Gate valve, gas distribution device and substrate processing device

Abstract

The utility model provides a gate valve, gas distribution device and substrate processing device, the gate valve includes valve seat, bonnet and valve plate, the valve seat and bonnet are respectively arranged at the opposite position of channel both sides, the inside of valve seat is provided with the drive part that is connected with the valve plate, the inside of valve seat is provided with the gas distribution device, the gas distribution device is provided with the gas distribution device. The driving part is used for driving the valve plate to move between the valve seat and the valve cover so that the gate valve can be opened or closed, a preset angle is formed between the moving direction of the valve plate and the flowing direction of fluid in the channel, a limiting seat is arranged in the valve seat, and a sealing piece matched with the limiting seat is arranged on the valve plate. According to the embodiment of the utility model, when the valve plate is opened, fluid in a pipeline can be prevented from flowing into the driving part of the valve along the channel, so that elements in the driving part are prevented from being corroded, the gas environment of the channel can be prevented from being damaged, gas leakage is prevented, the safety of the gate valve and the channel is improved, and the service life of the gate valve and the channel is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of valve devices, and in particular to a gate valve, a gas distribution device and a substrate processing device. Background Art

[0002] Gate valves, also known as gate valves or flapper valves, are generally used in larger-diameter pipelines or within passages between cavities. They operate by opening and closing the gate disc, creating a seal between the valve seat and the valve disc, thereby allowing gas or liquid to flow through or isolate the spaces on either side of the disc. However, when the disc is open, the fluid in the pipeline flows through the channel connecting the disc and the actuator into the actuator. Chemically or plasma-corrosive fluids can easily corrode the actuator components, reducing the service life of the gate valve. Utility Model Content

[0003] In view of this, the present invention aims to provide a gate valve, a gas distribution device and a substrate processing device, wherein the gate valve has a sealing design to at least partially solve the technical problem in the prior art that corrosive flow enters the interior of the valve along the channel between the valve plate and the valve seat, such as the valve plate connecting part and the driving part, causing corrosion of components in the driving part and reducing the service life of the gate valve.

[0004] One aspect of the present invention provides a gate valve, which includes a valve seat, a valve cover and a valve plate. The valve seat and the valve cover are respectively arranged at relative positions on both sides of a channel. A driving part connected to the valve plate is provided in the valve seat. The driving part is used to drive the valve plate to move between the valve seat and the valve cover to realize the opening or closing of the gate valve. The moving direction of the valve plate is at a predetermined angle to the flow direction of the fluid in the channel. A limit seat is provided in the valve seat, and a first sealing member cooperating with the limit seat is provided on the valve plate.

[0005] In some embodiments, the limit seat and the first sealing member are annular structures, the limit seat is circumferentially arranged on the inner surface of the valve seat, and the first sealing member extends radially away from the valve plate, so as to abut against the limit seat circumferentially when the valve plate moves from the valve cover into the valve seat.

[0006] In some embodiments, a clamping member is provided on the limiting seat, and when the valve plate moves from the valve cover to the valve seat, the first sealing member cooperates with the clamping member.

[0007] In some embodiments, the cross-section of the first seal is L-shaped, and includes a first annular structure arranged radially and a second annular structure arranged axially. The inner side of the first annular structure is connected to the outer surface of the valve plate, and the outer side thereof is connected to the second annular structure. The second annular structure and the clip are staggered with each other and there is a gap between the two.

[0008] In some embodiments, the driving portion is disposed at the bottom of the valve seat, a connecting member is disposed between the driving portion and the valve plate, and a stopper is disposed between the connecting member and the driving portion for limiting movement of the connecting member.

[0009] In some embodiments, a bellows is provided between the limiting seat and the connecting member.

[0010] In some embodiments, the connecting member includes a first connecting portion and a second connecting portion connected to each other, the first connecting portion is radially arranged in the valve seat and can slide relative to the inner surface of the valve seat, and is connected to the driving portion; the second connecting portion is arranged in the valve seat along the moving direction of the valve plate, one end of which is connected to the valve plate, and the other end of which is connected to the first connecting portion.

