Crystal ingot pushing mechanism

Abstract

The utility model provides a crystal ingot pushing mechanism, and relates to the technical field of semiconductor processing, and the crystal ingot pushing mechanism comprises a pushing slide way mechanism which is arranged along a linear direction, a workbench is arranged at one end of the pushing slide way mechanism, and one end, far away from the workbench, of the pushing slide way mechanism is arranged as an operation end for taking and placing a crystal ingot; the material pushing head mechanism is located on the material pushing slide way mechanism, a containing cavity used for containing crystal ingots is formed in the material pushing head mechanism, and the material pushing head mechanism is used for driving the crystal ingots to move between the workbench and the operation end in the length direction of the material pushing slide way mechanism; and the driving device is used for driving the material pushing head mechanism to reciprocate on the material pushing slideway mechanism. The problem of economic loss caused by falling or surface damage of the crystal ingot during automatic feeding and discharging in the prior art is solved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing technology, and in particular to a crystal ingot pushing mechanism. Background Art

[0002] Currently, when loading and unloading ingots, they are usually gripped using side clamping or suction cups. Side clamping uses multiple jaws to grasp the ingot, while suction cups grasp the ingot by applying suction to the upper surface. The ingot is then moved to a workbench and placed on it.

[0003] The inventor believes that the two methods mentioned above will cause damage to the side wall of the ingot during the process of grabbing the ingot. The suction cup method has the risk of the ingot falling. Due to the high cost of the ingot, falling or causing damage to the surface of the ingot and making it unusable will cause serious economic losses. Summary of the Invention

[0004] The purpose of the present application is to provide a crystal ingot pushing mechanism, aiming to solve the problem in the related art that crystal ingots may fall off or be damaged on the surface during automatic loading and unloading, causing economic losses.

[0005] Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

[0006] According to a first aspect of the present application, there is provided an ingot pushing mechanism, comprising:

[0007] A material pushing chute mechanism is arranged along a straight line, a workbench is arranged at one end of the material pushing chute mechanism, and an end of the material pushing chute mechanism away from the workbench is arranged as an operating end for taking and placing the crystal ingot;

[0008] A pusher head mechanism is located on the pusher slide mechanism, and has a receiving cavity formed therein for placing the ingot. The pusher head mechanism is used to drive the ingot to move between the workbench and the operating end along the length direction of the pusher slide mechanism;

[0009] The driving device is used to drive the pushing head mechanism to move back and forth on the pushing slide mechanism.

[0010] In an exemplary embodiment of the present application, the pusher head mechanism includes:

[0011] a loading plate, used for pushing the ingot onto the workbench;

[0012] A discharge plate is arranged opposite to the loading plate along the length direction of the pushing slide mechanism, and is used to push the crystal ingot out of the workbench.

[0013] In an exemplary embodiment of the present application, the opposite side of the loading plate and the unloading plate is configured to be in an arc shape.

[0014] In an exemplary embodiment of the present application, the pusher head mechanism further includes:

[0015] A pusher base is located directly above the loading plate and the unloading plate, and a discharge port is formed through the pusher base, and the discharge port is connected to the receiving cavity;

[0016] An adjusting bolt, threadedly connected between the pusher base and the loading plate, or between the pusher base and the unloading plate, for adjusting the distance between the loading plate or the unloading plate and the pusher base;

[0017] The elastic member is located between the pushing base and the loading plate, and between the pushing base and the unloading plate, and is always in a compressed state.

[0018] In an exemplary embodiment of the present application, the elastic member is configured as a spring, and the spring is sleeved on the outside of the adjusting bolt.

[0019] In an exemplary embodiment of the present application, a lifting mechanism for driving the pusher head mechanism to move up and down is further included, and the lifting mechanism includes:

[0020] a connecting plate, fixedly connected to the power output end of the driving device;

[0021] A lifting device, fixedly connected between the connecting plate and the pushing base;

[0022] The guide rod is fixed on the bottom of the connecting plate in a vertical direction and passes through the pushing base.

[0023] In an exemplary embodiment of the present application, a sliding sleeve is provided on the outer shell of the guide rod, and the sliding sleeve is fixedly connected to the pusher base.

