Plasma cleaning machine with automatic turnover mechanism

Abstract

The plasma cleaning machine with the automatic turnover mechanism comprises a machine cabinet and a cabinet door arranged on the machine cabinet, an outer frame moving in a reciprocating mode in the direction towards an opening of the machine cabinet is movably installed in the machine cabinet, an inner frame is connected to the outer frame through a rotating shaft, a bearing plate and a pressing plate are installed on the inner frame in a sliding mode, and the bearing plate is connected with the pressing plate through a rotating shaft. Wherein the sliding direction of the bearing plate is perpendicular to the sliding direction of the pressing plate, and the pressing plate is connected with the inner frame through an elastic piece so as to clamp a workpiece on the bearing plate. After a workpiece is located on the bearing plate, the inner frame can be driven to turn over along with the movement of the outer frame, so that the bearing plate is driven to turn over together, in order to ensure the stability of the workpiece, the workpiece is clamped under the cooperation of the pressing plate, more positions of the workpiece are exposed in the cabinet by changing the position of the workpiece, and the cleaning work is facilitated to be completed.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma cleaning machines, in particular to a plasma cleaning machine with an automatic turning mechanism. Background Art

[0002] The plasma cleaning machine generates high-energy disordered plasma in a vacuum chamber by using a radio frequency power supply under certain pressure conditions, and bombards the surface of the product to be cleaned with the plasma.

[0003] Currently, a flat-panel plasma cleaning machine cleans a workpiece by pulling out a carrier plate from a frame inside the cleaning machine, placing the workpiece on the carrier plate, and then reinserting the carrier plate into the frame. After closing the cabinet door, the plasma inside the cleaning machine completes the cleaning of the workpiece. However, since the workpiece is laid flat on the carrier plate, and the frame and carrier plate cannot be adjusted at an angle within the cabinet, for some special-shaped workpieces, some cleaning locations are remote, which often requires more cleaning time. In view of this, the present application proposes a plasma cleaning machine with an automatic flipping mechanism. Utility Model Content

[0004] The purpose of the present utility model is to provide a plasma cleaning machine with an automatic flipping mechanism to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: a plasma cleaning machine with an automatic flipping mechanism, comprising a cabinet and a cabinet door configured on the cabinet, wherein an outer frame is movably installed in the cabinet and reciprocates in a direction toward the cabinet opening, the outer frame is connected to an inner frame via a rotating shaft, and a carrying plate and a pressing plate are slidably installed on the inner frame, wherein the sliding direction of the carrying plate is perpendicular to the sliding direction of the pressing plate, and the pressing plate is connected to the inner frame via an elastic member to form a clamp for the workpiece on the carrying plate, and further comprising:

[0006] The switching member acts on the rotating shaft. When the outer frame moves back and forth, the switching member drives the rotating shaft to flip to achieve the angle change of the inner frame.

[0007] Preferably, the cabinet is equipped with a screw rod and a guide rod, the screw rod is threadedly connected to a threaded seat, the guide rod is slidably connected to a slide seat, the threaded seat and the slide seat are both connected to the outer frame, a servo motor is installed on the cabinet, and the servo motor output shaft is connected to the screw rod.

[0008] Preferably, two sets of symmetrically distributed guide rails are installed on the inner frame, and a slider is installed on the bearing plate, and the slider is slidably engaged with the guide rails.

[0009] Preferably, the elastic member includes a guide hole and a side plate constructed on the inner frame, a connecting block is slidably fitted in the guide hole, the connecting block is connected to the pressure plate, an insertion rod is installed on the connecting block, the free end of the insertion rod slides through the side plate, and a spring is sleeved on the insertion rod.

[0010] Preferably, a positioning pin is installed on a side of the pressure plate facing the supporting plate, and a positioning hole is constructed through the supporting plate.

[0011] Preferably, the switching member includes a gear disposed at the end of the rotating shaft, and a rack that can mesh with the gear is installed in the cabinet.

[0012] Preferably, a locking block is installed at the end of the rotating shaft, and a locking frame is installed in the cabinet. When the locking block enters the locking frame, the rotation of the rotating shaft is restricted.

