Device for preparing acetylene for electronic industry by purifying industrial acetylene

Abstract

The utility model relates to the technical field of acetylene purification, in particular to a device for preparing acetylene for electronic industry by purifying industrial acetylene, which comprises a film press, the film press is provided with a primary pressurizing mechanism and a secondary pressurizing mechanism, and an inlet and an outlet of the primary pressurizing mechanism are respectively communicated with a gas supply end and a cooling component; the inlet end of the adsorption tower component is communicated with the outlet end of the cooling component, and the outlet end of the adsorption tower component is sequentially communicated with a flow regulating valve and a pressure regulating valve; the inlet end of the bubbling adsorption component is connected with the adsorption tower component, and the outlet end of the bubbling adsorption component is communicated with the inlet end of the secondary pressurization mechanism; the inlet end and the outlet end of the regeneration part are respectively communicated with the outlet end and the inlet end of the adsorption tower part. The device is beneficial to further purification of industrial acetylene, is simple and convenient to operate, and reduces power consumption.

Description

Technical Field

[0001] The utility model relates to the technical field of acetylene purification, in particular to a device for purifying industrial acetylene to prepare acetylene for the electronics industry. Background Art

[0002] Acetylene is mainly used in the fields of organic synthesis, metal welding and cutting, and high-purity acetylene is mainly used in laboratory analysis, standard gas and calibration gas.

[0003] High-purity industrial acetylene is gaining increasing attention in the semiconductor industry. Electronic-grade acetylene with a purity of 99.9% or higher is used in the preparation of carbon mask films for photolithography in large-scale integrated circuit manufacturing. In this process, plasma-enhanced chemical vapor deposition (CVD) is used to form a stable amorphous carbon layer on the silicon surface, creating a carbon hard mask suitable for photolithography. This carbon mask film is a key raw material for the production of logic devices, memory devices, panel devices, and photolithography devices. Acetylene purity directly impacts the performance, integration level, and yield of integrated circuits (ICs). Chip performance and integration directly impact the computing speed and other performance characteristics of electronic devices. Currently, acetylene purification is primarily achieved through decomposition, low-pressure drying, and then high-pressure drying. These purification methods involve multiple steps, are cumbersome, and increase power consumption.

[0004] Therefore, those skilled in the art are committed to developing a device for purifying industrial acetylene to produce acetylene for the electronics industry, which is beneficial for further purification of industrial acetylene, is easy to operate, and reduces power consumption. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a device for purifying industrial acetylene to prepare acetylene for the electronic industry, which is beneficial to further purifying the industrial acetylene, is easy to operate and reduces power consumption.

[0006] The technical solution of the utility model to solve the above technical problems is as follows:

[0007] A device for purifying industrial acetylene to produce acetylene for the electronics industry, comprising:

[0008] A membrane press, wherein the membrane press has a primary pressurizing mechanism and a secondary pressurizing mechanism, wherein the inlet and outlet of the primary pressurizing mechanism are respectively connected to an air supply end and a cooling component;

[0009] An adsorption tower component, wherein the inlet end of the adsorption tower component is connected to the outlet end of the cooling component, and the outlet end of the adsorption tower component is sequentially connected to a flow regulating valve and a pressure regulating valve;

[0010] a bubbling adsorption component, wherein the inlet end of the bubbling adsorption component is connected to the adsorption tower component, and the outlet end of the bubbling adsorption component is connected to the inlet end of the secondary boosting mechanism;

[0011] The regeneration component has an inlet end and an outlet end thereof communicated with the outlet end and the inlet end of the adsorption tower component respectively.

[0012] The beneficial effects of adopting the above scheme are as follows: industrial acetylene is pressurized and cooled by the primary pressurizing mechanism and then transported to the adsorption tower component. The adsorption tower component absorbs moisture in the industrial acetylene and then condenses and absorbs carbon dioxide, methane, oxygen, etc. in the bubbling adsorption component, thereby producing high-purity acetylene for the electronics industry, thereby improving the purity of acetylene, requiring fewer components, simplifying operation, and reducing energy consumption.