[0024] In an exemplary embodiment of the present application, the pushing slide mechanism includes: a bottom plate, a support, and a rotating rod;

[0025] The support is provided in two pieces, and both of the supports are fixed above the two sides of the bottom plate along the length direction of the bottom plate;

[0026] The rotating rods are provided in a number, and the plurality of rotating rods are rotatably connected between the two supports, and the plurality of rotating rods are located above the base plate, and the rotation axis of each rotating rod is perpendicular to the length direction of the base plate.

[0027] In an exemplary embodiment of the present application, an adjustment device for adjusting the push slide mechanism is provided on both sides of the bottom plate, and the adjustment device includes:

[0028] The upper surface of the regulating plate is provided with a regulating cavity in a vertical downward direction;

[0029] a guide plate fixedly connected to the side wall of the bottom plate, located in the adjustment cavity and capable of being slidably connected to the adjustment plate along a vertical direction;

[0030] A top screw is threadably connected to the guide plate, passes through the guide plate, and abuts against the adjustment plate.

[0031] In an exemplary embodiment of the present application, a slide plate is fixedly provided on the upper surface of the base plate at the operating end, and a groove is opened on the upper surface of the slide plate for avoiding the robot arm when taking and placing the crystal ingot.

[0032] The exemplary embodiments of the present application may have some or all of the following beneficial effects:

[0033] In an example embodiment of the present application, an ingot pushing mechanism is provided. When preparing to process an ingot, the operator places the ingot into the receiving chamber of the pusher mechanism at the operating end. At this point, the pusher mechanism has not yet applied any external force to the ingot, thereby ensuring the integrity of the ingot surface and avoiding damage to the ingot surface before processing. Subsequently, a drive device causes the pusher mechanism to move smoothly along a pusher chute mechanism, which drives the ingot from the operating end to the workbench. During the unloading process, the ingot is placed back into the receiving chamber, and then the drive device drives the pusher mechanism back from the workbench to the operating end. The pusher chute mechanism provides stable support for the ingot throughout the entire movement process, effectively preventing the ingot from falling during movement and ensuring the safe transfer of the ingot. In summary, this pusher mechanism not only effectively protects the integrity of the ingot surface and avoids surface damage during the entire loading and unloading process, but also completely eliminates the risk of the ingot falling, thereby avoiding economic losses caused by ingot damage or falling.

[0034] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The accompanying drawings are incorporated into and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the specification, are used to explain the principles of the present application. Obviously, the drawings described below are only some embodiments of the present application, and those skilled in the art can derive other drawings based on these drawings without inventive effort.

[0036] Figure 1 A schematic structural diagram of a crystal ingot pushing mechanism according to an embodiment of the present application is shown;

[0037] Figure 2 An exploded view of the structure of a crystal ingot pushing mechanism according to an embodiment of the present application is shown;

[0038] Figure 3 This is a side sectional view showing the connection relationship between the loading plate and the pushing base in the embodiment of the present application;

[0039] Figure 4 It is a structural diagram of the material pushing slide mechanism in the embodiment of the present application.

[0040] Description of reference numerals:

[0041] 1. Pushing slide mechanism; 11. Bottom plate; 12. Support; 13. Rotating rod; 2. Pushing head mechanism; 21. Storage chamber; 22. Loading plate; 23. Unloading plate; 24. Pushing base; 241. Discharge port; 25. Adjusting bolt; 26. Elastic member; 3. Driving device; 4. Lifting mechanism; 41. Connecting plate; 42. Lifting device; 43. Guide rod; 5. Sliding sleeve; 6. Adjusting device; 61. Adjusting plate; 611. Adjusting chamber; 62. Guide plate; 63. Top screw; 7. Slide plate; 71. Groove; 8. Ingot; 9. Operating end. DETAILED DESCRIPTION

[0042] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this application will be thorough and complete and will fully convey the concepts of the example embodiments to those skilled in the art. Like reference numerals in the figures represent like or similar structures, and thus their detailed descriptions will be omitted. Furthermore, the figures are merely schematic illustrations of the present application and are not necessarily drawn to scale.

[0043] While relative terms such as "upper" and "lower" are used in this specification to describe the relationship of one illustrated component to another, these terms are used for convenience only, such as in accordance with the orientation of the illustrations in the accompanying drawings. It should be understood that if the illustrated device were flipped upside down, the component described as "upper" would become the component "lower." When a structure is referred to as "on" another structure, this may mean that the structure is integrally formed with the other structure, that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure through the other structure.

