Semi-conductor clamp full-automatic cleaning equipment capable of discharging steam

Abstract

The utility model provides a semiconductor clamp full-automatic cleaning device capable of discharging steam. The semiconductor clamp full-automatic cleaning device comprises a machine frame. The main steam tank is arranged in the rack; the cleaning unit conveying belt and the drying unit conveying belt are installed in the main steam tank in the conveying direction of the clamp and located between the cleaning inlet and the cleaning outlet of the rack. The steam cleaning unit and the drying unit are installed in the steam main tank in the direction that the clamp is subjected to steam cleaning and then dried and arranged above the cleaning unit conveying belt and the drying unit conveying belt in a covering mode correspondingly. The steam exhausting, cooling and discharging unit is arranged at the top of the rack, and an air inlet is connected through a steam cleaning unit pipeline. Two different unit modules are adopted for steam cleaning and drying, residual steam in the steam hood is cooled and then discharged in a concentrated mode through the exhaust fan arranged on the top of the steam cleaning unit, liquefaction backflow is avoided, and meanwhile a pressure sensor is arranged to cooperate with a PC to achieve monitoring and rapid feedback.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, in particular to the technical field of automatic cleaning equipment, and specifically to a fully automatic cleaning equipment for semiconductor fixtures capable of steam discharge. Background Art

[0002] In the process of flip-chip placement of semiconductors, fixtures are needed to fix the products. During the process, the products and fixtures will enter the reflow oven for baking. Therefore, the fixtures are easily contaminated during use. During the production process, the fixtures need to be cleaned regularly by fully automatic cleaning equipment. Currently, high-temperature saturated steam is usually used for cleaning. However, the following problems will occur during the cleaning process of ordinary steam equipment:

[0003] (1) Due to the excessive amount of residual steam during the high-temperature saturated steam cleaning process, it is necessary to discharge it in time to ensure that the pressure in the cavity is normal and does not affect the operation of the equipment. Otherwise, it is easy to cause pressure instability in the equipment, resulting in frequent equipment shutdown alarms;

[0004] (2) Since the steam exhaust humidity of the current cleaning equipment is too high, it often liquefies into water in the pipe and flows back to the equipment. The steam discharged from the steam cleaning equipment cannot directly enter the company's exhaust pipe, resulting in frequent water leakage on the top of the equipment. Summary of the Invention

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a fully automatic cleaning device for semiconductor fixtures capable of steam discharge, so as to solve the difficulties of the prior art.

[0006] To achieve the above-mentioned and other related purposes, the present invention provides a fully automatic cleaning device for semiconductor fixtures capable of steam discharge, comprising:

[0007] A frame 1, wherein a cleaning inlet 2 and a cleaning outlet 3 are formed on two opposite sides of the frame 1 along a horizontal direction;

[0008] The main steam tank 4 is arranged in the frame 1, with an open top, and a cavity for accommodating the steam cleaning unit and the drying unit is formed inside, and a space is formed between the frame 1 on all sides;

[0009] The cleaning unit conveyor belt 5 and the drying unit conveyor belt 6 are installed in the steam main tank 4 along the conveying direction of the clamp, and are located between the cleaning inlet 2 and the cleaning outlet 3 of the frame 1, with a gap set between the cleaning unit conveyor belt 5 and the drying unit conveyor belt 6;

[0010] The steam cleaning unit and the drying unit are installed in the steam main tank 4 along the direction of steam cleaning and then drying the clamps, and are respectively covered above the cleaning unit conveyor belt 5 and the drying unit conveyor belt 6. The steam cleaning unit and the drying unit are both provided with a transfer hole 7 for transferring the clamps;

[0011] The steam exhaust cooling and discharge unit is arranged on the top of the rack 1, and the air inlet is connected through the steam cleaning unit pipeline.

[0012] According to a preferred embodiment, the bottoms of the cleaning unit conveyor belt 5 and the drying unit conveyor belt 6 are installed in the main steam tank 4 through a fixing plate assembly.

[0013] According to a preferred embodiment, at least two parallel conveyor belts are provided in the steam cleaning unit and the drying unit.

