Installation tool for pressure distribution ring

Abstract

The utility model provides an installation tool of a pressure distribution ring, which comprises an outer disc, an inner disc and a telescopic supporting piece, the telescopic supporting piece can stretch out and draw back along the vertical direction, and two ends of the telescopic supporting piece are respectively connected with the outer disc and the inner disc; the outer disc is arranged outside the inner disc in a sleeving manner; when the telescopic supporting piece is in a natural state, the top end of the side wall of the outer disc is lower than the top end of the side wall of the inner disc. When the pressure distribution ring is mounted by the aid of the device, the pressure distribution ring is uniformly supported and tensioned by the periphery of the inner disc, a worker can check and adjust the distortion state of the pressure distribution ring at any time, and in the dropping process of a blasting head, each peripheral part of the inner disc drops slowly and uniformly, so that the pressure distribution ring is uniformly stressed and cannot be distorted, and the pressure distribution ring is prevented from being damaged. The pressure distribution ring is accurately pressed into a groove in a polishing head, the problems that in the prior art, when the pressure distribution ring is installed manually, twist-shaped distortion, local excessive stretching or local stacking and warping happen to the pressure distribution ring are solved, the assembling quality of the pressure distribution ring is guaranteed, and the polishing quality of a silicon wafer is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to an installation tool for a pressure distribution ring. Background Art

[0002] During silicon wafer processing, polishing is the process of chemically etching and mechanically grinding the acid- or alkaline-etched silicon wafer to obtain a smooth and flat surface. With the reduction in semiconductor feature size and the increase in integration, the requirements for silicon wafer surface flatness are becoming increasingly stringent.

[0003] The pressure distribution ring on the polishing head is a crucial component in silicon wafer polishing equipment. Depending on the type of wafer being polished and the specific process, different types and hardnesses of pressure distribution rings are required. Currently, installing the pressure distribution ring on the polishing head requires manual installation, pressing it into the mounting groove bit by bit. This is highly inefficient and can also cause the ring to twist, overstretch, or warp, significantly impacting the polishing quality of the wafer. Utility Model Content

[0004] The purpose of the present invention is to provide a pressure distribution ring installation tool to solve the above-mentioned problems.

[0005] The technical solution adopted by the present invention is: a mounting tool for a pressure distribution ring, which includes an outer disk, an inner disk and a telescopic support member, the telescopic support member can be telescoped vertically, and its two ends are respectively connected to the outer disk and the inner disk; the outer disk is sleeved on the outside of the inner disk; when the telescopic support member is in a natural state, the top end of the side wall of the outer disk is lower than the top end of the side wall of the inner disk.

[0006] Preferably, the telescopic support member includes a sliding rod and a compression spring, one of the outer disk and the inner disk is fixedly connected to one end of the sliding rod, and the other is slidably connected to the other end of the sliding rod; the two ends of the compression spring respectively abut the facing surfaces of the outer disk and the inner disk.

[0007] Preferably, a limiting block is provided at the sliding end of the sliding rod, and the limiting block abuts against a side of the outer disk or the inner disk away from the compression spring.

[0008] Preferably, a mounting groove is provided on the bottom plate of the outer disk or the inner disk, and the mounting groove is connected to a reducing groove toward one end of the compression spring, and the reducing groove includes at least a first sliding area, a reduced diameter area and a second sliding area connected in sequence, the second sliding area is close to the compression spring, and the limit block is slidably arranged in the first sliding area, and the cross-sectional size is larger than the reduced diameter area.

[0009] Preferably, a detachable baffle is provided in the mounting groove, and the baffle is used to cover the first sliding area.

[0010] Preferably, the telescopic support members are provided in a plurality of groups, and in each group of the telescopic support members, at least part of the compression springs are sleeved on the sliding rod.

[0011] Preferably, an auxiliary inclined surface or an auxiliary curved surface is provided on the top end of the side wall of the inner disk, and the bottom end of the auxiliary inclined surface or the auxiliary curved surface is close to the side wall of the outer disk.