[0044] The terms "a", "an", "the" and "at least one" are used to indicate the presence of one or more elements / components / etc.; the terms "including" and "having" are used to express open-ended inclusion and mean that additional elements / components / etc. may be present in addition to the listed elements / components / etc.; the terms "first" and "second" are used only as labels and do not limit the quantity of their objects.

[0045] like Figure 1 and Figure 2 As shown, in an embodiment of the present application, a crystal ingot pushing mechanism is disclosed, comprising:

[0046] A material pushing chute mechanism 1 is arranged along a straight line, a workbench is arranged at one end of the material pushing chute mechanism 1, and an end of the material pushing chute mechanism 1 away from the workbench is arranged as an operating end 9 for taking and placing the crystal ingot 8;

[0047] A pusher mechanism 2 is located on the pusher chute mechanism 1 and has a receiving cavity 21 formed therein for placing the ingot 8. The pusher mechanism 2 is used to drive the ingot 8 to move between the workbench and the operating end 9 along the length direction of the pusher chute mechanism 1;

[0048] The driving device 3 is used to drive the pushing head mechanism 2 to move back and forth on the pushing slide mechanism 1.

[0049] In the embodiment of the present application, the diameter of the storage cavity 21 in the pusher mechanism 2 needs to be larger than the diameter of the ingot 8. This is to ensure that the ingot 8 can be accurately placed in the storage cavity 21, to avoid damage to the ingot 8 during the loading process, and to enhance the compatibility of the pusher mechanism 2 with ingots 8 of different sizes. There are no special restrictions on the drive device 3, and a cylinder or a linear motor can be used. The preferred solution is to use a linear motor, which is installed on one side of the pusher mechanism 2. This structure can effectively reduce the space occupied by the pusher mechanism in the length direction, achieving a compact structure.

[0050] During the processing of the crystal ingot 8, when loading, the drive device 3 guides the pusher head mechanism 2 to move from the operating end 9 to the workbench; when unloading, the drive device 3 operates in the opposite direction, moving the pusher head mechanism 2 from the workbench back to the operating end 9. During loading and unloading, the crystal ingot 8 is placed in the storage chamber 21 and moves synchronously with the movement of the pusher head mechanism 2. The pusher slide mechanism 1 provides stable support for the crystal ingot 8 throughout the loading and unloading process. As a result, the crystal ingot pushing mechanism not only effectively protects the surface of the crystal ingot 8 from damage during loading and unloading, but also ensures the stability of the crystal ingot 8 during transfer, avoiding the risk of falling, thereby significantly reducing the economic losses caused by damage or falling of the crystal ingot 8.

[0051] As one implementation scheme in the present application, the pusher head mechanism 2 is configured as a pusher plate with an annular structure, the center of which is configured as a receiving cavity 21. During the movement of the pusher plate, it can accurately drive the crystal ingot 8 to move synchronously, ensuring the stability and safety of the crystal ingot 8 during the processing process.

[0052] like Figure 2 As shown, as a preferred implementation scheme in the embodiment of the present application, the pushing head mechanism 2 includes a loading plate 22 and a unloading plate 23. The loading plate 22 is used to push the crystal ingot 8 from the operating end 9 to the workbench, and the unloading plate 23 is used to push the crystal ingot 8 from the workbench to the operating end 9. Specifically, the loading plate 22 and the unloading plate 23 are arranged relative to each other along the length direction of the pushing slide mechanism 1, wherein the unloading plate 23 is located on the side of the loading plate 22 facing the workbench, and the storage cavity 21 is arranged between the loading plate 22 and the unloading plate 23. It can be understood that in the process of the pushing head mechanism 2 moving from the operating end 9 to the workbench, the loading plate 22 is on the side of the crystal ingot 8 away from the workbench, so it can effectively push the crystal ingot 8 to the workbench, thereby realizing the loading of the crystal ingot 8. On the contrary, when the push head mechanism 2 returns from the workbench to the operating end 9, the unloading plate 23 is located on the side of the crystal ingot 8 away from the operating end 9, so that the crystal ingot 8 can be smoothly sent back from the workbench to the operating end 9 to complete the unloading of the crystal ingot 8.

