Transfer equipment and coating system

Abstract

The utility model discloses transfer equipment and a coating system. The transfer equipment comprises a sealing shell, a carrier, a driving mechanism and a transfer mechanism, a first opening and a second opening are defined in the side wall of the sealing shell, a vacuum cavity communicated with the first opening and the second opening is defined in the sealing shell, and the first opening and the second opening are used for being in butt joint with first coating equipment and second coating equipment respectively; the carrier is movably arranged in the vacuum chamber, and the carrier is provided with a feeding side and a discharging side; the driving mechanism is used for driving the carrier to move between a first station and a second station, the first station is the position where the feeding side is in butt joint with the first opening, and the second station is the position where the discharging side is in butt joint with the second opening; the transferring mechanism is used for transferring the materials located at the first opening to the carrier when the carrier is located at the first station and transferring the materials located on the carrier to the second opening when the carrier is located at the second station. The transfer equipment disclosed by the utility model can prevent materials from being exposed in the air when the materials are transferred among different coating equipment.

Description

Technical Field

[0001] The utility model relates to the technical field of automation equipment, in particular to a transfer device and a coating system. Background Art

[0002] Vacuum coating equipment heats metal or non-metal materials under vacuum conditions, causing them to evaporate and condense onto the surface of the material, forming a thin film. Materials requiring different coating processes typically require different coating equipment, and transfer equipment is required between different coating equipment.

[0003] In the related technology, the transfer equipment transfers the material under the atmospheric state. However, in the process of transferring the material from one coating device with a vacuum environment inside to another coating device with a vacuum environment inside, the material will be exposed to the air, causing the material to come into contact with the air, thereby affecting the subsequent coating effect on the material. Utility Model Content

[0004] The present invention aims to solve at least one of the technical problems in the prior art. To this end, the present invention provides a transfer device and a coating system that can prevent materials from being exposed to air when being transferred between different coating devices.

[0005] According to the transfer equipment of the first embodiment of the present invention, the transfer equipment is used to transfer materials between the first coating equipment and the second coating equipment, and the transfer equipment includes:

[0006] A sealed shell, wherein a vacuum chamber is defined within the sealed shell, and a side wall of the sealed shell defines a first opening and a second opening, wherein the vacuum chamber is communicated with the first opening and the second opening, respectively, wherein the first opening is used for docking with a first coating device, and the second opening is used for docking with a second coating device;

[0007] The carrier is movably arranged in the vacuum chamber, and the carrier has a loading side and a unloading side;

[0008] A driving mechanism is used to drive the carrier to move between a first station and a second station, the first station being a position where the loading side is docked with the first opening, and the second station being a position where the unloading side is docked with the second opening;

[0009] The transfer mechanism is used to transfer the material located at the first opening to the carrier when the carrier is at the first working position, and to transfer the material located on the carrier to the second opening when the carrier is at the second working position.

[0010] The heat dissipation structure according to the embodiment of the present invention has at least the following beneficial effects:

[0011] By defining a vacuum chamber inside the sealed shell, the movement space required for the carrier to transfer materials can be provided, and a first opening that interfaces with the first coating device and a second opening that interfaces with the second coating device are defined on the side walls of the sealed shell respectively. In this way, when the material enters the vacuum chamber from the first opening and is transferred to the second opening, the material can always be in a vacuum environment separated from the outside world, thereby avoiding exposure of the material to the air when transferring between different coating devices, thereby avoiding contact between the material and the air and affecting the coating effect of the next coating device.

[0012] According to some embodiments of the present invention, the carrier is provided with a rotation connection portion;

[0013] The driving mechanism is connected to the rotating connection part, and is used for driving the rotating connection part to drive the carrier to flip between the first station and the second station around the axis of the rotating connection part.

[0014] According to some embodiments of the present invention, the interior of the carrier defines a receiving cavity, and the receiving cavity is used to receive the material;

[0015] The carrier defines a first side opening on the loading side, the first side opening is communicated with the accommodating cavity, and the first side opening is suitable for the material to pass through and enter the accommodating cavity;

[0016] The carrier defines a second side opening on the unloading side, the second side opening is communicated with the accommodating cavity, and the second side opening is suitable for passing through the second side opening to move out of the accommodating cavity.

