Gas mass flow controller

Abstract

The utility model discloses a gas mass flow controller, which comprises a main pipe for gas to pass through; the auxiliary pipe is fixedly arranged on the main pipe, an air inlet pipe and an air outlet pipe are arranged at the two ends of the auxiliary pipe, and the air inlet pipe and the air outlet pipe are both communicated with the main pipe; the debugging assembly is arranged on the auxiliary pipe and used for heating gas in the auxiliary pipe; the cooling device is fixedly arranged on the auxiliary pipe and is used for cooling gas in the auxiliary pipe; in the working state, gas flows in the main pipe, enters the auxiliary pipe after passing through the gas inlet pipe and is heated at the debugging assembly, and the heated gas enters the main pipe through the exhaust pipe after being cooled by the cooling device. According to the utility model, the heated gas can be cooled, and the cooled gas enters the main pipe through the exhaust pipe, so that the temperature gradient of the gas in the auxiliary pipe and the gas in the main pipe is reduced, and the thermosyphon effect caused by temperature change is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a gas mass flow controller. Background Art

[0002] MFC is a gas mass flow controller that automatically controls the gas flow by measuring the gas flow and sets the flow according to user needs.

[0003] In the prior art, the commonly used MFC is of the temperature type. Compared with the pressure type, it has the significant advantage of measuring gas flow without contacting the gas. Most of the gas flows through the main pipe, and only a small part passes through the secondary pipe for flow monitoring. The MFC sensor tube is divided into the main pipe and the secondary pipe. The secondary pipe has the advantages of fast and uniform temperature conduction, thus accurate and quick response. However, due to its small diameter, it is also prone to clogging; it is also easily affected by thermal siphoning, and the gas is prone to backflow, which interferes with the gas flow detection results.

[0004] Therefore, it is necessary to provide a new gas mass flow controller to solve the above problems existing in the prior art. Utility Model Content

[0005] The purpose of the utility model is to provide a gas mass flow controller, which can improve the problem that the pipeline is easily blocked and reduce the possibility of gas in the pipeline being easily affected by thermal siphoning and causing backflow.

[0006] To achieve the above purpose, the technical solution of the utility model is as follows:

[0007] A gas mass flow controller, comprising:

[0008] Main pipe, for passing gas;

[0009] The auxiliary pipe is fixedly arranged on the main pipe, and the two ends of the auxiliary pipe have an intake pipe and an exhaust pipe, and the intake pipe and the exhaust pipe are both connected to the main pipe.

[0010] a debugging component, disposed in the auxiliary pipe, for heating the gas in the auxiliary pipe;

[0011] a cooling device, fixedly arranged on the auxiliary pipe, for cooling the gas in the auxiliary pipe;

[0012] In the working state, the gas flows in the main pipe, enters the auxiliary pipe after passing through the intake pipe, is heated at the debugging component, and the heated gas is cooled by the cooling device before entering the main pipe through the exhaust pipe.

[0013] By adopting the above technical solution, the debugging component heats the gas in the auxiliary pipe. After the heating is completed, the gas passes through the cooling device, which cools the heated gas. The cooled gas enters the main pipe through the exhaust pipe, thereby reducing the temperature gradient between the gas in the auxiliary pipe and the gas in the main pipe, which can effectively reduce the thermal siphon effect caused by temperature changes, thereby improving the problem of gas reflux.

[0014] Optionally, the cooling device includes multiple coolers and a first sensor, and the multiple coolers and the first sensors are fixedly arranged on the side wall of the secondary pipe in sequence along the direction from the intake pipe to the exhaust pipe. The cooler is used to cool the gas in the secondary pipe, and the first sensor is used to monitor the temperature of the gas after passing through the cooler.

[0015] By adopting the above technical solution, the cooling device includes multiple coolers and a first sensor. Multiple coolers are provided, and the multiple coolers cool the gas in the auxiliary pipe in turn, so that the temperature of the gas in the auxiliary pipe is gradually reduced, effectively reducing the thermal siphon effect caused by drastic temperature changes, thereby improving the problem of gas reflux. At the same time, the first sensor detects the temperature of the cooled gas; if the gas temperature is the same as the temperature when entering the intake pipe, the cooling device maintains the temperature unchanged; if it is different, the cooling device adjusts the temperature.