[0011] In some embodiments, a second sealing member is provided on the outer surface of the valve plate, and a contact seal is achieved between the second sealing member and the inner wall of the valve seat.

[0012] Another aspect of the present invention provides a gas distribution device, which includes an air inlet channel, an upper cover plate and a gas distribution plate. The air inlet channel is connected to the upper cover plate and fluidically connected to the gas distribution plate. A gas diffusion chamber is formed on the side of the upper cover plate opposite to the gas distribution plate. The gas distribution plate includes a plurality of spray holes distributed at intervals. A gate valve according to any of the above items is arranged on the air inlet channel.

[0013] Another aspect of the present invention provides a substrate processing device, comprising a reaction chamber and a transmission chamber, wherein a substrate conveying channel is provided between the reaction chamber and the transmission chamber, and the gate valve according to any one of the above items is provided on the substrate conveying channel.

[0014] The embodiment of the present invention can prevent the fluid in the pipeline from flowing into the interior of the valve, such as the driving part, along the channel when the valve plate is opened, thereby avoiding corrosion of components in the driving part, and can prevent the gas environment of the channel from being destroyed and prevent gas leakage, thereby improving the safety and service life of the gate valve and the channel.

[0015] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In the drawings, which are not necessarily drawn to scale, the same reference numerals may describe similar parts in different views. The same reference numerals with letter suffixes or different letter suffixes may represent different instances of similar parts. The drawings generally illustrate various embodiments by way of example and not limitation, and together with the description and claims, are used to illustrate the disclosed embodiments. Where appropriate, the same reference numerals are used throughout the drawings to refer to the same or similar parts. Such embodiments are illustrative and are not intended to be exhaustive or exclusive embodiments of the present apparatus or method. The drawings described herein are used to provide a further understanding of the present disclosure and constitute a part of this application. The illustrative embodiments of the present disclosure and their description are used to explain the present disclosure and do not constitute an improper limitation on the present disclosure. In the drawings:

[0017] Figure 1 This is a structural diagram of a gate valve in a closed state in an embodiment provided by the present utility model;

[0018] Figure 2 This is a structural diagram of a gate valve in an open state in an embodiment provided by the present utility model;

[0019] Figure 3 This is a structural schematic diagram of another embodiment of the present invention in which the gate valve is in a closed state;

[0020] Figure 4 This is a structural schematic diagram of another embodiment of the present invention in which the gate valve is in an open state;

[0021] Figure 5 This is a schematic diagram of a gas distribution device for which the gate valve provided by the present invention is used;

[0022] Figure 6 It is a schematic diagram of a substrate processing device in which the gate valve provided by the present invention is used.

[0023] The above drawings include the following reference numerals:

[0024] 1-valve seat; 2-valve cover; 3-valve plate; 5-limiting seat; 51-clamping part; 6-connecting part; 61-first connecting part; 62-second connecting part; 7-first sealing part; 8-second sealing part; 10-channel; 11-bellows; 12-stopper; 20-fluid channel. DETAILED DESCRIPTION

[0025] The specific embodiments of the present disclosure are described in detail below with reference to the accompanying drawings, but are not intended to limit the present disclosure.

[0026] It should be understood that various modifications may be made to the embodiments disclosed herein. Therefore, the above description should not be considered as limiting, but merely as an example of an embodiment. Other modifications within the scope and spirit of the present disclosure will occur to those skilled in the art.

[0027] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present disclosure and, together with the general description of the present disclosure given above and the detailed description of the embodiments given below, serve to explain the principles of the present disclosure.

[0028] These and other characteristics of the present disclosure will become apparent from the following description of a preferred form of embodiment given as a non-limiting example with reference to the accompanying drawings.

[0029] It should also be understood that although the present disclosure has been described with reference to certain specific examples, those skilled in the art will be able to realize many other equivalent forms of the present disclosure that have the characteristics recited in the claims and are therefore within the scope of protection defined thereby.

[0030] The above and other aspects, features and advantages of the present disclosure will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings.