[0013] Preferably, an expansion block is constructed at the end of the locking frame, the size of the expansion block is larger than the size of the locking block, and the inner size of the expansion block gradually decreases along the direction approaching the locking frame.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] The utility model changes the frame structure of the existing plasma cleaning machine. When the workpiece is on the carrying plate, the movement of the outer frame can drive the inner frame to flip, thereby driving the carrying plate to flip together. In order to ensure the stability of the workpiece, the pressure plate cooperates to form a clamp for the workpiece, thereby changing the position of the workpiece so that more of its position is exposed in the cabinet, which helps to complete the cleaning work. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of the utility model;

[0017] Figure 2 It is a partial structural perspective diagram of the utility model;

[0018] Figure 3 For this utility model Figure 2 A magnified view of the structure at center A;

[0019] Figure 4 For this utility model Figure 2 A magnified view of the structure at point B in the middle;

[0020] Figure 5 For this utility model Figure 2 Front view of

[0021] Figure 6 for Figure 5 Enlarged view of the structure at point C in the middle.

[0022] In the figure: 1. Cabinet; 2. Cabinet door; 3. External frame; 301. Reciprocating plate; 302. Vertical plate; 4. Rotating shaft; 5. Inner frame; 6. Load-bearing plate; 7. Pressure plate; 8. Guide rail; 9. Slider; 10. Positioning pin; 11. Screw; 12. Threaded seat; 13. Guide rod; 14. Slide; 15. Servo motor; 16. Guide hole; 17. Connecting block; 18. Side plate; 19. Insert rod; 20. Spring; 21. Gear; 22. Rack; 23. Locking block; 24. Locking frame; 25. Expansion block. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] Example 1

[0025] See also Figures 1-6 , this embodiment provides a technical solution: a plasma cleaning machine with an automatic flipping mechanism, comprising a cabinet 1 and a cabinet door 2 configured on the cabinet 1, the cabinet door 2 being hinged to the cabinet 1 by a hinge, an outer frame 3 movably installed in the cabinet 1 that reciprocates in the direction toward the opening of the cabinet 1, the outer frame 3 comprising a return plate 301 and two vertical plates 302 installed on the return plate 301, the outer frame 3 in this application is equivalent to the frame of an existing plasma cleaning machine, the difference being that the outer frame 3 in this application is movable, and part of the structure of the outer frame 3 can extend out of the cabinet 1 through the opening of the cabinet 1, such a design has two main advantages, one is that it facilitates loading and unloading of workpieces, and the other is that it facilitates inspection and maintenance;

[0026] The core of this application is that: the outer frame 3 is connected to the inner frame 5 through the rotating shaft 4, and the inner frame 5 can be flipped vertically relative to the outer frame 3 through the rotating shaft 4, and the rotating shaft 4 is connected to the vertical plate 302 through a bearing, so as to change the inclination angle of the inner frame 5, wherein a carrying plate 6 and a pressing plate 7 are slidably installed on the inner frame 5, wherein the sliding direction of the carrying plate 6 is perpendicular to the sliding direction of the pressing plate 7, and the sliding direction of the carrying plate 6 is along the length direction of the inner frame 5. When loading and unloading is required, the entire inner frame 5 is in a vertical state, and the carrying plate 6 is in a horizontal state, which is convenient for extraction, and then the workpiece is placed flat on the carrying plate 6 and then pushed horizontally onto the inner frame 5, completing During the loading of the workpiece, the pressing plate 7 is connected to the inner frame 5 through an elastic member to form a clamping operation for the workpiece on the carrier plate 6. Under the cooperation of the elastic member, the pressing plate 7 always has a movement tendency close to the inner frame 5. During the loading process, the pressing plate 7 is forced away from the carrier plate 6 by applying force to the pressing plate 7, and then the carrier plate 6 is pulled out to complete the loading. Then, during the process of putting the carrier plate 6 back into the inner frame 5, the pressing plate 7 is forced again in the same way. When the carrier plate 6 is placed, the pressing plate 7 is close to the carrier plate 6 under the cooperation of the elastic member to complete the clamping operation for the workpiece on the carrier plate 6, ensuring that when the inner frame 5 rotates, the workpiece on the carrier plate 6 can be in a stable state. The present application also includes:

[0027] The switching member acts on the rotating shaft 4. When the outer frame 3 reciprocates, the switching member drives the rotating shaft 4 to flip to achieve the angle change of the inner frame 5. That is, due to the existence of the switching member, when the outer frame 3 moves on the cabinet 1, it will drive the rotating shaft 4 to rotate, thereby achieving the flipping of the inner frame 5, thereby changing the position of the workpiece on the carrying plate 6, which is conducive to completing the cleaning work;

[0028] In summary, the present application changes the frame structure of the existing plasma cleaning machine. When the workpiece is on the supporting plate 6, as the outer frame 3 moves, the inner frame 5 can be driven to flip, thereby driving the supporting plate 6 to flip together. In order to ensure the stability of the workpiece, the pressure plate 7 cooperates to form a clamp for the workpiece, thereby changing the position of the workpiece so that more of its position is exposed in the cabinet 1, which helps to complete the cleaning work.

