Efficient single-machine double-side exposure equipment

Abstract

The utility model discloses high-efficiency single-machine double-sided exposure equipment which comprises a base, an exposure assembly, a substrate carrying table and two plate turning assemblies, the exposure assembly is arranged above the base. The substrate carrying table is arranged between the base and the exposure assembly, is used for adsorbing a to-be-exposed part, and can move along the length direction of the base; the two plate overturning assemblies are arranged between the substrate carrying table and the exposure assembly, each plate overturning assembly comprises a suction cup part and a connecting rod, the suction cup parts are rotationally connected with the connecting rods, and the connecting rods can move in the width direction of the base. The rotation directions of the two suction cup pieces of the two turning plate assemblies are opposite. According to the high-efficiency single-machine double-sided exposure equipment disclosed by the utility model, high-efficiency single-machine double-sided exposure of the to-be-exposed part is realized through the matching of the two plate turnover assemblies, additional equipment such as a transplanter and a plate turnover machine is not needed, the cost of the exposure equipment is favorably reduced, meanwhile, exposure group lines are reduced, the productivity of the exposure equipment is improved, and the production efficiency of the exposure equipment is improved. And the occupied area of the exposure equipment is also reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of exposure equipment, in particular to a high-efficiency single-machine double-sided exposure equipment. Background Art

[0002] Double-sided exposure automatic lines typically utilize two exposure machines, along with a transplanter, flipper, dust collector, and other equipment. One exposure machine exposes the front side, while the other exposes the back side, completing double-sided exposure. In related technology, to achieve rapid double-sided exposure on a single-stage exposure machine, additional equipment such as a transplanter and flipper is often added to or near the single-stage exposure machine. However, these additional equipment increases the cost of double-sided exposure. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the present invention is to provide a highly efficient single-machine double-sided exposure device that helps reduce the cost of the exposure device, while also reducing the number of exposure lines, increasing the production capacity of the exposure device, and reducing the footprint of the exposure device.

[0004] According to an embodiment of the utility model, a high-efficiency single-machine double-sided exposure device includes: a base; an exposure component, wherein the exposure component is arranged above the base; a substrate carrier, wherein the substrate carrier is arranged between the base and the exposure component and is used to adsorb the workpiece to be exposed, and the substrate carrier is movable along the length direction of the base; two flip-plate assemblies, wherein both of the flip-plate assemblies are arranged between the substrate carrier and the exposure component, each of the flip-plate assemblies includes a suction cup member and a connecting rod, wherein the suction cup member is rotatably connected to the connecting rod, and the connecting rod is movable along the width direction of the base; wherein the rotation directions of the two suction cup members of the two flip-plate assemblies are opposite.

[0005] According to the high-efficiency single-machine double-sided exposure equipment of the embodiment of the present invention, the cooperation of the two flip-plate assemblies realizes the high-efficiency single-machine double-sided exposure of the workpiece to be exposed, without the need for additional equipment such as transplanters and flip-plate machines, which is beneficial to reducing the cost of the exposure equipment, while reducing the exposure line group, improving the production capacity of the exposure equipment, and reducing the floor space occupied by the exposure equipment.

[0006] According to some embodiments of the present invention, the two side surfaces of the piece to be exposed in the thickness direction of the base are respectively the front and the back, and the two suction cup members are respectively the first suction cup member and the second suction cup member; during the front exposure process, the substrate carrier adsorbs the back and moves to the bottom of the exposure component for front exposure; during the process of switching from the front exposure to the back exposure, after the first suction cup member rotates to be parallel to the substrate carrier and adsorbs the front, the first suction cup member rotates to be parallel to the second suction cup member, the second suction cup member adsorbs the back and rotates to be parallel to the substrate carrier, and the substrate carrier adsorbs the front and moves to the bottom of the exposure component for the back exposure.

[0007] According to some embodiments of the present invention, the suction cup component includes a main body, which is rotatably connected to the connecting rod; a plurality of suction rods, which are arranged on the main body at intervals, each of the suction rods is a hollow structure, and one end of each of the suction rods is suitable for connecting with a vacuum device; wherein, when the plurality of suction rods are vacuumed, the plurality of suction rods adsorb the workpiece to be exposed.