[0031] Specific embodiments of the present disclosure will be described hereinafter with reference to the accompanying drawings; however, it should be understood that the disclosed embodiments are merely examples of the present disclosure, which may be implemented in a variety of ways. Well-known and / or repetitive functions and structures are not described in detail to avoid obscuring the present disclosure with unnecessary or redundant detail. Therefore, the specific structural and functional details disclosed herein are not intended to be limiting, but rather serve merely as a basis and representative basis for the claims to teach those skilled in the art to variously employ the present disclosure with substantially any suitable detailed structure.

[0032] It should be noted that the terms "first", "second", etc. in the specification and claims of the present disclosure and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present disclosure described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0033] This description may use the phrases "in one embodiment," "in another embodiment," "in a further embodiment," or "in other embodiments," each of which may refer to one or more of the same or different embodiments according to the present disclosure.

[0034] The embodiment of the present disclosure provides a gate valve, such as Figure 1-Figure 4 As shown, the gate valve of this embodiment can be applied to scenarios where corrosive gases are used for a long time, and can be used in channels within a gas distribution device or a substrate processing device, where the gate valve can be used to control the flow of fluid within the channel.

[0035] Specifically, if Figure 5 As shown, for example, when the gate valve is used on a gas distribution device 110, the gas distribution device 110 includes an air inlet channel 111, an upper cover plate 112 and a gas distribution plate 113. The air inlet channel 111 is connected to the upper cover plate 112 and connects the gas to the gas distribution plate 113. A gas diffusion cavity 114 is formed on the side opposite to the upper cover plate 112 and the gas distribution plate 113. The gas distribution plate 113 includes a plurality of spray holes 115 distributed at intervals. The gate valve involved in this embodiment is provided on the air inlet channel 111, and the flow of gas in the air inlet channel 111 is turned on and off by the gate valve; as shown Figure 6 As shown, for example, when the gate valve is used on a substrate processing device 120, the substrate processing device includes a reaction chamber 121 and a transmission chamber 122, and a substrate conveying channel 123 is provided between the reaction chamber 121 and the transmission chamber 122. The gate valve involved in this embodiment is provided on the substrate conveying channel 123.

[0036] In this embodiment, if Figures 1 to 4 As shown, the gate valve is disposed on channel 10. Channel 10 can be the aforementioned air inlet channel 111, the substrate transport channel 123, or other channels. Channel 10 is used to introduce a fluid to allow the fluid to flow within the channel 10. The fluid can be a gas or a liquid, particularly a corrosive fluid such as a chemical or plasma fluid. In some scenarios, a vacuum environment may also be maintained within the channel 10.

[0037] The gate valve of this embodiment includes a valve seat 1, a valve cover 2 and a valve plate 3. The valve seat 1 and the valve cover 2 are respectively arranged at relative positions on both sides of the channel 10. Figure 1At the M position and the N position in the figure, mounting openings are respectively provided at the M position and the N position on the channel 10 to respectively set the valve seat 1 and the valve cover 2. It can be understood that the M position and the N position are located on opposite sides relative to the pipeline; the valve seat 1 and the valve cover 2 are sealed with the channel 10, and the valve plate 3 reciprocates between the valve seat 1 and the valve cover 2 to realize the opening or closing of the gate valve.

[0038] Furthermore, based on the installation positions of the valve seat 1 and the valve cover 2, the movement direction of the valve plate 3 is configured to form a predetermined angle with the direction of fluid flow in the channel 10. Specifically, the movement direction of the valve plate 3 is a reciprocating movement between the valve seat 1 and the valve cover 2. Here, the movement direction of the valve plate 3 forms a predetermined angle with the extension direction of the channel 10 (that is, the direction of fluid flow in the channel 10), so that when the valve plate is open, the fluid can pass between the valve seat 1 and the valve cover 2.

[0039] Preferably, the moving direction of the valve plate 3 here is arranged perpendicular to the extension direction of the channel 10, which is equivalent to a predetermined angle of 90°, ensuring that the valve seat 1 and the valve cover 2 are arranged relative to each other, thereby facilitating the rapid movement of the valve plate 3, thereby occupying less space in the fluid direction, and minimizing the opening and closing time of the gate valve, and hardly restricting the flow of the fluid when the valve plate is fully open; of course, the predetermined angle here can also be, for example, less than 90° and greater than 45°.