[0012] Preferably, when the telescopic support is in a natural state, the height difference between the bottom end of the auxiliary inclined surface or the auxiliary curved surface and the top end of the outer disk side wall is ≥ 1 / 2 of the cross-sectional height of the pressure distribution ring to be installed.

[0013] The beneficial effect of the present invention is that when the tool is used to assist in the installation of the pressure distribution ring, the outer periphery of the inner disk is first used to evenly support and tension the pressure distribution ring, and the pressure distribution ring is visible to the workers. The workers can check and adjust the distortion state of the pressure distribution ring at any time. In the process of the polishing head descending, the circumferential parts of the inner disk descend slowly and evenly, so that the pressure distribution ring is evenly stressed and will not be twisted. It is accurately pressed into the groove on the polishing head, avoiding the problems of the pressure distribution ring in a twist-like distortion, local over-stretching or local accumulation and warping during pure manual installation in the prior art, ensuring the assembly quality of the pressure distribution ring and improving the polishing quality of the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional diagram of an embodiment of the utility model;

[0015] Figure 2 It is a cross-sectional view of an embodiment of the utility model in use;

[0016] Figure 3 This is an assembly example diagram of the telescopic support member in the embodiment of the present utility model;

[0017] Figure 4 This utility model embodiment is attached Figure 3 A magnified view of the structure at center A.

[0018] In the picture:

[0019] 1. Foreign market;

[0020] 2. Internal disk;

[0021] 3. Telescopic support; 31. Sliding rod; 32. Compression spring; 33. Limit block;

[0022] 4. Auxiliary curved surface

[0023] 5. Variable diameter chute; 51. First sliding area; 52. Reduced diameter area; 53. Second sliding area;

[0024] 6. Block the plate. DETAILED DESCRIPTION

[0025] The technical solutions of the embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0026] In the description of the embodiments of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "setting" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be a communication between the internal parts of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood based on specific circumstances.

[0027] Reference Attachment Figure 1-4 The utility model provides an installation tool for a pressure distribution ring, which includes an outer disk 1, an inner disk 2 and a telescopic support member 3. The outer disk 1 and the inner disk 2 have the same contour shape, both have a bottom plate and an annular side wall, the inner diameter of the outer disk 1 is larger than the outer diameter of the inner disk 2, so that the outer disk 1 can be sleeved on the outside of the inner disk 2; the telescopic support member 3 is located between the bottom plates of the outer disk 1 and the inner disk 2, and its two ends are respectively connected to the outer disk 1 and the inner disk 2, and can be retracted and retracted vertically; the size and assembly principle of the telescopic support member 3 are as follows: when not subject to external force, the telescopic support member 3 is in a natural state, and the top end of the side wall of the outer disk 1 is lower than the top end of the side wall of the inner disk 2.

[0028] The inner disk 2 serves as a sleeve structure for the pressure distribution ring. The outer diameter of the inner disk 2 is equal to the inner diameter of the pressure distribution ring in the assembled state, but slightly larger than the inner diameter of the pressure distribution ring in the unloaded state (the pressure distribution ring is tensioned when assembled on the polishing head, so the inner diameter in the assembled state is slightly larger than the inner diameter in the unloaded state). When using this installation tool to assist in the installation of the pressure distribution ring, the pressure distribution ring is stretched and sleeved on the outside of the side wall of the inner disk 2. The shape of the pressure distribution ring is accurately adjusted to avoid twisting. Then, the tool and the pressure distribution ring are placed under the polishing head. The polishing machine is started to lower the polishing head so that the polishing head is pressed against the inner disk 2 of the tool. The telescopic support 3 is compressed and shortened, and the inner disk 2 is lowered. The groove on the polishing head for installing the pressure distribution ring also lowers with the lowering of the polishing head. However, due to the support of the outer disk 1, the pressure distribution ring does not drop, allowing the pressure distribution ring to be smoothly inserted into the groove on the polishing head. During this process, the side wall of the inner disk 2 can also avoid the center pressure plate of the polishing head to prevent damage to the center pressure plate.