[0016] Optionally, a one-way valve is provided in the secondary pipe, and the one-way valve is provided between the first sensor and the exhaust pipe;

[0017] In a working state, when the gas in the auxiliary pipe flows toward the exhaust pipe, the one-way valve is opened; when the gas in the auxiliary pipe flows toward the intake pipe, the one-way valve is closed.

[0018] By adopting the above technical solution, the setting of the one-way valve enables the gas in the auxiliary pipe to flow in one direction in the auxiliary pipe, that is, to flow from the intake pipe to the exhaust pipe. When the gas moves in the direction, the one-way valve is closed, preventing the gas from flowing, further reducing the possibility of gas back-absorption.

[0019] Optionally, the one-way valve includes:

[0020] A valve port is fixedly arranged on the inner wall of the auxiliary pipe, and a flow hole is opened on the valve port;

[0021] a blocking member movably disposed inside the auxiliary pipe and used to close the flow hole;

[0022] an elastic member, which is flexibly arranged inside the auxiliary pipe and has one end connected to the blocking member;

[0023] In the working state, when the gas in the auxiliary pipe flows toward the exhaust pipe, the blocking member is pushed away from the valve port, and the gas flows to the exhaust pipe after passing through the flow hole; when the gas in the auxiliary pipe flows toward the intake pipe, the blocking member closes the flow hole under the action of the elastic member.

[0024] By adopting the above technical solution, when the gas in the auxiliary pipe flows from the intake pipe to the exhaust pipe, the blocking member is pushed away from the valve port and the elastic member is compressed. At this time, the gas can flow to the exhaust pipe after passing through the flow hole; when the gas in the auxiliary pipe flows from the exhaust pipe to the intake pipe, the blocking member closes the flow hole under the action of the elastic member, and the gas cannot flow, thereby further reducing the possibility of gas back-absorption.

[0025] Optionally, there is a certain angle between the exhaust pipe and the auxiliary pipe, one end of the elastic member is connected to the inner wall of the exhaust pipe, and the other end is connected to the blocking member.

[0026] By adopting the above technical solution, a certain angle is formed between the exhaust pipe and the auxiliary pipe, and one end of the elastic member is connected to the inner wall of the exhaust pipe, and the other end is connected to the blocking member, which facilitates the movement of the elastic member and thus facilitates the elastic member to push the blocking member to move.

[0027] Optionally, a diverter is fixedly provided inside the main pipe, the diverter is provided between the intake pipe and the exhaust pipe, a diverter hole is provided on the diverter, and the axial direction of the diverter hole is parallel to the axial direction of the main pipe.

[0028] By adopting the above technical solution, when the gas in the main pipe flows to the diverter, part of it passes through the diverter hole and continues to flow in the main pipe, while the other part enters the intake pipe and then enters the auxiliary pipe. The diverter facilitates the gas in the main pipe to enter the interior of the intake pipe.

[0029] Optionally, a gas filtering device is further included, and the gas filtering device is arranged on the main pipe, and the gas enters the air inlet pipe after passing through the gas filtering device.

[0030] By adopting the above technical solution, the gas enters the main pipe and the air inlet pipe after passing through the gas filtering device, which can improve the problem of dust entering the main pipe and the air inlet pipe, thereby causing detection errors.

[0031] Optionally, the gas filtering device includes a filter screen and an adsorption material; the filter screen and the adsorption material are both detachable and arranged on the inner wall of the main pipe.

[0032] By adopting the above technical solution, the filter and the adsorption material jointly filter the gas. The gas first passes through the filter and then passes through the adsorption material, which can maximize the filtration of dust and other impurities in the gas.

[0033] Optionally, the gas filtering device further comprises a filter cartridge, which is detachably disposed in the main pipe;

[0034] The filter screen is fixedly arranged at both ends of the filter cartridge, and the adsorption material is arranged inside the filter cartridge.

[0035] By adopting the above technical solution, the filter cartridge can be detachably arranged. When different gases pass through, the filter cartridge can be removed and replaced with different adsorption materials to adapt to different gases and improve the adsorption capacity of impurities such as dust in different gases.

[0036] Optionally, the debugging component includes:

[0037] a heater, fixedly arranged on the side wall of the auxiliary pipe;

[0038] A second sensor includes a first detection end and a second detection end, wherein the first detection end and the second detection end are both fixedly disposed on the side wall of the auxiliary pipe and distributed at both ends of the heater;

[0039] In a working state, the second sensor detects the temperature of the gas before passing through the heater and the temperature of the gas after passing through the heater to calculate the gas flow rate.

