Concave crown head probe top column head and probe

By designing multiple outer inclined surfaces and gradually deepening groove structures on the probe top sill head, the problem of tin cutting piles is solved, the self-cleaning and life of the probe is achieved, and electromagnetic interference is reduced, and it is suitable for chip testing with high test density.

CN223217553UActive Publication Date: 2025-08-12ZHEJIANG GOLDEN CONNECTION TECH CO LTD

Patent Information

Application Number
CN202422299356.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-20
Publication Date
2025-08-12
Estimated Expiration
2034-09-20

AI Technical Summary

Technical Problem

Traditional chip test probe top sill easily deteriorates electrical performance and shortens life due to tin cutting and stacking in high test density environments, which cannot meet the requirements of large-scale precision chip testing.

Method used

A concave crown head probe top sill head is designed, adopting multiple outer inclined surfaces and groove structures to reduce the volume of the detection foot, increase the sliding area of the tin cutting, and set up grooves with gradually deepening in the concave area to promote the discharge of tin cutting and avoid stacking.

Benefits of technology

It realizes the self-cleaning function of the probe, extends the service life, reduces electromagnetic interference, and meets the chip testing needs in high test density environments.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a concave crown head probe top column head and a probe. The concave crown head probe top column head comprises a column body part and a contact part arranged at the top end of the column body part, the contact part comprises a plurality of outer side inclined planes uniformly distributed around the central axis of the contact part, a detection pin and a groove; the adjacent outer side inclined surfaces intersect to form a convex edge, the vertex of each detection foot is located on the corresponding convex edge, the minimum distance between the vertexes of the detection feet is 35%-55% of the outer diameter of the cylinder part, and the maximum distance between the vertexes of the detection feet is 50%-70% of the outer diameter of the cylinder part; grooves are formed in the outer inclined faces between the adjacent detection feet, and the grooves are communicated to form an inwards-concave area of the contact part. The contact part of the probe top column head is provided with the downward inclined planes which are uniformly distributed, and the relative height of the central point of the concave area is improved, so that cuttings can slide off and do not accumulate in the concave area, the probe top column head has a self-cleaning function, good test electrical performance of the probe is maintained, and the test service life of the probe head is remarkably prolonged. And the test environment of large-batch precision chips is met.
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Description

Technical Field

[0001] The utility model relates to the field of probes for chip testing, in particular to a concave crown-type probe top column head and the probe. Background Art

[0002] With the surge in global demand for semiconductor chips, the demand for chip test probes, a core component essential for back-end testing in chip manufacturing, is also growing. Because the pin of a chip test probe directly contacts the chip pins, its lifespan is crucial to chip test quality, efficiency, and cost. Traditional chip test probes use a concave crown tip. Tiny shavings generated when contacting the solder balls on the chip pins under test accumulate in the center of the crown, and this accumulation increases with the number of tests. Especially with the miniaturization of chips, probe diameters are becoming increasingly thinner, often less than 0.2 mm. This accumulation of shavings during testing increases resistance, degrading the probe's electrical performance and leading to chip test failures. This is particularly true for high-volume, precision chip testing, where a probe lifespan of over 500,000 cycles is required. Traditional chip test probes with concave crown tips simply cannot meet these requirements.

[0003] Utility model CN205374531U discloses a wafer test probe, comprising a probe base and a probe head. The probe head comprises, from the outside to the inside, an outer claw unit, a middle claw unit, and an inner claw unit. The outer claw unit comprises a circular base with an inverted triangular tip disposed thereon, the middle claw unit comprises an inverted conical tip ring and a circular spring disposed thereunder, and the inner claw unit comprises a crown head with three inverted conical claws at its top, and a spring connected to the probe base at the bottom of the crown head. This probe is a traditional crown-head probe, which accumulates tin shavings during long-term testing, resulting in increased probe resistance, poor electrical performance, and chip test failure.

