Vacuum drying equipment

Abstract

The utility model discloses vacuum drying equipment which comprises a cavity, a bearing table and a vacuum pump. The cavity is provided with a containing space, the containing space is used for containing a substrate, the bearing table is used for bearing the cavity, and the vacuum pump communicates with the containing space through a pipeline and is used for exhausting air in the containing space. The cavity is provided with a protective gas connector and an atmosphere connector, the protective gas connector is used for providing protective gas for the containing space, and the atmosphere connector is used for enabling the containing space to be communicated with the outside so as to balance air pressure inside and outside the cavity. The vacuum drying equipment is small in size, small in occupied space and convenient to install, the containing space of the cavity is small, the vacuum drying equipment can rapidly reach the working state, the working efficiency is improved, meanwhile, energy consumption can be reduced, and therefore the use cost is reduced, and in addition, the vacuum drying equipment is simple in structure, low in price and suitable for popularization and application. The verification cost is further improved, the operation is simple, and the maintenance cost is relatively low.

Description

Technical Field

[0001] The utility model relates to the technical field of drying equipment, in particular to vacuum drying equipment. Background Art

[0002] VCD (Vacuum Concentration Drying) equipment, also known as vacuum drying, is a core component of perovskite slot coating. The coated substrate is placed in this chamber, where the chamber pressure is reduced by vacuuming, causing the liquid film on the substrate surface to rapidly evaporate, rapidly bringing the perovskite film to a supersaturated state. This allows for rapid nucleation and uniform crystal growth. Once the perovskite film enters the vacuum drying chamber and a portion of the solvent evaporates, nucleation and crystal growth begin simultaneously once the film reaches saturation or supersaturation. Adjusting the solvent evaporation rate can control and regulate the nucleation and crystal growth processes. Generally, a faster evaporation rate accelerates nucleation, reducing the time that nucleation and crystal growth coexist, thereby achieving a nucleation rate significantly greater than the crystal growth rate. Once uniform nucleation is achieved, slow crystal growth can be achieved through heating and annealing. Because crystal growth is based on nucleation, the crystal growth process is controllable. To improve perovskite film quality and avoid unnecessary losses during mass production, optimizing the drying conditions of the liquid film on the substrate surface is crucial before mass production, specifically through small-batch verification.

[0003] In the existing technology, the vacuum drying equipment is large in size, which not only takes up a large space, but also restricts the installation of the vacuum drying equipment due to the limited space in the laboratory when conducting various verifications. Moreover, the large size of the vacuum drying equipment also leads to increased costs during the verification process. In addition, the complex structure of the vacuum drying equipment inevitably leads to a high price of the vacuum drying equipment, further increasing the cost of verification.

[0004] Therefore, existing vacuum drying equipment needs to be further improved. Summary of the Invention

[0005] The purpose of the utility model is to provide a vacuum drying device, which is not only small in size, occupies a small space, and is easy to install, but also has a small cavity accommodating space. The vacuum drying device can quickly reach a working state, improve work efficiency, and reduce energy consumption. In addition, the vacuum drying device has a simple structure, is cheap, and is easy to operate.

[0006] The purpose of this utility model is achieved by the following technical solutions:

[0007] A vacuum drying device comprising:

[0008] A cavity having a receiving space for placing a substrate;

[0009] A carrying platform, the carrying platform is used to carry the cavity;

[0010] a vacuum pump, the vacuum pump being connected to the accommodation space through a pipeline, and the vacuum pump being used to evacuate the accommodation space;

[0011] The cavity is provided with a protective gas interface and an atmospheric interface. The protective gas interface is used to provide protective gas to the accommodating space, and the atmospheric interface is used to connect the accommodating space with the outside world to balance the air pressure inside and outside the cavity.

[0012] Preferably, one end of the pipe communicating with the accommodating space is arranged near the middle position of the top of the cavity; and / or,

[0013] The pipeline is provided with a fluid control valve, and the fluid control valve is used to control the speed at which the vacuum pump evacuates the accommodating space.

[0014] Preferably, the fluid control valve is provided at one end of the pipeline close to the cavity, and the fluid control valve comprises at least one of a manual pneumatic valve and a manual butterfly valve; and / or,

[0015] It also includes a vacuum gauge, which is arranged on the cavity and / or the pipeline, and is used to detect the vacuum degree in the cavity and / or the pipeline; and / or,

[0016] It also includes a pressure sensor, which is arranged on the cavity and / or the pipeline, and is used to detect the gas pressure in the cavity and / or the pipeline; and / or,

[0017] The system further includes a first flow meter connected to the protective gas interface, and configured to detect the gas flow of the protective gas; and / or

[0018] It also includes a second flow meter, which is arranged on the pipeline and is used to detect the gas flow in the pipeline.