[0040] Furthermore, a drive unit is disposed within the valve seat 1, and can particularly be disposed at the bottom of the valve seat 1. The drive unit is connected to the valve plate 3 and drives the valve plate 3 to reciprocate between the valve seat 1 and the valve cover 2 to open or close the gate valve. The drive unit can be, for example, a pneumatic cylinder, a hydraulic cylinder, or a linear motor. In this embodiment, the drive unit is a pneumatic cylinder.

[0041] Specifically, when the gate valve is in a closed state, the valve plate 3 extends out of the end surface of the valve seat 1 under the drive of the driving unit and achieves close contact with the valve cover 2, so that the valve plate 3 can cut off the fluid flow in the channel 10, thereby making the downstream side of the channel 10 in a disconnected state; when the gate valve is in an open state, the valve plate 3 retreats into the valve seat 1 under the drive of the driving unit and is located below the end surface of the valve seat 1, so that the valve plate 3 will not block the fluid flow in the channel 10, thereby making the downstream side of the channel 10 in a fluid connected state.

[0042] Considering that there is a certain distance between the driving unit and the valve plate 3, a connecting member 6 is provided between the driving unit and the valve plate 3. The driving unit drives the valve plate 3 to move back and forth between the valve seat 1 and the valve cover 2 via the connecting member 6. For example, when the driving unit adopts a cylinder structure, the connecting member 6 is driven to move by a piston in the cylinder.

[0043] Furthermore, the connecting member 6 includes a first connecting portion 61 and a second connecting portion 62 connected to each other, wherein the first connecting portion 61 is radially arranged in the valve seat 1 and can slide relative to the inner surface of the valve seat 1, and is connected to the driving portion; the second connecting portion 62 is arranged in the valve seat 1 along the moving direction of the valve plate 3, one end of which is connected to the valve plate 3, and the other end of which is connected to, for example, the center position of the first connecting portion 61.

[0044] Furthermore, due to factors such as processing accuracy, there may still be a gap between the valve plate 3 and the inner wall of the valve seat 1. In this way, when the valve plate 3 is retracted into the valve seat 1, a fluid channel 20 is formed between the valve plate 3 and the inner wall of the valve seat 1. The fluid in the channel 10 can enter the valve seat 1 through the fluid channel 20 and flow toward the driving part. When the fluid is, for example, a corrosive fluid, it may contact the driving part, thereby damaging the driving part. The first connecting part 61 of the connecting part 6 can block the fluid from penetrating into the valve seat 1. In order to avoid damage to the connecting part 6, contact between the fluid and the connecting part 6 is also undesirable.

[0045] Furthermore, a limit seat 5 is provided in the valve seat 1, and a first sealing member 7 cooperating with the limit seat 5 is provided on the valve plate 3. The first sealing member 7 can especially be provided on the outer surface of the bottom of the valve plate 3. The setting position of the limit seat 5 here is determined according to the size of the valve plate 3. When the valve plate 3 is retracted to the inside of the valve seat 1, the limit seat 5 is provided at a position matching the bottom of the valve plate 3; the driving part is provided between the limit seat 5 and the bottom of the valve seat 1, so that when the valve plate 3 is retracted to the valve seat 1, it can cooperate with the first sealing member 7 through the limit seat 5 to prevent the fluid from penetrating and contacting the driving part and the connecting part.

[0046] Preferably, the limit seat 5 is an annular structure, which is circumferentially arranged on the inner surface of the valve seat 1. The radial size of the limit seat 5 is determined according to the size of the valve plate 3 and the size of the first sealing member 7 to ensure that the upper end face of the limit seat 5 and the lower end face of the first sealing member 7 can achieve contact sealing.

[0047] Furthermore, in one embodiment, the first sealing member 7 here is an annular structure, which is used to abut against the limit seat 5 along the circumferential direction when the valve plate 3 moves from the valve cover 2 to the valve seat 1. By arranging the first sealing member 7 on the outer surface of the valve plate 3, a contact seal is achieved between the first sealing member 7 and the limit seat 5.