[0029] When using this tool to assist in the installation of the pressure distribution ring, first use the outer periphery of the inner disk 2 to evenly support and tension the pressure distribution ring, and make the pressure distribution ring visible to the workers. The workers can check and adjust the distortion of the pressure distribution ring at any time. During the descent of the polishing head, the circumferential parts of the inner disk 2 descend slowly and evenly, so that the pressure distribution ring is evenly stressed and will not be twisted. It is accurately pressed into the groove on the polishing head, avoiding the problems of the pressure distribution ring in a twisted shape, local over-stretching or local accumulation and warping during pure manual installation in the existing technology, ensuring the assembly quality of the pressure distribution ring and improving the polishing quality of the silicon wafer.

[0030] Reference Attachment Figure 2 The telescopic support member 3 includes a slide rod 31, a compression spring 32 and a limit block 33. One of the outer disk 1 and the inner disk 2 is fixedly connected to one end of the slide rod 31, and the other is slidably connected to the other end of the slide rod 31; the two ends of the compression spring 32 respectively abut the facing surfaces of the bottom plates of the outer disk 1 and the inner disk 2, and the limit block 33 abuts the side of the outer disk 1 or the inner disk 2 away from the compression spring 32.

[0031] To simplify assembly, the shank of the high-strength bolt can be used as a slide bar 31, and the cap as a stopper 33. The shank of the high-strength bolt is slid through the bottom plate of the inner plate 2, and the bottom end of the shank is threadedly connected to the bottom plate of the outer plate 1. In this technical solution, since the height of the slide bar 31 and the stopper 33 remains constant when the inner plate 2 moves downward, and they will be exposed above the bottom plate of the inner plate 2, the side wall height of the inner plate 2 and outer plate 1, as well as the length of the high-strength bolt, must be comprehensively designed to ensure that even when the top ends of the side walls of the inner plate 2 and outer plate 1 are flush, the top end of the high-strength bolt does not contact the tumbling head.

[0032] In a more preferred embodiment, refer to the attached Figure 3-4A mounting groove can be dug on the bottom plate of the inner disk 2 or the outer disk 1, and a reducing groove 5 is provided at the end of the mounting groove facing the compression spring 32. The reducing groove 5 includes at least a first sliding area 51, a reduced diameter area 52 and a second sliding area 53 connected in sequence. The second sliding area 53 is close to the compression spring 32, and the limit block 33 is slidably set in the first sliding area 51, and the cross-sectional size is larger than the reduced diameter area 52; the inner diameter of the second sliding area 53 can be greater than, equal to or smaller than the reduced diameter area 52, but should be larger than the cross-sectional size of the slide rod 31, so that the slide rod 31 can slide smoothly.

[0033] Slotting the bottom plate of the inner disk 2 or the outer disk 1 can not only prevent the slide rod 31 and the limit block 33 from being exposed above the bottom plate of the inner disk 2 and accidentally damaging the center pressure plate of the throwing head, but also effectively utilize the thickness space originally occupied by the bottom plates of the inner disk 2 and the outer disk 1. In particular, when the mounting groove is opened on the bottom plate of the outer disk 1, the size design and assembly process of the tool can be simplified.

[0034] In addition, a detachable baffle 6 may be provided in the mounting groove, and the baffle 6 is used to cover the first sliding area 51 to prevent dust and collision.

[0035] In order to ensure sufficient supporting force for the inner disk 2, multiple groups of telescopic support members 3 can be set up, and in each group of telescopic support members 3, the number of compression springs 32 can be more than the slide rod 31, and at least part of the compression springs 32 is mounted on the slide rod 31 to ensure the smooth movement and support stability of the inner disk 2.