[0053] Furthermore, the facing surfaces of the loading plate 22 and the unloading plate 23 are configured in an arc shape. This arc-shaped structure allows the loading plate 22 and the unloading plate 23 to achieve a tighter fit with the sidewalls of the ingot 8, thereby improving the stability of the ingot 8 during movement. To further reduce possible minor damage to the surface of the ingot 8, flexible materials such as rubber, silicone, flocking cloth, or sponge can be added to the facing surfaces of the loading plate 22 and the unloading plate 23. These materials not only provide additional cushioning protection, but also ensure that the surface of the ingot 8 is intact, thereby further improving the quality of the ingot 8 processing.

[0054] In the embodiment of the present application, the pusher head mechanism 2 further includes a pusher base 24, an adjusting bolt 25, and an elastic member 26. The pusher base 24 is disposed directly above the loading plate 22 and the unloading plate 23. A discharge port 241 is formed through the pusher base 24, and the discharge port 241 is located directly above the receiving chamber 21. The discharge port 241 provides convenience for the operator when placing the ingot 8. The operator can pass the ingot 8 through the discharge port 241 through the pusher base 24 and then place it into the receiving chamber 21.

[0055] like Figure 2 and Figure 3As shown, the provision of the adjusting bolts 25 enhances the flexibility and adaptability of the pusher mechanism 2. A plurality of adjusting bolts 25 are provided, and the plurality of adjusting bolts 25 are evenly distributed above the loading plate 22 or the unloading plate 23. The plurality of adjusting bolts 25 all penetrate the pusher base 24 and are rotatably connected to the pusher base 24. The adjusting bolts 25 located above the loading plate 22 are threadedly connected to the upper surface of the loading plate 22, and the adjusting bolts 25 located above the unloading plate 23 are threadedly connected to the upper surface of the unloading plate 23. Through the above-mentioned structure, when the pusher mechanism 2 moves crystal ingots 8 of different thicknesses, the height of the loading plate 22 and the unloading plate 23 can be adjusted by rotating the adjusting bolts 25, making the pusher mechanism 2 applicable to a wider range of crystal ingots 8 of different sizes.

[0056] The function of the elastic member 26 is to improve the stability of the loading plate 22 and the unloading plate 23 during height adjustment. Multiple elastic members 26 correspond one-to-one with multiple adjustment bolts 25. Springs are used as elastic members 26, and each spring is mounted outside the circumferential sidewall of the corresponding adjustment bolt 25 and is always in a compressed state. When adjusting the height of the loading plate 22 and the unloading plate 23, the elastic member 26 can exert a vertical downward elastic force on the loading plate 22 and the unloading plate 23 through its own deformation. This not only improves the stability of the loading plate 22 and the unloading plate 23, but also ensures the smooth movement of the ingot 8 during movement. It is worth noting that the specific structure and installation location of the elastic member 26 are not restrictive.

[0057] In the embodiment of the present application, in order to further improve the flexibility and adaptability of the pushing mechanism of the ingot 8, it also includes a lifting mechanism 4. The main function of the lifting mechanism 4 is to adjust the overall height of the pushing head mechanism 2. The specific structure of the lifting mechanism 4 is not particularly limited in this application.

[0058] As a preferred embodiment in the embodiment of the present application, the lifting mechanism 4 includes a connecting plate 41, a lifting device 42 and a guide rod 43. The connecting plate 41 is fixedly connected to the output end of the driving device 3 and is suspended directly above the pusher head mechanism 2, providing a stable support for the entire lifting mechanism 4. The lifting device 42 is fixedly connected between the connecting plate 41 and the pusher base 24. Specifically, in the present application, the lifting device 42 is configured as a lifting cylinder. In the present application, the lifting device 42 preferably adopts a lifting cylinder, the cylinder body of which is fixedly connected to the lower surface of the connecting plate 41, and the piston rod end of the lifting cylinder is fixedly connected to the upper surface of the pusher base 24. Thus, the lifting and lowering of the pusher head mechanism 2 can be achieved by contracting the lifting cylinder.

[0059] The guide rod 43 is designed to further enhance the stability of the pusher mechanism and prevent shaking during movement. Specifically, two guide rods 43 are provided, and the two guide rods 43 are respectively arranged on both sides of the lifting device 42 along the vertical direction. The top of the guide rod 43 is fixedly connected to the bottom of the connecting plate 41, and the bottom of the guide rod 43 passes through the pusher base 24 along the vertical direction to form a sliding connection. When the lifting cylinder contracts, the entire pusher head mechanism 2 can move up and down smoothly, and the sliding connection between the guide rod 43 and the pusher base 24 plays a guiding role, effectively preventing shaking and ensuring the stability of the pusher mechanism during the height adjustment process.