[0017] According to some embodiments of the present invention, the carrier defines a third side opening on a side away from the loading side, and the third side opening is communicated with the accommodating cavity;

[0018] The transfer mechanism includes a pulling mechanism, which is arranged on the side where the third side opening is located. The pulling mechanism is used to pull the material located at the first opening to the carrier through the third side opening when the carrier is in the first working position.

[0019] According to some embodiments of the present invention, the carrier defines a fourth side opening on a side away from the unloading side, and the fourth side opening is communicated with the accommodating cavity;

[0020] The transfer mechanism includes a push mechanism, which is arranged on the side of the carrier away from the unloading side when the carrier is in the second station. The push mechanism is used to push the material on the carrier to the second opening through the fourth side opening when the carrier is in the second station.

[0021] According to some embodiments of the present invention, the transfer mechanism includes a pulling mechanism, which includes a second driving device and a pull rod. The second driving device is connected to one end of the pull rod, and a buckle is provided at the other end of the pull rod. The second driving device can drive the pull rod to extend toward the material located at the first opening and make the buckle buckle connected to the material.

[0022] According to some embodiments of the present invention, the transfer equipment also includes a distance measuring device, which is arranged on the side away from the loading side when the carrier is in the first workstation. The distance measuring device is used to measure the target distance from the material to the distance measuring device, so that the second driving device can control the buckle to move to a position where it is buckled with the material according to the target distance.

[0023] According to some embodiments of the present invention, the transfer mechanism includes a pushing mechanism, which includes a third driving device and a push rod. The third driving device is connected to one end of the push rod, and the other end of the push rod is provided with a pushing portion. The third driving device is used to drive the push rod to move toward the material located on the carrier, and to make the pushing portion push the material to the second opening.

[0024] According to some embodiments of the present invention, the transfer device further includes a first detection device, which is disposed on the loading side. When the first detection device detects that part of the material has arrived at the loading side when the carrier is in the first station, the material is transferred to the carrier by the transfer mechanism; and / or,

[0025] The transfer equipment also includes a second detection device, which is located on the side of the carrier away from the loading side. When the second detection device detects that the material has arrived at the side of the carrier away from the loading side when the carrier is in the first station, the carrier is driven to the second station through the driving mechanism.

[0026] According to the coating system of the second embodiment of the present invention, the coating system includes:

[0027] A first coating device, a second coating device, and the transfer device as described above;

[0028] A side wall of the first coating device defines a third opening, and the third opening is connected to the first opening;

[0029] The side wall of the second coating device defines a fourth opening, and the fourth opening is connected to the second opening.

[0030] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0032] Figure 1 A structural perspective diagram of a coating system provided in one embodiment of the present invention;

[0033] Figure 2 for Figure 1 The coating system shown is a structural stereogram omitting the sealed housing of the transfer equipment;

[0034] Figure 3 for Figure 1 The transfer device shown is a structural perspective view omitting the sealing shell;

[0035] Figure 4 for Figure 2 A three-dimensional diagram of the structure of the transfer equipment's pulling mechanism and material coordination;

[0036] Figure 5 for Figure 4 A structural cross-sectional view of the pulling mechanism is shown.

[0037] Reference numerals:

[0038] Transfer device 100; sealed shell 10; first opening 11; second opening 12; carrier 20; rotating connection portion 21; accommodating chamber 22; first side opening 23; second side opening 24; third side opening 25; first light hole 26; fourth side opening 27; second light hole 28; third light hole 29; driving mechanism 30; first driving device 31; first magnetic fluid mounting seat 311; first motor 312; connecting shaft 32; transfer mechanism 40; pulling mechanism 41; second driving device 411; second magnetic fluid mounting seat 4111; adapter shaft 4112; second motor 4113; pulling rod 412; buckle 4121; pushing mechanism 42; third driving device 421; third magnetic fluid mounting seat 4211; fourth motor 4212; pushing rod 422; pushing portion 4221; distance measuring device 50; first detection device 60; second detection device 70;

[0039] First coating device 200; third opening 210;

[0040] Second coating device 300; fourth opening 310;

[0041] Material 400; carrier plate 410; slot 4101; part to be coated 420. DETAILED DESCRIPTION

[0042] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0043] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or station relationships, are based on the orientations or station relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0044] In the description of this utility model, "several" means more than one, "plurality" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of the terms "first" and "second" is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0045] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0046] In the description of the present invention, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the exemplary expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0047] In the related art, when the transfer equipment transfers materials between different coating equipment, since the transfer equipment itself is in a non-vacuum environment, the materials will come into contact with air during the transfer process, thereby affecting the subsequent coating effect on the materials.

