Photoresist resin reaction kettle liquid level monitoring device
By introducing structures such as liquid storage tanks, rollers, connecting ropes and pointers into the photoresist resin reactor, combined with gravity sensors and electric rotating shafts, the problem of inaccurate photoresist monitoring is solved, and the accuracy of liquid level monitoring and cleaning efficiency are improved.
Patent Information
- Application Number
- CN202421931306.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-09
- Publication Date
- 2025-08-12
- Estimated Expiration
- 2034-08-09
AI Technical Summary
The monitoring method of photoresist in the prior art can easily lead to changes in the properties of photoresist and lacks an effective monitoring solution.
It adopts a structure including a reservoir tank, roller, connecting rope, pointer and transparent scale meter, combined with gravity sensor and electric rotary shaft to accurately monitor and clean the liquid level of the photoresist resin reactor.
It ensures the accuracy of liquid level monitoring of photoresist resin reactor, and improves cleaning efficiency, avoids errors in pointers when the resin is not poured into it, ensuring the accuracy of monitoring and comprehensiveness of cleaning.
Smart Images

Figure CN223209460U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of reactor liquid level monitoring, in particular to a photoresist resin reactor liquid level monitoring device. Background Art
[0002] Photoresist, also known as photoresist, refers to a thin film material whose solubility changes when exposed to ultraviolet light, electron beams, ion beams, X-rays, or other radiation. It is a light-sensitive liquid mixture composed of three main components: a photosensitive resin, a sensitizer, and a solvent.
[0003] During actual monitoring, due to the different properties of the photoresist itself, traditional monitoring methods can easily cause changes in the photoresist.
[0004] Currently, no effective solutions have been proposed for the problems in related technologies. Utility Model Content
[0005] In view of the problems in the related art, the present invention proposes a photoresist resin reactor liquid level monitoring device to overcome the above technical problems existing in the existing related art.
[0006] To this end, the specific technical solutions adopted in this utility model are as follows:
[0007] A photoresist resin reactor liquid level monitoring device comprises a reactor and a feeding port arranged at the top of the reactor. A liquid storage tank is provided in the reactor. Adjustment mechanisms connected to the reactor are provided on both sides of the liquid storage tank. A cleaning port is provided at the top of the reactor.
[0008] Preferably, the adjustment mechanism includes rollers arranged on both sides of the liquid storage tank, both ends of the rollers are connected to the reactor, any group of the rollers is provided with a connecting rope, one end of the connecting rope is connected to the liquid storage tank, and the other end of the connecting rope is connected to a pointer located between the liquid storage tank and the reactor, and the reactor is provided with a transparent scale matching the pointer.
[0009] Preferably, a gravity sensor is provided in the roller, an electric rotating shaft in contact with the roller is provided in the roller, the electric rotating shaft is electrically connected to the gravity sensor, and a connector is provided at the junction of the pointer and the connecting rope.
[0010] Preferably, a slide groove for the liquid storage tank to slide is provided on the inner wall of the reactor.
[0011] Preferably, the connecting member includes a frame, the frame is connected to both sides of the top of the pointer, and the bottom of the frame is provided with a plurality of groups of connecting rods arranged at equal distances.
[0012] Preferably, a second slide groove for the pointer to slide is provided in the reactor, and a limiting plate is provided on the side of the second slide groove away from the pointer.
[0013] Preferably, the reactor is provided with a base at the bottom end, and three groups of equally spaced legs are provided at the bottom end of the base, and any group of legs is telescopic. A receiving groove matching the three groups of legs is provided in the base, and a telescopic hose is provided at the connection between the discharge port and the liquid storage tank.
[0014] Preferably, a discharge port is provided at the bottom end of the reactor, and an electric valve is provided in the discharge port.
[0015] Preferably, a handle is provided at the top of the reactor, a vertically arranged rotating spindle is provided in the liquid storage tank, and several groups of equidistantly arranged stirring rods are provided outside the rotating spindle. A scraper is provided at the end of any group of stirring rods away from the rotating spindle, and a telescopic rod connected to the top of the reactor is provided at the top of the rotating spindle.
[0016] Preferably, the feeding port and the cleaning port are both connected to the liquid storage tank.
[0017] The beneficial effects of the present invention are as follows: by pouring the photoresist resin into the reactor, the liquid storage tank will be pressed down by the pouring of the resin, thereby driving the connecting rope to be pulled, thereby driving the roller to rotate, and then driving the pointer to move up, at this time the pointer stops on the transparent scale to be read; in this process, the height of the liquid storage tank can be corrected by the gravity sensor and the electric rotating shaft, that is: by detecting whether there is relevant liquid in the liquid storage tank 3 under the action of the gravity sensor, it is avoided that the initial height of the liquid storage tank 3 is affected by its own weight, and at the same time the electric rotating shaft can be used to rotate, thereby realizing control of the connecting rope 6, realizing correction, avoiding displacement of the pointer when the resin has not been poured, and ensuring the accuracy of monitoring, and at the same time, through the provided rotating spindle and scraper, the liquid storage tank can be controlled to move up and down by the electric rotating shaft while cleaning the inner wall of the liquid storage tank. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0019] Figure 1 This is an appearance diagram of a photoresist resin reactor liquid level monitoring device according to an embodiment of the present utility model;
[0020] Figure 2This is a schematic diagram of the structure inside a photoresist resin reactor liquid level monitoring device according to an embodiment of the present utility model;
[0021] Figure 3 The present invention is a schematic structural diagram of the connection between a pointer and a connecting rope in a photoresist resin reactor liquid level monitoring device according to an embodiment of the present invention.
