Double-sided film-coated carrier plate

Abstract

The utility model relates to a double-sided film-coated carrier plate, and belongs to the technical field of film-coated carrier plates. Comprising a carrier plate outer frame, a plurality of supporting rod pairs, a plurality of bearing frames and a plurality of positioning pins. One end of a supporting rod head and one end of a supporting rod tail in each supporting rod of the supporting rod pair are connected with the two ends of the carrier plate outer frame respectively, the other ends of the supporting rod head and the supporting rod tail are connected with the two ends of the rod body respectively, the trapezoid bosses are connected with the rod body and evenly connected between the supporting rod head and the supporting rod tail, and the supporting rod head and the supporting rod tail are each provided with a first positioning hole. Two first positioning holes are formed in the trapezoidal boss; the bearing frame comprises a square hollow frame, and at least one opposite angle of the square hollow frame is provided with a second positioning hole; and after pin bodies and rubber layers of the positioning pins are inserted into the second positioning holes and the first positioning holes, the square hollow frame is detachably connected to the supporting rod pairs. The silicon wafer cleaning device can avoid the problems of silicon wafer decrystallization, winding plating, even fragmentation and the like, is simple to disassemble and assemble, can improve the maintenance efficiency, and has low requirements on the space of the cleaning tank during cleaning.

Description

Technical Field

[0001] The utility model relates to the technical field of film-coated carrier boards, in particular to a double-sided film-coated carrier board. Background Art

[0002] Solar energy, due to its clean, safe, and pollution-free properties, has become one of the most efficient renewable resources. As one of the most important applications of solar energy, photovoltaic technology has a positive impact on changing energy consumption patterns, mitigating global warming, and protecting the ecological environment. Therefore, the vigorous development of photovoltaic technology is of far-reaching and significant significance. Continuous magnetron sputtering double-sided coating in PVD (Physical Vapor Deposition) equipment has become the primary technology used in high-efficiency solar cell coating systems. During the double-sided coating process, the double-sided coating carrier that supports the silicon wafer is a critical component of the PVD system.

[0003] In order to achieve the best coating effect, the existing double-sided coated carrier adopts a design in which several small carriers are installed in a large carrier frame with screws. However, during the high-speed transmission of the double-sided coated carrier, relative displacement is likely to occur between the small carriers and the large carrier frame, resulting in inaccurate wafer placement by the robot, which can easily cause problems such as silicon wafer decrystallineing, plating wrapping, and even fragmentation. In addition, when deformation and other problems occur in individual carrier frames of the small carriers, the entire small carrier needs to be replaced, and the disassembly and assembly of the screws is too cumbersome, affecting work efficiency. Furthermore, when the double-sided coated carrier reaches the end of its service life and needs to be cleaned or sandblasted, the size of the double-sided coated carrier is limited, and the space requirements for the cleaning tank and the sandblasting machine are relatively high. Summary of the Invention

[0004] In order to solve the above technical problems, the present invention provides a double-sided coated carrier. The technical solution of the present invention is as follows:

[0005] A double-sided coated carrier comprises a carrier outer frame, a plurality of support rod pairs, a plurality of receiving frames and a plurality of positioning pins, wherein a receiving space for the receiving frame is formed between the two support rods of each support rod pair;

[0006] Each support rod pair includes two support rods, and the two support rods are symmetrical to each other. Each support rod includes a support rod head, a support rod tail, a rod body and a plurality of trapezoidal bosses. One end of the support rod head and the support rod tail are detachably connected to the two ends of the carrier plate outer frame, and the other ends of the support rod head and the support rod tail are fixedly connected to the two ends of the rod body respectively. The plurality of trapezoidal bosses are fixedly connected to the rod body and evenly connected between the support rod head and the support rod tail. A first positioning hole is opened on the support rod head and the support rod tail, and two first positioning holes are opened on the trapezoidal boss;

[0007] The receiving frame includes a square hollow frame, the hollow shape of the upper portion of the square hollow frame is a square with an upper missing corner, and the hollow shape of the lower portion of the square hollow frame is a square with a lower missing corner, the size of the square with the upper missing corner is larger than the size of the square with the lower missing corner, and a second positioning hole is opened on at least one diagonal corner of the square hollow frame, and the first positioning hole and the second positioning hole have the same diameter;

[0008] The positioning pin includes a pin body, a rubber layer is fixedly connected to the periphery of the pin body, and a pin cap is fixedly connected to the top of the rubber layer. After the pin body and the rubber layer are inserted into the second positioning hole and the first positioning hole in sequence, the square hollow frame is detachably connected to the pair of support rods.