[0048] The radial dimension of the first sealing member 7 protruding from the outer surface of the valve plate 3 is determined based on the radial dimension of the limit seat 5, ensuring that when the valve plate 3 is retracted into the valve seat 1, a contact seal is achieved between the first sealing member 7 and the limit seat 5. In this way, not only can the position of the valve plate 3 be limited by the limit seat 5 when the valve plate 3 is accommodated in the valve seat 1 when the gate valve is in a closed state to have a limiting effect, but the contact connection between the limit seat 5 and the first sealing member 7 can also prevent the fluid in the fluid channel 20 from continuing to flow toward the driving part, thereby preventing the fluid from contacting the driving part and damaging the driving part.

[0049] Furthermore, a bellows 11 is provided between the stop seat 5 and the connector 6. One end of the bellows 11 is connected to the end of the stop seat 5, and the other end is connected to the upper surface of the first connecting portion 61 of the connector 6. The bellows 11 ensures that the channel 10 is not connected to the atmosphere during the opening and closing of the gate valve, thereby providing good isolation between the fluid medium in the channel and the atmosphere. The bellows 11 also has an elastic function to ensure the reciprocating movement of the connector 6.

[0050] It is taken into consideration that when a large amount of corrosive fluid enters the fluid channel 20, the bellows 11 may rupture in the case of severe corrosion; in addition, when the channel 10 is in a vacuum environment to transmit gas, the bellows 11 needs to maintain a vacuum environment; when the bellows 11 is damaged, it will cause the vacuum and the atmosphere to be connected, so that the vacuum environment in the channel 10 is destroyed and gas leakage may also occur.

[0051] To this end, considering that there is still a possibility of leakage between the limit seat 5 and the first seal 7, the seal and the bellows arranged on the outer surface of the valve plate 3 are coordinated so that when the valve plate 3 is retracted into the valve seat 1, the corrosive fluid will not be damaged by the drive part and other components such as the connector and the bellows.

[0052] In another embodiment, a clip 51 is provided on the limit seat 5, and when the valve plate 3 moves from the valve cover 2 to the valve seat 1, the first sealing member 7 cooperates with the clip 51. Specifically, the first sealing member 7 achieves mutual cooperation and sealing with the clip 51 when the valve plate 3 retreats into the valve seat 1.

[0053] In this embodiment, the cross-section of the first seal 7 is L-shaped. Specifically, the first seal includes a first annular structure arranged radially and a second annular structure arranged axially. The inner side of the first annular structure is connected to the outer surface of the valve plate 3, and the outer side thereof is connected to the second annular structure. The clamping member 51 here can be, for example, a vertical plate arranged in an annular shape along the limit seat 5, so that the second annular structure of the first seal 7 and the clamping member 51 are staggered and matched, and there is a gap between the first seal 7 and the clamping member 51. For example, there is a certain gap between the end of the second annular structure and the limit seat 5 and between the second annular structure and the vertical plate, so that a microchannel can be formed to achieve soft sealing. The dimensions of the first annular structure and the second annular structure in the first seal 7 here are determined based on the radial dimensions of the limit seat 5 and the dimensions of the clamping member 51.

[0054] In this way, it is ensured that when the valve plate 3 retreats into the valve seat 1, the first sealing member 7 and the clamping member 51 on the limit seat 5 are clamped with each other. In this way, not only can the position of the valve plate 3 be limited by the limit seat 5 when the valve plate 3 is accommodated in the valve seat 1 when the gate valve is in the closed state to have a limiting effect, but the soft seal between the limit seat 5 and the first sealing member 7 can also prevent the fluid in the fluid channel 20 from continuing to flow downward, thereby avoiding damage to other components by the fluid.

