Gas mixing device for semiconductor gas

Abstract

The utility model relates to a gas mixing device for semiconductor gas. The gas mixing device comprises a container part, a gas mixing part, a pressurizing part, a monitoring part and a control part, the gas mixing device has the advantages that the gas mixing part is arranged in the container part, and different gases introduced into the container part can be mixed, so that the mixing efficiency of the gases in the container part is enhanced, and the mixing effect is improved; besides, the monitoring part and the pressurizing part are arranged in the container part, and the pressurizing part can compress the space in the container part under the condition that the pressure and the supply flow, monitored by the monitoring part, in the container part are small, so that the pressure in the container part and the supply flow of downstream process equipment are enhanced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor process equipment, in particular to a gas mixing device for semiconductor gases. Background Art

[0002] The semiconductor manufacturing process may involve the use of multiple gases (or chemical sources). For example, the fabrication of multilayer thin films requires the use of multiple gases. During the process, different gases are mixed and supplied to the wafer surface for reaction. The uniformity of the gas mixture determines the quality of the deposition on the wafer surface.

[0003] Thin film deposition has very high requirements for film formation uniformity, which puts higher requirements on the uniformity of gas mixing before entering the reaction chamber. The existing technology is connected to the mixing chamber through two or more channels, all extending toward the center of the mixing chamber. In this way, the two gases will collide with each other after flowing into the mixing chamber to form a turbulent flow, so that the two gases can be mixed more evenly in the mixing chamber.

[0004] However, because the gas types in the mixing barrel are different, their quality and gas properties are also different. If they are not used in time within a certain period of time, if the gas is not used at the process end after mixing, the gas in the barrel will form precipitation and stratification, which will lead to uneven gas mixing; in addition, during the semiconductor process, the flow rate of the mixed gas may not meet the needs of the downstream semiconductor process.

[0005] Currently, no effective solutions have been proposed for the problems of uneven gas mixing and flow supply that cannot meet the needs of downstream processes in related technologies. Utility Model Content

[0006] The purpose of the utility model is to address the deficiencies in the prior art and provide a gas mixing device for semiconductor gases to solve the problems existing in the related art such as uneven gas mixing and flow supply that cannot meet the needs of downstream processes.

[0007] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0008] The utility model provides a gas mixing device for semiconductor gases, comprising:

[0009] A container component, wherein the container component is connected to an upstream process device and a downstream process device, respectively, and is used to receive multiple gases from the upstream process device and transport the mixed gas to the downstream process device;

[0010] a gas mixing component, the gas mixing component being arranged inside the container component and being used to disturb the gas inside the container component;

[0011] a pressurizing component, disposed inside the container component and configured to compress the space inside the container component;

[0012] A monitoring component is provided at the gas outlet of the container component and is used to monitor the pressure and flow inside the container component in real time;

[0013] A control component is provided in the container component and is respectively connected to the container component, the gas mixing component, the pressurizing component and the monitoring component, and is used to control the container component, the gas mixing component and the pressurizing component.

[0014] In some embodiments, the container component includes:

[0015] A container component, wherein the container component is connected to an upstream process device and a downstream process device, and is used to receive multiple gases from the upstream process device and transport the mixed gas to the downstream process device;

[0016] a plurality of air inlet pipes, wherein the first ends of the plurality of air inlet pipes are respectively connected to the container members, and the second ends of the plurality of air inlet pipes are respectively connected to corresponding upstream process equipment for conveying gas;

[0017] An air outlet pipe member, wherein a first end of the air outlet pipe member is connected to the container member, and a second end of the air outlet pipe member is connected to a downstream process device for conveying the mixed gas.

[0018] In some embodiments, the container component further comprises:

[0019] a plurality of first switch valves, each of which is provided on the corresponding air intake pipe and connected to the control component for controlling the flow of the air intake pipe;

[0020] A second switch valve is provided on the air outlet pipe and is connected to the control component for controlling the flow of the air outlet pipe.

[0021] In some embodiments, the gas mixing component includes:

[0022] a driving member, the driving member being disposed at the bottom of the container member and connected to the control member for providing power;

[0023] a screw member, the screw member being coaxially connected to the output shaft of the driving member and being adapted to rotate under the action of the driving member;

[0024] The first gas mixing component is provided at its center through the screw component and is threadedly connected to the screw component, and is used for rotating and reciprocatingly rising and falling under the action of the screw component to disturb the gas inside the container component.