[0048] In view of this, please see Figure 1 An embodiment of the present invention provides a transfer device 100 , which is used to transfer material 400 between a first coating device 200 and a second coating device 300 .

[0049] Please combine Figure 2The transfer device 100 includes a sealed shell 10, a carrier 20, a driving mechanism 30, and a transfer mechanism 40. The interior of the sealed shell 10 defines a vacuum chamber, and the sidewall of the sealed shell 10 defines a first opening 11 and a second opening 12. The vacuum chamber is connected to the first opening 11 and the second opening 12 respectively. The first opening 11 is used to dock with the first coating device 200, and the second opening 12 is used to dock with the second coating device 300. The carrier 20 is movably arranged in the vacuum chamber. The carrier 20 has a loading side 201 and a unloading side 202. The driving mechanism 30 is used to drive the carrier 20 to move between a first station and a second station. The first station is the position where the loading side 201 docks with the first opening 11, and the second station is the position where the unloading side 202 docks with the second opening 12. The transfer mechanism 40 is used to transfer the material 400 located at the first opening 11 to the carrier 20 when the carrier 20 is in the first station, and to transfer the material 400 located on the carrier 20 to the second opening 12 when the carrier 20 is in the second station.

[0050] Specifically, the sidewall of the first coating apparatus 200 defines a third opening 210, which interfaces with the first opening 11; the sidewall of the second coating apparatus 300 defines a fourth opening 310, which interfaces with the second opening 12. The interiors of the first coating apparatus 200 and the second coating apparatus 300 are both in a vacuum environment during operation. When the first coating apparatus 200 and the second coating apparatus 300 are each in a vacuum environment through a vacuum pumping device, the first opening 11 connects the vacuum chamber to the interior of the first coating apparatus 200, and the second opening 12 connects the vacuum chamber to the interior of the second coating apparatus 300, so that the vacuum chamber can also be in a vacuum environment.

[0051] The first coating device 200 is provided with a first conveying mechanism for conveying the material 400, and the second coating device 300 is provided with a second conveying mechanism for conveying the material 400. After the material 400 completes the first coating on the first coating device 200, the first conveying mechanism conveys the material 400 to the joint of the first opening 11 and the third opening 210. At this time, the carrier 20 is in the first working position, and the loading side 201 of the carrier 20 is docked with the first opening 11. Under the transmission of the first conveying mechanism, part of the material 400 can enter the vacuum chamber through the first opening 11 and dock at the first opening 11; then, the material 400 is separated from the first opening 11 and transferred to the carrier 20 by the transfer mechanism 40; after the material 40 is completed, After the material 400 is transferred to the carrier 20, the driving mechanism 30 drives the carrier 20 to the second station. At this time, the unloading side 202 of the carrier 20 is connected to the second opening 12. Then, the transfer mechanism 40 transfers the material 400 on the carrier 20 to the connection between the second opening 12 and the fourth opening 310. Part of the material 400 can first enter the interior of the second coating device 300 through the fourth opening 310 and stop at the fourth opening 310. Finally, the second conveying mechanism allows the material 400 to exit the second opening 12 and be transferred to the interior of the second coating device 300. In this way, the transfer device 100 completes the transfer of the material 400 between the first coating device 200 and the second coating device 300.

[0052] In an embodiment of the present invention, a vacuum chamber defined within the sealed housing 10 provides the space required for the carrier 20 to transfer the material 400. Furthermore, a first opening 11 for docking with the first coating apparatus 200 and a second opening 12 for docking with the second coating apparatus 300 are defined on the sidewalls of the sealed housing 10. This allows the material 400 to remain in a vacuum environment isolated from the outside world during its transfer from the first opening 11 to the second opening 12. This prevents the material 400 from being exposed to air during transfer between different coating apparatuses, thereby preventing contact with air and potentially affecting the coating effect of the next coating apparatus. Furthermore, by providing a drive mechanism 30 for driving the carrier 20 between the first and second stations, and a transfer mechanism 40 for transferring the material 400 from the previous coating apparatus to the carrier 20 and from the carrier 20 to the next coating apparatus, automation of the material 400 transfer process between the apparatuses is achieved, thereby improving the efficiency of material 400 transfer.