[0004] Utility model CN216251235U discloses a spring probe comprising: a needle tube, comprising a needle tube body and a needle body contraction portion integrally formed on one axial side of the needle tube body; an upper needle head, comprising a base and an upper needle head body on one axial side of the base, the upper needle head body being used to contact the test piece, the base being clamped within an opening of the needle tube body away from the needle body contraction portion; and a spring disposed within the needle tube body and located between the needle body contraction portion and the upper needle head. Although the crown head structure of this probe has a groove communicating with the outside, to ensure the mechanical strength of the probe detection foot, the detection foot material needs to be thickened and raised, resulting in the probe generating more electromagnetic interference and being unsuitable for use in scenarios with high test density.

[0005] Therefore, how to improve the existing crown head structure probe that can be used in high test density environments, while maintaining the original detection accuracy, avoid the impact of tin shavings generated during the detection process on the detection, and prevent tin shavings from accumulating, affecting the probe performance and shortening the probe life is an urgent problem to be solved by technical personnel in this field. Utility Model Content

[0006] In response to the defects existing in the above-mentioned prior art, the utility model provides an inward-concave crown head probe top column head and a probe. The inward-concave crown head probe top column head can be used in a high test density environment. While maintaining the excellent electrical performance of the probe, it realizes the self-cleaning function, avoids the accumulation of tin shavings, and improves the test service life of the probe head.

[0007] In a first aspect, the utility model provides a concave crown head probe top column head, comprising a column portion and a contact portion arranged at the top end of the column portion;

[0008] The contact portion includes a plurality of outer inclined surfaces, detection feet and grooves evenly distributed around its central axis;

[0009] Adjacent outer inclined surfaces intersect to form ridges, and the apex of each detection foot is located on the corresponding ridge. The minimum distance between the vertices of each detection foot is 35%-55% of the outer diameter of the column part, and the maximum distance is 50%-70% of the outer diameter of the column part.

[0010] There are grooves on the outer inclined surfaces between adjacent detection feet, and the grooves are connected to form a concave area of the contact part.

[0011] Preferably, the contact portion includes 4-8 outer inclined surfaces, 4-8 detection feet and 4-8 grooves evenly distributed around its central axis.

[0012] In traditional crown tip designs, the center portion has a shallower slope and a concave shape, which easily traps and accumulates tin shavings. The accumulation of tin shavings in the center of the probe tip increases the contact resistance between the probe and the chip, affecting the accuracy and reliability of chip testing.

[0013] On the basis of the existing crown head structure, the utility model processes the outer surface of each crown head detection foot into an inclined surface with a certain angle and limits the distance between each detection foot, which can effectively reduce the spatial volume of the detection foot, provide a sharper tip under the condition of the same detection foot height, and reduce the height of the detection foot under the condition of the same tip, thereby reducing the depth of the concave area of the contact part. By balancing the relationship between the inclined surface and the friction force, the contact area between the tin shavings and the probe head is increased, and the tin shavings generated during the detection process are not easy to enter the concave area but are directly discharged from the outer inclined surface, eliminating the accumulation problem common to concave probes, thereby improving the self-cleaning performance.

[0014] Furthermore, the column portion is a cylinder, the outer inclined surface includes an inclined plane, and there are multiple arc-shaped boundary lines connected end to end between the column portion and the contact portion. Each arc-shaped boundary line corresponds to an inclined plane and a groove thereon. Adjacent inclined planes form the outer side wall of the detection foot, and the symmetry axes of each detection foot intersect with the central axis of the contact portion.

[0015] Among them, when the contact part includes four outer inclined surfaces, four detection feet and four grooves evenly distributed around its central axis, there will be four arc-shaped boundary lines connected end to end between the column part and the contact part, and each arc-shaped boundary line corresponds to an outer inclined surface and a groove thereon.

[0016] Furthermore, along the central axis of the contact portion, the lowest point of the concave area of the contact portion is higher than the lowest point of each arc intersection line; the ratio of the contact portion height h to the column portion height H is 1:(2-10), wherein the contact portion height h is the distance between the lowest point of each arc intersection line and the vertex of each detection foot along the central axis of the contact portion, and the column portion height H is the distance between the lowest point of each arc intersection line and the bottom end of the column portion along the central axis of the contact portion.

