Main heater for reducing oxygen content of silicon single crystal
By installing the heat insulation shell and aluminum film structure on the heater, the problem of bidirectional heat diffusion of the heater is solved, and more efficient heat utilization and stable heating operation are achieved, reducing energy consumption.
Patent Information
- Application Number
- CN202422337877.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-25
- Publication Date
- 2025-08-12
- Estimated Expiration
- 2034-09-25
AI Technical Summary
When existing heaters heat the single crystal furnace, heat not only diffuses to the single crystal furnace, but also diffuses in the opposite direction, resulting in heat loss and heating efficiency reduction and increasing production costs.
The thermal insulation shell and aluminum film structure are adopted to reduce heat transfer to the outside, and the heat is reflected through the aluminum film and radiation is returned to the heat inside the heater, and the glass fiber wool and ceramic fiber wool are combined for secondary reflection, improving the heat insulation performance and heat utilization of the heater.
It improves the heat insulation performance and heat utilization rate of the heater, reduces heat loss, maintains a constant heating temperature, reduces energy consumption, and improves the stability and efficiency of heating operations.
Smart Images
Figure CN223214207U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field related to single crystal furnace heat sources, and in particular relates to a main heater for reducing the oxygen content of silicon single crystals. Background Art
[0002] The single crystal furnace thermal field heater is a key device for providing heat source during the single crystal growth process. By changing the size and distribution position of the main heater, the temperature gradient of the thermal field can be changed, the stability of the silicon solution surface can be improved, the oxygen content of the silicon single crystal can be reduced, and the breakage rate can be reduced. However, when the heater heats the single crystal furnace, the temperature emitted by itself not only diffuses toward the single crystal furnace, but also diffuses in the opposite direction of the single crystal furnace, resulting in heat loss and reduced heating efficiency. More energy is required to maintain the required heating temperature, thereby increasing production costs. Utility Model Content
[0003] The purpose of the present utility model is to provide a main heater for reducing the oxygen content of silicon single crystals, so as to solve the problem proposed in the above background technology that when the heater heats the single crystal furnace, the temperature emitted by itself not only diffuses toward the single crystal furnace, but also diffuses in the opposite direction of the single crystal furnace.
[0004] To achieve the above object, the present invention provides the following technical solution: a main heater for reducing the oxygen content of a silicon single crystal, comprising a heating seat and a bottom heater mounted on the upper end of the heating seat;
[0005] A main heater a is provided on the upper side of the bottom heater;
[0006] A main heater b is provided on the upper side of the main heater a;
[0007] A main heater c is provided on the upper side of the main heater b;
[0008] The outer side of the bottom heater is provided with a heat-insulating shell, and the circular inner wall of the heat-insulating shell is provided with an aluminum film.
[0009] Preferably, glass fiber wool is provided inside the heat-insulating shell, and ceramic fiber wool is provided on the right side of the glass fiber wool.
[0010] Preferably, the left end outer wall of the ceramic fiber wool is provided with a mesh frame b to limit the position of the ceramic fiber wool, and the left end outer wall of the glass fiber wool is fixedly connected with a mesh frame a to limit the position of the glass fiber wool.
[0011] Preferably, the glass fiber cotton and ceramic fiber cotton are both in sheet form, and the aluminum film is adhered to the inner wall of the heat-insulating shell by an adhesive.
[0012] Preferably, the lower outer wall of the heating seat is fixedly connected to a base, and the heating seat supplies power to the bottom heater, main heater a, main heater b and main heater c respectively.
[0013] Preferably, the main heater c is connected between the foot plate and the base, and the main heater a and the main heater b are designed to be connected in an integrated manner.
[0014] Preferably, the main heater a, the main heater b and the main heater c are arranged concentrically in the longitudinal direction, and the bottom heater, the main heater a, the main heater b and the main heater c are all made of graphite material.