[0025] In some embodiments, the gas mixing component further comprises:

[0026] a first limiting member, the first limiting member being provided at a first end of the screw member and being used for limiting the first gas mixing member;

[0027] A second limiting member is provided at the second end of the screw rod and is used to limit the first mixing member.

[0028] In some embodiments, the gas mixing component further comprises:

[0029] Two mounting pieces, the two mounting pieces are respectively mounted at two ends of the first gas mixing piece and are used for mounting components;

[0030] Two second gas mixing pieces are rotatably connected to the interior of the mounting piece and are used to rotate and disturb the gas inside the container component under the action of the first gas mixing piece.

[0031] In some embodiments, the pressurizing component includes:

[0032] a pressurizing member, which is disposed at the top of the container component and is connected to the container component in a lifting manner, and is used to compress the space inside the container component;

[0033] a communicating pipe, a first end of which is in communication with a cavity formed between the container component and the pressurizing component for conveying gas;

[0034] An air pump component is arranged on the top of the container component and is communicated with the second end of the communicating pipe component. The air pump component is connected to the control component and is used for compressing air.

[0035] In some embodiments, the pressurizing component further comprises:

[0036] A sealing member is provided between the pressurizing member and the inner wall of the container component and is used for sealing the abutment between the pressurizing member and the container component.

[0037] In some embodiments, the monitoring component includes:

[0038] a first monitoring component, the first monitoring component being disposed inside the container component and being used to monitor the pressure inside the container component in real time;

[0039] A second monitoring component is provided at the air outlet of the container component and is used for monitoring the flow rate of the air outlet of the container component in real time.

[0040] In some embodiments, the control component includes:

[0041] a communication component, which is provided on the container component and is connected to the monitoring component and an external remote control device, respectively, for receiving and transmitting signals;

[0042] A control component is provided in the container component and is respectively connected to the communication component, the container component, the gas mixing component and the pressurizing component, and is used to control the container component, the gas mixing component and the pressurizing component.

[0043] The present invention adopts the above technical solution, and compared with the prior art, has the following technical effects:

[0044] The utility model provides a gas mixing device for semiconductor gases. By arranging a gas mixing component inside a container component, different gases introduced into the container component can be mixed, thereby enhancing the mixing efficiency of the gases inside the container component and increasing the mixing effect. In addition, by arranging a monitoring component and a pressurizing component inside the container component, when the pressure inside the container component and the supply flow rate monitored by the monitoring component are small, the pressurizing component can compress the space inside the container component, thereby enhancing the pressure inside the container component and the supply flow rate to downstream process equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 1 is a schematic diagram of the external structure of the gas mixing device according to an embodiment of the present utility model;

[0046] Figure 2 1 is a schematic diagram of the internal structure of the gas mixing device according to an embodiment of the present utility model (I);

[0047] Figure 3 is a schematic diagram of a container component and a pressurizing component according to an embodiment of the present utility model;

[0048] Figure 4 1 is a schematic diagram of a gas mixing component according to an embodiment of the present invention (I);

[0049] Figure 5 1 is a schematic diagram of a frame of a gas mixing device according to an embodiment of the present utility model;

[0050] Figure 6 2 is a schematic diagram of the internal structure of the gas mixing device according to an embodiment of the present utility model;

[0051] Figure 7 2 is a schematic diagram of a gas mixing component according to an embodiment of the present invention.

[0052] The reference numerals are: 100, container component; 110, container component; 120, air inlet pipe component; 130, air outlet pipe component; 140, first switch valve; 150, second switch valve;

[0053] 200, gas mixing component; 210, driving component; 220, screw component; 230, first gas mixing component; 240, first position limiting component; 250, second position limiting component; 260, mounting component; 270, second gas mixing component;

[0054] 300, pressurizing component; 310, pressurizing component; 320, connecting pipe; 330, air pump component;

[0055] 400, monitoring component; 410, first monitoring component; 420, second monitoring component;

[0056] 500, control component; 510, communication component; 520, control component. DETAILED DESCRIPTION

[0057] In order to make the purpose, technical solutions and advantages of this application more clearly understood, the present application is described and illustrated below in conjunction with the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely used to explain this application and are not intended to limit this application. Based on the embodiments provided in this application, all other embodiments obtained by those of ordinary skill in the art without making any creative efforts are within the scope of protection of this application.

