Device for fixing seed crystal

Abstract

A device for fixing a seed crystal relates to the technical field of Czochralski silicon production and comprises a base body, a slide way arranged on the base body and a mounting channel arranged at the tail end of the slide way and communicated with the slide way, and the mounting channel penetrates through the base body to allow the seed crystal to be fixed to be inserted in; a slide block capable of sliding in the depth direction of the slide way is arranged in the slide way, a locking bolt is rotationally arranged on the slide block in a penetrating manner, the inner end of the locking bolt faces the mounting channel, and the locking bolt can rotate under the action of external force to enable the inner end face of the locking bolt to abut against or be separated from the seed crystal in the mounting channel. According to the utility model, the to-be-cut seed crystal in the mounting channel is fixed through the locking bolt, so that the risk that the seed crystal is accidentally injured due to cutting by equipment when the seed crystal is manually fixed is avoided; by adjusting the position of the locking bolt in the slide way, the device can adapt to seed crystals to be cut with different lengths, meanwhile, the device is convenient to operate, and the fixing position of the seed crystals can be adjusted at any time.

Description

Technical Field

[0001] The utility model relates to the technical field of Czochralski single crystal silicon production, in particular to a device for fixing seed crystals. Background Art

[0002] In the field of semiconductor technology, seed crystals are required in the process of pulling single crystals. Seed crystals have a fixed crystal orientation. Generally speaking, the crystal orientation of products pulled by single crystal furnaces is fixed. As customer needs change, the crystal orientation needs to be adjusted according to customer needs. Therefore, the crystal orientation of the seed crystal needs to be confirmed before the single crystal is loaded into the furnace to meet customer requirements.

[0003] If the life of the seed crystal has not expired, the replaced seed crystal needs to be processed before it can be used again. Generally speaking, the welded part of the seed crystal needs to be cut, and the contaminated part of the previous furnace needs to be completely removed before it can be recycled and used again. The seed crystal needs to be fixed during the cutting process. In the past, manual fixation was used, and the risk of accidental injury during cutting was extremely high, which could easily cause harm to production workers.

[0004] The Chinese utility model patent with application number CN202023070344.X discloses a clamp for seed crystal cutting, which can clamp the seed crystal under the action of a clamping spring. The driver drives the sliding seat to move, so that the limit clamping plate clamps and fixes the other end of the seed crystal, clamping the seed crystal from four sides, thereby achieving the purpose of fixing the seed crystal. However, the method of fixing the seed crystal is not limited to the existing technology. This application proposes a solution with a different technical concept to achieve the fixation of the seed crystal. Utility Model Content

[0005] The utility model aims to provide a device for fixing seed crystals, which realizes the fixation of seed crystals to be cut by a technical conception different from the prior art.

[0006] In order to achieve the above-mentioned purpose, the specific scheme adopted by the utility model is: a device for fixing seed crystals, comprising a base, a slideway opened on the base, and an installation channel arranged at the end of the slideway and connected to the slideway, the installation channel being arranged through the base body for the seed crystal to be fixed to be inserted; a slider capable of sliding along its depth direction is provided in the slideway, a locking bolt is rotatably penetrated on the slider, the inner end of the locking bolt faces the installation channel, and the locking bolt can be rotated under the action of external force so that its inner end face presses the seed crystal in the installation channel.

[0007] As a further optimization of the above technical solution, the slide is divided into a first retracted section, an expanded section and a second retracted section along its length direction. The slider is located in the expanded section, and the two ends of the slider are in contact with the inner sides of the first retracted section and the second retracted section respectively.

[0008] As a further optimization of the above technical solution, the slider includes a slider body, a connecting tube and a baffle. The connecting tube is sleeved on the locking bolt. One end of the connecting tube is fixed to the slider body, and the other end is provided with a baffle that can limit the movement of the slider body along the length direction of the slide.

[0009] As a further optimization of the above technical solution, the baffle is a circular plate with a diameter greater than the width of the slideway, or a strip plate with a length greater than the width of the slideway.