[0060] Furthermore, in order to improve the smoothness of the pusher mechanism during movement, a sliding sleeve 5 is provided on the outer side of the guide rod 43, and the sliding sleeve 5 is fixedly connected to the pusher base 24. The sliding connection between the sliding sleeve 5 and the guide rod 43 improves the smoothness and stability of the pusher head mechanism 2 during the lifting process.

[0061] like Figure 1 and Figure 4 As shown, in the embodiment of the present application, the push slide mechanism 1 includes a base plate 11, a support 12 and a rotating rod 13. It is used to provide good support for the movement of the ingot 8 between the workbench and the operating end 9, while reducing friction with the surface of the ingot 8 to protect the surface of the ingot 8.

[0062] Specifically, the base plate 11, as the main body of the entire pushing chute mechanism 1, is arranged between the operating end 9 and the workbench. Two supports 12 are provided. The two supports 12 are parallel to each other and fixedly connected to both sides of the upper surface of the base plate 11 along the length direction of the base plate 11. A plurality of rotating rods 13 are provided. The plurality of rotating rods 13 are parallel to each other and located above the base plate 11. The two ends of the rotating rods 13 are rotatably connected to the opposite sides of the two supports 12, and the rotation axis of the rotating rods 13 is perpendicular to the length direction of the base plate 11. When the ingot 8 moves on the pushing chute mechanism 1, the ingot 8 drives the rotating rods 13 to rotate, so as to reduce the friction of the ingot 8 during movement, make the bottom of the ingot 8 less likely to be damaged, and improve the smoothness of the ingot 8 during movement.

[0063] To further minimize surface damage to the ingot 8 as it moves on the rotating rod 13, the outer surface of the rotating rod 13 can be optionally fitted with a protective sleeve or made directly from a material that protects the ingot 8. For example, flexible materials such as POM plastic, rubber, sponge, and flocking cloth can be used. These materials prevent hard contact between the rotating rod 13 and the ingot 8, effectively protecting the surface of the ingot 8 and making it less susceptible to bumps and scratches. It is worth noting that the above protective measures are merely illustrative and not restrictive.

[0064] In the embodiment of the present application, a slide plate 7 is fixedly provided on the upper surface of the base plate 11 at the position of the operating end 9. The slide plate 7 is made of POM plastic, and a groove 71 for avoiding the ingot 8 is provided on the upper surface of the slide plate 7 according to the robot mechanism for taking and placing the ingot 8. In summary, the slide plate 7 structure of the present application adopts the structure of POM plastic material and the groove 71, which not only effectively protects the bottom surface of the ingot 8 and avoids surface wear, but the groove 71 structure also enables the robot to place the ingot 8 stably on the slide plate 7, thereby improving the stability of the ingot 8 during the placement process.

[0065] In the embodiment of the present application, in order to meet the diverse needs during the processing of the ingot 8, adjustment devices 6 for adjusting the height of the pusher slide mechanism 1 are configured on both sides of the bottom plate 11. Specifically, the adjustment device 6 includes an adjustment plate 61, a guide plate 62 and a top screw 63.

[0066] An adjustment cavity 611 is opened from top to bottom on the upper surface of the adjustment plate 61, and the guide plate 62 is fixedly connected to the side wall of the bottom plate 11. The guide plate 62 is located in the adjustment cavity 611 and can be slidably connected to the adjustment plate 61 along the vertical direction. The guide plate 62 is threadedly connected with a top screw 63, and the bottom of the top screw 63 passes through the guide plate 62 and abuts against the bottom wall of the adjustment plate 61 in the adjustment cavity 611.

[0067] When the height of the pushing mechanism needs to be adjusted, the operator only needs to rotate the top screw 63 to adjust the height of the bottom plate 11 through the reverse push of the top screw 63 on the adjustment plate 61, so that the pushing slide mechanism 1 can be adjusted to an appropriate height to improve the applicability of the crystal ingot 8 pushing mechanism.

[0068] Those skilled in the art will readily appreciate other embodiments of the present invention after considering the specification and practicing the embodiments of the present invention. This application is intended to cover any variations, uses, or adaptations of the present invention that follow the general principles of the present invention and include common knowledge or customary techniques in the art that are not covered by this application. The specification and embodiments are intended to be exemplary only, and the true scope and spirit of the present invention are indicated by the appended claims.