[0058] Obviously, the drawings described below are merely examples or embodiments of the present application. Those skilled in the art can, without inventive effort, apply the present application to other similar scenarios based on these drawings. Furthermore, it is also understood that, although the effort involved in such a development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this application, changes in design, manufacturing, or production based on the technical content disclosed in this application are merely conventional technical means and should not be construed as an insufficiency of the content disclosed in this application.

[0059] References to "embodiments" in this application mean that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it refer to independent or alternative embodiments that are mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described in this application may be combined with other embodiments unless there is a conflict.

[0060] Example 1

[0061] An illustrative embodiment of the present invention is as follows: Figure 1 、 Figure 2 and Figure 5 As shown, a gas mixing device for semiconductor gases includes a container component 100, a gas mixing component 200, a pressurizing component 300, a monitoring component 400, and a control component 500. The container component 100 is connected to upstream process equipment and downstream process equipment, respectively, for receiving multiple gases from the upstream process equipment and delivering the mixed gas to the downstream process equipment; the gas mixing component 200 is disposed inside the container component 100 and is used to disturb the gas inside the container component 100; the pressurizing component 300 is disposed inside the container component 100 and is used to compress the space inside the container component 100; the monitoring component 400 is disposed at the gas outlet of the container component 100 and is used to monitor the pressure and flow inside the container component 100 in real time; and the control component 500 is disposed in the container component 100 and is connected to the container component 100, the gas mixing component 200, the pressurizing component 300, and the monitoring component 400, respectively, for controlling the container component 100, the gas mixing component 200, and the pressurizing component 300.

[0062] like Figure 3 As shown, the container component 100 includes a container 110, a plurality of air inlet pipes 120, and an air outlet pipe 130. The container 110 is respectively connected to upstream process equipment and downstream process equipment, and is used to receive multiple gases from the upstream process equipment and deliver mixed gases to the downstream process equipment; the first ends of the plurality of air inlet pipes 120 are respectively connected to the container 110, and the second ends of the plurality of air inlet pipes 120 are respectively connected to the corresponding upstream process equipment for delivering gases; the first end of the air outlet pipe 130 is connected to the container 110, and the second end of the air outlet pipe 130 is connected to the downstream process equipment for delivering mixed gases.

[0063] Specifically, the container part 110 is arranged in a hollow barrel structure, and the container part 110 can be connected with a cylinder, upstream process equipment, downstream process equipment, etc., so that a variety of different gases can be introduced into the container part 110. After the multiple gases are evenly mixed, the mixed gas can be introduced into the downstream process equipment.

[0064] In some embodiments, the container 110 includes, but is not limited to, a stainless steel drum.

[0065] Specifically, the first end of the air intake pipe 120 is connected to the container part 110 by welding, riveting or integral molding, and the connection point between the first end of the air intake pipe 120 and the container part 110 is located at the bottom position of the container part 110, and the second end of the air intake pipe 120 is connected to the cylinder or upstream process equipment; it should be noted that the first end and the second end of the air intake pipe 120 are respectively the two ends in its length direction.

[0066] In some embodiments, the air inlet pipe 120 includes but is not limited to a stainless steel pipe.

[0067] More specifically, the number of the air intake pipes 120 is four, and the four air intake pipes 120 are symmetrically arranged along the central axis of the container 110 .

[0068] In some embodiments, the number of the air intake pipes 120 may be 2, 3, 5, etc., that is, the number of the air intake pipes 120 may be set according to actual needs, and no excessive restrictions are imposed herein.

[0069] Specifically, the first end of the air outlet pipe fitting 130 is connected to the container part 110 by welding, riveting or integral molding, and the connection point between the first end of the air outlet pipe fitting 130 and the container part 110 is located in the middle position of the container part 110, and the second end of the air outlet pipe fitting 130 is connected to the downstream process equipment; it should be noted that the first end and the second end of the air outlet pipe fitting 130 are respectively the two ends in its length direction.

