with the action of the pressing assembly to achieve sealing and pressing of the material port 11, so as to further suppress the risk of nitrogen escaping from the gap between the frame 1 and the inner door 22 when the material port 11 is closed, thereby improving the sealing effect of the opening and closing door on the material port 11.

[0032] In the opening and closing door, the opening and closing drive part 21 directly drives the outer door 23, and the elastic part 24 connects the outer door 23 and the inner door 22, so that the inner door 22 can be raised and lowered synchronously with the outer door 23 when there is no external force. When the inner door 22 is acted upon by an external force (stopped by the stop part 31), it can provide a tensile elastic force between the inner door 22 and the outer door 23 to ensure that the outer door 23 continues to move upward.

[0033] For further information, see Appendix Figure 2 As shown, the frame 1 is provided with a sealing ring 4 around the material port 11 for the inner door 22 to press against. The provision of the sealing ring 4 can enhance the sealing performance of the inner door 22 when it is pressed, further suppressing gas leakage.

[0034] In some embodiments, see Appendix Figure 3As shown, the linkage portion 32 includes linkage rods 321 symmetrically arranged on both sides of the inner door 22 in the front-to-back direction. The two ends of each linkage rod 321 are pivotally connected to the inner door 22 and the outer door 23 respectively; and when the elastic member 24 is in the natural state, the linkage rod 321 is inclined downward from the inner door 22 to the outer door 23. Furthermore, a plurality of linkage rods 321 distributed vertically can be provided on each side of the inner door 22. For example, two linkage rods 321 are provided on each side of the inner door 22, and the two linkage rods 321 are respectively close to the upper and lower ends of the inner door 22. This arrangement allows the four linkage rods 321 to be relatively evenly distributed on the four corners of the inner door 22 and the outer door 23, so as to ensure that when the four linkage rods 321 swing synchronously, the movement of each part of the inner door 22 is relatively consistent, thereby ensuring the pressing effect on the material port 11.

[0035] When the cam 321 is in the unlocking state, the locking cam 321 is in the unlocking state, and the locking cam 321 is in the unlocking state, so the cam 321 is locked and the unlocking state is achieved.

[0036] In some embodiments, see Appendix Figure 1-3 As shown, the outer door 23 is provided with at least one vertically arranged waist-shaped groove 231. The inner door 22 is provided with a guide block 221, which corresponds one-to-one with each waist-shaped groove 231 and can extend into the corresponding waist-shaped groove 231. An elastic member 24 is disposed within the waist-shaped groove 231 and above the guide block 221. The ends of the elastic member 24 are connected to the waist-shaped groove 231 and the guide block 221, respectively. When the elastic member 24 is in its neutral position, a gap is left between the lower end of the guide block 221 and the waist-shaped groove 231. It is important to note that the elastic member 24 can be a single spring, in which case the spring is located within only one waist-shaped groove 231, or it can be a plurality of springs, corresponding one-to-one with the number of waist-shaped grooves 231, in which case each spring is located within a corresponding waist-shaped groove 231. Clearly, the one-to-one correspondence between the plurality of waist-shaped grooves 231 and the plurality of springs ensures a more uniform upward or downward pulling force exerted by the elastic member 24 on the inner door 22.

[0037] Through the cooperation between the waist-shaped groove 231 and the guide block 221, the pulling force of the elastic member 24 on the inner door 22 can be as much as possible in the vertical direction, so as to avoid the horizontal displacement of the inner door 22 during the lifting and lowering process of the outer door 23, and the waist-shaped groove 231 can guide the movement of the guide block 221, and the gap reserved between the guide block 221 and the bottom of the waist-shaped groove 231 can ensure that when the inner door 22 stops on the stop part 31, the waist-shaped groove 231 can move upward along the guide block 221 to ensure that the outer door 23 continues to move upward.