[0019] Preferably, the protective gas interface is connected to one end of the first air pipe, the other end of the first air pipe is used to be connected to the gas source of the protective gas, and a first valve is provided on the first air pipe, and the first valve is used to control the on and off of the first air pipe.

[0020] Preferably, a first filter is provided near the end of the first gas pipe connected to the gas source of the protective gas, and the first filter is used to remove impurities in the protective gas.

[0021] Preferably, the atmospheric interface is connected to one end of the second air pipe, the other end of the second air pipe is connected to the outside atmosphere, and a second valve is provided on the second air pipe, and the second valve is used to control the opening and closing of the second air pipe.

[0022] Preferably, an exhaust filter is provided near the end of the second air pipe connected to the outside atmosphere, and the exhaust filter is used to eliminate noise generated when the gas flows in the second air pipe and remove impurities in the outside atmosphere.

[0023] Preferably, a closed door is provided on the side of the cavity, and a sealing ring is provided between the closed door and the cavity.

[0024] Preferably, a pull-out plate is provided in the accommodating space, and the pull-out plate is used to place the substrate, and the pull-out plate can enter or extend from the accommodating space.

[0025] Preferably, a plurality of supporting legs are provided at the bottom of the cavity, and the height of the supporting legs is adjustable.

[0026] Compared with the prior art, the beneficial effects of the present invention include at least:

[0027] The vacuum drying equipment of the present invention is not only small in size and occupies little space, but also easy to install. Especially in laboratory environments, where space is often limited, the small vacuum drying equipment can be easily placed in the laboratory without taking up too much area, making it convenient to integrate with other experimental instruments and equipment. Moreover, the cavity has a small accommodating space, so the vacuum drying equipment can quickly reach a working state, thereby improving work efficiency and reducing energy consumption, thereby reducing the cost of use. In addition, the vacuum drying equipment has a simple structure and a low price, which further improves the cost of verification. It is simple to operate and has a relatively low maintenance cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a perspective structural schematic diagram of the vacuum drying equipment of an embodiment of the present utility model.

[0029] Figure 2 This is a schematic structural diagram of the vacuum drying equipment from another perspective of an embodiment of the present utility model.

[0030] Figure 3 It is a structural diagram of the embodiment of the present invention when the cavity is not provided with a closed door.

[0031] In the figure: 100, vacuum drying equipment; 1, cavity; 11, protective gas interface; 111, first air pipe; 112, first valve; 113, first filter; 12, atmosphere interface; 121, second air pipe; 122, second valve; 123, exhaust filter; 13, closing door; 14, sealing ring; 15, pull-out plate; 16, support leg; 17, side; 18, bottom; 19, top; 2, supporting platform; 3, vacuum pump; 31, pipeline; 32, fluid control valve; 321, manual pneumatic valve; 322, manual butterfly valve; 323, switch manual valve; 33, vacuum gauge; 34, pressure sensor; 200, substrate. DETAILED DESCRIPTION

[0032] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make this disclosure more comprehensive and complete and to fully convey the concepts of the example embodiments to those skilled in the art. Identical reference numerals in the figures denote identical or similar structures, and thus repeated descriptions thereof will be omitted.

[0033] The words expressing positions and directions described in this utility model are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of this utility model.

[0034] refer to Figures 1 to 3 The present invention provides a vacuum drying device 100 , comprising: a cavity 1 , a carrier and a vacuum pump 3 . The cavity 1 can be set on a carrier 2 , and the cavity 1 and the vacuum pump 3 can be connected through a pipe 31 .

[0035] Specifically, refer to Figure 3 The cavity 1 as a whole can be roughly rectangular, and can include side surfaces 17, a bottom 18, and a top 19. The cavity 1 has a storage space, that is, the side surfaces 17, the bottom 18, and the top 19 enclose a storage space, and the storage space is used to place the substrate 200. The surface of the substrate 200 is coated with a liquid film formed by the perovskite solution. The pressure of the vacuum chamber is reduced by vacuuming, causing the solvent in the liquid film to evaporate rapidly. As the gas is pumped out by the vacuum pump 3, the liquid film quickly enters a supersaturated state, and then rapidly nucleates, achieving uniform crystal growth.

[0036] Preferably, a closed door 13 is provided on the side 17 of the chamber 1. The closed door 13 can be opened or closed to facilitate the placement and removal of the substrate 200 into or from the accommodation space. A sealing ring 14 can be provided between the closed door 13 and the chamber 1. The sealing ring 14 can improve the sealing performance between the closed door 13 and the chamber 1. When the vacuum pump 3 evacuates the chamber 1, the sealing ring 14 can prevent air leakage between the closed door 13 and the chamber 1.