[0014] According to a preferred embodiment, the steam cleaning unit comprises:

[0015] A steam hood 8 is provided on the cleaning unit conveyor belt 5, and the discharge end of the cleaning unit conveyor belt 5 is located in the steam hood 8. The top of the steam hood 8 is provided with a mounting hole 10 for mounting a steam upper cover 9;

[0016] A lifting unit, wherein the lifting unit is installed on both sides of the steam hood 8, and the steam hood 8 is driven by the lifting unit to move on the cleaning unit conveyor belt 5;

[0017] A pair of steam nozzles 11 are provided, and are respectively located above and below the cleaning unit conveyor belt 5 .

[0018] According to a preferred embodiment, the steam hood 8 is provided with an inner and outer double-layer structure.

[0019] According to a preferred solution, a pressure sensor is further installed in the steam hood 8 , and the pressure sensor transmits signals to the PC 12 .

[0020] According to a preferred embodiment, the drying unit includes:

[0021] The oven cover 13 is provided on the drying unit conveyor belt 6, and both ends of the drying unit conveyor belt 6 protrude from the oven cover 13 to connect adjacent processes;

[0022] Lifting units, which are installed on both sides of the oven cover 13 and drive the oven cover 13 to move on the drying unit conveyor belt 6;

[0023] The hot air rotating mechanism is installed in the steam main tank 4 and is located below the drying unit conveyor belt 6. The hot air rotating mechanism drives the hot air outlet installed on the screw 15 to rotate through the stepping motor 14 to dry the clamp transported on the drying unit conveyor belt 6.

[0024] According to a preferred embodiment, the lifting unit comprises:

[0025] a lifting cylinder 16 , which is vertically arranged on opposite sides of the steam hood 8 and the oven hood 13 ;

[0026] A Y-shaped connecting bracket 17, the vertical end of which is mounted on the sides of the steam hood 8 and the oven hood 13, and the horizontal end of which is connected to the cylinder shaft of the lifting cylinder 16;

[0027] The cylinder bracket 18 is L-shaped, with the horizontal end connected to the cylinder seat of the lifting cylinder 16 and the vertical end connected to the crossbeam at the top of the frame 1.

[0028] According to a preferred embodiment, a pair of lifting units is provided on at least one mounting side surface of the steam hood 8 and the oven hood 13 .

[0029] According to a preferred embodiment, the steam exhaust cooling and discharge unit includes an exhaust fan 19, the bottom of which is mounted on the top of the rack 1 through a fan liquid receiving pan 20;

[0030] The exhaust fan 19 is provided in a pair, and the air inlet of each exhaust fan 19 is connected to the air outlet 21 opened on both sides of the steam cover 8 in the steam cleaning unit below through the exhaust pipe to extract steam;

[0031] The air outlet of the exhaust fan 19 is connected to a condensation tank for liquefaction recovery.

[0032] According to a preferred solution, a light alarm 22 is installed on the top of the rack 1 , and the light alarm 22 is electrically connected to the PC 12 .

[0033] The utility model adopts two different unit modules for steam cleaning and drying. The exhaust fan installed on the top of the steam cleaning unit realizes the cooling of the residual steam in the steam hood and the centralized discharge to avoid liquefaction backflow. At the same time, a pressure sensor is equipped to cooperate with a PC to realize monitoring and rapid feedback.

[0034] The following will describe in more detail the best embodiments of the present invention in conjunction with the accompanying drawings so that the features and advantages of the present invention can be easily understood. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 Shown is a schematic diagram of the three-dimensional structure of the utility model;

[0036] Figure 2 Shown is a schematic diagram of the three-dimensional structure of the utility model from another perspective;

[0037] Figure 3 Shown is a schematic diagram of the internal structure of the utility model;

[0038] Figure 4 Shown is an enlarged schematic diagram of the three-dimensional structure of the washing unit conveyor belt and the drying unit conveyor belt in the present invention;

[0039] Description of labels

[0040] 1. Frame; 2. Cleaning inlet; 3. Cleaning outlet; 4. Steam main tank; 5. Cleaning unit conveyor belt; 6. Drying unit conveyor belt; 7. Transfer hole; 8. Steam hood; 9. Steam upper cover; 10. Mounting hole; 11. Steam nozzle; 12. PC; 13. Oven cover; 14. Stepper motor; 15. Screw; 16. Lifting cylinder; 17. Y-type connecting bracket; 18. Cylinder bracket; 19. Exhaust fan; 20. Fan liquid collection tray; 21. Air outlet; 22. Sound and light alarm. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the technical solution of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings of the specific embodiments of the present invention. The same figure marks in the drawings represent the same parts. It should be noted that the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] Compared to the embodiments shown in the drawings, feasible embodiments within the scope of protection of the present invention may have fewer components, other components not shown in the drawings, different components, differently arranged components, or differently connected components, etc. In addition, two or more components in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.