[0040] By adopting the above technical solution, the second sensor detects the temperature of the gas before passing through the heater and the temperature of the gas after passing through the heater to calculate the gas flow rate, and the detection process is simple.

[0041] The beneficial effects of the gas mass flow controller provided by the utility model include at least:

[0042] 1. A cooling device is provided to cool the heated gas. The cooled gas enters the main pipe through the exhaust pipe, thereby reducing the temperature gradient between the gas in the auxiliary pipe and the gas in the main pipe, effectively reducing the thermal siphon effect caused by temperature changes.

[0043] 2. Multiple coolers are installed in the cold zone device to gradually cool the gas in the auxiliary pipe to reduce the thermal siphon effect caused by drastic temperature changes;

[0044] 3. A one-way valve is installed in the auxiliary pipe to further prevent gas backflow;

[0045] 4. A gas filter device is provided on the main pipe, and the gas enters the intake pipe after passing through the gas filter device, thereby improving the problem of dust entering the main pipe and the intake pipe, which may cause errors in detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1 A half-section diagram of the main structure of a gas mass flow controller according to an embodiment of the present utility model;

[0047] Figure 2 for Figure 1 Enlarged view of part A;

[0048] Figure 3 for Figure 1 Enlarged view of part B.

[0049] Reference numerals:

[0050] 100, main pipe; 200, auxiliary pipe; 210, intake pipe; 220, exhaust pipe; 300, debugging assembly; 310, heater; 320, second sensor; 400, cooling device; 410, cooler; 420, first sensor; 500, one-way valve; 510, valve port; 520, blocking member; 530, elastic member; 600, diverter; 610, diverter hole; 700, gas filter device; 710, filter screen; 720, adsorption material; 730, filter cartridge. DETAILED DESCRIPTION

[0051] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the present invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0052] The specific implementation of the present invention will be further described in detail below with reference to the accompanying drawings.

[0053] Reference Figure 1 、 Figure 2 and Figure 3The embodiment of the present invention provides a gas mass flow controller, wherein the gas mass flow controller includes a main pipe 100, the main pipe 100 is used to pass gas, one end of the main pipe 100 is connected to the gas source, and the other end is connected to the pipeline, and the gas from the gas source enters the pipeline after passing through the main pipe 100; a secondary pipe 200 is also fixedly provided on the main pipe 100, wherein both ends of the secondary pipe 200 are fixedly provided with an air inlet pipe 210 and an exhaust pipe 220, and the secondary pipe 200 is connected to the air inlet pipe 210 and the exhaust pipe 220 at the same time. The intake pipe 210 and the exhaust pipe 220 are both fixedly arranged on the main pipe 100, and the fixing method can be bolt fixing, welding or integral molding, etc. In this embodiment, the intake pipe 210, the exhaust pipe 220 and the main pipe 100 are fixedly connected by integral molding. Part of the gas in the main pipe 100 flows into the intake pipe 210, and then enters the auxiliary pipe 200 after passing through the intake pipe 210. The gas in the auxiliary pipe 200 re-enters the main pipe 100 after passing through the exhaust pipe 220, so that the detected gas can re-participate in the reaction.

[0054] Reference Figure 1 、 Figure 2 and Figure 3 The auxiliary pipe 200 is provided with a debugging component 300, which is used to heat the gas in the auxiliary pipe 200 and detect it. The debugging component includes a heater 310 and a second sensor 320. The heater 310 is fixedly arranged on the side wall of the auxiliary pipe 200. In this embodiment, the heater 310 surrounds the side wall of the auxiliary pipe 200 to facilitate heating the auxiliary pipe 200, thereby facilitating heating of the gas in the auxiliary pipe 200. The fixing method can be bonding, clamping or bolting. In this embodiment, the bolting connection method is preferably used; the second sensor 320 includes a first detection end and a second detection end, wherein the first detection end and the second detection end are both fixedly arranged on the side wall of the auxiliary pipe 200. The fixing method can be bonding, clamping or bolting. In this embodiment, the bolting connection method is preferably used. At the same time, the first detection end and the second detection end are distributed at both ends of the heater 310, which can detect the temperature of the gas in the auxiliary pipe 200 before and after being heated by the heater 310, so as to facilitate calculation of the gas flow.