[0017] Traditional concave crown-shaped probes, due to their recessed center, often require more material to maintain structural strength and stability, resulting in a larger overall probe head. The present invention reduces the height and volume of the detection foot by providing an external bevel structure. The concave area can be designed to have a relatively higher center point, eliminating the need for additional volume to ensure probe strength and avoiding unnecessary material accumulation, thereby providing a smaller, more compact, and more precise probe head. This design with a relatively high concave area can also be considered a "biased" crown head design. In addition, the height ratio of the contact portion and the column portion can be flexibly set within the above range based on the detection requirements and clamping installation conditions, with the preferred h:H ratio being 1:(3-8).

[0018] Reducing the contact area of the probe tip helps reduce electromagnetic interference and crosstalk. During chip testing, probes need to transmit tiny electrical signals. Larger probe tips tend to generate more electromagnetic interference. The smaller probe structure employed in this utility model can reduce this interference, resulting in more stable and accurate test signals and enabling deployment in higher-density environments.

[0019] Furthermore, the two opposite side walls extending from the vertices of adjacent detection feet toward the column portion gradually approach each other, forming symmetrical grooves along the center line of the outer inclined surface between the adjacent detection feet, and the symmetry axes of the grooves intersect the central axis of the contact portion.

[0020] Furthermore, the groove gradually deepens from the central axis of the contact portion outward. Compared with the traditional crown head probe with a concave structure, the present invention further promotes the discharge of tin shavings by processing the center point of the concave area into a groove that deepens outward.

[0021] Preferably, the contact portion has a symmetrical structure, including four outer inclined surfaces, four detection feet and four grooves, the vertices of the four detection feet are arranged in a square, and the distance between adjacent detection foot vertices is 40%-50% of the outer diameter of the column portion.

[0022] Furthermore, on the outer inclined surface, the angle α between the bottom of the groove and the line connecting the vertices of adjacent detection feet is between 45° and 90°. Preferably, the angle α is 60°.

[0023] Furthermore, the outer inclined surface is an inclined plane, and the angle β between the two opposite inclined planes is between 45° and 90°. Preferably, the angle β is 60°.

[0024] Preferably, the column portion and the contact portion are an integrated structure. The top column head of the concave crown head probe of the present invention preferably adopts an integrated structure, which is easy to process and is also conducive to obtaining a probe head with more uniform texture and better strength.

[0025] In a second aspect, the present invention further provides a probe comprising the concave crown head probe top column head.

[0026] The utility model has at least the following beneficial effects:

[0027] (1) In the prior art, the detection foot of the crown head structure is usually directly set on the outer curved surface of the column part without an outer inclined surface, which is large in size and not sharp enough at the tip. The design of the top column head of the concave crown head probe of the present invention includes multiple outer inclined surfaces. On the one hand, these outer inclined surfaces reduce the volume of the detection foot and make the tip of the detection foot sharper. Moreover, its inclination angle is steeper than that of the existing arc surface. When the tin shavings contact the probe head, they are more easily affected by gravity and naturally slide down along these inclined surfaces.

[0028] (2) The accumulation problem in the concave design is the main drawback of the traditional crown head probe. The concave "biased" crown head probe top column disclosed by the utility model increases the relative height of the center point of the crown head after setting the outer inclined surface to reduce the volume of the detection foot, and sets a groove that gradually deepens from the inside to the outside, so that after the tin shavings fall to the center of the crown head structure, they continue to fall along the groove, and thus cannot accumulate in the center of the crown head. That is, the outer inclined surface and the higher center point of the crown head cooperate with each other to form an effective tin discharge path, making it difficult for the tin shavings to stay in any area of the crown head probe top column, thereby achieving the effect of automatic cleaning and extending the life of the probe.