[0009] Optionally, the size difference between the four corners of the upper square and the lower square is greater than the size difference at the sides, and the size of the lower square is smaller than the size of the supported object.

[0010] Optionally, second positioning holes are provided on two diagonal corners of the square hollow frame, and the spacing between adjacent first positioning holes is equal to the spacing between adjacent second positioning holes.

[0011] Optionally, the bottom end of the pin body is fixedly connected with an I-shaped connecting piece.

[0012] Optionally, the diameter of the pin cap is larger than the diameter of the second positioning hole.

[0013] Optionally, the diameters of the first positioning hole and the second positioning hole are both 3 mm; the diameter of the pin cap is 4 mm; the size difference between the four corners of the upper and lower missing corner squares is 1 mm, and the size difference between the sides is 0.7 mm.

[0014] Optionally, the pin cap and the rubber layer are made of high-temperature resistant rubber, and the carrier plate outer frame, support rod, and receiving frame are all made of titanium alloy.

[0015] Optionally, the support rod head, support rod tail, rod body and trapezoidal boss are integrally formed.

[0016] All the above optional technical solutions can be combined arbitrarily, and the present utility model does not provide detailed descriptions of the structures after the combinations.

[0017] By means of the above solution, the beneficial effects of the present invention are as follows:

[0018] The support rod and the square hollow frame are connected by locating pins, which is convenient for plugging and unplugging. During the high-speed transmission of the double-sided coated carrier, the square hollow frame and the outer frame of the carrier are not easily displaced relative to each other, thereby avoiding problems such as silicon wafer decrystalline, plating winding, and even fragmentation. By setting up a number of square hollow frames that are detachably connected to the support rod through their respective locating pins, when one or some square hollow frames have problems such as deformation, the corresponding locating pins can be pulled out from the second locating hole and the first locating hole. The operation is simple and can improve maintenance efficiency. When the double-sided coated carrier needs to be cleaned, each square hollow frame can be cleaned separately, thereby reducing the limitation caused by the size of the double-sided coated carrier and requiring less space for the cleaning tank and sandblasting machine.

[0019] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and to implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural diagram of the present utility model.

[0021] Figure 2 It is a structural schematic diagram of the support rod pair in the utility model.

[0022] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle.

[0023] Figure 4 It is a structural diagram of the receiving frame in the utility model.

[0024] Figure 5 yes Figure 4 A partial enlarged view of point B in the middle.

[0025] Figure 6 It is a structural schematic diagram of the positioning pin in the utility model.

[0026] Figure 7 It is a schematic diagram of the connection relationship between the support rod pair and the receiving frame in the utility model.

[0027] Figure 8 yes Figure 7 A partial enlarged view of point C in the middle.

[0028] The accompanying drawings are marked as follows: 1. carrier plate outer frame, 2. support rod pair, 2-1. support rod head, 2-2. support rod tail, 2-3. rod body, 2-4. trapezoidal boss, 2-5. first positioning hole, 3. receiving frame, 3-1. square hollow frame, 3-2. square with upper missing corner, 3-3. square with lower missing corner, 3-4. second positioning hole, 4-1. pin body, 4-2. rubber layer, 4-3. pin cap, 4-4. I-shaped connector. DETAILED DESCRIPTION

[0029] The following embodiments are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0030] like Figures 1 to 8 As shown, the double-sided coating carrier provided by the embodiment of the present invention includes a carrier outer frame 1, a plurality of support rod pairs 2, a plurality of receiving frames 3 and a plurality of positioning pins, and a receiving space for the receiving frame 3 is formed between the two support rods of each support rod pair 2;

[0031] Each group of support rod pairs 2 includes two support rods, and the two support rods are symmetrical to each other. Each support rod includes a support rod head 2-1, a support rod tail 2-2, a rod body 2-3 and a plurality of trapezoidal bosses 2-4. One end of the support rod head 2-1 and the support rod tail 2-2 are detachably connected to the two ends of the carrier plate outer frame 1 by bolts, and the other ends of the support rod head 2-1 and the support rod tail 2-2 are fixedly connected to the two ends of the rod body 2-3, and the plurality of trapezoidal bosses 2-4 are fixedly connected to the rod body 2-3 and evenly connected between the support rod head 2-1 and the support rod tail 2-2. A first positioning hole 2-5 is provided on the support rod head 2-1 and the support rod tail 2-2, and two first positioning holes 2-5 are provided on the trapezoidal boss 2-4;