[0055] In addition, a second sealing member 8 is provided on the outer surface of the valve plate 3. The second sealing member 8 is used to achieve a seal with the valve seat 1 and the inner wall of the valve cover 2. This seal prevents the fluid in the passage 10 from entering the valve seat 1 through the gap between the valve plate 3 and the valve seat 1. The second sealing member 8 is, for example, a circular sealing ring. For example, a sealing groove may be provided on the outer surface of the valve plate 3. The second sealing member 8 is disposed in the sealing groove. The second sealing member 8 ensures that when the valve plate 3 extends into the valve cover 2, the end of the valve plate 3 is in contact and sealed with the inner wall of the valve seat 1 and the valve cover 2.

[0056] In a preferred embodiment, the second sealing member 8 is primarily disposed on the side of the valve plate 3 facing the fluid, so that when the valve plate is closed, a seal is formed between the passage 10 and the valve plate 3, thereby preventing the fluid in the passage 10 from leaking into the gate valve. It will be appreciated that in other preferred embodiments, the second sealing member 8 may be disposed on the other side of the valve plate 3.

[0057] According to the embodiment of the present utility model, Figure 3 The second sealing member 8 shown is preferably a sealing ring, and the sealing ring is arranged along the diameter of the channel 10. It should be understood that the drawings of the present invention are all schematic. The outer diameter of the sealing ring actually arranged is larger than the outer diameter of the channel 10, so that the sealing ring is in close contact with the valve body 1 and the valve cover 2 to achieve contact sealing. More preferably, the inner diameter of the sealing ring is larger than the outer diameter of the channel 10. The sealing ring can be arranged in the groove of the valve plate 3, or it can be arranged in the groove of the inner wall of the valve body 1 and the valve cover 2. Specifically, when the valve plate 3 moves back and forth, the sealing ring is not in contact with the inner wall of the valve body 1 and the valve cover 2. When the valve plate 3 moves into the valve cover 2, that is, when the gate valve is in a closed state, the valve plate 3 will be driven by the drive unit and further move to the left, so that the sealing ring is in close contact with the inner wall of the valve body 1 and the valve cover 2 to achieve sealing.

[0058] In addition, a third seal may be provided between the first seal 7 and the limit seat. The third seal may be, for example, a sealing ring. Axial contact sealing is achieved through the third seal, thereby further improving the sealing between the valve plate 3 and the valve seat 1.

[0059] Furthermore, a stopper 12 is provided in the valve seat 1 , and the stopper 12 is located between the driving portion and the connecting member 6 , and is used to limit the movement of the connecting member 6 toward the driving portion, thereby ensuring the safe use of the driving portion.

[0060] The embodiment of the utility model can prevent the fluid in the pipeline from flowing into the driving part of the valve along the channel when the valve plate is opened, thereby avoiding corrosion of components in the driving part, and can prevent the gas environment of the channel from being destroyed and prevent gas leakage, thereby improving the safety and service life of the gate valve and the channel.

[0061] The second embodiment of the present invention provides a gas distribution device, which includes an air inlet channel, an upper cover plate and a gas distribution plate. The air inlet channel is connected to the upper cover plate and fluidically connected to the gas distribution plate. A gas diffusion chamber is formed on the side of the upper cover plate opposite to the gas distribution plate. The gas distribution plate includes a plurality of spray holes distributed at intervals. The gate valve described in any one of the implementations of the above-mentioned first embodiment is arranged on the air inlet channel.

[0062] A third embodiment of the present invention provides a substrate processing device, comprising a reaction chamber and a transmission chamber, wherein a substrate conveying channel is provided between the reaction chamber and the transmission chamber, and the gate valve described in any one of the implementations of the first embodiment is provided on the substrate conveying channel.

[0063] The embodiments of the present invention can prevent the fluid in the pipeline from flowing into the valve drive unit along the channel when the valve plate is opened, thereby avoiding corrosion of components in the drive unit. It can also prevent the gas environment in the channel from being damaged and prevent gas leakage, thereby improving the safety and service life of the gate valve and the channel. In the above embodiments of the present disclosure, the description of each embodiment has its own emphasis. For parts not detailed in one embodiment, please refer to the relevant description of other embodiments.

[0064] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways, rotated 90 degrees or in other orientations, and the spatially relative descriptions used herein are interpreted accordingly.