[0008] According to some embodiments of the present invention, a plurality of through holes are formed on the main body, and the plurality of through holes are arranged in an array.

[0009] According to some embodiments of the present invention, the high-efficiency single-machine double-sided exposure equipment also includes a plurality of support members, which are respectively arranged on both sides of the width direction of the base, and each of the support members extends along the thickness direction of the base; a first guide member, which is connected to the plurality of support members, and a first slide groove is formed on one of the first guide member and the connecting rod, and a first slide rail is provided on the other of the first guide member and the connecting rod, and the first slide rail slides in cooperation with the first slide groove.

[0010] According to some embodiments of the present invention, one end of the plurality of support members away from the base is connected to a connecting plate, and the first guide member is connected to the connecting plate.

[0011] According to some embodiments of the present invention, the connecting plate is located below the exposure assembly, a plurality of exposure holes are formed on the connecting plate, and the exposure assembly includes a plurality of exposure heads, and the plurality of exposure heads correspond one-to-one to the plurality of exposure holes.

[0012] According to some embodiments of the present invention, a second slide groove is formed on one of the base and the substrate carrier, and a second slide rail is provided on the other of the base and the substrate carrier, and the second slide rail is slidably engaged with the second slide groove.

[0013] According to some embodiments of the present invention, a conveyor belt is provided on a side of the base adjacent to the substrate carrier, the conveyor belt extends along the length direction of the base, and the conveyor belt is connected to the substrate carrier.

[0014] According to some embodiments of the present invention, a gas channel is formed on the substrate carrier, and one end of the gas channel is suitable for communicating with a vacuum pumping device; wherein, when the gas channel is vacuumed, the substrate carrier absorbs the workpiece to be exposed.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0017] Figure 1 is a schematic diagram of an exposure device according to an embodiment of the present utility model;

[0018] Figure 2 is a schematic diagram of an exposure device according to an embodiment of the present invention, wherein a first suction cup member absorbs a workpiece to be exposed;

[0019] Figure 3 is a schematic diagram of an exposure apparatus according to an embodiment of the present invention, wherein the first suction cup member is parallel to the second suction cup member;

[0020] Figure 4 is a schematic diagram of an exposure device according to an embodiment of the present invention, wherein the second suction cup member is parallel to the substrate carrier.

[0021] Reference numerals:

[0022] 100: exposure equipment;

[0023] 1: Base; 11: Second slide rail; 12: Conveyor belt; 2: Exposure assembly; 21: Exposure head; 3: Substrate carrier; 31: Gas channel; 4: Flip assembly; 41: Suction cup; 411: First suction cup; 412: Second suction cup; 413: Body; 4131: Through hole; 414: Suction rod; 42: Connecting rod; 5: Support member; 6: First guide member; 61: First slide rail; 7: Connecting plate;

[0024] 200: piece to be exposed; 201: front side; 202: back side. DETAILED DESCRIPTION

[0025] Reference below Figure 1-Figure 4A high-efficiency single-machine double-sided exposure device 100 according to an embodiment of the present invention is described.

[0026] like Figure 1-Figure 4 As shown, the high-efficiency single-machine double-sided exposure device 100 according to an embodiment of the present invention includes a base 1, an exposure component 2, a substrate carrier 3 and two flip plate components 4.

[0027] Specifically, the exposure assembly 2 is disposed above the base 1 (for example, Figure 1 The substrate carrier 3 is provided between the base 1 and the exposure assembly 2 and is used to absorb the workpiece 200 to be exposed. The substrate carrier 3 is arranged along the length direction of the base 1 (for example, Figure 1 The two flip plate assemblies 4 are both provided between the substrate stage 3 and the exposure assembly 2. Each flip plate assembly 4 includes a suction cup 41 and a connecting rod 42. The suction cup 41 is rotatably connected to the connecting rod 42. The connecting rod 42 extends in the width direction of the base 1 (for example, Figure 1 Wherein, the rotation directions of the two suction cup members 41 of the two flap assemblies 4 are opposite.