[0010] As a further optimization of the above technical solution, the slider body is a rectangular parallelepiped.

[0011] As a further optimization of the above technical solution, a rotating handle is provided at the outer end of the locking bolt.

[0012] As a further optimization of the above technical solution, a limiting member for limiting the sliding block from leaving the slideway is provided on the base.

[0013] As a further optimization of the above technical solution, the limiting member is a T-shaped block arranged across the slideway.

[0014] As a further optimization of the above technical solution, an observation channel connected to the installation channel is opened on the base, and the side of the observation channel opposite to the installation channel is opened on the side of the base to form an observation port.

[0015] As a further optimization of the above technical solution, the installation channel is a variable diameter channel, including a large diameter section and a small diameter section connected by a necking section. The opening of the large diameter section on the surface of the base serves as the entrance of the installation channel, and the opening of the small diameter section on the surface of the base serves as the outlet of the installation channel.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] The utility model fixes the seed crystal to be cut in the installation channel by means of a locking bolt, thereby avoiding the risk of accidental injury by cutting of the equipment when the seed crystal is manually fixed; by adjusting the position of the locking bolt in the slideway, it can adapt to seed crystals to be cut of different lengths; at the same time, the device is easy to operate, and the fixing position of the seed crystal can be adjusted at any time. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Schematic diagram of the three-dimensional structure of Example 1;

[0019] Figure 2 is a schematic top view of Example 1;

[0020] Figure 3 is a schematic cross-sectional view of Example 1;

[0021] Figure 4 This is a schematic structural diagram of Example 1 when viewed from the side and showing the bottom of the device;

[0022] Figure 5 is a schematic top view of Example 2;

[0023] Figure numerals: 1. Installation channel, 101. Large diameter section, 102. Narrowing section, 103. Small diameter section, 2. Slideway, 201. First retracted section, 202. Expansion section, 203. Second retracted section, 3. Rotating handle, 4. Locking bolt, 5. Slider, 501. Slider body, 502. Connecting cylinder, 503. Baffle, 6. T-shaped block, 7. Installation groove, 8. Observation channel, 9. Seed crystal, 10. Auxiliary transport groove. DETAILED DESCRIPTION

[0024] The technical solution of the present invention is further elaborated in detail below in conjunction with specific embodiments. Parts not described and disclosed in detail in the following embodiments of the present invention should be understood as existing technologies known or should be known to those skilled in the art.

[0025] Example 1

[0026] like Figure 1 、 2 As shown, the present invention discloses a device for fixing a seed crystal, comprising a base, a mounting channel 1 provided on the base, and a slideway 2 connected to the mounting channel 1. First, it should be noted that the device can be placed vertically or horizontally when in use. For ease of understanding, the following detailed description will be given using the vertical placement of the device as an example.

[0027] The base of the present invention is cylindrical, with parallel upper and lower surfaces. A mounting channel 1 is vertically defined within and extends through the base, with openings at both ends located on the upper and lower surfaces, respectively. A slideway 2 is formed by two opposing side walls and a bottom wall, which connects the two side walls to maintain the device's robustness and stability.

[0028] In the process of explaining this solution, the depth of the slideway 2 is the distance between the upper surface of the base and the bottom wall of the slideway 2. The depth direction of the slideway 2 is parallel to the axial direction of the installation channel 1, that is, Figure 2 In the direction perpendicular to the paper, the width of the slide 2 is the distance between the two side walls, and the length of the slide 2 is Figure 2 In the transverse direction, the end of the slideway 2 is an end extending into the base along the length direction of the slideway 2, and the installation channel 1 is located at the end of the slideway 2 and is connected to the slideway 2.

[0029] like Figure 2 、 3As shown, a slider 5 capable of sliding along its depth direction is provided in the slideway 2, and a locking bolt 4 is rotatably penetrated on the slider 5. The inner end of the locking bolt 4 faces the installation channel 1, and the locking bolt 4 can be rotated under the action of external force so that its inner end face abuts or separates from the seed crystal 9 in the installation channel 1.

