Automatic silicon core cleaning device
By designing the silicon core automatic cleaning device, using a mechanical gripper mechanism and a flipboard mechanism to achieve automatic cleaning, isolate the diffusion of acid mist, and use a mixture of hydrofluoric acid and concentrated nitric acid for corrosion cleaning, the problems of high labor intensity and poor cleaning quality in the prior art are solved, and cleaning efficiency and safety are improved.
Patent Information
- Application Number
- CN202422350417.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-26
- Publication Date
- 2025-08-15
- Estimated Expiration
- 2034-09-26
AI Technical Summary
The existing silicon core cleaning devices have problems such as high labor intensity, poor cleaning quality and low automation, especially when cleaning large diameter silicon cores increase difficulty.
An automatic cleaning device for silicon core is designed, including a feeding transportation mechanism, pickling tank, rinsing tank, ultrasonic cleaning tank, drying section and feeding transportation mechanism. The mechanical gripper mechanism and flipboard mechanism are used to achieve automatic cleaning. The partition isolates the gas phase space at different stages to avoid the diffusion of acid mist, and uses a mixture of hydrofluoric acid and concentrated nitric acid for corrosion cleaning.
The efficient and automated silicon core cleaning process is achieved, the cleaning efficiency is improved, the surface characteristics of the silicon core meet the deposition rate of the reduction reaction and the quality of the silicon material, and the safety risks are reduced.
Smart Images
Figure CN223222066U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of polysilicon production, in particular to an automatic silicon core cleaning device. Background Art
[0002] Polysilicon production involves numerous and complex processes, particularly within the polysilicon reduction furnace, where the silicon core plays a crucial role. During the polysilicon growth process, the surface of the core is gradually covered by a newly deposited silicon layer, forming polysilicon crystals that serve as the foundation for deposited silicon material. The surface of the core is where chemical reactions occur, and its surface properties (such as cleanliness and roughness) affect the deposition rate and quality of the silicon material.
[0003] Currently, silicon cores are cleaned manually or automatically. Manual cleaning has drawbacks such as strong acid corrosion, high labor intensity, and poor cleaning quality. However, the use of automatic cleaning equipment has improved the cleaning output and quality more closely aligned with the needs of polysilicon production. To achieve a certain output, the cleaning equipment requires the silicon cores to be mounted on a cleaning basket. Typically, a set of baskets holds 30-45 silicon cores. The baskets are heavy, inconvenient to move and clean, and labor-intensive for operators. As the diameter of individual silicon cores increases, their weight also increases, making cleaning increasingly difficult. Utility Model Content
[0004] In view of this, the utility model provides a silicon core automatic cleaning device, the main purpose of which is to improve the efficiency of silicon core cleaning.
[0005] In order to achieve the above-mentioned purpose, the present invention mainly provides the following technical solutions:
[0006] The utility model provides a silicon core automatic cleaning device, which includes:
[0007] Along the length direction of the chamber, a loading and transporting mechanism, a pickling tank, a rinsing tank, an ultrasonic cleaning tank, a drying section and a unloading and transporting mechanism are arranged in sequence;
[0008] In which, a water seal tank is provided between the rinsing tank and the ultrasonic cleaning tank, a conveyor chain mechanism is provided in the water seal tank, a partition is provided above the water seal tank, and the lower end of the partition is located below the liquid level of the water seal tank, a first partition wall is provided between the pickling tank and the loading and transporting mechanism, the first partition wall is installed with a first flip mechanism, a second partition wall is provided between the drying section and the unloading and transporting mechanism, the second partition wall is installed with a second flip mechanism, the chamber between the first partition wall and the partition is installed with a first mechanical gripper mechanism, and the chamber between the partition and the second partition wall is installed with a second mechanical gripper mechanism.
[0009] The purpose of the present invention and the solution to its technical problems can be further achieved by adopting the following technical measures.
[0010] Optionally, the drying section includes a blowing box and a drying box arranged in sequence, wherein a cold air blowing pipe is installed in the blowing box, and a hot air blowing pipe is installed in the drying box.