[0043] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning understood by persons of ordinary skill in the field to which the present invention belongs. The words "first", "second" and similar terms used in the specification and claims of the present utility model patent application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "a" or "an" do not necessarily indicate a quantity limitation. Words such as "include" or "comprising" mean that the elements or objects preceding the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0044] The utility model proposes a fully automatic cleaning device for semiconductor fixtures capable of steam discharge, which is used in the semiconductor flip-chip mounting process. The utility model does not limit the type of fixture, but the structure of the fully automatic cleaning device for semiconductor fixtures capable of steam discharge is particularly suitable for memory stick production.

[0045] In general, the fully automatic cleaning equipment for semiconductor fixtures with steam discharge proposed by the present invention mainly includes a frame 1, a steam main tank 4, a cleaning unit conveyor belt 5 and a drying unit conveyor belt 6, a steam cleaning unit and a drying unit and a steam exhaust cooling discharge unit. Figure 1 , which shows the arrangement relationship of the frame 1, the steam main tank 4, the cleaning unit conveyor belt 5 and the drying unit conveyor belt 6, the steam cleaning unit and the drying unit and the steam exhaust cooling discharge unit.

[0046] In order to achieve the purpose of processing excess saturated steam, the following problems that may arise during the cleaning process of ordinary steam equipment in the background technology are solved: due to excessive residual steam during the high-temperature saturated steam cleaning process, it needs to be discharged in time to ensure that the pressure in the cavity is normal and does not affect the operation of the equipment. Otherwise, it is easy to cause pressure instability in the equipment, resulting in frequent equipment shutdown alarms; since the steam discharge humidity of the current cleaning equipment is too high, it is often liquefied into water in the pipeline and flows back to the equipment. The steam discharged from the steam cleaning equipment cannot directly enter the company's discharge pipeline, resulting in frequent water leakage on the top of the equipment. For this reason, in the technical solution provided in this embodiment, steam cleaning and drying are implemented in two different unit modules. The exhaust fan installed on the top of the steam cleaning unit realizes the cooling of the residual steam in the steam hood and then discharges it in a centralized manner to avoid liquefaction reflux. At the same time, a pressure sensor is provided to cooperate with a PC to realize monitoring and rapid feedback.

[0047] like Figure 1 As shown, a cleaning inlet 2 and a cleaning outlet 3 are provided on two opposite sides of the rack 1 along the horizontal direction. However, since a PC 12, an electrical box and other structures are also installed in the rack 1, and since water flow is involved in the automatic cleaning equipment, in order to prevent the water flow from affecting other structures in the rack 1, a main steam tank 4 with an upward opening is installed in the rack 1. A cavity for accommodating the steam cleaning unit and the drying unit is formed inside the main steam tank 4, and a gap is formed around the rack 1, which effectively plays a role of spacing and protection.

[0048] As mentioned above, a steam cleaning unit and a drying unit are provided in the frame 1 in order of steam cleaning and drying the fixtures. Corresponding cleaning unit conveyor belts 5 and drying unit conveyor belts 6 are provided in the steam cleaning unit and the drying unit, respectively. The bottoms of the cleaning unit conveyor belts 5 and the drying unit conveyor belts 6 are installed in the steam main tank 4 through a fixing plate assembly. The steam cleaning unit and the drying unit are used to transport the fixtures through the transfer holes 7 for transferring the fixtures. In addition, the cleaning unit conveyor belts 5 and the drying unit conveyor belts 6 are installed in the steam main tank 4 and are located between the cleaning inlet 2 and the cleaning outlet 3 of the frame 1, which can effectively prevent liquid from falling into other structures of the frame 1 while completing the transfer function of the fixtures.