[0013] On the basis of the above technical solution, the present invention can also be improved as follows.

[0014] Furthermore, the outlet end of the secondary boosting mechanism is sequentially connected to a metering component and a charging component.

[0015] The beneficial effect of adopting the above further solution is that the metering component is used to meter the purified acetylene and then fill it into the container through the charging component.

[0016] Furthermore, the cooling component includes a cooling coil, a coolant tank and a heat dissipation mechanism, the cooling coil is arranged in the coolant tank, and the coolant tank is filled with coolant, and both ends of the cooling coil are respectively connected to the outlet end of the primary supercharging mechanism and the inlet end of the adsorption tower component;

[0017] The lower side of the coolant tank is connected in sequence with a liquid supply pump, the heat dissipation mechanism and the upper end of the coolant tank, and the outlet end of the liquid supply pump is communicated with the upper end of the coolant tank through a three-way valve.

[0018] The beneficial effect of adopting the above further solution is: the heat dissipation efficiency of the heat dissipation mechanism is adjusted by the opening of the three-way valve, so that the coolant in the coolant tank is maintained within a suitable temperature range, which is conducive to the subsequent adsorption tower components to adsorb moisture.

[0019] Furthermore, the adsorption tower component includes a first adsorption tower and a second adsorption tower, and the inlet end and the outlet end of the first adsorption tower and the second adsorption tower are respectively connected in series.

[0020] The beneficial effect of adopting the above further solution is: two adsorption towers are arranged in series, one working and the other regenerating, thereby improving the acetylene purification efficiency.

[0021] Furthermore, at least one silica gel layer and a molecular sieve adsorption layer are installed in each of the first adsorption tower and the second adsorption tower.

[0022] The beneficial effect of adopting the above further solution is that the silica gel layer and the molecular sieve adsorption layer are used to adsorb moisture in the acetylene gas and are beneficial to subsequent regeneration.

[0023] Furthermore, the bubbling adsorption component includes a bubbling adsorption tower, a metal filter is installed at the bottom of the bubbling adsorption tower, the bubbling adsorption tower is filled with DMF solution, and a hot water coil is also installed on the bubbling adsorption tower.

[0024] The beneficial effect of adopting the above further solution is that when the bubbling adsorption tower is regenerated, high-temperature water is introduced into the hot water coil so that the impurity gases condensed and adsorbed in the DMF solution are heated and precipitated.

[0025] Furthermore, the regeneration component includes a regeneration gas cooling mechanism, a condensate collecting mechanism and a regeneration gas heating mechanism. The inlet end of the regeneration gas cooling mechanism is connected to the outlet end of the adsorption tower component. The outlet end of the regeneration gas cooling mechanism is connected to the condensate collecting mechanism and the regeneration gas heating mechanism in sequence. The outlet end of the regeneration gas heating mechanism is connected to the inlet end of the adsorption tower component.

[0026] The beneficial effect of adopting the above further scheme is: the silica gel and molecular sieve adsorption layer are regenerated by high-temperature gas, and the moisture is cooled along with the high-temperature gas in the regeneration gas cooling mechanism so that the moisture condenses and precipitates, is collected by the condensate collection mechanism, and then transported to the regeneration gas heating mechanism.

[0027] Furthermore, the outer layers of the first adsorption tower and the second adsorption tower are both equipped with heat dissipation fins.

[0028] The beneficial effect of adopting the above further solution is that the heat dissipation fins accelerate the heat dissipation efficiency of the first adsorption tower and the second adsorption tower. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic diagram of the structure of a device for purifying industrial acetylene to produce acetylene for the electronics industry in a specific embodiment of the present utility model;

[0030] Figure 2 This is a structural diagram of a cooling component in a specific embodiment of the present utility model.