[0030] The length direction of the locking bolt 4 is consistent with the length direction of the slide 2, and the length of the locking bolt 4 is greater than the length of the slide 2, so that the locking bolt 4 always has a section outside the base, that is, the outer end of the locking bolt 4. A rotating handle 3 is provided at the outer end of the locking bolt 4. By twisting the rotating handle 3 to drive the locking bolt 4 to rotate, it is made to move forward and backward along the length direction of the slide 2 to fix or loosen the seed crystal, or the rotating handle 3 is moved up and down to drive the slider 5 and the adjustment bolt 4 along the depth direction of the slide 2, which is used to fix seed crystals of different lengths, thereby expanding the scope of application of this device.

[0031] Along its length, the slideway 2 is divided into a first retracted section 201, an expanded section 202, and a second retracted section 203. The second retracted section 203 communicates with the mounting channel 1 and is wider than the diameter of the locking bolt 4. The inner end of the locking bolt 4 can pass through the second retracted section 203 and enter the mounting channel 1 to secure the seed crystal 9. The outer end of the locking bolt 4 extends through the first retracted section 201 and connects to the rotating handle 3.

[0032] Continue reading Figure 1 The slider 5 includes a slider body 501, a connecting tube 502, and a baffle 503. The slider body 501 is located in the expanded section 202. An internal thread for use with the locking bolt 4 is provided in the slider body 501. The slider body 501 has a rectangular outline to prevent the slider body 501 from rotating with the locking bolt 4 when the locking bolt 4 rotates. The connecting tube 502 is sleeved on the locking bolt 4 and slides along the first retracted section 201. One end of the connecting tube 502 is fixed to the slider body 501, and the other end is provided with a baffle 503 that can limit the movement of the slider body 501 along the length of the slideway 2. The connecting tube 502 is fixedly connected to the slider body 501 and the baffle 503, either by integral molding or welding.

[0033] Preferably, the outer contour of the connecting tube 502 is cylindrical or rectangular. In this embodiment, the outer contour of the connecting tube 502 is rectangular. The baffle 503 installed on the connecting tube 502 has a rectangular outer contour, and the length of the baffle 503 is greater than the width of the first retracted section 201.

[0034] In other embodiments of the present invention, the outer contour of the baffle 503 may also be set to be circular, and the diameter of the circle is greater than the width of the first retracted section 201 .

[0035] When the present invention is in use, the expanded section 202 constrains the slider body 501 to limit its rotation with the locking bolt 4, and the connecting tube 502 and the baffle 503 limit the movement of the slider body 501 along the length direction of the slide 2. Therefore, when the locking bolt 4 is rotated, the locking bolt 4 can move toward or away from the installation channel 1 along the length direction of the slide 2, so that the inner end face of the locking bolt 4 abuts against or disengages from the seed crystal 9.

[0036] Since the seed crystal 9 to be fixed is a variable diameter structure (such as Figure 3 As shown), it includes a large diameter section and a small diameter section connected by a diameter reduction section. Therefore, the installation channel 1 is also set as a variable diameter channel, including a large diameter section 101 and a small diameter section 103 connected by a reduction section 102. The large diameter section of the installation channel 1 is located at the upper part of the base, and the opening of the large diameter section 101 is the entrance for inserting the seed crystal 9 to be fixed, and the diameter of the large diameter section 101 of the installation channel 1 is greater than the width of the second reduction section 203. The small diameter section 103 of the installation channel 1 is located at the lower part of the base. Different from the variable diameter structure of the seed crystal 9, the length of the small diameter section 103 of the installation channel 1 is less than the length of the large diameter section 101, and the diameter of the small diameter section 103 of the installation channel 1 is slightly larger than the diameter of the small diameter section of the seed crystal 9, and smaller than the diameter of the large diameter section of the seed crystal 9, so that the small diameter section of the seed crystal 9 can extend from the lower surface of the base for subsequent cutting. The length of the large diameter section 101 of the installation channel 1 is greater than the depth of the slide 2, so that when the seed crystal 9 is fixed, the inner end face of the locking bolt 4 abuts against the large diameter section of the seed crystal 9.