[0029] (3) The concave crown-shaped probe head of the present invention adopts an outer inclined surface and an elevated center height, which reduces material usage and improves the space utilization of the geometric structure. At the same time, combined with precise manufacturing technology and material optimization, this structure can achieve a smaller and thinner probe volume while maintaining functionality and strength, reducing electrical signal interference and meeting the miniaturization requirements of modern chip testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a front view of the top column head of the concave crown head probe provided by the utility model;

[0031] Figure 2 for Figure 1 Side view of the top column of the concave crown head probe rotated 45 degrees;

[0032] Figure 3 This is a side view of the top column head of the concave crown head probe provided by the utility model;

[0033] Figure 4 This is a front view of the top column head of a concave crown head probe provided by another embodiment of the present invention.

[0034] Explanation of reference numerals: 100 - contact portion, 1 - outer inclined surface, 11 - ridge, 2 - groove, 21 - inner wall, 3 - detection foot, 200 - column portion. DETAILED DESCRIPTION

[0035] To better understand the above technical solution, the following will be described in detail with reference to the accompanying drawings and specific implementation methods. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0036] The terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The singular forms "a", "the" and "the" used in the embodiments of the present invention and the appended claims are also intended to include plural forms, unless the context clearly indicates otherwise, and "a plurality" generally includes at least two.

[0037] It should also be noted that the terms "include," "comprises," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a product or device comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such product or device. In the absence of further limitations, an element defined by the phrase "comprises a..." does not exclude the presence of other identical elements in the product or device comprising the element.

[0038] The following will be combined with the accompanying drawings to further explain the present invention in detail by taking the probe top column head as an initial state in which the contact portion 100 and the column portion 200 are integrated into a cylinder and processed to obtain a concave crown head probe top column head, such as Figure 1-4 As shown, the utility model provides a concave crown head probe top column head, including a column portion 200 and a contact portion 100 arranged at the top of the column portion 200, wherein the contact portion 100 specifically includes: a plurality of outer inclined surfaces 1, a groove 2 and a detection foot 3 evenly distributed around its central axis;

[0039] (1) Outer inclined surface 1:

[0040] The outer inclined surface 1 is an inclined plane obtained by cutting downward with the center of the cylinder end surface as the vertex, and the projections formed by each outer inclined surface 1 on the cylinder end surface are symmetrical about the vertex center.

[0041] After the inclined cutting, multiple arc-shaped interface sections connected end to end are formed between the column portion 200 and the contact portion 100. Each arc-shaped interface line corresponds to an inclined plane and a groove 2 thereon. The adjacent inclined planes form the outer wall of the detection foot 3, and the symmetry axis of each detection foot 3 intersects with the central axis of the contact portion 100.

[0042] The ratio of the contact portion height h to the column portion height H is 1:(2-10), where the contact portion height h is the distance between the lowest point of each arc intersection line and the vertex of each detection foot along the central axis of the contact portion;

[0043] Height H of the column: the distance between the lowest point of each arc intersection line and the bottom end of the column along the central axis of the contact part.

[0044] (2) Detection pin 3

[0045] The ridge 11 is formed by the intersection of two adjacent outer inclined surfaces 1, and the vertex of each detection foot 3 is located on the corresponding ridge 11. The vertex of each detection foot 3 corresponds to two outer walls and two inner walls 21. The two outer inclined surfaces 1 corresponding to each detection foot 3 respectively form the outer walls of the detection foot 3; the symmetry axis of each detection foot 3 intersects with the central axis of the contact portion 100.

[0046] The minimum distance between the vertices of the detection feet is 35%-55% of the outer diameter of the column part, and the maximum distance is 50%-70% of the outer diameter of the column part.

[0047] (3) Groove 2:

[0048] From the vertices of adjacent detection feet 3 along the outer inclined surface between them, cutting toward the column portion 200, the two opposite inner side walls 21 gradually approach each other, and symmetrical grooves 2 are formed along the center line of the outer inclined surface between the adjacent detection feet. The symmetry axis of each groove 2 intersects with the central axis of the contact portion 100. Preferably, the groove 2 gradually deepens from the central axis of the contact portion 100 outward.

[0049] The plurality of grooves 2 on the outer inclined surface 1 between adjacent detection pins 3 are connected to form a concave area of the contact portion 100 .