[0031] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0032] 1. Membrane press; 2. Primary boosting mechanism; 3. Secondary boosting mechanism; 4. Gas supply end; 5. Cooling component; 6. Adsorption tower component; 7. Flow regulating valve; 8. Pressure regulating valve; 9. Bubble adsorption component; 10. Regeneration component; 11. Metering component; 12. Loading component; 13. Cooling coil; 14. Coolant tank; 15. Heat dissipation mechanism; 16. Liquid supply pump; 17. Three-way valve; 18. First adsorption tower; 19. Second adsorption tower; 20. Silica gel layer; 21. Molecular sieve adsorption layer; 22. Regeneration gas cooling mechanism; 23. Condensate collection mechanism; 24. Regeneration gas heating mechanism. DETAILED DESCRIPTION

[0033] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0034] In the description of the present invention, it should be understood that the terms "center", "length", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "inside", "outside", "peripheral", "circumferential" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the system or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0035] In the description of the present invention, “a plurality of” means at least two, such as two, three, etc., unless otherwise clearly defined.

[0036] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0037] like Figure 1 、 Figure 2 As shown, a device for purifying industrial acetylene to produce acetylene for the electronics industry includes:

[0038] A membrane press 1 comprises a primary pressurizing mechanism 2 and a secondary pressurizing mechanism 3, wherein the inlet and outlet of the primary pressurizing mechanism 2 are respectively connected to an air supply end 4 and a cooling component 5;

[0039] The adsorption tower component 6, the inlet end of the adsorption tower component 6 is connected to the outlet end of the cooling component 5, and the outlet end of the adsorption tower component 6 is sequentially connected to the flow regulating valve 7 and the pressure regulating valve 8;

[0040] The bubbling adsorption component 9 has an inlet end connected to the adsorption tower component 6 and an outlet end connected to the inlet end of the secondary boosting mechanism 3;

[0041] The regeneration component 10 has an inlet end and an outlet end thereof communicated with the outlet end and the inlet end of the adsorption tower component 6 respectively.

[0042] In the utility model, industrial acetylene is pressurized and cooled by the primary pressurizing mechanism 2 and then transported to the adsorption tower component 6. The adsorption tower component 6 absorbs moisture in the industrial acetylene and then transports it to the bubbling adsorption component 9 to condense and absorb carbon dioxide, methane, oxygen, etc., thereby producing acetylene with higher purity for the electronic industry, thereby improving the purity of acetylene, requiring fewer components, simplifying operation, and reducing energy consumption.

[0043] like Figure 1 、 Figure 2 As shown, in some embodiments, a flow control valve 7 is used to adjust the flow rate to ensure sufficient contact time of the acetylene gas within the adsorption tower component 6. A pressure control valve 8 is used to adjust the pressure within the adsorption tower component 6, generally controlled at 2 bar(g) to 8 bar(g). The outlet end of the secondary boosting mechanism 3 is connected in sequence to a metering component 11 and a charging component 12. The purified acetylene is further pressurized by the secondary boosting mechanism 3 and then transported to the metering component 11 and the charging component 12, where the acetylene is loaded into a suitable container.

[0044] The temperature inside the adsorption tower component 6 must be maintained between 30°C and 60°C. After industrial acetylene is pressurized by the primary booster mechanism 2, it needs to be cooled to maintain the acetylene temperature between 30°C and 60°C, thereby facilitating moisture adsorption by the adsorption tower component 6. Specifically, the cooling component 5 includes a cooling coil 13, a coolant tank 14, and a heat dissipation mechanism 15. The cooling coil 13 can be a copper tube and is disposed in the coolant tank 14, which is filled with coolant. The two ends of the cooling coil 13 are connected to the outlet of the primary booster mechanism 2 and the inlet of the adsorption tower component 6, respectively.