[0022] In the picture:
[0023] 1. Reactor; 2. Feeding port; 3. Liquid storage tank; 4. Cleaning port; 5. Roller; 6. Connecting rope; 7. Pointer; 8. Transparent scale; 9. Frame; 10. Connecting rod; 11. Base; 12. Support leg; 13. Discharge port; 14. Telescopic hose; 15. Rotating spindle; 16. Stirring rod; 17. Scraper. DETAILED DESCRIPTION
[0024] To further illustrate each embodiment, the present invention provides drawings, which are part of the disclosure of the present invention and are mainly used to illustrate the embodiments. They can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. By referring to these contents, ordinary technicians in this field should be able to understand other possible implementation methods and the advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are generally used to represent similar components.
[0025] According to an embodiment of the present utility model, a photoresist resin reactor liquid level monitoring device is provided.
[0026] Embodiment 1;
[0027] like Figure 1 and Figure 2As shown, according to the embodiment of the present invention, the photoresist resin reactor liquid level monitoring device includes a reactor 1 and a feeding port 2 provided at the top of the reactor 1, a liquid storage tank 3 is provided in the reactor 1, and adjustment mechanisms connected to the reactor 1 are provided on both sides of the liquid storage tank 3, a cleaning port 4 is provided at the top of the reactor 1, a base 11 is provided at the bottom of the reactor 1, and three groups of equally spaced legs 12 are provided at the bottom of the base 11, and any group of the legs 12 are telescopic, and a receiving groove matching the three groups of legs 12 is provided in the base 11, and the bottom of the reactor 1 is provided with a plurality of adjusting mechanisms. A discharge port 13 is provided, an electric valve is provided in the discharge port 13, a telescopic hose 14 is provided at the junction of the discharge port 13 and the liquid storage tank 3, a handle is provided at the top of the reactor 1, a vertically arranged rotating spindle 15 is provided in the liquid storage tank 3, and a plurality of groups of equidistant stirring rods 16 are provided outside the rotating spindle 15, and a scraper 17 is provided on the end of any group of stirring rods 16 away from the rotating spindle 15, a telescopic rod connected to the top of the reactor 1 is provided at the top of the rotating spindle 15, and the feeding port 2 and the cleaning port 4 are both connected to the liquid storage tank 3.
[0028] Embodiment 2:
[0029] like Figure 2 and Figure 3 As shown, the adjustment mechanism includes rollers 5 provided on both sides of the liquid storage tank 3, both ends of the rollers 5 are connected to the reactor 1, and any group of the rollers 5 is provided with a connecting rope 6, one end of the connecting rope 6 is connected to the liquid storage tank 3, and the other end of the connecting rope 6 is connected to the pointer 7 located between the liquid storage tank 3 and the reactor 1, and the reactor 1 is provided with a transparent scale 8 matching the pointer 7, a gravity sensor is provided in the roller 5, an electric rotating shaft in contact with it is provided in the roller 5, and the electric rotating shaft is electrically connected to the gravity sensor, and a connecting piece is provided at the junction of the pointer 7 and the connecting rope 6, and a slide groove for sliding the liquid storage tank 3 is provided on the inner wall of the reactor 1, and the connecting piece includes a frame 9, which is connected to both sides of the top of the pointer 7, and a plurality of groups of equidistantly arranged connecting rods 10 are provided at the bottom end of the frame 9, and a slide groove 2 for sliding the pointer 7 is provided in the reactor 1, and a limit plate is provided on the side of the slide groove 2 away from the pointer 7.
[0030] In order to facilitate understanding of the above technical solutions of the present invention, the working principle or operation method of the present invention in actual process is described in detail below.