[0032] The receiving frame 3 includes a square hollow frame 3-1, the hollow shape of the upper portion of the square hollow frame 3-1 is an upper notched square 3-2, and the hollow shape of the lower portion of the square hollow frame 3-1 is a lower notched square 3-3. The size of the upper notched square 3-2 is larger than that of the lower notched square 3-3. A second positioning hole 3-4 is opened on at least one diagonal corner of the square hollow frame 3-1, and the first positioning hole 2-5 and the second positioning hole 3-4 have the same diameter;

[0033] The positioning pin includes a pin body 4-1, a rubber layer 4-2 is fixedly connected to the periphery of the pin body 4-1, and a pin cap 4-3 is fixedly connected to the top of the rubber layer 4-2. After the pin body 4-1 and the rubber layer 4-2 are inserted into the second positioning hole 3-4 and the first positioning hole 2-5 in turn, the square hollow frame 3-1 is detachably connected to the support rod pair 2.

[0034] Specifically, several receiving frames 3 are arranged in an array between several pairs of support rods 2, resulting in a compact and aesthetically pleasing double-sided coated carrier board. After the pin body 4-1 and rubber layer 4-2 are inserted into the second positioning hole 3-4 and the first positioning hole 2-5, the rubber layer 4-2 precisely fills the second positioning hole 3-4 and the first positioning hole 2-5, preventing the positioning pin from moving within the second positioning hole 3-4 and the first positioning hole 2-5.

[0035] When assembling the double-sided film-coated carrier provided by the embodiment of the present invention, the support rod heads 2-1 and support rod tails 2-2 of the support rods in the plurality of support rod pairs 2 are first connected to the carrier outer frame 1 using bolts in sequence. Then, a plurality of square hollow frames 3-1 are sequentially placed between the two support rods of the support rod pairs 2, and after aligning the second positioning holes 3-4 with the first positioning holes 2-5, the positioning pins are inserted into the second positioning holes 3-4 and the first positioning holes 2-5 in sequence by holding the pin caps 4-3. Connecting the support rods and the square hollow frames 3-1 with the positioning pins facilitates insertion and removal, and also prevents relative displacement between the square hollow frames 3-1 and the carrier outer frame 1 during high-speed transmission of the double-sided film-coated carrier, thereby preventing problems such as silicon wafer decrystallineing, plating wraparound, and even fragmentation. By providing a plurality of square hollow frames 3-1 that are detachably connected to the support rod pair 2 via respective positioning pins, if one or more square hollow frames 3-1 experience deformation or other problems, the corresponding positioning pins can be simply removed from the second positioning holes 3-4 and the first positioning holes 2-5. This simplifies operation and improves maintenance efficiency. When the double-sided coated carrier board needs to be cleaned, each square hollow frame 3-1 can be cleaned individually, thereby reducing the size restrictions of the double-sided coated carrier board and reducing the space requirements for the cleaning tank and sandblasting machine.

[0036] In one embodiment, the difference in size between the corners of the upper notched square 3-2 and the lower notched square 3-3 is greater than the difference in size at the edges, thereby minimizing obstruction of the support while providing a stable support for the object. The lower notched square 3-3 is smaller than the object (a silicon wafer in a double-sided coating process) to prevent the object from falling out of the square hollow frame 3-1.

[0037] In a specific embodiment, the two diagonal corners of the square hollow frame 3-1 are each provided with a second positioning hole 3-4, and the spacing between adjacent first positioning holes 2-5 is equal to the spacing between adjacent second positioning holes 3-4. By so setting, the receiving frame 3 can be placed exactly into the support rod head 2-1 and the trapezoidal boss 2-4.

[0038] between the support rod tail 2-2 and the trapezoidal boss 2-4, and between two adjacent trapezoidal bosses 2-4, thereby making the overall structure more compact.

[0039] In a specific embodiment, an I-shaped connector 4-4 is fixedly connected to the bottom end of the pin body 4-1 to facilitate assembly and disassembly from the second positioning hole 3-4 and the first positioning hole 2-5.

[0040] In a specific embodiment, the diameter of the pin cap 4 - 3 is larger than the diameter of the second positioning hole 3 - 4 to prevent the positioning pin from slipping out of the second positioning hole 3 - 4 and the first positioning hole 2 - 5 .

[0041] In a specific embodiment, the diameters of the first positioning hole 2-5 and the second positioning hole 3-4 are both 3 mm; the diameter of the pin cap 4-3 is 4 mm; the size difference between the four corners of the upper missing corner square 3-2 and the lower missing corner square 3-3 is 1 mm, and the size difference between the edges is 0.7 mm.