[0070] In some embodiments, the gas outlet pipe 130 includes but is not limited to a stainless steel pipe.

[0071] Furthermore, the container component 100 also includes a plurality of first on-off valves 140 and second on-off valves 150. The first on-off valves 140 are respectively disposed on corresponding air inlet pipes 120 and connected to the control component 500 to control the flow of air through the air inlet pipes 120; the second on-off valves 150 are disposed on the air outlet pipes 130 and connected to the control component 500 to control the flow of air through the air outlet pipes 130.

[0072] In some embodiments, the first switching valve 140 includes but is not limited to a diaphragm valve.

[0073] In some embodiments, the second switching valve 150 includes but is not limited to a diaphragm valve.

[0074] It should be noted that the number of the first switch valves 140 is four, and the four first switch valves 140 are respectively disposed on corresponding intake pipes 120 .

[0075] In some embodiments, the number of the first switch valves 140 matches the number of the intake pipes 120 ; it should be understood that the number of the first switch valves 140 is the same as the number of the intake pipes 120 .

[0076] like Figure 4As shown, the gas mixing component 200 includes a driving member 210, a screw member 220, and a first gas mixing member 230. The driving member 210 is disposed at the bottom of the container 100 and is connected to the control member 500 for providing power. The screw member 220 is coaxially connected to the output shaft of the driving member 210 and is configured to rotate under the action of the driving member 210. The first gas mixing member 230 is centrally disposed through the screw member 220 and is threadedly connected to the screw member 220. It is configured to rotate and reciprocate under the action of the screw member 220, thereby disturbing the gas inside the container 100.

[0077] Specifically, the driving member 210 is installed on the bottom wall inside the container member 110 by welding, riveting or bolting, and the driving member 210 is connected to the control member 500 by wired connection, and the driving member 210 is located at the center of the bottom wall inside the container member 110.

[0078] In some embodiments, the driving member 210 includes but is not limited to a rotary motor.

[0079] Specifically, the screw rod member 220 is vertically arranged inside the container member 110, and the first end of the screw rod member 220 is connected to the output shaft of the driving member 210 by welding, bolt fixing or integral molding, and the second end of the screw rod member 220 extends to the lower side of the exhaust pipe member 130; it should be noted that the first end and the second end of the screw rod member 220 are respectively the two ends in its length direction.

[0080] In some embodiments, the screw member 220 includes but is not limited to a threaded rod.

[0081] Specifically, a threaded hole is defined at the center of the first gas mixing component 230 , and the screw member 220 can pass through the threaded hole of the first gas mixing component 230 and be threadedly connected to the first gas mixing component 230 .

[0082] In some embodiments, the first gas mixing element 230 includes but is not limited to a stainless steel rod.

[0083] It should be noted that the rotation of the screw member 220 can drive the rotation of the first mixing member 230. When the screw member 220 stops rotating, the first mixing member 230 can rise and fall due to inertia, thereby effectively mixing the gas inside the container member 110.

[0084] Furthermore, the gas mixing component 200 further includes a first stopper 240 and a second stopper 250. The first stopper 240 is disposed at the first end of the screw member 220 for limiting the first gas mixing component 230, while the second stopper 250 is disposed at the second end of the screw member 220 for limiting the first gas mixing component 230.

[0085] Specifically, the first limiting member 240 is connected to the first end of the screw member 220 by welding, riveting, or bolting, so as to prevent the first mixing member 230 from being separated from the screw member 220 .

[0086] In some embodiments, the first limiting member 240 includes but is not limited to a circular plate.

[0087] Specifically, the second limiting member 250 is connected to the second end of the screw member 220 by welding, riveting, or bolting, so as to prevent the first mixing member 230 from being separated from the screw member 220 .

[0088] In some embodiments, the second limiting member 250 includes but is not limited to a circular plate.

[0089] like Figure 3 As shown, the pressurizing component 300 includes a pressurizing component 310, a connecting pipe 320, and an air pump 330. The pressurizing component 310 is disposed at the top of the container component 100 and is connected to the container component 100 for lifting and lowering, and is used to compress the space inside the container component 100; the first end of the connecting pipe 320 is connected to the cavity formed between the container component 100 and the pressurizing component 310, and is used to transport gas; the air pump 330 is disposed at the top of the container component 100 and is connected to the second end of the connecting pipe 320. The air pump 330 is connected to the control component 500 and is used to compress air.