[0037] A pull-out plate 15 may be provided within the storage space. The number of pull-out plates 15 may be one or more. In this embodiment, there is only one pull-out plate 15. The pull-out plate 15 is used to place the substrate 200. The pull-out plate 15 can be extended into or out of the storage space. An operator can operate the pull-out plate 15 to facilitate placing a substrate 200 to be dried into the storage space and removing a dried substrate 200 from the storage space.

[0038] refer to Figure 1 、 Figure 2 The supporting platform 2 as a whole can be roughly rectangular. The supporting platform 2 is used to support the cavity 1. The supporting platform 2 not only provides support for the cavity 1, but also has a certain height so that the cavity 1 is located at a preset height. For example, the height of the cavity 1 matches the height of the operator, which is convenient for the operator to use. The projected area of the supporting platform 2 on the ground is preferably larger than the projected area of the cavity 1 on the ground. In this way, the supporting platform 2 can provide stable support for the cavity 1 to prevent the cavity 1 from falling from the supporting platform 2. Other areas of the supporting platform 2 can also be used to place other items for easy operation. The supporting platform 2 is, for example, a laboratory table, that is, the vacuum drying equipment 100 can be set in a laboratory. Of course, the vacuum drying equipment 100 can also be set in other areas.

[0039] As a preferred embodiment, the bottom 18 of the cavity 1 can be provided with a plurality of support legs 16, and the plurality of support legs 16 are evenly distributed at the bottom 18 of the cavity 1. The height of the support legs 16 is adjustable, which not only ensures that the cavity 1 remains level, but also allows the height of the cavity 1 to be controlled by adjusting the support legs 16, so that the height of the cavity 1 matches the height of the operator, making it easier for the operator to use.

[0040] The vacuum pump 3 can be connected to the containing space through a pipe 31. The vacuum pump 3 is used to evacuate the containing space. The pipe 31 is, for example, a bellows. The vacuum pump 3 extracts the gas in the containing space through the pipe 31, and the solvent evaporated from the liquid film is extracted together with the gas. As the air pressure in the containing space decreases, the evaporation rate of the solvent in the liquid film is promoted, thereby accelerating the evaporation rate of the solvent in the liquid film. The vacuum pump 3 can be set on the ground below the supporting platform 2, and the vacuum pump 3 can also be set on the supporting platform 2. In this embodiment, the vacuum pump 3 is set on the ground below the supporting platform 2 to prevent the vibration generated by the operation of the vacuum pump 3 from causing the position of the cavity 1 to shift.

[0041] The end of the pipe 31 connected to the accommodating space is preferably arranged near the middle position of the top 19 of the cavity 1. This can reduce the distance difference between each point on the substrate 200 and the vacuum pump 3, thereby ensuring that the evaporation rate of each point on the substrate 200 is balanced, thereby ensuring that the crystal growth of each point on the substrate 200 is more consistent, and improving the quality of the perovskite film.

[0042] Among them, reference Figure 2 The cavity 1 may be provided with a protective gas interface 11 and an atmospheric interface 12. The protective gas interface 11 and the atmospheric interface 12 may be provided on opposite sides of the cavity 1. In the present embodiment, the protective gas interface 11 and the atmospheric interface 12 may be provided on opposite sides 17 of the cavity 1. The protective gas interface 11 is used to provide protective gas to the accommodating space, and the atmospheric interface 12 is used to connect the accommodating space with the outside to balance the air pressure inside and outside the cavity 1. The protective gas is, for example, nitrogen. On the one hand, the protective gas can break the vacuum. When the cavity 1 is evacuated, the protective gas is provided to the accommodating space through the protective gas interface 11, so that the pressure in the cavity 1 returns to normal pressure or a specific pressure. On the other hand, the protective gas can also prevent the perovskite film from being oxidized. External gas can enter the accommodating space through the atmospheric interface 12, thereby balancing the air pressure inside and outside the cavity 1, so that the closed door 13 of the cavity 1 can be opened.