[0045] The lower side of the coolant tank 14 is connected in sequence with a liquid supply pump 16, a heat dissipation mechanism 15 and the upper end of the coolant tank 14. The outlet end of the liquid supply pump 16 is connected to the upper end of the coolant tank 14 through a three-way valve 17. The liquid supply pump 16 pumps the coolant at the bottom of the coolant tank 14, and a part of it is delivered to the heat dissipation mechanism 15, and the other part directly reaches the outlet end of the heat dissipation mechanism 15 through the three-way valve 17. The amount of coolant entering the heat dissipation mechanism 15 is adjusted by the three-way valve 17, thereby controlling the heat dissipation efficiency of the heat dissipation mechanism 15, so that the coolant temperature in the coolant tank 14 is maintained within an appropriate range.

[0046] The adsorption tower component 6 includes a first adsorption tower 18 and a second adsorption tower 19. The inlet and outlet ends of the first adsorption tower 18 and the second adsorption tower 19 are connected in series. During the acetylene purification process, an adsorption-regeneration mode is adopted to improve the efficiency of acetylene purification. The first adsorption tower 18 and the second adsorption tower 19 are each installed with at least one silica gel layer 20 and a molecular sieve adsorption layer 21. The molecular sieve adsorption layer 21 can use 3A molecular sieve. The outer layers of the first adsorption tower 18 and the second adsorption tower 19 are both installed with heat dissipation fins. The heat dissipation fins are used to accelerate the natural cooling efficiency after the adsorption tower is regenerated.

[0047] like Figure 1 In another embodiment, the bubbling adsorption component 9 includes a bubbling adsorption tower having a metal filter installed at the bottom thereof for gas distribution and aeration. The bubbling adsorption tower is filled with a DMF solution, and the acetylene gas is distributed and aerated to increase the contact area between the acetylene gas and the DMF solution. The bubbling adsorption tower is also equipped with a hot water coil for heating the liquid during regeneration of the bubbling adsorption tower to precipitate impurity gases dissolved in the DMF solution.

[0048] In some embodiments, the regeneration component 10 includes a regeneration gas cooling mechanism 22, a condensate collecting mechanism 23 and a regeneration gas heating mechanism 24. The inlet end of the regeneration gas cooling mechanism 22 is connected to the outlet end of the adsorption tower component 6. The outlet end of the regeneration gas cooling mechanism 22 is connected to the condensate collecting mechanism 23 and the regeneration gas heating mechanism 24 in sequence. The outlet end of the regeneration gas heating mechanism 24 is connected to the inlet end of the adsorption tower component 6.

[0049] After being heated, the regeneration gas enters the adsorption tower component 6, regenerating the silica gel layer 20 and the molecular sieve adsorption layer 21 at high temperature. The regeneration gas mixed with water vapor enters the regeneration gas cooling mechanism 22, causing the water vapor to precipitate at low temperature. The condensed water is collected by the condensed water collection mechanism 23 and then passed into the regeneration gas heating mechanism 24 for circulation.

[0050] Example 1

[0051] The primary boosting mechanism 2 boosts the industrial acetylene and then transports it to the cooling component 5. The cooling component 5 cools the acetylene so that the acetylene outlet temperature is maintained at 30°C to 60°C, and the acetylene gas is transported to the first adsorption tower 18 or the second adsorption tower 19 for adsorption. The outlet pressure of the acetylene gas is adjusted by the pressure regulating valve 8, and the outlet flow rate of the acetylene gas is adjusted by the flow regulating valve 7. The outlet pressure is maintained at 2 bar(g) to 8 bar(g).

[0052] The acetylene is then transported to a drum adsorption tower for further adsorption. The temperature of the drum adsorption tower is 30°C to 80°C, the pressure is normal pressure, and the flow rate is 100kg / h to 300kg / h.

[0053] When the adsorption tower is regenerated, regeneration gas is passed to the first adsorption tower 18 or the second adsorption tower 19. The regeneration gas can be nitrogen or acetylene. The regeneration temperature is 200℃~400℃, the regeneration pressure is 2bar(g)~8bar(g), and the regeneration flow rate is 20m 3 / h~40m 3 / h, the regeneration time is 12h~36h. After the regeneration is completed, the adsorption tower reaches the ambient temperature through natural cooling.