[0015] Compared with the prior art, the present invention provides a main heater for reducing the oxygen content of silicon single crystals, which has the following beneficial effects:
[0016] By installing a thermal insulation shell and aluminum film, when the heater is heating toward the single crystal furnace, the insulation shell and aluminum film can effectively reduce heat transfer outward, improving the heater's thermal insulation performance. The aluminum film has the characteristic of reflecting thermal radiation, which can be reflected back into the heater, reducing heat loss, improving heating efficiency, and enhancing the heater's performance stability and reliability during heating operation. Maintaining a constant heating temperature, reducing temperature fluctuations, ensuring the accuracy and stability of the heating operation, and reducing heat loss and improving heating efficiency can reduce energy consumption and save energy costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 This is a schematic structural diagram of a main heater for reducing the oxygen content of a silicon single crystal according to the present invention.
[0018] Figure 2 It is a schematic diagram of the partial structure of the heat-insulating shell area in a front view of the present invention.
[0019] Figure 3 This is a schematic diagram of the local structure of the heat-insulating shell area of the utility model.
[0020] In the figure: 1. Base; 2. Heating seat; 3. Bottom heater; 4. Main heater a; 5. Main heater b; 6. Main heater c; 7. Thermal insulation shell; 8. Aluminum film; 9. Frame a; 10. Glass fiber cotton; 11. Frame b; 12. Ceramic fiber cotton. DETAILED DESCRIPTION
[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0022] The utility model provides Figure 1-3 The main heater for reducing the oxygen content of a silicon single crystal shown includes a heating base 2 and a bottom heater 3 mounted on the upper end of the heating base 2;
[0023] A main heater a4 is provided on the upper side of the bottom heater 3;
[0024] A main heater b5 is provided on the upper side of the main heater a4;
[0025] A main heater c6 is provided on the upper side of the main heater b5. When heating the silicon solution inside the single crystal furnace, the bottom heater 3, main heater a4, main heater b5 and main heater c6 can be turned on simultaneously to improve heat utilization and shorten the dissolution time. The main heater c6 and main heater b5 can be turned on separately to reduce the reaction rate of the bottom molten silicon with the crucible wall, thereby reducing the oxygen content of the silicon single crystal.
[0026] An insulating outer shell 7 is provided on the outer side of the bottom heater 3, and an aluminum film 8 is provided on the circular inner wall of the insulating outer shell 7. The heat generated during the heating process of the bottom heater 3, the main heater a4, the main heater b5 and the main heater c6, the reflecting surface of the aluminum film 8 faces the main heater a4, and the heat transfer to the outside can be reduced through the insulating outer shell 7 and the aluminum film 8, thereby improving the thermal insulation performance of the heater. During the heating operation, the insulation effect is better, the heat loss is reduced, and the heating efficiency is improved.
[0027] like Figure 2 As shown, glass fiber wool 10 is arranged inside the heat-insulating shell 7, ceramic fiber wool 12 is arranged on the right side of the glass fiber wool 10, a mesh frame b11 is provided on the left outer wall of the ceramic fiber wool 12 to limit the position of the ceramic fiber wool 12, and a mesh frame a9 is fixedly connected to the left outer wall of the glass fiber wool 10 to limit the position of the glass fiber wool 10.
[0028] The glass fiber cotton 10 and ceramic fiber cotton 12 can reflect the heat radiation that penetrates the aluminum film 8 for a second time, and can keep the heat radiation that cannot be reflected warm to avoid the temperature from spreading outward. The positions of the glass fiber cotton 10 and ceramic fiber cotton 12 can be limited by the mesh frames a9 and b11.
[0029] like Figure 2 and Figure 3As shown, the glass fiber wool 10 and the ceramic fiber wool 12 are both in sheet form, and the aluminum film 8 is adhered to the inner wall of the heat-insulating shell 7 by an adhesive.
[0030] The sheet-like glass fiber wool 10 and ceramic fiber wool 12 can be stably placed inside the heat-insulating outer shell 7 and can increase the contact area with heat radiation.
[0031] like Figure 1 As shown, the lower outer wall of the heating seat 2 is fixedly connected to the base 1, and the heating seat 2 supplies power to the bottom heater 3, the main heater a4, the main heater b5 and the main heater c6 respectively.
[0032] Different power-on units are arranged between the heating seat 2 and the bottom heater 3, main heater a4, main heater b5 and main heater c6. The heating seat 2 can transfer electric energy to the corresponding bottom heater 3, main heater a4, main heater b5 and main heater c6 according to demand, so as to achieve simultaneous power-on heating and separate power-on heating.