[0037] To prevent the slider from falling off the slideway opening on the upper surface of the base, a stopper is provided on the upper surface of the base, extending across the slideway. The stopper can be a connecting rod or a connecting plate, and only needs to be able to connect the two side walls of the slideway 2 to prevent the slider 5 from sliding upward. The stopper in this embodiment is a T-shaped block 6 that straddles the slideway 2. A T-shaped mounting groove 7 is provided on the upper surface of the base. The T-shaped block 6 is embedded in the mounting groove 7 to limit the upward movement of the slider 2.

[0038] The base is also provided with an observation channel 8 connected to the mounting channel 1. The length of the observation channel 8 is perpendicular to the length of the slide 2. The mounting channel 1 is located at the vertical intersection of the observation channel 8 and the slide 2, that is, the mounting channel 1 is located at the end of the length of the observation channel 8. The observation channel 8 is formed by two oppositely arranged side walls and a bottom wall. The inner ends of the two side walls extend to the mounting channel, so that the observation channel is connected to the mounting channel. The outer ends of the two side walls extend to the side of the base, forming an observation port. This allows the insertion depth of the seed crystal in the mounting channel to be observed through the observation channel from the side of the base, facilitating the precise fixation of the seed crystal 9. The top of the observation channel opens to the upper surface of the base to ensure that there is sufficient light in the observation channel for observation.

[0039] Preferably, the depth of the observation channel 8 is not less than the depth of the slideway 2 .

[0040] In order to facilitate the transportation of the device, auxiliary transportation grooves 10 are provided on the upper and lower surfaces of the base. When moving the device, the auxiliary transportation grooves 10 are convenient for workers to hold or insert transportation tools, making the transportation process safer and more convenient.

[0041] The base described in the present invention is an integrally formed cylindrical structure. The opening of the first retracted section on the slide on the side of the base and the observation port of the observation channel on the side of the base are respectively located in two perpendicular directions. The side of the base opposite to the observation port of the observation channel and the side opposite to the first retracted section are both planes, and the two planes intersect vertically to meet the stability requirements of the device when placed horizontally.

[0042] When using this utility model, the specific steps are as follows:

[0043] 1) Place the device vertically, keeping the bottom of the device suspended in the position corresponding to the installation channel 1, and insert the seed crystal 9 to be cut (i.e., the seed crystal 9 to be fixed) into the installation channel 1 through the large diameter section opening of the installation channel 1. The small diameter section of the seed crystal 9 faces downward, and the seed crystal 9 slides downward under its own gravity, and the small diameter section leaks out from the bottom of the device. According to the position to be cut, manually adjust the position of the seed crystal 9 to align the part to be cut with the lower surface of the device;

[0044] 2) visually determining the position of the large diameter section of the seed crystal 9 through the opening on the upper surface of the installation channel 1 and the observation channel 8;

[0045] 3) Manually adjust the position of the slider 5, align the locking bolt 4 with the large diameter section of the seed crystal 9, and then manually twist the locking bolt 4 until it abuts against the seed crystal 9 to secure the seed crystal 9;

[0046] 4) The fixed seed crystal 9 is moved together with the device of the present invention to the cutting operation table, and the cutting machine cuts off the seed crystal 9 that leaks out from the lower end of the device and needs to be cut off.

[0047] 5) After removal, reverse the locking bolt 4 to separate the inner end face of the locking bolt 4 from the seed crystal 9. Adjust the device position so that its upper surface faces downward. The seed crystal 9 slides out of the installation channel 1 under its own gravity, thus completing the fixing operation of the seed crystal 9.