[0050] Preferably, the contact portion 100 includes 4-8 outer inclined surfaces 1, 4-8 detection feet 3, and 4-8 grooves 2. More preferably, it includes 4 outer inclined surfaces 1, 4 detection feet 3, and 4 grooves 2. The vertices of the four detection feet are arranged in a square, and the distance between adjacent detection foot vertices is 40%-50% of the outer diameter of the column. As a result, there are four arc-shaped intersection lines connected end to end between the column 200 and the contact portion 100. Each outer inclined surface 1 and a groove 2 thereon corresponds to an arc-shaped intersection line. Preferably, along the central axis of the contact portion 100, the lowest point of the concave area of the contact portion 100 is higher than the lowest point of each arc-shaped intersection line.

[0051] The angle β between the two opposing inclined planes is between 45° and 90°. On the outer inclined surface 1, the angle α between the bottom of the groove 2 and the line connecting the vertices of the adjacent detection feet 3 is between 45° and 90°. By adjusting the cutting angle of each surface, the height of the detection foot 3 or the depth of the groove 2 can be controlled.

[0052] Example 1

[0053] like Figure 1-3 As shown, this embodiment provides a concave crown head probe top column head, specifically comprising: a column portion 200 and a contact portion 100 provided at the top end of the column portion, wherein the contact portion 100 specifically comprises: four outer inclined surfaces 1, four grooves 2 and four detection feet 3 evenly distributed around its central axis;

[0054] (1) Outer inclined surface 1:

[0055] The outer inclined surfaces are four inclined planes obtained by cutting downward with the point on the end face of the cylinder as the vertex. Each outer inclined surface actually forms a four-pyramid configuration, and the projection formed on the end face of the cylinder is symmetrical about the vertex center.

[0056] After the oblique cutting, four arcuate interfaces are formed between the column portion 200 and the contact portion 100, connected end to end. Each arcuate interface corresponds to an inclined plane and a groove 2 thereon. Adjacent inclined planes form the outer walls of the detection pins 3. The symmetry axes of each detection pin 3 intersect the central axis of the contact portion 100. The ratio of the contact portion height h to the column portion height H is approximately 1:5.

[0057] (2) Detection pin 3

[0058] There are four ridges 11 formed by the intersection of two adjacent outer inclined surfaces 1. The vertices of the four detection feet 3 are respectively located on the corresponding ridges 11. The vertex of each detection foot 3 corresponds to two outer walls and two inner walls 21. The two outer inclined surfaces 1 corresponding to each detection foot 3 respectively form the outer walls of the detection foot 3; the symmetry axes of each detection foot 3 intersect with the central axis of the contact portion 100.

[0059] The minimum distance between the vertices of the detection feet is 45% of the outer diameter of the column part, and the maximum distance is 60% of the outer diameter of the column part.

[0060] (3) Groove 2:

[0061] Starting from the vertices of adjacent detection feet 3 along the outer inclined surface between them, cutting toward the column portion 200, the two opposite inner side walls 21 gradually approach each other, and symmetrical grooves 2 are formed along the center line of the outer inclined surface between the adjacent detection feet. The symmetry axes of the four grooves 2 intersect with the central axis of the contact portion 100.

[0062] The four grooves 2 on the outer inclined surface 1 between adjacent detection pins 3 connect to form the concave area of the contact portion 100. The four grooves have the same depth, meaning the concave area of the contact portion 100 has a uniform depth. Along the central axis of the contact portion, the concave area of the contact portion is higher than the lowest point of the intersection of the arcs. In other words, the detection pins and grooves of the contact portion are all located within the spatial area of the aforementioned quadrangular pyramid.

[0063] On the outer inclined surface, the angle α between the bottom of the groove and the line connecting the vertices of adjacent detection feet is 60°, and the angle β between the two opposite inclined planes is 60°.

[0064] Example 2

[0065] See also Figure 4 The difference between this embodiment and embodiment 1 is that the grooves and the concave areas of the contact portions formed by the grooves are slightly different.