[0031] In actual application, by pouring photoresist resin in the reactor 1, the liquid storage tank 3 can be pressed down due to the pouring of resin, and then drive the connecting rope 6 to be pulled, and then drive the roller 5 to rotate, and then drive the pointer 7 to move up, and at this moment, the pointer 7 stops on the transparent scale 8 and can realize reading; In this process, the correction of the liquid storage tank 3 height can be realized by the gravity sensor and the electric rotating shaft, that is: by under the effect of the gravity sensor, detect whether there is relevant liquid in the liquid storage tank 3, avoid affecting the initial height of the liquid storage tank 3 under deadweight, and the electric rotating shaft can be used for rotation at the same time, and then realize the control of the connecting rope 6, realize correction, avoid when not pouring resin, pointer 7 has been displaced, and ensure the accuracy of monitoring; Simultaneously, after use, the up and down movement of the liquid storage tank 3 can be controlled by the rotation of the electric rotating shaft, and then in conjunction with the effect of the rotating main shaft 15 and the scraper 17, realize the cleaning of the liquid storage tank 3 inner wall parts, and then can complete the cleaning of the dead angle on the liquid storage tank 3 inner wall when cleaning, and then improve cleaning efficiency.
[0032] In summary, with the aid of the above technical solution of the present invention, by pouring the photoresist resin into the reactor 1, the liquid storage tank 3 is then pressed downward due to the pouring of the resin, thereby driving the connecting rope 6 to be pulled, thereby driving the roller 5 to rotate, and then driving the pointer 7 to move upward. At this time, the pointer 7 stops on the transparent scale 8 and can be read; in this process, the height of the liquid storage tank 3 can be corrected by the gravity sensor and the electric shaft, that is, by detecting whether there is relevant liquid in the liquid storage tank 3 under the action of the gravity sensor, so as to avoid the initial height of the liquid storage tank 3 being affected by its own weight. At the same time, the electric shaft can be used to rotate, thereby controlling the connecting rope 6 and achieving correction, thereby avoiding displacement of the pointer 7 when the resin is not poured, thereby ensuring the accuracy of monitoring; at the same time, after use, the up and down movement of the liquid storage tank 3 can be controlled by the rotation of the electric shaft, and then the inner wall portion of the liquid storage tank 3 can be cleaned by combining the action of the rotating spindle 15 and the scraper 17, so that the blind spots on the inner wall of the liquid storage tank 3 can be cleaned during cleaning, thereby improving the cleaning efficiency.
[0033] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A photoresist resin reactor liquid level monitoring device, characterized in that: The invention comprises a reactor (1) and a feeding port (2) provided at the top of the reactor (1), a liquid storage tank (3) is provided in the reactor (1), and adjustment mechanisms connected to the reactor (1) are provided on both sides of the liquid storage tank (3), and a cleaning port (4) is provided at the top of the reactor (1), and the adjustment mechanism comprises rollers (5) provided on both sides of the liquid storage tank (3), and both ends of the rollers (5) are connected to the reactor (1), and a connecting rope (6) is provided on any group of the rollers (5), one end of the connecting rope (6) is connected to the liquid storage tank (3), and the other end of the connecting rope (6) is connected to the liquid storage tank (3) and the reactor. (1) is connected to a pointer (7) between the reactor (1), a transparent scale (8) matching the pointer (7) is provided on the reactor (1), a gravity sensor is provided in the roller (5), an electric rotating shaft in contact with the roller (5) is provided in the roller (5), the electric rotating shaft is electrically connected to the gravity sensor, a connecting piece is provided at the junction of the pointer (7) and the connecting rope (6), a slide groove for the liquid storage tank (3) to slide is provided on the inner wall of the reactor (1), the connecting piece includes a frame (9), the frame (9) is connected to both sides of the top of the pointer (7), and the bottom of the frame (9) is provided with a plurality of groups of connecting rods (10) arranged at equal distances.
2. A photoresist resin reactor liquid level monitoring device according to claim 1, characterized in that: A second slide groove for the pointer (7) to slide is provided in the reactor (1), and a limiting plate is provided on a side of the second slide groove away from the pointer (7).
3. The photoresist resin reactor liquid level monitoring device according to claim 1, characterized in that: The bottom end of the reactor (1) is provided with a base (11), and the bottom end of the base (11) is provided with three groups of equally spaced support legs (12), and any group of the support legs (12) is telescopic. The base (11) is provided with a receiving groove matching the three groups of the support legs (12).
4. A photoresist resin reactor liquid level monitoring device according to claim 3, characterized in that: The bottom end of the reactor (1) is provided with a discharge port (13), an electric valve is provided in the discharge port (13), and a telescopic hose (14) is provided at the junction of the discharge port (13) and the liquid storage tank (3).
5. The photoresist resin reactor liquid level monitoring device according to claim 1, characterized in that: The reactor (1) is provided with a handle at the top end, the liquid storage tank (3) is provided with a vertically arranged rotating main shaft (15), and a plurality of groups of stirring rods (16) are provided outside the rotating main shaft (15) and are arranged at equal distances. A scraper (17) is provided at the end of any group of stirring rods (16) away from the rotating main shaft (15), and a telescopic rod connected to the top end of the reactor (1) is provided at the top end of the rotating main shaft (15).
6. The device for monitoring the liquid level of a photoresist resin reactor according to claim 1, wherein: The feeding port (2) and the cleaning port (4) are both connected to the liquid storage tank (3).