[0048] 6) Repeat steps 1) to 5) to fix and cut subsequent seed crystals 9.

[0049] It should be noted that when the present invention is in use, it can also be placed horizontally. After the seed crystal 9 to be fixed is inserted into the installation channel 1, the seed crystal 9 can be pushed into the installation channel 1 by external force. The other steps are generally the same as those when placed vertically, and will not be repeated here.

[0050] Example 2

[0051] The main structure of this embodiment is the same as that of embodiment 1, except that: Figure 2 As shown, the slider 5 in this embodiment is a rectangular parallelepiped as a whole. The slider 5 is located in the expanded section 202 of the slide 2. The two ends of the slider 5 respectively abut against the inner sides of the first retracted section 201 and the second retracted section 203. The slider 5 is limited in the length direction of the slide by the first retracted section 201 and the second retracted section 203, and a guide is provided for the slider to slide along the depth direction of the slide.

[0052] During use, the locking bolt 4 is twisted so that its inner end surface can enter the installation channel 1 and press the seed crystal 9, or the locking bolt 4 is twisted in the opposite direction to separate the locking bolt 4 from the seed crystal 9. The specific use steps of this embodiment are the same as those of embodiment 1 and will not be repeated here.

[0053] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A device for fixing a seed crystal, characterized in that: The invention comprises a base body, a slideway (2) provided on the base body, and an installation channel (1) provided at the end of the slideway (2) and in communication with the slideway (2), wherein the installation channel (1) is provided through the base body for insertion of a seed crystal (9) to be fixed; A slider (5) capable of sliding along the depth direction is provided in the slideway (2), and a locking bolt (4) is rotatably passed through the slider (5). The inner end of the locking bolt (4) faces the installation channel (1), and the locking bolt (4) can be rotated under the action of an external force so that its inner end face presses the seed crystal (9) in the installation channel (1).

2. The device for fixing seed crystals according to claim 1, characterized in that: The slideway (2) is divided into a first retracted section (201), an expanded section (202) and a second retracted section (203) along its length direction; the slider (5) is located in the expanded section (202), and both ends of the slider (5) are in contact with the inner sides of the first retracted section (201) and the second retracted section (203), respectively.

3. The device for fixing seed crystals according to claim 1, characterized in that: The slider (5) comprises a slider body (501), a connecting tube (502) and a baffle (503). The connecting tube (502) is sleeved on the locking bolt (4). One end of the connecting tube (502) is fixed to the slider body (501), and the other end is provided with a baffle (503) capable of limiting the movement of the slider body (501) along the length direction of the slideway (2).

4. The device for fixing seed crystals according to claim 3, characterized in that: The baffle (503) is a circular plate with a diameter greater than the width of the slideway (2), or a strip plate with a length greater than the width of the slideway (2).

5. The device for fixing seed crystals according to claim 3, characterized in that: The slider body (501) is a rectangular parallelepiped.

6. The device for fixing seed crystals according to claim 1, characterized in that: The outer end of the locking bolt (4) is provided with a rotating handle (3).

7. The device for fixing seed crystals according to claim 1, characterized in that: A limiting member for limiting the sliding block from separating from the slideway (2) is provided on the base.

8. The device for fixing seed crystals according to claim 7, characterized in that: The limiting member is a T-shaped block (6) arranged across the slideway (2).

9. The device for fixing seed crystals according to claim 1, characterized in that: An observation channel (8) communicating with the installation channel (1) is provided on the base body. The observation channel (8) is opened on the side of the base body on a side opposite to the installation channel to form an observation port.

10. The device for fixing seed crystals according to claim 1, characterized in that: The installation channel (1) is a variable diameter channel, comprising a large diameter section (101) and a small diameter section (103) connected by a narrowing section (102); the opening of the large diameter section (101) on the surface of the base body serves as the inlet of the installation channel (1), and the opening of the small diameter section (103) on the surface of the base body serves as the outlet of the installation channel (1).

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