[0055] Reference Figure 1 、 Figure 2 and Figure 3The gas mass flow controller also includes a cooling device 400, which is fixedly arranged on the auxiliary pipe 200 and is used to cool the gas in the auxiliary pipe 200. In the working state, the gas flows in the main pipe 100 and enters the auxiliary pipe 200 through the intake pipe 210. It is first heated at the debugging component 300. The heated gas continues to flow and flows to the cooling device 400. The cooling device 400 cools the heated gas in the auxiliary pipe 200. After the temperature is reduced, it enters the main pipe 100 through the exhaust pipe 220; the cooling device 400 includes a plurality of coolers 410 and a first sensor 420. In this embodiment, three coolers 410 are selected, wherein the plurality of coolers 410 and the first sensor 420 are fixedly arranged in sequence along the direction from the intake pipe 210 to the exhaust pipe 220. The side wall of the secondary pipe 200 allows the gas in the secondary pipe 200 to first pass through multiple coolers 410 and then pass through the first sensor 420. In the working state, the multiple coolers 410 cool the gas in the secondary pipe 200. The first sensor 420 is used to monitor the temperature of the gas after passing through the cooler 410. If the gas temperature at this time is the same as the gas temperature when entering the secondary pipe 200, the cooling device 400 maintains the cooling temperature unchanged; if the gas temperature at this time is different from the gas temperature when entering the secondary pipe 200, the cooling device 400 adjusts the cooling temperature of the multiple coolers 410, such as adjusting the flow rate of condensed water, and gradually reducing the temperature gradient between the temperature of the gas in the secondary pipe 200 and the temperature of the gas in the main pipe 100, thereby gradually adjusting the temperature of the gas in the secondary pipe 200 and reducing the thermal siphon effect caused by drastic temperature changes.

[0056] Reference Figure 1 、 Figure 2 and Figure 3A one-way valve 500 is provided in the auxiliary pipe 200. The one-way valve 500 is provided between the first sensor 420 and the exhaust pipe 220. In the working state, when the gas in the auxiliary pipe 200 flows toward the exhaust pipe 220, the one-way valve 500 is in an open state. At this time, the flow direction of the gas is that part of the gas flows in the main pipe 100, and part of the gas flows through the intake pipe 210, the auxiliary pipe 200 and the exhaust pipe 220 and then re-enters the main pipe 100; the gas in the auxiliary pipe 200 flows toward the intake pipe When the air flows into the auxiliary pipe 210, the one-way valve 500 is closed, so that the gas cannot flow from the exhaust pipe 220 to the intake pipe 210; wherein the one-way valve 500 includes a valve port 510, a blocking member 520 and an elastic member 530; the valve port 510 is fixedly arranged on the inner wall of the auxiliary pipe 200, and its fixing method can be bonding or clamping, etc. In this embodiment, the clamping connection method of the two is preferably adopted, and at the same time, a flow hole is opened on the valve port 510, and the axis of the flow hole is parallel to the axis of the auxiliary pipe 200, so that the gas can pass through Through the valve port 510, the blocking member 520 is slidably arranged inside the auxiliary pipe 200 to close the flow hole. The blocking member 520 can be spherical, cylindrical or other shapes that can block the flow hole. In this embodiment, the blocking member 520 is spherical and needs to have high temperature resistance and corrosion resistance. The elastic member 530 is retractably arranged inside the auxiliary pipe 200. In this embodiment, the elastic member 530 is a spring, wherein one end of the elastic member 530 is connected to the blocking member 520. Connection, in the working state, when the gas in the auxiliary pipe 200 flows toward the exhaust pipe 220, the blocking member 520 is pushed away from the valve port 510, and the elastic member 530 is compressed. At this time, the gas can pass through the flow hole and enter the exhaust pipe 220 after passing through the flow hole; when the gas in the auxiliary pipe 200 flows toward the intake pipe 210, under the action of the elastic member 530, the blocking member 520 contacts the valve port 510, closes the flow hole, and the gas cannot flow toward the intake pipe 210, effectively preventing back suction.