[0038] When the inner door 22 abuts the stopper 31, as the outer door 23 continues to move upward, the waist-shaped groove 231 abuts the lower end of the guide block 221. At this time, the elastic member 24 is in a stretched state, and the connecting rod 321 swings to a horizontal direction or a nearly horizontal direction. At this time, the abutment between the lower end of the guide block 221 and the waist-shaped groove 231 can limit the upward movement of the outer door 23. The connecting rod 321 also swings to the limit position, and the inner door 22 is also in the limit position of pressing the material port 11. During this process, the connecting rod 321 swings from an oblique direction to a horizontal direction or a nearly horizontal direction, causing the connecting rod 321 to swing from an oblique direction to a horizontal direction or a nearly horizontal direction, thereby increasing the horizontal dimension of the connecting rod 321, thereby causing the inner door 22 to move away from the outer door 23.

[0039] The term "close to horizontal" means that the connecting rod 321 is still slanting downward from the inner door 22 toward the outer door 23, but the degree of downward slant is less than that of the connecting rod 321 when the elastic member 24 is in its natural state. This arrangement ensures that during the process of pressing the material port 11, the swinging of the connecting rod 321 causes the connecting rod 321 to gradually increase in the horizontal direction, thereby pushing the inner door 22 away from the outer door 23.

[0040] In some embodiments, see Appendix Figure 2 As shown, the side of the inner door 22 facing the outer door 23 is equipped with a door panel stop 222 located above the outer door 23. The door panel stop 222 is abutted against the outer door 23. The provision of the door panel stop 222 prevents the outer door 23 from moving upward. When the outer door 23 abuts the door panel stop 222, the lower end of the guide block 221 abuts the waist-shaped groove 231, and the connecting rod 321 swings horizontally or tilts downward from the inner door 22 toward the outer door 23. At this time, the inner door 22 is pressed against the material port 11. The cooperation between the door panel stop 222, the waist-shaped groove 231, and the guide block 221 can double-limit the upward and downward position of the outer door 23, ensuring the positional stability of the outer door 23 when it is sealed and pressed against the material port 11.

[0041] In some embodiments, the upper end of the outer door 23 is provided with a clearance notch 232 for avoiding the stopper 31. The provision of the clearance notch 232 can prevent the outer door 23 from abutting against the stopper 31 during the simultaneous upward movement of the outer door 23 and the inner door 22, thereby ensuring that the outer door 23 can continue to move upward.

[0042] In some embodiments, two sets of opening and closing drive units 21 are provided, one on each side of the inner door 22. Each set of opening and closing drive units 21 includes a lifting cylinder 211, a lifting plate 212, and a lifting rail 213. The lifting rail 213 is arranged vertically on the frame 1. The lifting plate 212 slides on the lifting rail 213 and is connected to the piston rod of the lifting cylinder 211. The lifting plate 212 is connected to the outer door 23. The cooperation between the lifting rail 213 and the lifting plate 212 can guide the movement direction of the lifting plate 212 and the outer door 23.

[0043] Furthermore, the lifting plate 212 comprises a U-shaped plate that is held on the frame 1 and partially covers the side of the outer door 23 away from the inner door 22. The structural stability of the frame 1 is utilized to inhibit the left and right movement of the lifting plate 212, thereby inhibiting the left and right movement of the outer door 23 connected to the lifting plate 212, ensuring that the outer door 23 can only move up and down with the lifting plate 212.

[0044] The working process of this embodiment is as follows:

[0045] When closing the material port 11, the outer door 23 is first driven to rise by the opening and closing drive unit 21. At this time, the inner door 22 rises synchronously with the outer door 23 under the action of the elastic member 24 until the inner door 22 abuts against the stop portion 31; the opening and closing drive unit 21 continues to drive the outer door 23 to rise. Due to the stop of the stop portion 31, the inner door 22 cannot continue to rise. At this time, the connecting rod 321 swings and pushes the inner door 22 to move away from the material port 11, and gradually presses on the sealing ring 4 until the guide 221 abuts against the waist-shaped groove 231, and the material port 11 is closed. At this time, the elastic member 24 is in a stretched state, and the connecting rod 321 swings to a horizontal direction or a near horizontal direction.