[0054] When the bubbling adsorption tower is regenerated, circulating hot water at 30°C to 80°C and a flow rate of 100kg / h to 300kg / h is introduced into the hot water coil to heat the DMF solvent, and the impurity waste gas precipitated in the solvent is introduced into the incinerator for incineration.

[0055] In the description of this specification, the reference terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0056] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A device for purifying industrial acetylene to produce acetylene for the electronics industry, characterized by: include A membrane press (1), the membrane press (1) comprising a primary pressurizing mechanism (2) and a secondary pressurizing mechanism (3), the inlet and outlet of the primary pressurizing mechanism (2) being connected to an air supply end (4) and a cooling component (5), respectively; An adsorption tower component (6), wherein the inlet end of the adsorption tower component (6) is connected to the outlet end of the cooling component (5), and the outlet end of the adsorption tower component (6) is sequentially connected to a flow regulating valve (7) and a pressure regulating valve (8); A bubbling adsorption component (9), wherein the inlet end of the bubbling adsorption component (9) is connected to the adsorption tower component (6), and the outlet end of the bubbling adsorption component (9) is communicated with the inlet end of the secondary boosting mechanism (3); A regeneration component (10), wherein the inlet end and the outlet end of the regeneration component (10) are respectively communicated with the outlet end and the inlet end of the adsorption tower component (6).

2. The device for purifying industrial acetylene to produce acetylene for the electronics industry according to claim 1, characterized in that: The outlet end of the secondary boosting mechanism (3) is sequentially connected to a metering component (11) and a charging component (12).

3. The device for purifying industrial acetylene to produce acetylene for the electronics industry according to claim 1, characterized in that: The cooling component (5) includes a cooling coil (13), a coolant tank (14) and a heat dissipation mechanism (15); the cooling coil (13) is arranged in the coolant tank (14), and the coolant tank (14) is filled with coolant; both ends of the cooling coil (13) are respectively connected to the outlet end of the primary boost mechanism (2) and the inlet end of the adsorption tower component (6); The lower side of the coolant tank (14) is connected in sequence to a liquid supply pump (16), the heat dissipation mechanism (15) and the upper end of the coolant tank (14), and the outlet end of the liquid supply pump (16) is connected to the upper end of the coolant tank (14) through a three-way valve (17).

4. The device for purifying industrial acetylene to produce acetylene for the electronics industry according to claim 1, characterized in that: The adsorption tower component (6) comprises a first adsorption tower (18) and a second adsorption tower (19), wherein the inlet end and the outlet end of the first adsorption tower (18) and the second adsorption tower (19) are respectively connected in series.

5. The device for purifying industrial acetylene to produce acetylene for the electronics industry according to claim 4, characterized in that: At least one silica gel layer (20) and a molecular sieve adsorption layer (21) are installed in each of the first adsorption tower (18) and the second adsorption tower (19).

6. The device for purifying industrial acetylene to produce acetylene for the electronics industry according to claim 1, characterized in that: The bubbling adsorption component (9) comprises a bubbling adsorption tower, a metal filter is installed at the bottom of the bubbling adsorption tower, the bubbling adsorption tower is filled with DMF solution, and a hot water coil is also installed on the bubbling adsorption tower.

7. The device for purifying industrial acetylene to produce acetylene for the electronics industry according to claim 1, characterized in that: The regeneration component (10) includes a regeneration gas cooling mechanism (22), a condensate collecting mechanism (23) and a regeneration gas heating mechanism (24); the inlet end of the regeneration gas cooling mechanism (22) is connected to the outlet end of the adsorption tower component (6); the outlet end of the regeneration gas cooling mechanism (22) is connected to the condensate collecting mechanism (23) and the regeneration gas heating mechanism (24) in sequence; and the outlet end of the regeneration gas heating mechanism (24) is communicated with the inlet end of the adsorption tower component (6).

8. The device for purifying industrial acetylene to produce acetylene for the electronics industry according to claim 4, characterized in that: The outer layers of the first adsorption tower (18) and the second adsorption tower (19) are both equipped with heat dissipation fins.

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