Claims

1. A crystal ingot pushing mechanism, characterized in that: include: A material pushing slide mechanism (1) is arranged along a straight line, a workbench is arranged at one end of the material pushing slide mechanism (1), and an end of the material pushing slide mechanism (1) away from the workbench is arranged as an operating end (9) for taking and placing a crystal ingot (8); A push head mechanism (2) is located on the push slide mechanism (1), and has a receiving cavity (21) formed therein for placing the crystal ingot (8). The push head mechanism (2) is used to drive the crystal ingot (8) to move between the workbench and the operating end (9) along the length direction of the push slide mechanism (1); The driving device (3) is used to drive the pushing head mechanism (2) to move back and forth on the pushing slide mechanism (1).

2. The ingot pushing mechanism according to claim 1, characterized in that: The push head mechanism (2) comprises: a loading plate (22) for pushing the crystal ingot (8) onto the workbench; A discharge plate (23) is arranged opposite to the loading plate (22) along the length direction of the pushing slide mechanism (1) and is used to push the crystal ingot (8) out of the workbench.

3. The ingot pushing mechanism according to claim 2, characterized in that: The opposite side of the loading plate (22) and the unloading plate (23) is configured in an arc shape.

4. The ingot pushing mechanism according to claim 2, characterized in that: The pushing head mechanism (2) further comprises: A material pushing base (24) is located directly above the loading plate (22) and the unloading plate (23), and a material discharge port (241) is provided through the material pushing base (24), and the material discharge port (241) and the receiving chamber (21) are mutually connected; An adjusting bolt (25) is threadedly connected between the pusher base (24) and the loading plate (22), and between the pusher base (24) and the unloading plate (23), and is used to adjust the distance between the loading plate (22) or the unloading plate (23) and the pusher base (24); The elastic member (26) is located between the pushing base (24) and the loading plate (22), and between the pushing base (24) and the unloading plate (23), and is always in a compressed state.

5. The ingot pushing mechanism according to claim 4, characterized in that: The elastic member (26) is configured as a spring, and the spring is sleeved on the outside of the adjusting bolt (25).

6. The ingot pushing mechanism according to claim 4, characterized in that: It also includes a lifting mechanism (4) for driving the pushing head mechanism (2) to move up and down, and the lifting mechanism (4) includes: A connecting plate (41) fixedly connected to the power output end of the driving device (3); A lifting device (42) is fixedly connected between the connecting plate (41) and the pushing base (24); The guide rod (43) is fixedly arranged at the bottom of the connecting plate (41) in a vertical direction and passes through the pushing base (24).

7. The ingot pushing mechanism according to claim 6, characterized in that: The outer cover of the guide rod (43) is provided with a sliding sleeve (5), and the sliding sleeve (5) is fixedly connected to the pusher base (24).

8. The ingot pushing mechanism according to claim 1, characterized in that: The material pushing slide mechanism (1) comprises: a bottom plate (11), a support (12) and a rotating rod (13); The support (12) is provided in two pieces, and the two supports (12) are fixedly arranged above both sides of the bottom plate (11) along the length direction of the bottom plate (11); The rotating rods (13) are provided in a plurality of pieces, and the plurality of rotating rods (13) are all rotatably connected between the two supports (12). The plurality of rotating rods (13) are all located above the base plate (11), and the rotation axis of each rotating rod (13) is perpendicular to the length direction of the base plate (11).

9. The ingot pushing mechanism according to claim 8, characterized in that: Adjustment devices (6) for adjusting the material pushing slide mechanism (1) are provided on both sides of the bottom plate (11), and the adjustment device (6) comprises: An adjustment plate (61) has an adjustment cavity (611) formed on its upper surface in a vertically downward direction; A guide plate (62) is fixedly connected to the side wall of the bottom plate (11), is located in the adjustment cavity and is slidably connected to the adjustment plate (61) along a vertical direction; A top screw (63) is threadedly connected to the guide plate (62), passes through the guide plate (62) and abuts against the adjustment plate (61).

10. The ingot pushing mechanism according to claim 8, characterized in that: A slide plate (7) is fixedly provided on the upper surface of the base plate (11) at the operating end (9), and a groove (71) is provided on the upper surface of the slide plate (7) for avoiding a robot when taking or placing a crystal ingot (8).

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