[0049] In order to effectively improve the cleaning effect of the clamp, at least two parallel conveyor belts are provided in the steam cleaning unit and the drying unit.

[0050] It should be specifically explained that, in order to facilitate real-time monitoring of the pressure situation in the steam hood 8 and to facilitate the discharge of residual steam out of the rack 1 in the steam cleaning unit near the cleaning inlet 2, on the one hand, since a pair of steam nozzles 11 are provided, which are respectively located above and below the cleaning unit conveyor belt 5, in order to facilitate the detection of the pressure situation in the steam hood 8, the steam hood 8 is installed on the cleaning unit conveyor belt 5 in an openable and closable manner through a lifting unit, and the lifting unit can be used to drive the steam hood 8 to move on the cleaning unit conveyor belt 5, which is convenient for opening and cleaning. It is also possible to implement a pressure sensor that is directly assembled and fixed to the steam hood 8 of the steam cleaning unit through threaded installation. After the steam hood 8 descends to cover the cleaning area, steam is generated. The pressure sensor monitors the pressure in the steam hood 8 cavity in real time. Through PLC signal conversion, the pressure value is displayed on the display screen of the PC 12. When the pressure change exceeds the set value, an audible and visual alarm 22 is used to alarm.

[0051] In addition, in order to ensure the cleaning effect and prevent steam from flowing out of the steam hood 8 as much as possible, the discharge end of the cleaning unit conveyor belt 5 is located in the steam hood 8, and a mounting hole 10 for mounting a steam upper hood cover 9 is opened on the top of the steam hood 8. When the steam upper hood cover 9 is closed during cleaning, a waterproof effect is achieved. Furthermore, the steam hood 8 is provided with an inner and outer double-layer structure, which can effectively keep the heat in.

[0052] On the other hand, in order to facilitate the discharge of residual steam from the rack 1, a steam exhaust cooling and discharge unit is arranged at the top of the rack 1. The steam exhaust cooling and discharge unit includes an exhaust fan 19. The air inlet of each exhaust fan 19 is connected to the air outlet 21 opened on both sides of the steam cover 8 in the steam cleaning unit below through an exhaust pipe to extract steam and discharge it from the rack 1. The air outlet of the exhaust fan 19 is connected to a condensation box for liquefaction recovery; in addition, to avoid liquid remaining on the top of the rack 1 in the prior art, the bottom of the exhaust fan 19 is installed on the top of the rack 1 through a fan liquid receiving pan 20.

[0053] On this basis, the drying unit includes an oven cover 13, which is covered on the drying unit conveyor belt 6, wherein both ends of the drying unit conveyor belt 6 protrude from the oven cover 13 to connect adjacent processes and realize seamless transfer of the clamp. In the drying process, the hot air rotating mechanism is installed in the steam main tank 4 and is located below the drying unit conveyor belt 6. The hot air rotating mechanism drives the hot air outlet installed on the screw 15 to rotate through the stepper motor 14, thereby achieving the purpose of drying the clamp transported on the drying unit conveyor belt 6.

[0054] Preferably, both sides of the oven cover 13 in the drying unit are also installed on the lifting unit, and the oven cover 13 can be driven by the lifting unit to move on the drying unit conveyor belt 6. In this embodiment, the lifting unit uses a lifting cylinder 16 as a power source. The lifting cylinder 16 is vertically arranged on the opposite sides of the steam cover 8 and the oven cover 13. The cylinder seat of the lifting cylinder 16 is installed on the crossbeam at the top of the frame 1 through an L-shaped cylinder bracket 18. The cylinder shaft at the bottom of the lifting cylinder 16 is connected to the sides of the steam cover 8 and the oven cover 13 through a Y-shaped connecting bracket 17.

[0055] Considering the connection stability of the oven cover, a pair of lifting units are provided on at least one mounting side surface of the steam cover 8 and the oven cover 13 .

[0056] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by one of ordinary skill in the art without departing from the spirit and technical principles disclosed in the present invention are intended to be covered by the claims of the present invention.