[0028] For example, in Figure 1-Figure 4 In the example shown, a substrate stage 3 and an exposure assembly 2 are arranged on a base 1 from bottom to top. The side of the substrate stage 3 facing the exposure assembly 2 can absorb the workpiece 200 to be exposed, thereby increasing the stability of the workpiece 200 on the substrate stage 3 and facilitating the relative position of the workpiece 200 and the exposure assembly 2 to complete the exposure process.

[0029] The substrate carrier 3 can be moved along the length direction of the base 1 toward the exposure component 2 until the exposure component 2 is opposite to the object 200 to be exposed to complete the exposure; or the substrate carrier 3 can be moved along the length direction of the base 1 to away from the exposure component 2 to facilitate operations such as flipping the object 200 to be exposed on the substrate carrier 3.

[0030] The two flip-plate assemblies 4 are both arranged between the substrate carrier 3 and the exposure assembly 2, so that after the two flip-plate assemblies 4 perform the flip operation on the to-be-exposed part 200, the to-be-exposed part 200 can still fall on the side of the substrate carrier 3 facing the exposure assembly 2, so as to facilitate the exposure operation of the exposure assembly 2 on the other side of the to-be-exposed part 200.

[0031] One end of the connecting rod 42 of each flip assembly 4 is connected to the suction cup component 41, and the suction cup component 41 can adsorb the workpiece 200 to be exposed, and the suction cup component 41 can be moved along the width direction of the base 1 under the drive of the connecting rod 42 to realize the suction cup or the suction cup and the workpiece 200 to be exposed to move along the width direction of the base 1 as a whole, even if the suction cup or the suction cup and the workpiece 200 to be exposed to move as a whole in a direction away from the center of the base 1 or towards the center of the base 1.

[0032] At the same time, the suction cup member 41 is rotatably connected to the connecting rod 42, and the two suction cup members 41 of the two flip plate assemblies 4 rotate in opposite directions. For example, while the suction cup member 41 of one flip plate assembly 4 can rotate 90 degrees forward, the suction cup member 41 of the other flip plate assembly 4 can rotate 90 degrees counterclockwise. This is not specifically limited here. This facilitates the exchange of the workpiece 200 to be exposed between the suction cup members 41 of the two flip plate assemblies 4.

[0033] When the workpiece 200 to be exposed is attracted to the suction cup 41, the two suction cups 41 of the two flip plate assemblies 4 can be rotated to be parallel to complete the transfer of the workpiece 200 to be exposed. The suction cups 41 are then rotated to place the flipped surface of the workpiece 200 to be exposed on the substrate stage 3. When the exposure assembly 2 is performing exposure, the suction cups 41 can be driven away from the substrate stage 3 by the connecting rod 42 and rotated to be perpendicular to the plane of the substrate stage 3 on which the workpiece 200 to be exposed is placed, thereby preventing the flip plate assemblies 4 from interfering with the exposure operation.

[0034] Therefore, through the cooperation of the two flip-up assemblies 4, the exposure equipment 100 can realize efficient single-machine double-sided exposure of the exposure part 200, without the need for additional transplanting machines, flip-up machines and other equipment, which is beneficial to reducing the cost of the exposure equipment 100, while reducing the exposure line group, improving the production capacity of the exposure equipment 100, and reducing the floor space occupied by the exposure equipment 100.

[0035] According to the high-efficiency single-machine double-sided exposure equipment 100 of the embodiment of the present invention, the cooperation of the two flip-plate assemblies 4 realizes the high-efficiency single-machine double-sided exposure of the workpiece 200 to be exposed, without the need for additional equipment such as transplanters and flip-plate machines, which is beneficial to reducing the cost of the exposure equipment 100, while reducing the exposure line group, improving the production capacity of the exposure equipment 100, and also reducing the floor space occupied by the exposure equipment 100.

[0036] According to some embodiments of the present invention, referring to Figure 1-Figure 4 The two side surfaces of the object to be exposed 200 in the thickness direction of the base 1 are respectively the front side 201 and the back side 202, and the two suction cup members 41 are respectively the first suction cup member 411 and the second suction cup member 412. During the front exposure process, the substrate carrier 3 sucks the back side 202 and moves to the bottom of the exposure assembly 2 for front exposure. When the front exposure is switched to the back exposure process, the first suction cup member 411 rotates to be parallel to the substrate carrier 3 and sucks the front side 201. Then, the first suction cup member 411 rotates to be parallel to the second suction cup member 412. The second suction cup member 412 sucks the back side 202 and rotates to be parallel to the substrate carrier 3. The substrate carrier 3 sucks the front side 201 and moves to the bottom of the exposure assembly 2 for back exposure.