[0029] As a preferred embodiment, in order to meet the reciprocating movement of the external frame 3, the cabinet 1 is equipped with a screw rod 11 and a guide rod 13, a threaded seat 12 is threadedly connected to the screw rod 11, and a slide 14 is slidably connected to the guide rod 13, the threaded seat 12 and the slide 14 are both connected to the external frame 3, and a servo motor 15 is installed on the cabinet 1, the output shaft of the servo motor 15 is connected to the screw rod 11, and the screw rod 11 is driven to rotate by the servo motor 15. With the cooperation of the guide rod 13 and the slide 14, the external frame 3 is guided in a straight line, so that the threaded seat 12 moves in a straight line along the screw rod 11, providing driving force for the movement of the external frame 3, and meeting the requirements of the reciprocating movement of the external frame 3.

[0030] As a preferred embodiment, the inner frame 5 is equipped with two sets of symmetrically distributed guide rails 8, and the carrier plate 6 is equipped with sliders 9, which slide with the guide rails 8. The carrier plate 6 is inserted into the guide rails 8 through the sliders 9 on both sides thereof, so that the carrier plate 6 and the inner frame 5 form a reciprocating slide, thereby facilitating the pulling and pushing of the carrier plate 6. Figure 2 and Figure 5 As shown, there are multiple groups of guide rails 8 . For ease of understanding, only one group of the supporting plate 6 and the pressing plate 7 is shown in this application.

[0031] As a preferred embodiment, the elastic member includes a guide hole 16 and a side plate 18 constructed on the inner frame 5, and a connecting block 17 is slidably fitted in the guide hole 16, and the connecting block 17 is connected to the pressure plate 7, and an insertion rod 19 is installed on the connecting block 17. The free end of the insertion rod 19 slides through the side plate 18, and a spring 20 is sleeved on the insertion rod 19. Under normal circumstances, the spring 20 cooperates to push the connecting block 17 close to the adjacent supporting plate 6. That is to say, at this time, the pressure plate 7 is close to the supporting plate 6. When it is necessary to complete the loading and unloading actions, the pressure plate 7 is forced to move by applying force to the pressure plate 7. At this time, the insertion rod 19 will slide along the side plate 18, and the spring 20 is deformed and compressed, and the spacing between the pressure plate 7 and the supporting plate 6 is changed, which facilitates the removal and placement of the supporting plate 6. In the process of flipping the inner frame 5, the spring 20 is also cooperated to keep the pressure plate 7 close to the supporting plate 6 to meet the stability requirements of the workpiece.

[0032] As a preferred embodiment, a positioning pin 10 is installed on the side of the pressure plate 7 facing the supporting plate 6, and a positioning hole is constructed through the supporting plate 6. When the pressure plate 7 approaches the supporting plate 6, the positioning pin 10 is inserted into the positioning hole, completing the locking of the position of the supporting plate 6. In this way, when the inner frame 5 is flipped, the supporting plate 6 will not slide along the guide rail 8 through the guide block, thereby improving the stability of the supporting plate 6.

[0033] Example 2

[0034] See also Figures 1-6The difference between the second embodiment and the first embodiment is that the present embodiment discloses the specific structure of the switching member, the switching member includes a gear 21 arranged at the end of the rotating shaft 4, and a rack 22 that can mesh with the gear 21 is installed in the cabinet 1. When the outer frame 3 is moving, it drives the rotating shaft 4 located on the vertical plate 302 to move together, and the rotating shaft 4 and the vertical plate 302 are connected by bearings. Therefore, when the gear 21 contacts the rack 22, the gear 21 rotates relative to the rack 22, thereby driving the rotating shaft 4 to rotate, and finally realizing the rotation of the inner frame 5 and the supporting plate 6 on the inner frame 5. Since the movement of the outer frame 3 is achieved by the rotation of the screw rod 11, when the screw rod 11 is in a stopped state, the rotating shaft 4 can be kept in a locked state at this time, that is, the supporting plate 6 is in a stable state.