[0011] Optionally, the first mechanical gripper mechanism and the second mechanical gripper mechanism have the same structure, both including a screw slider structure and a cylinder, the screw of the screw slider structure extends along the length direction of the chamber, the slider of the screw slider structure is fixedly connected to the cylinder, and the piston rod of the cylinder is connected to the hook body.
[0012] Optionally, the first partition wall includes a first upper partition wall and a first lower partition wall, the first upper partition wall and the first lower partition wall are horizontally staggered to form a first interval, the first interval is located above the loading and transport mechanism, and the first flip mechanism is arranged at the first interval.
[0013] Optionally, the second partition wall includes a second upper partition wall and a second lower partition wall, the second upper partition wall and the second lower partition wall are horizontally staggered to form a second partition, the second partition is located above the unloading and transporting mechanism, and the second flip mechanism is arranged at the second partition.
[0014] Optionally, both the loading and unloading transport mechanisms adopt a conveyor chain structure.
[0015] Optionally, a plurality of nitrogen pipes are provided at the bottom of the rinsing tank, and a plurality of air injection holes are uniformly distributed on the pipe walls of the nitrogen pipes.
[0016] Optionally, it further includes a loading trolley and a unloading trolley, the frame of the loading trolley is detachably connected to the frame of the loading and transporting mechanism, and the frame of the unloading trolley is detachably connected to the frame of the unloading and transporting mechanism.
[0017] Optionally, it also includes a loading mechanical gripper mechanism and a unloading mechanical gripper mechanism, wherein the loading mechanical gripper mechanism is used to transfer the flower basket on the loading trolley to the loading transport mechanism, and the unloading mechanical gripper mechanism is used to transfer the flower basket on the unloading transport mechanism to the unloading trolley.
[0018] Optionally, an exhaust pipe is further included, and the exhaust pipe is connected to the top wall of the chamber.
[0019] By means of the above technical solution, the present invention has at least the following advantages:
[0020] The loading and transporting mechanism transports the silicon core flower basket to the outside of the first partition wall, the flap of the first flap mechanism unfolds, the first mechanical gripper mechanism grabs the flower basket, and moves the flower basket to the pickling tank, rinsing tank, and water seal tank in turn. The silicon core is pickled and rinsed in turn, and then the flower basket is transported forward by the conveyor chain mechanism in the water seal tank. The flower basket passes through the lower end of the partition, and the second mechanical gripper mechanism grabs the flower basket and moves the flower basket to the ultrasonic cleaning tank and drying section in turn. When the silicon core is heated and dried, the stains on the surface of the silicon core are thoroughly cleaned to ensure that the surface characteristics of the silicon core meet the deposition rate of the reduction reaction and the quality of the silicon material.
[0021] The flap of the second flap mechanism is unfolded, and the heated and dried silicon core flower basket is grabbed by the second mechanical gripper mechanism, and the silicon core flower basket is moved to the unloading and transporting mechanism.
[0022] During the process of pickling, rinsing, heating and drying the silicon core flower basket in sequence, the flap of the first flap mechanism is in a closed state, and the flap of the second flap mechanism is also in a closed state to prevent the acid gas in the chamber from overflowing. At the same time, the lower end of the partition is located below the liquid level of the water seal tank to prevent the acid mist in the pickling tank from spreading backward along the cleaning sequence.
[0023] By using this automatic cleaning device, the cleaning process does not require human participation, has a high degree of automation, and has high cleaning efficiency. The gas phase space in the pickling and rinsing stages and the gas phase space in the ultrasonic and drying stages are separated by partitions, which controls the diffusion of acid mist and reduces safety risks. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] Figure 1 A schematic structural diagram of an automatic silicon core cleaning device provided by an embodiment of the present utility model;
[0025] Figure 2 for Figure 1 Enlarged view of part A.