[0037] That is to say, referring to Figure 1The substrate stage 3 moves along the width direction of the base 1 until the exposed object 200 adsorbed on the substrate stage 3 and the exposure assembly 2 are opposite to complete the front exposure of the exposed object 200. Figure 2 When the substrate carrier 3 moves away from the exposure assembly 2 with the workpiece 200 to be exposed, the first suction cup 411 rotates to face the front surface 201 to be adsorbed on the front surface 201 of the workpiece 200 to be exposed. Figure 3 The first suction cup 411 moves along the width direction of the base 1 to approach the second suction cup 412, the first suction cup 411 rotates to be parallel to the second suction cup 412, the second suction cup 412 is adsorbed on the back surface 202 of the object 200 to be exposed, and the first suction cup 411 releases the object 200 to be exposed. Figure 4 Then, the second suction cup member 412 rotates parallel to the substrate stage 3, aligning the object 200 to be exposed with the substrate stage 3. The object 200 to be exposed is transferred from the second suction cup member 412 to the substrate stage 3. The substrate stage 3 is suctioned to the front surface 201 of the object 200 to be exposed, with the back surface 202 of the object 200 facing the exposure assembly 2. The substrate stage 3 moves along the width of the base 1 until the object 200 to be exposed, suctioned to the substrate stage 3, is aligned with the exposure assembly 2, completing the back surface exposure of the object 200. Thus, the exposure apparatus 100 achieves efficient, single-machine, double-sided exposure of the object 200 to be exposed.

[0038] Furthermore, the suction cup member 41 includes a main body 413 and a plurality of suction rods 414. The main body 413 is rotatably connected to the connecting rod 42. In the description of the present utility model, "plurality" means two or more. The plurality of suction rods 414 are arranged on the main body 413 at intervals, and each suction rod 414 is a hollow structure, and one end of each suction rod 414 is suitable for connecting with a vacuum device. When the plurality of suction rods 414 are vacuumed, the plurality of suction rods 414 adsorb the workpiece 200 to be exposed. For example, Figure 1-Figure 4 In the example shown, nine suction rods 414 are spaced apart on the main body 413, each of which can hold the workpiece 200 to be exposed. This increases the stability of the workpiece 200 held on the suction cup 41, ensuring the stability of the force applied to the workpiece 200 and preventing movement of the workpiece 200. This improves exposure accuracy and thus ensures the quality of exposure. The suction rods 414 can engage and disengage the workpiece 200 by switching on and off with the vacuum pump. When the vacuum pump is engaged and the suction rods 414 are evacuated, the suction cup 41 can stably and reliably hold the workpiece 200. When the vacuum pump is disconnected and the suction rods 414 are not evacuated, the suction rods 414 exert no force on the workpiece 200. Therefore, the suction cup 41 can release its force on the workpiece 200, facilitating its movement to the substrate carrier 3 or to the suction cup 41 of another flip plate assembly 4.

[0039] Furthermore, refer to Figure 1-Figure 4 The body 413 is formed with a plurality of through holes 4131, which is conducive to reducing the weight of the body 413 and increasing the connection between the suction rod 414 and the outside atmosphere when vacuuming and restoring normal air pressure, greatly reducing the impact of the suction rod 414 on the exposure workpiece 200. The plurality of through holes 4131 are arranged in an array, which is conducive to increasing the uniformity of the force applied by the plurality of suction rods 414 when vacuuming and restoring normal air pressure, thereby improving the stability and reliability of the suction cup member 41 in adsorbing and releasing the exposure workpiece 200. For example, Figure 1-Figure 4 In the example, four through holes 4131 are formed on the body 413, and the four through holes 4131 are arranged in an array.