[0035] As a preferred embodiment, considering that part of the structure of the outer frame 3 needs to be moved outside the cabinet 1, and in order to ensure that the outer frame 3 is in a horizontal state and moved out of the cabinet 1, a locking block 23 is installed at the end of the shaft 4, and a locking frame 24 is installed in the cabinet 1. When the locking block 23 enters the locking frame 24, the rotation of the shaft 4 is restricted. That is to say, as the outer frame 3 moves, the gear 21 will separate from the rack 22. At this time, if the shaft 4 is not restricted, then due to the influence of gravity and inertia, the inner frame 5 cannot maintain a stable state. Therefore, the present application adds a locking block 23 and a locking frame 24 design. Since the locking block 23 is installed on the shaft 4, when the gear 21 is separated from the rack 22, the locking block 2 3 enters the locking frame 24. Due to the size restriction of the locking frame 24, the locking block 23 can only move linearly in the locking frame 24. Then, the rotating shaft 4 cannot rotate at this time, thereby ensuring that the inner frame 5 can only be in a vertical state. At this time, the carrying plate 6 is in a horizontal state. In order to facilitate the docking of the locking block 23 with the locking frame 24, an expansion block 25 is constructed at the end of the locking frame 24. The size of the expansion block 25 is larger than that of the locking block 23, and the inner size of the expansion block 25 gradually decreases as it approaches the locking frame 24. Through the design of the expansion block 25, the locking block 23 can enter the expansion block 25 at an inclined angle, and then as the size of the expansion block 25 decreases, the locking block 23 is gradually guided to be aligned, ensuring smooth alignment.

[0036] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0037] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A plasma cleaning machine with an automatic flipping mechanism, comprising a cabinet (1) and a cabinet door (2) arranged on the cabinet (1), characterized in that: An outer frame (3) is movably mounted in the cabinet (1) and reciprocates in a direction toward the opening of the cabinet (1). An inner frame (5) is connected to the outer frame (3) via a rotating shaft (4). A bearing plate (6) and a pressure plate (7) are slidably mounted on the inner frame (5), wherein the sliding direction of the bearing plate (6) is perpendicular to the sliding direction of the pressure plate (7). The pressure plate (7) is connected to the inner frame (5) via an elastic member to form a clamp for a workpiece on the bearing plate (6). The invention also includes: The switching member acts on the rotating shaft (4). When the outer frame (3) moves back and forth, the switching member drives the rotating shaft (4) to flip to achieve angle change of the inner frame (5).

2. The plasma cleaning machine with an automatic flipping mechanism according to claim 1, characterized in that: The cabinet (1) is equipped with a screw rod (11) and a guide rod (13); a threaded seat (12) is threadedly connected to the screw rod (11); a slide seat (14) is slidably connected to the guide rod (13); the threaded seat (12) and the slide seat (14) are both connected to the outer frame (3); a servo motor (15) is installed on the cabinet (1); an output shaft of the servo motor (15) is connected to the screw rod (11).

3. The plasma cleaning machine with an automatic flipping mechanism according to claim 1, characterized in that: Two sets of symmetrically distributed guide rails (8) are installed on the inner frame (5), and a slider (9) is installed on the bearing plate (6), and the slider (9) is in sliding cooperation with the guide rails (8).

4. The plasma cleaning machine with an automatic flipping mechanism according to claim 3, characterized in that: The elastic member includes a guide hole (16) and a side plate (18) constructed on the inner frame (5); a connecting block (17) is slidably fitted in the guide hole (16); the connecting block (17) is connected to the pressure plate (7); an insertion rod (19) is installed on the connecting block (17); the free end of the insertion rod (19) slides through the side plate (18); and a spring (20) is sleeved on the insertion rod (19).

5. The plasma cleaning machine with an automatic flipping mechanism according to claim 4, characterized in that: A positioning pin (10) is installed on one side of the pressure plate (7) facing the supporting plate (6), and a positioning socket is formed through the supporting plate (6).

6. The plasma cleaning machine with an automatic flipping mechanism according to claim 1, characterized in that: The switching member comprises a gear (21) arranged at the end of the rotating shaft (4), and a rack (22) capable of meshing with the gear (21) is installed in the cabinet (1).

7. The plasma cleaning machine with an automatic flipping mechanism according to claim 6, characterized in that: A locking block (23) is installed at the end of the rotating shaft (4), and a locking frame (24) is installed in the cabinet (1). When the locking block (23) enters the locking frame (24), the rotation of the rotating shaft (4) is restricted.

8. The plasma cleaning machine with an automatic flipping mechanism according to claim 7, characterized in that: An expansion block (25) is constructed at the end of the locking frame (24); the size of the expansion block (25) is larger than the size of the locking block (23), and the inner size of the expansion block (25) gradually decreases in a direction approaching the locking frame (24).

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