[0043] In the present application, the vacuum drying equipment 100 is not only small in size, but also takes up little space and is easy to install. Especially in a laboratory environment, where space is often limited, the small vacuum drying equipment 100 can be easily placed in the laboratory without taking up too much area, making it convenient to integrate with other experimental instruments and equipment. For example, a small vacuum drying box can be placed next to a fume hood, making it easy to directly perform subsequent detection operations after drying. Moreover, the vacuum drying equipment 100 is small in size and the accommodation space of the cavity 1 is also small. The vacuum drying equipment 100 can quickly reach a working state. For example, when drying, the space range required to heat or maintain a vacuum is small, which makes the transfer of heat and the maintenance of a vacuum relatively easier, thereby improving work efficiency and reducing energy consumption, thereby reducing the cost of use. In addition, the vacuum drying equipment 100 is small in size and simple in structure, which means that the raw materials required for the vacuum drying equipment 100 are few, the manufacturing process is relatively simple, and the manufacturing cost is reduced, so that the price of the vacuum drying equipment 100 is cheap, further improving the cost of verification, and the operation of the vacuum drying equipment 100 is simple and the maintenance cost is relatively low.

[0044] In one embodiment, reference Figure 2 The pipeline 31 may be provided with a fluid control valve 32, which is used to control the speed at which the vacuum pump 3 evacuates the containment space. In other words, the fluid control valve 32 can be used to control the flow of gas in the pipeline 31, thereby controlling the speed at which the vacuum pump 3 evacuates the containment space, thereby enabling the vacuum pump 3 to evacuate the containment space quickly or slowly, meeting various verification requirements.

[0045] The fluid control valve 32 is preferably located at one end of the pipeline 31 near the chamber 1. The fluid control valve 32 may include at least one of a manual pneumatic valve 321 and a manual butterfly valve 322. In this embodiment, both the manual pneumatic valve 321 and the manual butterfly valve 322 are located on the pipeline 31, thereby achieving multiple control and flexibility. The manual pneumatic valve 321 enables rapid shutoff and flow regulation, while the manual butterfly valve 322 enables high-flow opening and closing and throttling operations, providing better flow control and sealing performance. The manual pneumatic valve 321 can be controlled by a switch manual valve 323, which is located on one of the side surfaces 17 of the chamber 1 for easy adjustment.

[0046] As a preferred method, refer to Figure 1The vacuum drying apparatus 100 may further include a vacuum gauge 33, which is disposed on the cavity 1 and / or the pipe 31 and is used to detect the vacuum level within the cavity 1 and / or the pipe 31. In this embodiment, the vacuum gauge 33 is preferably disposed at one end of the pipe 31 near the cavity 1. The vacuum gauge 33 can monitor the vacuum level within the receiving space in real time, ensuring that the desired drying conditions are met, thereby improving drying efficiency and product quality.

[0047] The vacuum drying apparatus 100 may further include a pressure sensor 34, which is disposed on the chamber 1 and / or the pipe 31. The pressure sensor 34 is used to detect the gas pressure within the chamber 1 and / or the pipe 31. In this embodiment, the pressure sensor 34 is preferably disposed at one end of the pipe 31 near the chamber 1. The pressure sensor 34 can provide accurate pressure data to help control and adjust the vacuum pump 3, prevent over-vacuuming, and protect the chamber 1 and the substrate 200.

[0048] The vacuum drying equipment 100 may also include a first flow meter (not shown), which is connected to the protective gas interface 11 and is used to detect the gas flow of the protective gas, that is, the first flow meter can monitor the size of the protective gas and can also adjust the flow size.

[0049] The vacuum drying apparatus 100 may further include a second flow meter (not shown) disposed on the pipe 31 for detecting the gas flow rate within the pipe 31. In this embodiment, the flow meter is preferably disposed at the end of the pipe 31 near the chamber 1. The flow meter can monitor the pumping rate to ensure that the gas flow rate meets process requirements, thereby optimizing the drying process and improving energy efficiency.

[0050] In one embodiment, reference Figure 2 The vacuum drying equipment 100 may include a first air pipe 111, the protective gas interface 11 may be connected to one end of the first air pipe 111, the other end of the first air pipe 111 is used to be connected to a gas source of protective gas, the gas source of protective gas is, for example, a nitrogen gas source, and a first valve 112 is provided on the first air pipe 111, the first valve 112 is used to control the on and off of the first air pipe 111, that is, the first valve 112 can control whether the protective gas can enter the accommodation space and control the amount and speed of the protective gas entering the accommodation space.

[0051] A first filter 113 is preferably provided near the end of the first gas pipe 111 connected to the gas source of the protective gas. The first filter 113 is used to remove impurities in the protective gas, thereby preventing impurities in the protective gas from entering the containing space, thereby preventing impurities from contaminating the substrate 200 and the perovskite film, and thus improving the quality of the product.