Claims

1. A fully automatic cleaning device for semiconductor fixtures capable of steam exhaust, characterized in that: include: A frame (1), wherein a cleaning inlet (2) and a cleaning outlet (3) are provided on two opposite sides of the frame (1) along a horizontal direction; A main steam tank (4), the main steam tank (4) is arranged in the frame (1), has an open top, forms a cavity for accommodating the steam cleaning unit and the drying unit, and is surrounded by a space between the frame (1); A cleaning unit conveyor belt (5) and a drying unit conveyor belt (6), wherein the cleaning unit conveyor belt (5) and the drying unit conveyor belt (6) are installed in the steam main tank (4) along the conveying direction of the clamp, and are located between the cleaning inlet (2) and the cleaning outlet (3) of the frame (1), and a gap is set between the cleaning unit conveyor belt (5) and the drying unit conveyor belt (6); A steam cleaning unit and a drying unit are installed in a main steam tank (4) along the direction of steam cleaning and then drying the clamps, and are respectively covered above a cleaning unit conveyor belt (5) and a drying unit conveyor belt (6). A transfer hole (7) for transferring the clamps is provided in each of the steam cleaning unit and the drying unit; A steam exhaust cooling and discharge unit is provided on the top of the frame (1), and an air inlet is connected via a steam cleaning unit pipeline.

2. The fully automatic cleaning equipment for semiconductor fixtures capable of steam exhaust according to claim 1, characterized in that: The steam cleaning unit comprises: A steam hood (8), the steam hood (8) is covered on the cleaning unit conveyor belt (5), and the discharge end of the cleaning unit conveyor belt (5) is located in the steam hood (8), and a mounting hole (10) for mounting a steam upper hood cover (9) is provided on the top of the steam hood (8); A lifting unit, wherein the lifting unit is installed on both sides of the steam hood (8), and the steam hood (8) is driven by the lifting unit to move on the cleaning unit conveyor belt (5); A pair of steam nozzles (11) are provided, and are respectively located above and below the cleaning unit conveyor belt (5).

3. The fully automatic cleaning equipment for semiconductor fixtures capable of steam exhaust according to claim 2, characterized in that: A pressure sensor is also installed in the steam cover (8), and the pressure sensor transmits signals to the PC (12).

4. The fully automatic cleaning equipment for semiconductor fixtures capable of steam exhaust according to claim 3, characterized in that: The drying unit comprises: An oven cover (13), the oven cover (13) is placed on the drying unit conveyor belt (6), and both ends of the drying unit conveyor belt (6) protrude from the oven cover (13) to connect adjacent processes; A lifting unit, the lifting unit being installed on both sides of the oven cover (13), and driving the oven cover (13) to move on the drying unit conveyor belt (6); A hot air rotating mechanism is installed in the steam main tank (4) and is located below the drying unit conveyor belt (6). The hot air rotating mechanism drives the hot air outlet installed on the screw rod (15) to rotate through a stepping motor (14) to dry the clamps transported on the drying unit conveyor belt (6).

5. The fully automatic cleaning equipment for semiconductor fixtures capable of steam exhaust according to claim 4, characterized in that: The lifting unit comprises: a lifting cylinder (16) vertically arranged on opposite sides of the steam hood (8) and the oven hood (13); A Y-shaped connecting bracket (17), wherein the vertical end of the Y-shaped connecting bracket (17) is mounted on the side of the steam cover (8) and the oven cover (13), and the horizontal end is connected to the cylinder shaft of the lifting cylinder (16); The cylinder bracket (18) is arranged in an L-shape, with a horizontal end connected to the cylinder seat of the lifting cylinder (16) and a vertical end connected to the crossbeam on the top of the frame (1).

6. The fully automatic cleaning equipment for semiconductor fixtures capable of steam exhaust according to claim 5, characterized in that: The steam exhaust cooling and discharge unit comprises an exhaust fan (19), the bottom of which is mounted on the top of the frame (1) via a fan liquid receiving tray (20); A pair of exhaust fans (19) are provided, and the air inlet of each exhaust fan (19) is connected to the air outlet (21) opened on both sides of the steam cover (8) in the steam cleaning unit below through an exhaust pipe to extract steam; The air outlet of the exhaust fan (19) is connected to a condensation tank for liquefaction recovery.

7. The fully automatic cleaning equipment for semiconductor fixtures capable of steam exhaust according to claim 6, characterized in that: A light alarm (22) is installed on the top of the frame (1), and the light alarm (22) is electrically connected to the PC (12).

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