[0090] Specifically, the pressurizing member 310 is connected to the interior of the container 110 in a lifting manner, and the pressurizing member 310 can compress the space inside the container 110 , thereby increasing the pressure inside the container 110 and the flow rate of the outlet pipe 130 .

[0091] In some embodiments, the pressurizing member 310 includes but is not limited to a stainless steel circular plate.

[0092] Specifically, the first end of the connecting pipe 320 is connected to the air pump part 330, and the second end of the connecting pipe 320 is connected to the top of the container part 110, and is used to transport gas to the cavity formed between the pressurizing part 310 and the top of the container part 110; it should be noted that the first end and the second end of the connecting pipe 320 are respectively the two ends of its length direction.

[0093] In some embodiments, the connecting pipe 320 includes but is not limited to a hose.

[0094] Specifically, the air pump component 330 is installed on the top of the container component 110 by welding, riveting or bolting, and the air pump component 330 is connected to the control component 500 by wired connection.

[0095] In some embodiments, the air pump component 330 includes but is not limited to a compressed air pump.

[0096] Furthermore, the pressurizing component 300 further includes a sealing member, wherein the sealing member is disposed between the pressurizing component 310 and the inner wall of the container component 100 , and is used to seal the abutment between the pressurizing component 310 and the container component 100 .

[0097] Specifically, the sealing member is sleeved on the circumferential side wall of the pressurizing member 310 , and the sealing member abuts against the inner wall of the container member 110 , thereby sealing the gap between the pressurizing member 310 and the container member 110 .

[0098] In some embodiments, the sealing member includes but is not limited to a rubber ring.

[0099] like Figure 5 As shown, the monitoring component 400 includes a first monitoring component 410 and a second monitoring component 420. The first monitoring component 410 is disposed inside the container component 100 and is used to monitor the pressure inside the container component 100 in real time; the second monitoring component 420 is disposed at the air outlet of the container component 100 and is used to monitor the flow rate of the air outlet of the container component 100 in real time.

[0100] Specifically, the first monitoring component 410 is installed inside the container component 110 by welding, riveting or bolting, and is connected to the control component 500 by wireless connection, etc., for real-time monitoring of the pressure inside the container component 110.

[0101] In some embodiments, the first monitoring component 410 includes but is not limited to a pressure sensor.

[0102] Specifically, the second monitoring component 420 is installed at the connection point between the container component 110 and the air outlet pipe component 130 by welding, riveting or bolting, and is connected to the control component 500 by wireless connection, etc., for real-time monitoring of the flow of the air outlet pipe component 130.

[0103] In some embodiments, the second monitoring component 420 includes but is not limited to a flow meter.

[0104] like Figure 5 As shown, the control component 500 includes a communication component 510 and a control component 520. The communication component 510 is provided in the container component 100 and is respectively connected to the monitoring component 400 and the external remote control device for receiving and transmitting signals; the control component 520 is provided in the container component 100 and is respectively connected to the communication component 510, the container component 100, the gas mixing component 200, and the pressurizing component 300 for controlling the container component 100, the gas mixing component 200, and the pressurizing component 300.

[0105] Specifically, the communication component 510 is installed on the top of the container component 110 by welding, riveting or bolting, and is connected to the first monitoring component 410, the second monitoring component 420 and the external remote control device respectively through wireless connection, etc., for receiving and transmitting signals.

[0106] In some embodiments, the communication component 510 includes but is not limited to a Bluetooth sensor, a WiFi sensor, and a ZigBee sensor.

[0107] Specifically, the control component 520 is installed on the top of the container component 110 by welding, riveting or bolting, and is connected to the communication component 510, the first switch valve 140, the second switch valve 150 and the driving component 210 respectively through wired connection, etc., for controlling the opening and closing of the first switch valve 140, the second switch valve 150 and the start and stop of the driving component 210.

[0108] In some embodiments, the control component 520 includes but is not limited to an MCU, a Raspberry Pi, or a single-chip microcomputer.