[0053] Please combine Figure 3In some embodiments, the carrier 20 is provided with a rotating connection portion 21; the driving mechanism 30 is connected to the rotating connection portion 21, and the driving mechanism 30 is used to drive the rotating connection portion 21 to drive the carrier 20 to flip around the axis of the rotating connection portion 21 between the first station and the second station, so that the loading side 201 is connected to the first opening 11, or the unloading side 202 is connected to the second opening 12, that is, the first opening 11 is set to correspond to the position of the loading side 201 when the carrier 20 is in the first station, and the second opening 12 is set to correspond to the position of the unloading side 202 when the carrier 20 is in the second station. The position of the carrier 20 is set correspondingly. In this way, the carrier 20 only needs to be driven by the driving mechanism 30 to flip around the axis of the rotating connection part 21 to realize the position switching of the carrier 20 between the first station and the second station. The carrier 20 does not need to move forward and backward, up and down, left and right, which reduces the movement space required for the carrier 20 to transfer the material 400, reduces the space occupied by the transfer equipment 100, and simplifies the movement of the carrier 20 to transfer the material 400, that is, simplifies the mechanism required by the driving mechanism 30 to drive the carrier 20 to move, thereby correspondingly simplifying the structural design of the transfer equipment 100.

[0054] Specifically, if Figure 1 and Figure 2 As shown, the first opening 11 and the second opening 12 are respectively arranged on the adjacent two side walls of the sealing shell 10, the loading side 201 and the unloading side 202 are respectively arranged on the adjacent two sides of the carrier 20, and the axis of the rotating connection part 21 is arranged parallel to the horizontal plane; the length direction of the first opening 11 is perpendicular to the horizontal plane, correspondingly, when the carrier 20 is in the first working position, the carrier 20 is in an upright vertical posture, the carrier 20 is flush with the first opening 11 in the vertical direction, and the material 400 can be transferred from the first opening 11 to the carrier 20 in an upright vertical posture; the length direction of the second opening 12 is parallel to the horizontal plane, and the second opening 12 and the axis of the rotating connection part 21 are at the same height, correspondingly, when the carrier 20 is in the second working position, the carrier 20 is in a horizontal lying posture, the carrier 20 is flush with the second opening 12 in the horizontal direction, and the material 400 can be transferred from the carrier 20 to the second opening 12 in a horizontal lying posture. In this way, the material 400 can be transferred between the transfer equipment 100 and the vertical coating equipment in an upright vertical posture, and the material 400 can be transferred between the transfer equipment 100 and the horizontal coating equipment in a flat horizontal posture. In order to realize the switching of the carrier 20 between the first workstation and the second workstation, it is only necessary to flip the carrier 20 90 degrees or reverse 90 degrees around the axis of the rotating connection part 21.

[0055] Correspondingly, the length direction of the third opening 210 on the first coating apparatus 200 is also perpendicular to the horizontal plane, and the length direction of the second coating apparatus 300 is also parallel to the horizontal plane. In other words, the first coating apparatus 200 is a vertical coating apparatus, and the second coating apparatus 300 is a horizontal coating apparatus. The material 400 is transferred from the vertical coating apparatus to the horizontal coating apparatus via the transfer apparatus 100. During the transfer process, the material 400 is transformed from an upright vertical position to a horizontal position by the horizontal flipping of the carrier 20.

[0056] It is understood that, in a specific application, the material 400 is not limited to being transferred from a vertical coating apparatus to a horizontal coating apparatus through the transfer apparatus 100. The material 400 can also be transferred from a horizontal coating apparatus to a vertical coating apparatus through the transfer apparatus 100. During the transfer process, the material 400 is transformed from a horizontal position to an upright vertical position by the horizontal flipping of the carrier 20.

[0057] Among them, the length direction of the first opening 11 can also be inclined relative to the horizontal plane, and correspondingly, the length direction of the third opening 210 is also inclined relative to the horizontal plane. Then, in the process of transferring the material 400 from the inside of the first coating device 200 to the carrier 20, it is carried out in a posture inclined relative to the horizontal plane; the length direction of the second opening 12 can also be inclined relative to the horizontal plane, and correspondingly, the length direction of the fourth opening 310 is also inclined relative to the horizontal plane. Accordingly, the length directions of the first opening 11 and the third opening 210 also need to be inclined relative to the horizontal plane. Then, in the process of transferring the material 400 from the inside of the first coating device 200 to the carrier 20, it is carried out in a posture inclined relative to the horizontal plane, and in the process of transferring the material 400 from the carrier 20 to the second coating device 300, it is also carried out in a posture inclined relative to the horizontal plane; the second opening 12 may not be at the same height as the axis of the rotating connection part 21. Then, in the process of transferring the material 400 from the carrier 20 to the inside of the second coating device 300, it is carried out in a posture inclined relative to the horizontal plane.