[0057] Reference Figure 1 、 Figure 2 and Figure 3 There is a certain angle between the exhaust pipe 220 and the auxiliary pipe 200, and the angle range can be between 0°-180°. In this embodiment, the angle between the exhaust pipe 220 and the auxiliary pipe 200 is 90°; one end of the elastic member 530 is fixedly connected to the inner wall of the exhaust pipe 220, and the other end is fixedly connected to the blocking member 520, so as to facilitate the movement of the elastic member 530; at the same time, there is a certain angle between the intake pipe 210 and the auxiliary pipe 200, and the angle range can be between 0°-180°. In this embodiment, the angle between the intake pipe 210 and the auxiliary pipe 200 is 90°; that is, the exhaust pipe 220 is arranged in parallel with the intake pipe 210. In addition, the auxiliary pipe 200 and the main pipe 100 are also arranged in parallel to facilitate the gas flow process.

[0058] Reference Figure 1 、 Figure 2 and Figure 3 A diverter 600 is provided inside the main pipe 100, and the diverter 600 is positioned between the intake pipe 210 and the exhaust pipe 220. Specifically in this embodiment, the diverter 600 is provided on the side close to the intake pipe 210, so that the gas in the main pipe 100 can quickly enter the intake pipe 210 after contacting the diverter 600, and no turbulence occurs; at the same time, a diverter hole 610 is also provided on the diverter 600, and a plurality of diverter holes 610 are provided. The axial directions of the plurality of diverter holes 610 are parallel to the axial direction of the main pipe 100, that is, after the gas in the main pipe 100 contacts the diverter 600, a part passes through the diverter hole 610 and continues to flow in the main pipe 100, and the other part passes through the intake pipe 210 and enters the interior of the sub-pipe 200, which facilitates uniform distribution of the gas.

[0059] Reference Figure 1 、 Figure 2 and Figure 3 The gas mass flow controller also includes a gas filter device 700, wherein the gas filter device 700 is arranged on the main pipe 100. In the working state, the gas enters the main pipe 100 after passing through the gas filter device 700. During the working process, after the gas passes through the filter device, it is diverted at the junction of the main pipe 100 and the auxiliary pipe 200, that is, at the air inlet pipe 210. The gas filter device 700 can improve the problem of dust entering and causing blockage in the pipeline; wherein the gas filter device 700 includes a filter screen 710 and an adsorption material 720. The filter screen 710 and the adsorption material 720 are both detachable and arranged on the inner wall of the main pipe 100. In actual use, the adsorption can be adjusted according to the different types of gases introduced. The attached material 720 is replaced, and the adsorption material 720 can be selected from activated carbon, alumina, silica gel or other materials with adsorption capacity according to different gas types; the gas filtering device 700 also includes a filter cartridge 730, and the filter cartridge 730 is detachably arranged in the main pipe 100, wherein the filter screen 710 is fixedly arranged at both ends of the filter cartridge 730, and its fixing method can be selected from bonding, clamping or bolting, etc. In this embodiment, the filter screen 710 is preferably fixedly arranged at both ends of the filter cartridge 730 by bonding, and the adsorption material 720 is arranged inside the filter cartridge 730. During use, the adsorption material 720 is replaced by disassembling the filter cartridge 730, and the replacement process is relatively simple.

[0060] The implementation principle of a gas mass flow controller in an embodiment of the present application is that the gas first passes through the gas filter device 700 and is diverted at the junction of the main pipe 100 and the auxiliary pipe 200, that is, at the intake pipe 210. The second sensor 320 detects the temperature of the gas before and after passing through the heater 310 and calculates the gas flow rate; then the gas passes through multiple coolers 410 in the auxiliary pipe 200 to cool the gas, and the cooling extent can be determined by the temperature detected by the first sensor 420; if the gas temperature is the same as the temperature when entering the auxiliary pipe 200, the cooling device 400 maintains the temperature unchanged; if different, the cooling device 400 adjusts the temperature; the cooled gas passes through the one-way valve 500 and is finally mixed with the gas in the main pipe 100, which can effectively reduce the thermal siphon effect and prevent the gas from flowing back and affecting the gas flow monitoring.

[0061] While the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations may be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the claims. Furthermore, the present invention described herein may have other embodiments and may be implemented or carried out in a variety of ways.