[0040] According to some embodiments of the present invention, the high-efficiency single-machine double-sided exposure device 100 further includes a plurality of support members 5 and a first guide member 6. The plurality of support members 5 are respectively arranged on both sides of the width direction of the base 1, and each support member 5 extends along the thickness direction of the base 1. The first guide member 6 is connected to the plurality of support members 5, and a first slide groove is formed on the first guide member 6 and one of the connecting rods 42, and a first slide rail 61 is provided on the other of the first guide member 6 and the connecting rod 42, and the first slide rail 61 slides with the first slide groove. That is to say, a first slide groove can be formed on the first guide member 6, and a first slide rail 61 can be provided on the connecting rod 42 (not shown in the figure); or, a first slide groove can be formed on the connecting rod 42, and a first slide rail 61 can be provided on the first guide 6 (as shown in the figure). Figure 1-Figure 4 shown).

[0041] For example, in Figure 1-Figure 4 In the example shown, the exposure apparatus 100 includes two support members 5, one located on either side of the width of the base 1. Along the thickness direction of the base 1, the two support members 5 are connected by a first guide member 6 on the side away from the base 1. The first guide member 6 is formed with a first slide rail 61 extending along the width direction of the base 1. A first slide groove is formed on the connecting rod 42. The first slide groove and the first slide rail 61 cooperate to achieve a sliding connection between the connecting rod 42 and the first guide member 6, enabling reliable movement of the connecting rod 42 along the width direction of the base 1.

[0042] Further, refer to Figure 1-Figure 4 The ends of the multiple support members 5 away from the base 1 are connected to a connecting plate 7, and the first guide member 6 is connected to the connecting plate 7. Thus, the connecting plate 7 not only increases the connection and installation stability of the multiple support members 5, but also increases the installation stability of the first guide member 6, preventing the first guide member 6 from deforming during the movement of the connecting rod 42, thereby improving the operational stability and reliability of the flap assembly 4.

[0043] Furthermore, the connecting plate 7 is located below the exposure assembly 2, and a plurality of exposure holes are formed on the connecting plate 7. The exposure assembly 2 includes a plurality of exposure heads 21, and the plurality of exposure heads 21 correspond to the plurality of exposure holes one by one. Figure 1-Figure 4 As shown, the connecting plate 7 is formed with twelve exposure holes. The exposure assembly 2 includes twelve exposure heads 21, each corresponding to one of the twelve exposure holes. Thus, light from the twelve exposure assemblies 2 can pass through the corresponding exposure holes to achieve the required exposure. At the same time, the connecting plate 7 increases the stability of the exposure assembly 2.

[0044] According to some embodiments of the present invention, a second slide groove is formed on one of the base 1 and the substrate carrier 3, and a second slide rail 11 is provided on the other of the base 1 and the substrate carrier 3, and the second slide rail 11 slides in cooperation with the second slide groove. That is, when the second slide groove is formed on the base 1, the second slide rail 11 is provided on the substrate carrier 3 (not shown); or, when the second slide groove is formed on the substrate carrier 3, the second slide rail 11 is provided on the base 1 (as shown in the figure). Figure 1-Figure 4 As shown). Thus, the cooperation between the second slide groove and the second slide rail 11 is conducive to the reliable movement of the substrate carrier 3 along the length direction of the base.

[0045] Further, refer to Figure 1-Figure 4 A conveyor belt 12 is provided on one side of the base 1 adjacent to the substrate stage 3. The conveyor belt 12 extends along the length of the base 1 and is connected to the substrate stage 3. This arrangement increases the force-bearing area of the substrate stage 3 through the conveyor belt 12, further improving the stability of the movement of the substrate stage 3.

[0046] According to other embodiments of the present invention, a gas channel 31 is formed on the substrate carrier 3, and one end of the gas channel 31 is suitable for connecting to a vacuum pump. When the gas channel 31 is evacuated, the substrate carrier 3 can absorb the object to be exposed 200. Alternatively, when the gas channel 31 is not evacuated, it is beneficial to restore the normal air pressure of the substrate carrier 3 to release the absorption of the object to be exposed 200. Figure 1-Figure 4 The substrate carrier 3 is formed with six gas channels 31, which are adapted to communicate with the vacuum pump. This arrangement increases the gas flow path, thereby facilitating vacuum pumping of the substrate carrier 3 to absorb the exposed workpiece 200.