[0058] In some other embodiments, the first opening 11 and the second opening 12 may also be respectively disposed on two opposite side walls of the sealed shell 10 , and the loading side 201 and the unloading side 202 may be respectively disposed on two opposite sides of the carrier 20 .

[0059] In some embodiments, the rotating connection portion 21 is arranged on the side of the carrier 20 away from the loading side 201, and the driving mechanism 30 is installed on the side wall of the sealing shell 10 opposite to the first opening 11. In this way, movement interference between the material 400 and the driving mechanism 30 can be avoided during the process of transferring the material 400 from the first opening 11 to the carrier 20.

[0060] Specifically, the driving mechanism 30 includes a first driving device 31 and a connecting shaft 32. One end of the connecting shaft 32 is connected to the first driving device 31, and the other end of the connecting shaft 32 is connected to the rotating connection part 21. The first driving device 31 is used to drive the connecting shaft 32 to drive the rotating connection part 21 to rotate.

[0061] More specifically, the first drive device 31 includes a first magnetic fluid mount 311 and a first motor 312. A first connection hole is defined on a side wall of the sealed housing 10 opposite the first opening 11. The first magnetic fluid mount 311 is disposed axially outward of the first connection hole and seals against the side wall of the sealed housing 10. The first motor 312 is mounted on a side of the first magnetic fluid mount 311 away from the sealed housing 10. A connecting shaft 32 passes through the first magnetic fluid mount 311 and the first connection hole. The output end of the first motor 312 is connected to one end of the connecting shaft 32, while the other end of the connecting shaft 32 extends into the vacuum chamber and connects to the rotating connection portion 21. The first motor 312 is configured to drive the connecting shaft 32 to rotate. When the first motor 312 is activated, the output end of the first motor 312 drives the connecting shaft 32 to rotate, which in turn drives the entire carrier 20 to rotate via the rotating connection portion 21. The provision of the first magnetic fluid mount 311 prevents air from entering the vacuum chamber through the first connection hole, thereby maintaining a vacuum environment within the vacuum chamber.

[0062] According to actual needs, a reducer can be provided between the output end of the first motor 312 and the connecting shaft 32 , and the reducer connects the output end of the first motor 312 and the connecting shaft 32 to increase the output torque of the connecting shaft 32 .

[0063] In some other embodiments, the driving mechanism 30 may also be other mechanisms for driving the carrier 20 to rotate. For example, the carrier 20 is rotatably connected to the sealed shell 10 via the rotating connection portion 21, and an electric push rod is provided on the side wall of the sealed shell 10 opposite to the second opening 12. The electric push rod is connected to the side of the carrier 20 away from the loading side 201 via a connecting rod. One end of the connecting rod is rotatably connected to the push rod portion of the electric push rod, and the other end of the connecting rod is rotatably connected to the side of the carrier 20 away from the loading side 201. The push rod portion of the electric push rod, the connecting rod, and the carrier 20 are connected to form an offset crank slider mechanism. When the electric push rod drives its push rod portion to move back and forth, the carrier 20 can be driven to flip between the first station and the second station. The number of electric push rods and connecting rods can be two, one electric push rod is connected to the upper end of the carrier 20 when it is in the second station via one connecting rod, and the other electric push rod is connected to the lower end of the carrier 20 when it is in the second station via another connecting rod.

[0064] In some embodiments, the interior of the carrier 20 defines a receiving chamber 22 for receiving material 400. The carrier 20 defines a first side opening 23 on a loading side 201, the first side opening 23 communicating with the receiving chamber 22 and adapted for passage of the material 400 into the receiving chamber 22. The carrier 20 defines a second side opening 24 on a loading side 202, the second side opening 24 communicating with the receiving chamber 22 and adapted for passage of the material 400 out of the receiving chamber 22. When the carrier 20 is in the first working position, the material 400 can enter the receiving chamber 22 through the first side opening 23. When the carrier 20 is in the second working position, the material 400 can be removed from the receiving chamber 22 through the second side opening 24. The carrier 20 can carry the material 400 in the vertical direction to prevent the material 400 from falling off. The accommodating cavity 22 can play a certain limiting role on the material 400. The material 400 can only enter and exit the accommodating cavity 22 through the first side opening 23 and the second side opening 24. The material 400 can remain on the carrier 20 during the process of switching between the first workstation and the second workstation as the carrier 20 switches until the transfer mechanism 40 transfers the material 400 to the second opening 12.