[0109] The method of using this embodiment is as follows:

[0110] In actual operation, the staff opens the first switch valve 140 on the air inlet pipe 120 through the control component 520, so that different gases pass into the interior of the container 110 through the air inlet pipe 120;

[0111] Subsequently, the operator activates the driving member 210 through the control member 520. The driving member 210 drives the screw member 220 to rotate. The rotation of the screw member 220 drives the first gas mixing member 230 to rotate and reciprocate along the length of the screw member 220, thereby evenly mixing the different gases in the container 110.

[0112] Then, the staff opens the second switch valve 150 on the gas outlet pipe 130 through the control component 520, so that the mixed gas can flow into the downstream process equipment through the gas outlet pipe 130;

[0113] In addition, when the pressure inside the container part 110 monitored by the first monitoring part 410 and the second monitoring part 420 and the gas flow of the air outlet pipe part 130 are small, the control part 520 starts the air pump part 330 to introduce high-pressure gas into the cavity formed between the pressurizing part 310 and the container part 110, thereby pushing the pressurizing part 310 to move downward, and then compressing the space inside the container part 110, thereby enhancing the internal pressure of the container part 110 and the gas flow of the air outlet pipe part 130.

[0114] The advantage of this embodiment is that by arranging a gas mixing component inside the container component, different gases introduced into the container component can be mixed, thereby enhancing the mixing efficiency of the gases inside the container component and increasing the mixing effect; in addition, by arranging a monitoring component and a pressurizing component inside the container component, when the pressure inside the container component and the supply flow monitored by the monitoring component are small, the pressurizing component can compress the space inside the container component, thereby enhancing the internal pressure of the container component and the supply flow to the downstream process equipment.

[0115] Example 2

[0116] This embodiment is a variation of the first embodiment. The main difference between this embodiment and the first embodiment is that the structure of the gas mixing component 200 is different.

[0117] like Figure 6 and Figure 7 As shown, the gas mixing component 200 further includes two mounting members 260 and two second gas mixing members 270. The two mounting members 260 are mounted at both ends of the first gas mixing member 230 for mounting components. The two second gas mixing members 270 are rotatably connected to the interior of the mounting members 260 and are configured to rotate and disturb the gas within the container 100 under the action of the first gas mixing member 230.

[0118] Specifically, the mounting member 260 is composed of a rod and a hollow frustum. The first end of the rod is vertically mounted at either end of the first mixing element 230 along its length by welding, riveting, or bolting, and the second end of the rod is connected to the hollow frustum by welding, riveting, or bolting. It should be noted that the first and second ends of the rod are respectively its two ends along its length.

[0119] In some embodiments, the mounting member 260 includes, but is not limited to, a hollow frustum of a cone.

[0120] Specifically, the second gas mixing element 270 is rotatably connected to the interior of the mounting element 260 via a rotating shaft, and the second gas mixing element 270 can be rotated by the lifting and lowering of the first gas mixing element 230 .

[0121] In some embodiments, the second gas mixing element 270 includes but is not limited to a fan.

[0122] The method of using this embodiment is as follows:

[0123] In actual operation, the staff opens the first switch valve 140 on the air inlet pipe 120 through the control component 520, so that different gases pass into the interior of the container 110 through the air inlet pipe 120;

[0124] Subsequently, the operator activates the driving member 210 through the control member 520. The driving member 210 drives the screw member 220 to rotate. The rotation of the screw member 220 drives the first gas mixing member 230 to rotate and reciprocate along the length of the screw member 220, thereby evenly mixing the different gases in the container 110.

[0125] Furthermore, while the first mixing element 230 is reciprocating and rising and falling, the second mixing element 270 located inside the mounting element 260 can rotate, thereby disturbing the airflow inside the container 110 and further improving the mixing efficiency of the different gases inside the container 110;

[0126] Finally, the staff opens the second switch valve 150 on the gas outlet pipe 130 through the control component 520, so that the mixed gas can flow into the downstream process equipment through the gas outlet pipe 130.

[0127] The advantage of this embodiment is that by arranging the second mixing pieces at both ends of the length direction of the first mixing piece, while the first mixing piece is reciprocatingly raised and lowered, the second mixing piece located inside the mounting piece can rotate, thereby disturbing the airflow inside the container piece and further improving the mixing efficiency of different gases inside the container piece.