[0047] Other structures and operations of the high-efficiency single-machine double-sided exposure device 100 according to the embodiment of the present invention are known to ordinary technicians in this field and will not be described in detail here.

[0048] In the description of the present invention, it should be understood that the terms "center", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "horizontal", "bottom", "inside", "outside", "clockwise", "counterclockwise", "circumferential", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0049] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0050] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "example," "specific example," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0051] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and purpose of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A high-efficiency single-machine double-sided exposure device, characterized in that: include: base; An exposure assembly, the exposure assembly being arranged above the base; A substrate carrier, which is provided between the base and the exposure assembly and is used to absorb the workpiece to be exposed. The substrate carrier is movable along the length direction of the base; Two flip plate assemblies, each of the two flip plate assemblies is disposed between the substrate stage and the exposure assembly, each of the flip plate assemblies comprising a suction cup and a connecting rod, the suction cup being rotatably connected to the connecting rod, and the connecting rod being movable along the width direction of the base; Wherein, the two suction cup members of the two flap assemblies rotate in opposite directions.

2. The high-efficiency single-machine double-sided exposure equipment according to claim 1, characterized in that: The two side surfaces of the object to be exposed in the thickness direction of the base are respectively the front side and the back side, and the two suction cup members are respectively the first suction cup member and the second suction cup member; During the front exposure process, the substrate stage absorbs the back surface and moves to the bottom of the exposure assembly for front exposure; During the process of switching from front exposure to back exposure, the first suction cup component rotates to be parallel to the substrate carrier and adsorbs the front side, then the first suction cup component rotates to be parallel to the second suction cup component, the second suction cup component adsorbs the back side and rotates to be parallel to the substrate carrier, and the substrate carrier adsorbs the front side and moves to the bottom of the exposure component for back exposure.

3. The high-efficiency single-machine double-sided exposure equipment according to claim 2, characterized in that: The suction cup member comprises: a body, the body being rotatably connected to the connecting rod; A plurality of suction rods, each of which is provided on the body at intervals, each of which is a hollow structure, and one end of each of which is suitable for communicating with a vacuum device; When the plurality of suction rods are vacuuming, the plurality of suction rods absorb the workpiece to be exposed.

4. The high-efficiency single-machine double-sided exposure equipment according to claim 3, characterized in that: A plurality of through holes are formed on the body, and the plurality of through holes are arranged in an array.

5. The high-efficiency single-machine double-sided exposure equipment according to any one of claims 1 to 4, characterized in that: Also includes: A plurality of support members, each of which is provided on both sides of the base in a width direction, and each of which extends along a thickness direction of the base; A first guide member, the first guide member is connected to the plurality of support members, a first slide groove is formed on one of the first guide member and the connecting rod, a first slide rail is provided on the other of the first guide member and the connecting rod, and the first slide rail is slidably engaged with the first slide groove.

6. The high-efficiency single-machine double-sided exposure equipment according to claim 5, characterized in that: One end of each of the plurality of support members away from the base is connected to a connecting plate, and the first guide member is connected to the connecting plate.

7. The high-efficiency single-machine double-sided exposure equipment according to claim 6, characterized in that: The connecting plate is located below the exposure assembly. A plurality of exposure holes are formed on the connecting plate. The exposure assembly includes a plurality of exposure heads, and the plurality of exposure heads correspond to the plurality of exposure holes in a one-to-one manner.

8. The high-efficiency single-machine double-sided exposure equipment according to any one of claims 1 to 4, characterized in that: A second slide groove is formed on one of the base and the substrate carrier, and a second slide rail is provided on the other of the base and the substrate carrier. The second slide rail is slidably engaged with the second slide groove.

9. The high-efficiency single-machine double-sided exposure equipment according to claim 8, characterized in that: A conveyor belt is provided on one side of the base adjacent to the substrate carrier. The conveyor belt extends along the length direction of the base and is connected to the substrate carrier.

10. The high-efficiency single-machine double-sided exposure equipment according to claim 1, characterized in that: A gas channel is formed on the substrate carrier, and one end of the gas channel is suitable for communicating with a vacuum pump; When the gas channel is evacuated, the substrate carrier absorbs the object to be exposed.

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