[0065] When the carrier 20 flips between the first and second stations around the axis of the rotating connection portion 21 , the carrier 20 always maintains the second side opening 24 facing non-downward to prevent the material 400 from slipping out of the second side opening 24 .

[0066] In some embodiments, the carrier 20 defines a third side opening 25 on a side away from the loading side 201, and the third side opening 25 is in communication with the accommodating chamber 22. The transfer mechanism 40 includes a pulling mechanism 41, which is disposed on the side where the third side opening 25 is located. The pulling mechanism 41 is configured to pull the material 400 located at the first opening 11 onto the carrier 20 through the third side opening 25 when the carrier 20 is in the first working position. The third side opening 25 can avoid the pulling mechanism 41 to allow the pulling mechanism 41 to pass through and enter the accommodating chamber 22, thereby transferring the material 400 to the accommodating chamber 22.

[0067] Please combine Figure 4 In some embodiments, the pulling mechanism 41 includes a second driving device 411 and a pull rod 412. The second driving device 411 is connected to one end of the pull rod 412, and the other end of the pull rod 412 is provided with a buckle 4121. The second driving device 411 can drive the pull rod 412 to extend toward the material 400 located at the first opening 11, and make the buckle 4121 buckled with the material 400. In this way, when the second driving device 411 drives the pull rod 412 to retract, the pull rod 412 can drive the material 400 to move in a direction away from the first opening 11 through the buckle 4121, thereby realizing the transfer of the material 400 to the carrier 20.

[0068] Specifically, the material 400 includes a carrier plate 410 and an object to be coated 420. The object to be coated 420 is mounted on the carrier plate 410. The carrier plate 410 is provided with a slot 4101 suitable for engaging with a buckle 4121. The slot 4101 is located near the side of the carrier plate 410 facing the pulling mechanism 41. The buckle 4121 extends from the other end of the pull rod 412 in a direction perpendicular to the length of the pull rod 412. The second drive device 411 can drive the pull rod 412 to move along its own axis so that the buckle 4121 moves to the slot 4101. The second drive device 411 can also drive the pull rod 412 to rotate about its own axis so that the buckle 4121 is engaged with the slot 4101.

[0069] Please combine Figure 5 More specifically, the second driving device 411 includes a second magnetic fluid mounting seat 4111, a transfer shaft 4112, a second motor 4113 and a third motor. A side wall of the sealed shell 10 opposite to the first opening 11 defines a second connecting hole, and the second magnetic fluid mounting seat 4111 is arranged on the axial outside of the second connecting hole and is sealed with the side wall of the sealed shell 10; the adapter shaft 4112 is rotatably sleeved in the second magnetic fluid mounting seat 4111; the second motor 4113 is installed on the shoulder end face of the adapter shaft 4112 away from the second connecting hole, and the pull rod 412 is passed through the connecting shaft 32 and the second connecting hole, one end of the pull rod 412 is connected to the output end of the second motor 4113, and the other end of the pull rod 412 extends into the vacuum chamber, and the second motor 4113 is used to drive the pull rod 412 to reciprocate along its own axial direction; the third motor is connected to the adapter shaft 4112, and the third motor is used to drive the adapter shaft 4112 to rotate, and the adapter shaft 4112 drives the second motor 4113 and the pull rod 412 connected to the second motor 4113 to rotate. The second magnetic fluid mounting seat 4111 is provided to prevent air from entering the interior of the vacuum chamber through the second connecting hole, so that the vacuum chamber can be kept in a vacuum environment.

[0070] In the process of pulling the material 400, the second motor 4113 first drives the pull rod 412 along its own axial direction through the third side opening 25 to extend toward the material 400 at the first opening 11, until the slot 4101 is located on the circumferential outside of the pull rod 412 and is directly opposite to the buckle 4121, and then the third motor drives the pull rod 412 to rotate around its own axial direction, so that the buckle 4121 rotates to a position where it is buckled with the slot 4101; then, the second motor 4113 drives the pull rod 412 to retract along its own axial direction , so that the buckle 4121 is in contact with the inner wall of the slot 4101 and drives the material 400 to move together, until the material 400 is separated from the first opening 11 and transferred to the carrier 20, the third motor drives the pull rod 412 to reverse around its own axis, so that the buckle 4121 exits the slot 4101; finally, the second motor 4113 continues to drive the pull rod 412 to retract along its own axis and exit the accommodating chamber 22 from the third side opening 25, thus completing the transfer of the material 400 to the carrier 20.