[0026] The figure marks in the drawings of the specification include: chamber 1, loading and transporting mechanism 2, pickling tank 3, rinsing tank 4, ultrasonic cleaning tank 5, unloading and transporting mechanism 6, water seal tank 7, conveyor chain mechanism 8, partition 9, first partition wall 10, first flip mechanism 11, second partition wall 12, second flip mechanism 13, first mechanical gripper mechanism 14, second mechanical gripper mechanism 15, blowing box 16, drying box 17, screw 18, slider 19, cylinder 20, hook body 21, nitrogen pipe 22, loading trolley 23, unloading trolley 24, loading mechanical gripper mechanism 25, unloading mechanical gripper mechanism 26, exhaust pipe 27. DETAILED DESCRIPTION
[0027] To further illustrate the technical means and effects employed by this utility model to achieve its intended purpose, the following, in conjunction with the accompanying drawings and preferred embodiments, provides a detailed description of the specific implementation methods, structures, features, and effects of this utility model application. In the following description, different references to "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.
[0028] The present invention will be described in further detail below with reference to the accompanying drawings and embodiments.
[0029] like Figure 1 As shown, an embodiment of the present invention provides an automatic silicon core cleaning device, which includes:
[0030] Along the length direction of the chamber 1, a loading and transporting mechanism 2, a pickling tank 3, a rinsing tank 4, an ultrasonic cleaning tank 5, a drying section and a unloading and transporting mechanism 6 are arranged in sequence;
[0031] Among them, a water seal tank 7 is arranged between the rinsing tank 4 and the ultrasonic cleaning tank 5, and a conveyor chain mechanism 8 is arranged in the water seal tank 7. A partition 9 is arranged above the water seal tank 7, and the lower end of the partition 9 is located below the liquid level of the water seal tank 7. A first partition wall 10 is arranged between the pickling tank 3 and the loading and transporting mechanism 2, and the first partition wall 10 is equipped with a first flip mechanism 11. A second partition wall 12 is arranged between the drying section and the unloading and transporting mechanism 6, and the second partition wall 12 is equipped with a second flip mechanism 13. The chamber 1 between the first partition wall 10 and the partition 9 is equipped with a first mechanical gripper mechanism 14, and the chamber 1 between the partition 9 and the second partition wall 12 is equipped with a second mechanical gripper mechanism 15.
[0032] The working process of a silicon core automatic cleaning device is as follows:
[0033] The loading and transporting mechanism 2 transports the silicon core flower basket to the outside of the first partition wall 10, the flap of the first flap mechanism 11 is unfolded, the first mechanical gripper mechanism 14 grabs the flower basket, and moves the flower basket to the pickling tank 3, the rinsing tank 4, and the water seal tank 7 in turn. The silicon core is pickled and rinsed in turn, and then the flower basket is transported forward by the conveyor chain mechanism 8 in the water seal tank 7. The flower basket passes through the lower end of the partition 9, and the second mechanical gripper mechanism 15 grabs the flower basket and moves the flower basket to the ultrasonic cleaning tank 5 and the drying section in turn. When the silicon core is heated and dried, the stains on the surface of the silicon core are thoroughly cleaned to ensure that the surface characteristics of the silicon core meet the deposition rate of the reduction reaction and the quality of the silicon material.
[0034] The flap of the second flap mechanism 13 is unfolded, and the heated and dried silicon core flower basket is grabbed by the second mechanical gripper mechanism 15 , and the silicon core flower basket is moved to the unloading and transporting mechanism 6 .
[0035] During the process of pickling, rinsing, heating and drying the silicon core flower basket in sequence, the flap of the first flap mechanism 11 is in a closed state, and the flap of the second flap mechanism 13 is also in a closed state to prevent the acid gas in the chamber 1 from overflowing. At the same time, the lower end of the partition 9 is located below the liquid level of the water seal tank 7 to prevent the acid mist in the pickling tank 3 from spreading backward along the cleaning sequence.
[0036] In the technical solution of the present invention, by using the automatic cleaning device, the cleaning process does not require human participation, the degree of automation is high, and the cleaning efficiency is high. The gas phase space in the pickling and rinsing stages and the gas phase space in the ultrasonic and drying stages are separated by the partition 9, which controls the diffusion of acid mist and reduces safety risks.