[0128] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0129] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that a person skilled in the art could make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A gas mixing device for semiconductor gas, characterized in that: include: A container component, wherein the container component is connected to an upstream process device and a downstream process device, respectively, and is used to receive multiple gases from the upstream process device and transport the mixed gas to the downstream process device; a gas mixing component, the gas mixing component being arranged inside the container component and being used to disturb the gas inside the container component; a pressurizing component, disposed inside the container component and configured to compress the space inside the container component; A monitoring component is provided at the gas outlet of the container component and is used to monitor the pressure and flow inside the container component in real time; A control component is provided in the container component and is respectively connected to the container component, the gas mixing component, the pressurizing component and the monitoring component, and is used to control the container component, the gas mixing component and the pressurizing component.

2. The gas mixing device according to claim 1, characterized in that The container component comprises: A container component, wherein the container component is connected to an upstream process device and a downstream process device, and is used to receive multiple gases from the upstream process device and transport the mixed gas to the downstream process device; a plurality of air inlet pipes, wherein the first ends of the plurality of air inlet pipes are respectively connected to the container members, and the second ends of the plurality of air inlet pipes are respectively connected to corresponding upstream process equipment for conveying gas; An air outlet pipe member, wherein a first end of the air outlet pipe member is connected to the container member, and a second end of the air outlet pipe member is connected to a downstream process device for conveying the mixed gas.

3. The gas mixing device according to claim 2, characterized in that: The container component also includes: a plurality of first switch valves, each of which is provided on the corresponding air intake pipe and connected to the control component for controlling the flow of the air intake pipe; A second switch valve is provided on the air outlet pipe and is connected to the control component for controlling the flow of the air outlet pipe.

4. The gas mixing device according to claim 1, characterized in that: The gas mixing component comprises: a driving member, the driving member being disposed at the bottom of the container member and connected to the control member for providing power; a screw member, the screw member being coaxially connected to the output shaft of the driving member and being adapted to rotate under the action of the driving member; The first gas mixing component is provided at its center through the screw component and is threadedly connected to the screw component, and is used for rotating and reciprocatingly rising and falling under the action of the screw component to disturb the gas inside the container component.

5. The gas mixing device according to claim 4, characterized in that: The gas mixing component also includes: a first limiting member, the first limiting member being provided at a first end of the screw member and being used for limiting the first gas mixing member; A second limiting member is provided at the second end of the screw rod and is used to limit the first mixing member.

6. The gas mixing device according to claim 4, characterized in that: The gas mixing component also includes: Two mounting pieces, the two mounting pieces are respectively mounted at two ends of the first gas mixing piece and are used for mounting components; Two second gas mixing pieces are rotatably connected to the interior of the mounting piece and are used to rotate and disturb the gas inside the container component under the action of the first gas mixing piece.

7. The gas mixing device according to claim 1, characterized in that: The pressurizing component includes: a pressurizing member, which is disposed at the top of the container component and is connected to the container component in a lifting manner, and is used to compress the space inside the container component; a communicating pipe, a first end of which is in communication with a cavity formed between the container component and the pressurizing component for conveying gas; An air pump component is arranged on the top of the container component and is communicated with the second end of the communicating pipe component. The air pump component is connected to the control component and is used for compressing air.

8. The gas mixing device according to claim 7, characterized in that: The pressurizing component further comprises: A sealing member is provided between the pressurizing member and the inner wall of the container component and is used for sealing the abutment between the pressurizing member and the container component.

9. The gas mixing device according to claim 1, characterized in that: The monitoring component includes: a first monitoring component, the first monitoring component being disposed inside the container component and being used to monitor the pressure inside the container component in real time; A second monitoring component is provided at the air outlet of the container component and is used for monitoring the flow rate of the air outlet of the container component in real time.

10. The gas mixing device according to claim 1, characterized in that: The control component includes: a communication component, which is provided on the container component and is connected to the monitoring component and an external remote control device, respectively, for receiving and transmitting signals; A control component is provided in the container component and is respectively connected to the communication component, the container component, the gas mixing component and the pressurizing component, and is used to control the container component, the gas mixing component and the pressurizing component.

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