[0052] As a preferred embodiment, the vacuum drying equipment 100 may further include a second air pipe 121, the atmospheric interface 12 is connected to one end of the second air pipe 121, the other end of the second air pipe 121 is connected to the outside atmosphere, and a second valve 122 is provided on the second air pipe 121. The second valve 122 is used to control the on and off of the second air pipe 121, that is, the second valve 122 can control whether the outside atmosphere can enter the containing space and control the amount and speed of the outside atmosphere entering the containing space.

[0053] An exhaust filter 123 may be provided near the end of the second air pipe 121 that is connected to the outside atmosphere. The exhaust filter 123 is used to eliminate the noise generated when the gas flows in the second air pipe 121 and remove impurities in the outside atmosphere. In other words, the exhaust filter 123 not only has the function of silencing, but also has the function of filtering. In this way, the exhaust filter 123 can prevent impurities in the outside atmosphere from entering the accommodation space, thereby preventing impurities from contaminating the substrate 200 and the perovskite film, thereby improving the quality of the product. At the same time, the exhaust filter 123 can not only effectively reduce the noise generated when the gas flows or is discharged, and improve the comfort of the working environment, but also excessive noise is often accompanied by greater vibration. The silencer can reduce the vibration of the second air pipe 121 while reducing the noise, thereby reducing the wear and fatigue damage of the connection between the second air pipe 121 and the cavity 1 caused by vibration, and extending the service life of the second air pipe 121 and the cavity 1.

[0054] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are illustrative and cannot be understood as limiting the present invention. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the utility model without departing from the principles and purpose of the utility model. All of these changes should fall within the scope of protection of the claims of the present invention.

Claims

1. A vacuum drying device, characterized in that: include: A cavity having a receiving space for placing a substrate; A carrying platform, the carrying platform is used to carry the cavity; a vacuum pump, the vacuum pump being connected to the accommodation space through a pipeline, and the vacuum pump being used to evacuate the accommodation space; The cavity is provided with a protective gas interface and an atmospheric interface. The protective gas interface is used to provide protective gas to the accommodating space, and the atmospheric interface is used to connect the accommodating space with the outside world to balance the air pressure inside and outside the cavity.

2. The vacuum drying equipment according to claim 1, characterized in that One end of the pipe communicating with the accommodating space is disposed near the middle of the top of the cavity; and / or, The pipeline is provided with a fluid control valve, and the fluid control valve is used to control the speed at which the vacuum pump evacuates the accommodating space.

3. The vacuum drying equipment according to claim 2, characterized in that The fluid control valve is provided at one end of the pipeline close to the cavity, and the fluid control valve includes at least one of a manual pneumatic valve and a manual butterfly valve; and / or, It also includes a vacuum gauge, which is arranged on the cavity and / or the pipeline, and is used to detect the vacuum degree in the cavity and / or the pipeline; and / or, It also includes a pressure sensor, which is arranged on the cavity and / or the pipeline, and is used to detect the gas pressure in the cavity and / or the pipeline; and / or, The system further includes a first flow meter connected to the protective gas interface, and configured to detect the gas flow of the protective gas; and / or It also includes a second flow meter, which is arranged on the pipeline and is used to detect the gas flow in the pipeline.

4. The vacuum drying equipment according to claim 1, characterized in that The protective gas interface is connected to one end of the first air pipe, the other end of the first air pipe is used to be connected to the gas source of the protective gas, and a first valve is provided on the first air pipe, and the first valve is used to control the opening and closing of the first air pipe.

5. The vacuum drying equipment according to claim 4, characterized in that A first filter is provided near one end of the first gas pipe connected to the gas source of the protective gas, and the first filter is used to remove impurities in the protective gas.

6. The vacuum drying equipment according to claim 1, characterized in that The atmospheric interface is connected to one end of the second air pipe, the other end of the second air pipe is connected to the outside atmosphere, and a second valve is provided on the second air pipe, and the second valve is used to control the opening and closing of the second air pipe.

7. The vacuum drying equipment according to claim 6, characterized in that An exhaust filter is provided near one end of the second air pipe connected to the outside atmosphere. The exhaust filter is used to eliminate noise generated when the gas flows in the second air pipe and remove impurities in the outside atmosphere.

8. The vacuum drying equipment according to claim 1, characterized in that A closed door is provided on the side of the cavity, and a sealing ring is provided between the closed door and the cavity.

9. The vacuum drying equipment according to claim 1, characterized in that A pull-out plate is provided in the accommodation space, and the pull-out plate is used to place the substrate. The pull-out plate can enter or extend from the accommodation space.

10. The vacuum drying equipment according to claim 1, characterized in that A plurality of supporting legs are provided at the bottom of the cavity, and the heights of the supporting legs are adjustable.

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