[0033] like Figure 1 As shown, the main heater c6 is connected between the foot plate and the base 1, the main heater a4 and the main heater b5 adopt an integrated connection design, the main heater a4, the main heater b5 and the main heater c6 are arranged concentrically in the longitudinal direction, and the bottom heater 3, the main heater a4, the main heater b5 and the main heater c6 are all made of graphite material.
[0034] The concentric arrangement of main heaters A4, B5, and C6 allows for more even heat transfer between the heaters, improving heating efficiency and stability. Different connection designs also affect the structural stability and service life. Graphite, a material with excellent thermal conductivity and high-temperature resistance, is suitable for high-temperature heating equipment. The graphite used in bottom heater 3, main heaters A4, B5, and C6 effectively conducts and evenly distributes heat, ensuring a uniform and stable temperature within the heaters.
[0035] The implementation principle of this embodiment is: when heating the silicon solution inside the single crystal furnace, the bottom heater 3, the main heater a4, the main heater b5 and the main heater c6 can be turned on at the same time to improve the heat utilization rate and shorten the dissolution time, and the main heater c6 and the main heater b5 can be turned on separately to reduce the reaction rate of the bottom molten silicon and the crucible wall, thereby reducing the oxygen content of the silicon single crystal. The heat emitted during the heating process of the bottom heater 3, the main heater a4, the main heater b5 and the main heater c6, the reflecting surface of the aluminum film 8 faces the main heater a4, and the heat transfer to the outside can be reduced through the heat-insulating shell 7 and the aluminum film 8, thereby improving the thermal insulation performance of the heater. During the heating operation, the insulation effect is better, the heat loss is reduced, and the heating efficiency is improved.
[0036] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A main heater for reducing the oxygen content of a silicon single crystal, comprising a heating seat (2) and a bottom heater (3) mounted on the upper end of the heating seat (2); A main heater a (4) is provided on the upper side of the bottom heater (3); A main heater b (5) is provided on the upper side of the main heater a (4); A main heater c (6) is provided on the upper side of the main heater b (5); Its characteristics are: A heat-insulating outer shell (7) is provided on the outer side of the bottom heater (3), and an aluminum film (8) is provided on the circular inner wall of the heat-insulating outer shell (7).
2. The main heater for reducing the oxygen content of a silicon single crystal according to claim 1, characterized in that: Glass fiber wool (10) is provided inside the heat-insulating outer shell (7), and ceramic fiber wool (12) is provided on the right side of the glass fiber wool (10).
3. The main heater for reducing the oxygen content of a silicon single crystal according to claim 2, characterized in that: The left end outer wall of the ceramic fiber cotton (12) is provided with a mesh frame b (11) to limit the position of the ceramic fiber cotton (12), and the left end outer wall of the glass fiber cotton (10) is fixedly connected with a mesh frame a (9) to limit the position of the glass fiber cotton (10).
4. The main heater for reducing the oxygen content of a silicon single crystal according to claim 2, characterized in that: The glass fiber cotton (10) and the ceramic fiber cotton (12) are both in sheet form, and the aluminum film (8) is adhered to the inner wall of the heat-insulating outer shell (7) by an adhesive.
5. The main heater for reducing the oxygen content of a silicon single crystal according to claim 1, characterized in that: The lower outer wall of the heating seat (2) is fixedly connected to a base (1), and the heating seat (2) is respectively powered by the bottom heater (3), the main heater a (4), the main heater b (5) and the main heater c (6).
6. The main heater for reducing the oxygen content of a silicon single crystal according to claim 1, characterized in that: The main heater c (6) is connected between the foot plate and the base (1), and the main heater a (4) and the main heater b (5) are designed to be connected in an integrated manner.
7. The main heater for reducing the oxygen content of a silicon single crystal according to claim 1, characterized in that: The main heater a (4), the main heater b (5) and the main heater c (6) are arranged concentrically in the longitudinal direction, and the bottom heater (3), the main heater a (4), the main heater b (5) and the main heater c (6) are all made of graphite material.