[0071] In some embodiments, there are two pulling mechanisms 41 , which are respectively disposed on the upper and lower sides of the driving mechanism 30 . The two pulling mechanisms 41 can pull the material 400 at the same time.

[0072] In a specific implementation process, the pulling mechanism 41 may be a linear rotary actuator, which is mounted at the second connection hole of the sealing shell 10 through a magnetic fluid mounting seat.

[0073] In such Figure 3In the illustrated embodiment, the pulling mechanism 41 pulls the material 400 located at the first opening 11 through the third side opening 25. Specifically, the pulling rod 412 of the pulling mechanism 41 passes through the third side opening 25 and the accommodating chamber 22 to pull the material 400 located at the first opening 11. It will be understood that in other embodiments, the pulling mechanism 41 may not pull the material 400 located at the first opening 11 through the third side opening 25. For example, a first avoidance groove is defined on the side of the carrier 20, and the first avoidance groove is arranged along the axis parallel to the pull rod 412. The pull rod 412 can extend along its own axis toward the material 400 on the side of the carrier 20. During this process, the buckle 4121 of the pull rod 412 is located outside the first avoidance groove until the slot 4101 of the carrier plate 410 is located on the circumferential outside of the pull rod 412 and is opposite to the buckle 4121. The pull rod 412 can rotate around its own axis and make the buckle 4121 buckled with the slot 4101 through the first avoidance groove. Thereafter, during the process of retracting the pull rod 412 along its own axis, the buckle 4121 moves along the first avoidance groove and drives the material 400 to move together until the material 400 detaches from the first opening 11 and is transferred to the carrier 20. The pull rod 412 reverses around its own axis to make the buckle 4121 exit the slot 4101 and the first avoidance groove. Finally, the pull rod 412 can continue to be retracted along its own axis. The side of the carrier 20 is the side facing away from the second opening 12 when the carrier 20 is in the first working position.

[0074] In some embodiments, the transfer equipment 100 also includes a distance measuring device 50, which is arranged on the side away from the loading side 201 when the carrier 20 is in the first workstation. The distance measuring device 50 is used to measure the target distance from the material 400 located at the first opening 11 to the distance measuring device 50, so that the second driving device 411 can drive the buckle 4121 to move to a position where it can be engaged with the material 400 according to the target distance. That is, the length of the pull rod 412 extending toward the material 400 is set according to the target distance, so that the buckle 4121 can just move to a position where it can be engaged with the slot 4101, thereby avoiding the extension length of the pull rod 412 being too long or too short, and ensuring that the length of the pull rod 412 extended each time is suitable for the buckle 4121 to be in a position where it can be engaged with the slot 4101.

[0075] Specifically, if Figure 3 As shown, the distance measuring device 50 can be an infrared distance measuring sensor, which is installed on a side wall of the sealed shell 10 opposite to the first opening 11. The carrier 20 defines a first light hole 26 on the side away from the loading side 201. The first light hole 26 is connected to the accommodating cavity 22. The infrared rays emitted by the infrared distance measuring sensor can pass through the first light hole 26 and the accommodating cavity 22 and reach the material 400 to measure the target distance from the material 400 to the infrared distance measuring sensor.

[0076] In some embodiments, the carrier 20 defines a fourth side opening 27 on a side away from the material discharge side 202, and the fourth side opening 27 is in communication with the accommodating chamber 22. The transfer mechanism 40 includes a pushing mechanism 42, which is disposed on a side of the carrier 20 away from the material discharge side 202 when the carrier 20 is in the second station. The pushing mechanism 42 is configured to push the material 400 on the carrier 20 toward the second opening 12 through the fourth side opening 27 when the carrier 20 is in the second station. The fourth side opening 27 can avoid the pushing mechanism 42, allowing the pushing mechanism 42 to pass through and enter the accommodating chamber 22, thereby transferring the material 400 to the second opening 12.