Claims

1. A gas mass flow controller, characterized in that: include: a main pipe (100) for passing gas; A secondary pipe (200) is fixedly arranged on the primary pipe (100), and both ends of the secondary pipe (200) are provided with an air intake pipe (210) and an exhaust pipe (220), and both the air intake pipe (210) and the exhaust pipe (220) are connected to the primary pipe (100); a debugging component (300), disposed in the auxiliary pipe (200), and configured to heat the gas in the auxiliary pipe (200); a cooling device (400) fixedly disposed on the auxiliary pipe (200) and used for cooling the gas in the auxiliary pipe (200); In a working state, the gas flows in the main pipe (100), passes through the intake pipe (210), and then enters the auxiliary pipe (200), where it is heated at the debugging assembly (300). The heated gas is cooled by the cooling device (400) and then enters the main pipe (100) through the exhaust pipe (220).

2. The gas mass flow controller according to claim 1, characterized in that The cooling device (400) comprises a plurality of coolers (410) and a first sensor (420). The plurality of coolers (410) and the first sensor (420) are fixedly arranged on the side wall of the auxiliary pipe (200) in sequence along the direction from the intake pipe (210) to the exhaust pipe (220). The cooler (410) is used to cool the gas in the auxiliary pipe (200), and the first sensor (420) is used to monitor the temperature of the gas after passing through the cooler (410).

3. The gas mass flow controller according to claim 2, characterized in that A one-way valve (500) is provided in the auxiliary pipe (200), and the one-way valve (500) is provided between the first sensor (420) and the exhaust pipe (220); In a working state, when the gas in the auxiliary pipe (200) flows toward the exhaust pipe (220), the one-way valve (500) is opened; when the gas in the auxiliary pipe (200) flows toward the intake pipe (210), the one-way valve (500) is closed.

4. The gas mass flow controller according to claim 3, characterized in that The one-way valve (500) comprises: A valve port (510) is fixedly arranged on the inner wall of the auxiliary pipe (200), and a flow hole is opened on the valve port (510); a blocking member (520) movably disposed inside the auxiliary pipe (200) and used to close the flow hole; an elastic member (530) which is flexibly disposed inside the auxiliary tube (200) and has one end connected to the blocking member (520); In the working state, when the gas in the auxiliary pipe (200) flows toward the exhaust pipe (220), the blocking member (520) is pushed away from the valve port (510), and the gas flows to the exhaust pipe (220) after passing through the flow hole; when the gas in the auxiliary pipe (200) flows toward the intake pipe (210), the blocking member (520) closes the flow hole under the action of the elastic member (530).

5. The gas mass flow controller according to claim 4, characterized in that There is a certain angle between the exhaust pipe (220) and the auxiliary pipe (200); one end of the elastic member (530) is connected to the inner wall of the exhaust pipe (220), and the other end is connected to the blocking member (520).

6. The gas mass flow controller according to claim 1, characterized in that A diverter (600) is fixedly provided inside the main pipe (100), and the diverter (600) is provided between the intake pipe (210) and the exhaust pipe (220). A diverter hole (610) is provided on the diverter hole (610), and the axial direction of the diverter hole (610) is parallel to the axial direction of the main pipe (100).

7. The gas mass flow controller according to claim 1, characterized in that It also includes a gas filtering device (700), which is arranged on the main pipe (100), and the gas enters the air inlet pipe (210) after passing through the gas filtering device (700).

8. The gas mass flow controller according to claim 7, characterized in that: The gas filtering device (700) comprises a filter screen (710) and an adsorption material (720); the filter screen (710) and the adsorption material (720) are both detachably mounted on the inner wall of the main pipe (100).

9. The gas mass flow controller according to claim 8, characterized in that: The gas filtering device (700) further comprises a filter cartridge (730), wherein the filter cartridge (730) is detachably disposed in the main pipe (100); The filter screen (710) is fixedly arranged at both ends of the filter cartridge (730), and the adsorption material (720) is arranged inside the filter cartridge (730).

10. The gas mass flow controller according to claim 1, characterized in that The debugging component (300) includes: a heater (310) fixedly disposed on a side wall of the auxiliary pipe (200); a second sensor (320) comprising a first detection end and a second detection end, wherein the first detection end and the second detection end are both fixedly disposed on the side wall of the auxiliary pipe (200) and distributed at both ends of the heater (310); In a working state, the second sensor (320) detects the temperature of the gas before passing through the heater (310) and the temperature of the gas after passing through the heater (310) to calculate the gas flow rate.

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