[0037] Specifically, the pickling tank 3 is filled with a mixture of hydrofluoric acid and nitric acid. Although hydrofluoric acid can dissolve the silicon dioxide and silicon on the surface of the silicon core to form silicon chloride, the corrosion effect of hydrofluoric acid alone on the silicon rod is extremely slow. Concentrated nitric acid can also remove the silicon oxide film, but the oxide film is a poorly soluble substance that is neither soluble in water nor in nitric acid. Therefore, nitric acid alone cannot achieve the purpose of etching and cleaning the surface of the silicon core. However, in the mixed etching solution of hydrofluoric acid and concentrated nitric acid, the hydrofluoric acid first dissolves the silicon dioxide on the surface of the silicon core, then the nitric acid oxidizes the elemental silicon on the surface of the silicon core into silicon dioxide, and then the hydrofluoric acid dissolves the oxide film produced by the nitric acid oxidation. The two acids act alternately in this way, thereby peeling off a layer of the silicon core surface, thereby achieving the purpose of cleaning the silicon core. Usually, we corrode and clean the silicon core in a mixture of concentrated nitric acid and hydrofluoric acid with a volume ratio of nitric acid to hydrofluoric acid of 5:1.
[0038] Specifically, driving gears are installed in the pickling tank 3, the rinsing tank 4 and the ultrasonic cleaning tank 5 respectively, and the driving gears are engaged with the gear disk at the end of the flower basket to facilitate driving the silicon core flower basket to rotate.
[0039] In a specific embodiment, the drying section includes a blowing box 16 and a drying box 17 which are arranged in sequence. A cold air blowing pipe is installed in the blowing box 16, and a hot air blowing pipe is installed in the drying box 17.
[0040] In this embodiment, specifically, in the blowing box 16, the cold air sprayed from the cold air blowing pipe removes most of the moisture on the surface of the silicon core; in the drying box 17, the hot air sprayed from the hot air blowing pipe heats and dries again to remove the moisture on the surface of the silicon core to prevent oxidation of the silicon core.
[0041] like Figure 2As shown, in a specific embodiment, the first mechanical gripper mechanism 14 and the second mechanical gripper mechanism 15 have the same structure, both including a screw slider structure and a cylinder 20, the screw 18 of the screw slider structure extends along the length direction of the chamber 1, the slider 19 of the screw slider structure is fixedly connected to the cylinder 20, and the piston rod of the cylinder 20 is connected to the hook body 21.
[0042] In this embodiment, specifically, the screw rod 18 drives the slider 19 to move forward and backward along the length direction of the chamber 1, the piston rod of the cylinder 20 drives the hook body 21 to move up and down, and the hook body 21 mounts the central axis of the end of the flower basket to drive the silicon core flower basket to move up and down, thereby realizing the sequential transfer of the silicon core flower basket among the loading and transporting mechanism 2, the pickling tank 3, the rinsing tank 4, the ultrasonic cleaning tank 5, the drying section, and the unloading and transporting mechanism 6.
[0043] In a specific embodiment, the first partition wall 10 includes a first upper partition wall and a first lower partition wall. The first upper partition wall and the first lower partition wall are horizontally staggered to form a first interval. The first interval is located above the loading and transporting mechanism 2, and the first flip mechanism 11 is arranged at the first interval.
[0044] In this embodiment, specifically, when the loading and transporting mechanism 2 transports the silicon core flower basket to the bottom of the first interval, the flap of the first flap mechanism 11 is unfolded, the hook body 21 of the first mechanical gripper mechanism 14 passes through the first interval, grabs the silicon core flower basket, and transfers the silicon core flower basket to the pickling tank 3. The flap of the first flap mechanism 11 is closed to prevent the acid mist in the pickling tank 3 from diffusing to the loading and transporting mechanism 2 outside the first interval.
[0045] In a specific embodiment, the second partition wall 12 includes a second upper partition wall and a second lower partition wall. The second upper partition wall and the second lower partition wall are horizontally staggered to form a second interval. The second interval is located above the unloading and transporting mechanism 6, and the second flip mechanism 13 is arranged at the second interval.
[0046] In this embodiment, specifically, after the drying section completes drying the silicon core flower basket, the flap of the second flip mechanism 13 is unfolded, the second mechanical gripper mechanism 15 grabs the silicon core flower basket, drives the silicon core flower basket through the second interval, and lowers the silicon core flower basket to the unloading and transporting mechanism 6, and then the flap of the second flip mechanism 13 is closed.