[0065] In addition to the above, it should be noted that references to "one embodiment," "another embodiment," "an embodiment," and the like in this specification refer to specific features, structures, or characteristics described in conjunction with that embodiment as included in at least one embodiment generally described in this application. The appearance of the same expression in multiple places in the specification does not necessarily refer to the same embodiment. Furthermore, when a specific feature, structure, or characteristic is described in conjunction with any embodiment, it is intended that such feature, structure, or characteristic be implemented in conjunction with other embodiments and fall within the scope of this disclosure.

[0066] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0067] The foregoing description is merely a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present disclosure shall be included within the scope of protection of the present disclosure.

Claims

1. A gate valve, characterized in that: The gate valve comprises a valve seat (1), a valve cover (2) and a valve plate (3), wherein the valve seat (1) and the valve cover (2) are respectively arranged at relative positions on both sides of a channel (10), a driving portion connected to the valve plate (3) is arranged in the valve seat (1), and the driving portion is used to drive the valve plate (3) to move between the valve seat (1) and the valve cover (2) to realize the opening or closing of the gate valve, and the moving direction of the valve plate (3) is at a predetermined angle to the flow direction of the fluid in the channel (10), a limit seat (5) is arranged in the valve seat (1), and a first sealing member (7) cooperating with the limit seat (5) is arranged on the valve plate (3).

2. The gate valve according to claim 1, characterized in that The limit seat (5) and the first sealing member (7) are annular structures. The limit seat (5) is circumferentially arranged on the inner surface of the valve seat (1) so as to abut against the limit seat (5) circumferentially when the valve plate (3) moves from the valve cover (2) into the valve seat (1).

3. The gate valve according to claim 2, characterized in that A clamping member (51) is provided on the limit seat (5), and when the valve plate (3) moves from the valve cover (2) to the inside of the valve seat (1), the first sealing member (7) cooperates with the clamping member (51).

4. The gate valve according to claim 3, characterized in that The cross section of the first sealing member (7) is L-shaped, and comprises a first annular structure arranged radially and a second annular structure arranged axially, the inner side of the first annular structure being connected to the outer surface of the valve plate (3), and the outer side thereof being connected to the second annular structure, and the second annular structure and the clamping member (51) being staggered with each other and having a gap therebetween.

5. The gate valve according to claim 1, characterized in that The driving part is arranged at the bottom of the valve seat (1), a connecting member (6) is arranged between the driving part and the valve plate (3), and a stopper (12) is arranged between the connecting member (6) and the driving part for limiting the movement of the connecting member (6).

6. The gate valve according to claim 5, characterized in that A bellows (11) is provided between the limiting seat (5) and the connecting member (6).

7. The gate valve according to claim 5, characterized in that The connecting member (6) includes a first connecting portion (61) and a second connecting portion (62) connected to each other, wherein the first connecting portion (61) is radially arranged in the valve seat (1) and can slide relative to the inner surface of the valve seat (1), and is connected to the driving portion; the second connecting portion (62) is arranged in the valve seat (1) along the moving direction of the valve plate (3), one end of which is connected to the valve plate (3), and the other end of which is connected to the first connecting portion (61).

8. The gate valve according to claim 1, characterized in that A second sealing member (8) is provided on the outer surface of the valve plate (3), and contact sealing is achieved between the second sealing member (8) and the inner wall of the valve seat (1).

9. A gas distribution device, characterized in that: The device includes an air inlet channel, an upper cover plate and a gas distribution plate. The air inlet channel is connected to the upper cover plate and fluidically connected to the gas distribution plate. A gas diffusion chamber is formed on the side of the upper cover plate opposite to the gas distribution plate. The gas distribution plate includes a plurality of spray holes distributed at intervals. A gate valve according to any one of claims 1-8 is provided on the air inlet channel.

10. A substrate processing device, characterized in that: The substrate processing device includes a reaction chamber and a transmission chamber. A substrate transport channel is provided between the reaction chamber and the transmission chamber. The gate valve according to any one of claims 1 to 8 is provided on the substrate transport channel.

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