[0046] When opening the material port 11, the outer door 23 is first driven down by the opening and closing drive unit 21, the elastic member 24 gradually returns to its natural state, and the connecting rod 321 swings to a downward direction from the inner door 22 to the outer door 23. At this time, with the swing of the connecting rod 321, the inner door 22 moves toward the outer door 23 and gradually loosens the sealing ring 4; the opening and closing drive unit 21 continues to drive the outer door 23 to descend, and the inner door 22 then descends synchronously with the outer door 23 under the action of the elastic member 24 until the material port 11 is fully opened.

[0047] The above implementation methods are only for illustrating the technical concept and features of the utility model. Its purpose is to enable people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the scope of protection of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the scope of protection of the utility model.

Claims

1. A sealed door panel opening and closing mechanism, characterized by: include A frame with a material port extending therethrough; An opening and closing door assembly is provided on the frame, comprising an opening and closing door capable of being raised and lowered under the action of an opening and closing drive unit to open or close the material port; the opening and closing door comprises an inner door and an outer door, the inner door being connected to the outer door via an elastic member; the outer door being connected to the opening and closing drive unit; The pressing assembly includes a stopper and a linkage part. The stopper is located above the material port for the inner door to abut against. The linkage part is arranged between the inner door and the outer door to drive the inner door to press the material port.

2. The sealing door panel opening and closing mechanism according to claim 1, characterized in that: The linkage portion includes connecting rods symmetrically arranged on both sides of the inner door, and both ends of each connecting rod are pivotally connected to the inner door and the outer door respectively; and when the elastic member is in a natural state, the connecting rod is inclined downward from the inner door to the outer door.

3. The sealing door panel opening and closing mechanism according to claim 1, characterized in that: The frame is provided with a sealing ring around the material opening for the inner door to press against.

4. The sealing door panel opening and closing mechanism according to claim 2, characterized in that: The outer door is provided with at least one waist-shaped groove arranged vertically; the inner door is provided with a guide block arranged in one-to-one correspondence with the waist-shaped groove and capable of extending into the corresponding waist-shaped groove; the elastic member is arranged in the waist-shaped groove and located above the guide block, and the two ends of the elastic member are respectively connected to the waist-shaped groove and the guide block, and when the elastic member is in a natural state, a gap is left between the lower end of the guide block and the waist-shaped groove.

5. The sealing door panel opening and closing mechanism according to claim 4, characterized in that: A door panel stopper located above the outer door is provided on one side of the inner door facing the outer door, and the outer door abuts against the door panel stopper.

6. The sealing door panel opening and closing mechanism according to claim 5, characterized in that: When the outer door abuts against the door panel stop block, the lower end of the guide block abuts against the waist-shaped groove, and the connecting rod swings to the horizontal direction or tilts downward from the inner door to the outer door. At this time, the inner door is pressed against the material port.

7. The sealing door panel opening and closing mechanism according to claim 5, characterized in that: The upper end of the outer door is provided with a notch for avoiding the stop portion.

8. The sealing door panel opening and closing mechanism according to claim 1, characterized in that: The opening and closing drive parts are provided with two groups, and are respectively located on both sides of the inner door panel; each group of the opening and closing drive parts includes a lifting cylinder, a lifting plate, and a lifting slide rail; the lifting slide rail is arranged vertically on the frame, and the lifting plate is slidably set on the lifting slide rail and connected to the piston rod of the lifting cylinder; the lifting plate is connected to the outer door.

9. The sealing door panel opening and closing mechanism according to claim 8, characterized in that: The lifting plate includes a U-shaped plate held on the door panel, and the U-shaped plate can partially cover a side of the outer door away from the inner door.

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