[0047] In a specific embodiment, the loading and transporting mechanism 2 and the unloading and transporting mechanism 6 both adopt a conveyor chain structure.
[0048] In this embodiment, specifically, the loading and transporting mechanism 2 and the unloading and transporting mechanism 6 both adopt a conveying chain structure, which includes two parallel chains. The two parallel chains correspond to the end gear plates of the flower basket respectively, and the outer edges of the parallel chains are arranged with multiple groups of buckles in sequence. Each group of buckles can correspond to the end gear plate, which is convenient for driving the silicon core flower basket to move along the length direction of the chamber 1 to realize loading and unloading.
[0049] In a specific embodiment, a plurality of nitrogen pipes 22 are provided at the bottom of the rinsing tank 4 , and a plurality of air injection holes are uniformly distributed on the pipe wall of the nitrogen pipe 22 .
[0050] In this embodiment, specifically, the silicon core flower basket is immersed in ultrapure water in the rinsing tank 4, and at the same time, the air jet hole of the nitrogen pipe 22 bubbles from bottom to top, so that the surface of the silicon core is in an inert gas atmosphere to prevent air from oxidizing the silicon core.
[0051] In a specific embodiment, it also includes a loading trolley 23 and a unloading trolley 24. The frame of the loading trolley 23 can be detachably connected to the frame of the loading and transporting mechanism 2, and the frame of the unloading trolley 24 can be detachably connected to the frame of the unloading and transporting mechanism 6.
[0052] In this embodiment, specifically, an arc-shaped support seat is provided at the end of the loading trolley 23 and the opposite end of the unloading trolley 24, and the end gear plates of the silicon core flower basket are placed correspondingly on the arc-shaped support seats;
[0053] The frame of the loading trolley 23 is connected to the frame of the loading transport mechanism 2 through a hook, and the frame of the unloading trolley 24 is connected to the frame of the unloading transport mechanism 6 through a hook;
[0054] The operator can transport the silicon core flower basket through the loading trolley 23 and the unloading trolley 24. At the same time, the relative position of the loading trolley 23 and the loading transport mechanism 2 can be fixed by a hook, and the relative position of the unloading trolley 24 and the unloading transport mechanism 6 can also be fixed by a hook, which facilitates the stable transfer of the silicon core flower basket.
[0055] In a specific embodiment, it also includes a loading mechanical gripper mechanism 25 and a unloading mechanical gripper mechanism 26. The loading mechanical gripper mechanism 25 is used to transfer the flower basket on the loading trolley 23 to the loading transport mechanism 2, and the unloading mechanical gripper mechanism 26 is used to transfer the flower basket on the unloading transport mechanism 6 to the unloading trolley 24.
[0056] In this embodiment, specifically, the loading mechanical gripper mechanism 25, the unloading mechanical gripper mechanism 26, the first mechanical gripper mechanism 14, and the second mechanical gripper mechanism 15 have the same structure, and all include a screw slider structure and a cylinder 20. The screw 18 of the screw slider structure extends along the length direction of the chamber 1, and the slider 19 of the screw slider structure is fixedly connected to the cylinder 20. The piston rod of the cylinder 20 is connected to the hook body 21, thereby realizing the transfer of the silicon core flower basket between the loading trolley 23 and the loading transport mechanism 2, and at the same time, realizing the transfer of the silicon core flower basket between the unloading transport mechanism 6 and the unloading trolley 24.
[0057] Specifically, magnets are installed on the sides of the sliders of the first mechanical gripper mechanism 14, the second mechanical gripper mechanism 15, the loading mechanical gripper mechanism 25 and the unloading mechanical gripper mechanism 26, respectively. A plurality of Hall elements are installed on the side of the chamber 1. The plurality of Hall elements are arranged in sequence directly above the loading trolley 23, the loading transport mechanism 2, the pickling tank 3, the rinsing tank 4, the ultrasonic cleaning tank 5, the blowing box 16, the drying box 17, the unloading transport mechanism 6 and the unloading trolley 24. The magnet moves horizontally with the slider. When the magnet moves to different Hall elements, the Hall element sends an electrical signal to the external controller, and the external controller sends a stop command to the drive motor of the screw slider structure. The external controller controls the piston rod and the hook body 21 of the cylinder 20 to move up and down, driving the silicon core flower basket to be lowered or lifted, thereby realizing the precise positioning of the silicon core flower basket.