[0066] In Example 2, the grooves gradually deepen from the central axis of the contact part outward, that is, the center point of the concave area of the contact part is the highest, and the intersection of the grooves on the outer inclined surface is the lowest point of the concave area. Along the central axis direction of the contact part, the lowest point is higher than the lowest point of the intersection line of each arc, that is, the detection feet and grooves of the contact part are all arranged in the spatial area of the aforementioned four-sided pyramid. In particular, the depth change of the groove makes the center of the concave area relatively elevated, which is more conducive to forming an effective tin discharge path, so that after the tin shavings fall into the concave area of the crown head structure, they continue to fall rapidly along the grooves and the outer inclined plane, and cannot stay and accumulate, thereby achieving the effect of automatic cleaning and extending the life of the probe.

[0067] Although preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they understand the basic inventive concepts. This invention is intended to include the preferred embodiments and all changes and modifications that fall within the scope of this invention. Obviously, those skilled in the art may make various changes and modifications to this invention without departing from the spirit and scope of this invention.

Claims

1. A concave crown head probe top column head, characterized in that: It includes a column portion and a contact portion arranged at the top end of the column portion; The contact portion includes a plurality of outer inclined surfaces, detection feet and grooves evenly distributed around its central axis; Adjacent outer inclined surfaces intersect to form ridges, and the apex of each detection foot is located on the corresponding ridge. The minimum distance between the vertices of each detection foot is 35%-55% of the outer diameter of the column part, and the maximum distance is 50%-70% of the outer diameter of the column part. There are grooves on the outer inclined surfaces between adjacent detection feet, and the grooves are connected to form a concave area of the contact part.

2. The concave crown probe top column head according to claim 1, characterized in that: The column portion is a cylinder, the outer inclined surface includes an inclined plane, and there are multiple arc-shaped boundary lines connected end to end between the column portion and the contact portion. Each arc-shaped boundary line corresponds to an inclined plane and a groove thereon. Adjacent inclined planes form the outer side wall of the detection foot, and the symmetry axes of each detection foot intersect with the central axis of the contact portion.

3. The concave crown probe top column head according to claim 2, characterized in that: Along the central axis direction of the contact portion, the lowest point of the concave area of the contact portion is higher than the lowest point of each arc intersection line; The ratio of the contact portion height h to the column portion height H is 1:(2-10), wherein the contact portion height h is the distance between the lowest point of each arc intersection line and the vertex of each detection foot along the central axis of the contact portion, and the column portion height H is the distance between the lowest point of each arc intersection line and the bottom end of the column portion along the central axis of the contact portion.

4. The concave crown probe top column head according to claim 1, characterized in that: Two opposite side walls extending from the vertices of adjacent detection feet toward the column portion gradually approach each other, forming symmetrical grooves along the center line of the outer inclined surface between the adjacent detection feet, and the symmetry axes of the grooves intersect the central axis of the contact portion.

5. The concave crown probe top column head according to claim 4, characterized in that: From the central axis of the contact portion outward, each groove gradually deepens.

6. The concave crown probe top column head according to any one of claims 1 to 5, characterized in that: The contact portion has a symmetrical structure, including four outer inclined surfaces, four detection feet and four grooves. The vertices of the four detection feet are arranged in a square, and the distance between adjacent detection foot vertices is 40%-50% of the outer diameter of the column part.

7. The concave crown probe top column head according to claim 6, characterized in that: On the outer inclined surface, the angle α between the bottom of the groove and the line connecting the vertices of adjacent detection feet is between 45° and 90°.

8. The concave crown probe top column head according to claim 6, characterized in that: The outer inclined surface is an inclined plane, and the angle β between the two opposite inclined planes is between 45° and 90°.

9. The concave crown probe top column head according to any one of claims 1-5, 7, and 8, characterized in that: The column portion and the contact portion are an integrated structure.

10. A probe, characterized in that: The invention comprises the concave crown head probe top column head as described in any one of claims 1 to 9.

Citation Information

Patent Citations

  • Wafer test probes

    CN205374531U

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