[0036] Since the pressure distribution ring needs to be tensioned when it is installed on the inner disk 2, in order to reduce the difficulty of its installation, an auxiliary inclined surface or auxiliary curved surface 4 can be set at the top of the side wall of the inner disk 2. The bottom end of the auxiliary inclined surface or auxiliary curved surface 4 is close to the side wall of the outer disk 1 to guide the pressure distribution ring and gradually tension it, thereby reducing the difficulty of its installation.

[0037] To prevent the pressure distribution ring from slipping on the inner disk 2, it should be ensured that when the telescopic support 3 is in the natural state, the height difference between the bottom end of the auxiliary inclined surface or auxiliary curved surface 4 and the top end of the side wall of the outer disk 1 is ≥ 1 / 2 of the cross-sectional height of the pressure distribution ring.

[0038] Compared with the prior art, the beneficial effects of the present invention are as follows: when using this tool to assist in the installation of the pressure distribution ring, the outer periphery of the inner disk 2 is first used to evenly support and tension the pressure distribution ring, and the pressure distribution ring is visible to the workers. The workers can check and adjust the distortion state of the pressure distribution ring at any time. During the descent of the polishing head, the circumferential parts of the inner disk 2 descend slowly and evenly, so that the pressure distribution ring is evenly stressed and will not be twisted. It is accurately pressed into the groove on the polishing head, avoiding the problems of the pressure distribution ring in a twisted shape, local over-stretching or local accumulation and warping during pure manual installation in the prior art, ensuring the assembly quality of the pressure distribution ring and improving the polishing quality of the silicon wafer.

[0039] The above is a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A pressure distribution ring installation tool, characterized in that: The telescopic support comprises an outer plate, an inner plate and a telescopic support member, wherein the telescopic support member can be extended and retracted vertically, and its two ends are respectively connected to the outer plate and the inner plate; the outer plate is sleeved on the outside of the inner plate; when the telescopic support member is in a natural state, the top of the side wall of the outer plate is lower than the top of the side wall of the inner plate.

2. The pressure distribution ring installation tool according to claim 1, characterized in that: The telescopic support member includes a sliding rod and a compression spring. One of the outer disk and the inner disk is fixedly connected to one end of the sliding rod, and the other is slidably connected to the other end of the sliding rod. The two ends of the compression spring respectively abut the facing surfaces of the outer disk and the inner disk.

3. The pressure distribution ring installation tool according to claim 2, characterized in that: A limiting block is provided at the sliding end of the sliding rod, and the limiting block abuts against a side of the outer disk or the inner disk away from the compression spring.

4. The pressure distribution ring installation tool according to claim 3, characterized in that: A mounting groove is provided on the bottom plate of the outer disk or the inner disk, and a reducing groove is connected to the mounting groove toward one end of the compression spring. The reducing groove includes at least a first sliding area, a reduced diameter area and a second sliding area connected in sequence. The second sliding area is close to the compression spring, and the limit block is slidably arranged in the first sliding area, and the cross-sectional size is larger than that of the reduced diameter area.

5. The pressure distribution ring installation tool according to claim 4, characterized in that: A detachable baffle is provided in the mounting groove, and the baffle is used to cover the first sliding area.

6. The pressure distribution ring installation tool according to claim 2, characterized in that: The telescopic support members are provided in a plurality of groups. In each group of the telescopic support members, at least part of the compression springs are sleeved on the sliding rod.

7. The pressure distribution ring installation tool according to any one of claims 1 to 6, characterized in that: An auxiliary inclined surface or an auxiliary curved surface is provided on the top end of the side wall of the inner disk, and the bottom end of the auxiliary inclined surface or the auxiliary curved surface is close to the side wall of the outer disk.

8. The pressure distribution ring installation tool according to claim 7, characterized in that: When the telescopic support member is in a natural state, the height difference between the bottom end of the auxiliary inclined surface or the auxiliary curved surface and the top end of the outer disk side wall is greater than or equal to 1 / 2 of the cross-sectional height of the pressure distribution ring to be installed.

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