[0058] In a specific embodiment, an air extraction pipe 27 is further included, and the air extraction pipe 27 is connected to the top wall of the chamber 1.
[0059] In this embodiment, specifically, one end of the exhaust pipe 27 is connected to the top wall of the chamber 1 , and the other end is connected to the exhaust gas treatment mechanism, so as to timely extract the volatilized acid mist in the chamber 1 .
[0060] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.
Claims
1. A silicon core automatic cleaning device, characterized in that: include: A chamber, wherein a loading and transporting mechanism, a pickling tank, a rinsing tank, an ultrasonic cleaning tank, a drying section and a unloading and transporting mechanism are sequentially arranged along the length direction of the chamber; In which, a water seal tank is provided between the rinsing tank and the ultrasonic cleaning tank, a conveyor chain mechanism is provided in the water seal tank, a partition is provided above the water seal tank, and the lower end of the partition is located below the liquid level of the water seal tank, a first partition wall is provided between the pickling tank and the loading and transporting mechanism, the first partition wall is installed with a first flip mechanism, a second partition wall is provided between the drying section and the unloading and transporting mechanism, the second partition wall is installed with a second flip mechanism, the chamber between the first partition wall and the partition is installed with a first mechanical gripper mechanism, and the chamber between the partition and the second partition wall is installed with a second mechanical gripper mechanism.
2. The automatic silicon core cleaning device according to claim 1, characterized in that: The drying section comprises a blowing box and a drying box which are arranged in sequence. A cold air blowing pipe is installed in the blowing box, and a hot air blowing pipe is installed in the drying box.
3. The automatic silicon core cleaning device according to claim 1, characterized in that: The first mechanical gripper mechanism and the second mechanical gripper mechanism have the same structure, both including a screw slider structure and a cylinder. The screw of the screw slider structure extends along the length direction of the chamber, the slider of the screw slider structure is fixedly connected to the cylinder, and the piston rod of the cylinder is connected to the hook body.
4. The automatic silicon core cleaning device according to claim 1, characterized in that: The first partition wall includes a first upper partition wall and a first lower partition wall. The first upper partition wall and the first lower partition wall are horizontally staggered to form a first partition. The first partition is located above the loading and transporting mechanism, and the first flap mechanism is arranged at the first partition.
5. The automatic silicon core cleaning device according to claim 1, characterized in that: The second partition wall includes a second upper partition wall and a second lower partition wall. The second upper partition wall and the second lower partition wall are horizontally staggered to form a second partition. The second partition is located above the unloading and transporting mechanism, and the second flap mechanism is arranged at the second partition.
6. The automatic silicon core cleaning device according to any one of claims 1 to 5, characterized in that: The loading and unloading transport mechanism and the unloading and transport mechanism both adopt a conveyor chain structure.
7. The automatic silicon core cleaning device according to any one of claims 1 to 5, characterized in that: A plurality of nitrogen pipes are provided at the bottom of the rinsing tank, and a plurality of air injection holes are uniformly distributed on the pipe walls of the nitrogen pipes.
8. The automatic silicon core cleaning device according to any one of claims 1 to 5, characterized in that: It also includes a loading trolley and a unloading trolley. The frame of the loading trolley can be detachably connected to the frame of the loading and transporting mechanism, and the frame of the unloading trolley can be detachably connected to the frame of the unloading and transporting mechanism.
9. The automatic silicon core cleaning device according to claim 8, characterized in that: It also includes a loading mechanical gripper mechanism and a unloading mechanical gripper mechanism. The loading mechanical gripper mechanism is used to transfer the flower basket on the loading trolley to the loading transport mechanism, and the unloading mechanical gripper mechanism is used to transfer the flower basket on the unloading transport mechanism to the unloading trolley.
10. The automatic silicon core cleaning device according to any one of claims 1 to 5, characterized in that: It also includes an air extraction pipe connected to the top wall of the chamber.