[0042] In a specific embodiment, the pin cap 4-3 and the rubber layer 4-2 are made of high-temperature resistant rubber, and the dimensions of the carrier outer frame 1, support rod, and receiving frame 3 are all made of titanium alloy to extend the service life of the double-sided coated carrier.

[0043] In a specific embodiment, the support rod head 2-1, the support rod tail 2-2, the rod body 2-3 and the trapezoidal boss 2-4 are integrally formed, that is, the support rod is an integrated structure to improve the overall stability of the support rod.

[0044] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that ordinary technicians in this technical field can make several improvements and modifications without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A double-sided coated carrier, characterized in that: It comprises a carrier plate outer frame (1), a plurality of support rod pairs (2), a plurality of receiving frames (3) and a plurality of positioning pins, wherein a receiving space for the receiving frame (3) is formed between two support rods of each support rod pair (2); Each pair of support rods (2) includes two support rods, the two support rods are symmetrical to each other, each support rod includes a support rod head (2-1), a support rod tail (2-2), a rod body (2-3) and a plurality of trapezoidal bosses (2-4), one end of the support rod head (2-1) and the support rod tail (2-2) are detachably connected to the two ends of the carrier plate outer frame (1), the other ends of the support rod head (2-1) and the support rod tail (2-2) are fixedly connected to the two ends of the rod body (2-3), the plurality of trapezoidal bosses (2-4) are fixedly connected to the rod body (2-3) and are evenly connected between the support rod head (2-1) and the support rod tail (2-2), a first positioning hole (2-5) is provided on the support rod head (2-1) and the support rod tail (2-2), and two first positioning holes (2-5) are provided on the trapezoidal boss (2-4); The receiving frame (3) comprises a square hollow frame (3-1), the hollow shape of the upper portion of the square hollow frame (3-1) is a square with an upper missing corner (3-2), the hollow shape of the lower portion of the square hollow frame (3-1) is a square with a lower missing corner (3-3), the size of the square with an upper missing corner (3-2) is larger than the size of the square with a lower missing corner (3-3), a second positioning hole (3-4) is provided on at least one diagonal corner of the square hollow frame (3-1), and the first positioning hole (2-5) and the second positioning hole (3-4) have the same diameter; The positioning pin comprises a pin body (4-1), a rubber layer (4-2) is fixedly connected to the periphery of the pin body (4-1), a pin cap (4-3) is fixedly connected to the top of the rubber layer (4-2), and after the pin body (4-1) and the rubber layer (4-2) are inserted into the second positioning hole (3-4) and the first positioning hole (2-5), the square hollow frame (3-1) is detachably connected to the pair of support rods (2).

2. The double-sided coated carrier according to claim 1, characterized in that: The size difference between the four corners of the upper missing corner square (3-2) and the lower missing corner square (3-3) is greater than the size difference at the sides, and the size of the lower missing corner square (3-3) is smaller than the size of the supported object.

3. The double-sided coated carrier according to claim 1, characterized in that: Second positioning holes (3-4) are provided on two opposite corners of the square hollow frame (3-1), and the spacing between adjacent first positioning holes (2-5) is equal to the spacing between adjacent second positioning holes (3-4).

4. The double-sided coated carrier according to claim 1, characterized in that: The bottom end of the pin body (4-1) is fixedly connected to an I-shaped connecting piece (4-4).

5. The double-sided coated carrier according to claim 1, characterized in that: The diameter of the pin cap (4-3) is larger than the diameter of the second positioning hole (3-4).

6. The double-sided coated carrier according to claim 1 or 2, characterized in that: The diameters of the first positioning hole (2-5) and the second positioning hole (3-4) are both 3 mm; the diameter of the pin cap (4-3) is 4 mm; the size difference between the four corners of the upper missing corner square (3-2) and the lower missing corner square (3-3) is 1 mm, and the size difference at the sides is 0.7 mm.

7. The double-sided coated carrier according to claim 1, characterized in that: The pin cap (4-3) and the rubber layer (4-2) are both made of high-temperature resistant rubber, and the dimensions of the carrier plate outer frame (1), the support rod, and the receiving frame (3) are all made of titanium alloy.

8. The double-sided coated carrier according to claim 1, characterized in that: The support rod head (2-1), the support rod tail (2-2), the rod body (2-3) and the trapezoidal boss (2-4) are integrally formed.

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