[0077] In some embodiments, the pushing mechanism 42 includes a third driving device 421 and a push rod 422. The third driving device 421 is connected to one end of the push rod 422. The other end of the push rod 422 is provided with a pushing portion 4221. The third driving device 421 is used to drive the push rod 422 to move toward the material 400 located on the carrier 20, and to make the pushing portion 4221 push the material 400 to the second opening 12.

[0078] Specifically, the third driving device 421 includes a third magnetic fluid mounting seat 4211 and a fourth motor 4212. A side wall of the sealed shell 10 opposite the second opening 12 defines a third connection hole. The third magnetic fluid mounting seat 4211 is disposed axially outward of the third connection hole and seals against the side wall of the sealed shell 10. The fourth motor 4212 is mounted on a side of the third magnetic fluid mounting seat 4211 away from the sealed shell 10. A push rod 422 passes through the third magnetic fluid mounting seat 4211 and the third connection hole. The output end of the fourth motor 4212 is connected to one end of the push rod 422, and the other end of the push rod 422 extends into the vacuum chamber. The push portion 4221 extends perpendicular to the axis of the push rod 422. The fourth motor 4212 is used to drive the push rod 422 to reciprocate along its own axis. The provision of the third magnetic fluid mounting seat 4211 prevents air from entering the interior of the vacuum chamber through the third connection hole, thereby maintaining the vacuum chamber in a vacuum environment.

[0079] In the process of pushing the material 400, the fourth motor 4212 drives the push rod 422 along its own axis through the fourth side opening 27 to extend toward the material 400 on the carrier 20 and push the carrier plate 410 until the material 400 is pushed to the second opening 12. The fourth motor 4212 drives the push rod 422 along its own axis through the fourth side opening 27 to be recovered. In this way, the material 400 is pushed to the second opening 12.

[0080] In such Figure 3In the illustrated embodiment, the pushing mechanism 42 pushes the material 400 on the carrier 20 through the fourth side opening 27. Specifically, the push rod 422 of the pushing mechanism 42 passes through the fourth side opening 27 and the accommodating chamber 22 to push the material 400 on the carrier 20. It will be understood that in other embodiments, the pushing mechanism 42 may not push the material 400 on the carrier 20 through the fourth side opening 27. For example, a second avoidance groove is defined on the side of the carrier 20, and the length direction of the second avoidance groove is perpendicular to the length direction of the first avoidance groove, and the second avoidance groove is connected to the first avoidance groove. A protrusion is provided on the carrier 410. During the process of the pulling mechanism 41 pulling the material 400, the protrusion can move along the first avoidance groove. When the material 400 is completely pulled to the carrier 20, the protrusion is located at the connection point between the second avoidance groove and the first avoidance groove. The push rod 422 of the pushing mechanism 42 can extend along its own axial direction toward the protrusion on the side of the carrier 20 and push the protrusion, so that the material 400 is pushed to the second opening 12.

[0081] In other embodiments, the transfer mechanism 40 may be another mechanism for transferring the material 400 and is not limited to the combination of the pulling mechanism 41 and the pushing mechanism 42 described above. For example, the transfer mechanism 40 may include a linear motor and a telescopic rod. The linear motor is disposed on a side of the carrier 20 that is away from the unloading side 202 when the carrier 20 is in the second station. The length of the linear motor is parallel to the length of the second opening 12. The electric push rod is mounted on the mover of the linear motor. When the carrier 20 is in the first station, the linear motor can drive the electric push rod along its own length to a position corresponding to the material 400. Specifically, the electric push rod can drive its push rod part to move toward the material 400 until the push rod part cooperates with the material 400 (for example, a slot is provided on the material 400, and the push rod part extends into the slot), and the linear motor then drives the electric push rod in reverse to move until the push rod part drives the material 400 to disengage from the first opening 11 and transfer the material 400 to the carrier 20, and then the electric push rod drives its push rod part to retract; then, the driving mechanism 30 drives the carrier 20 to flip to the second workstation, and the electric push rod drives its push rod part to move toward the material 400 and push the material 400 to transfer the material 400 toward the second workstation; finally, the electric push rod drives its push rod part to retract.

[0082] like Figure 3As shown, in some embodiments, the transfer equipment 100 further includes a first detection device 60, which is disposed on the loading side 201. When the first detection device 60 detects that part of the material 400 has arrived at the loading side 201 when the carrier 20 is in the first station, the material 400 is transferred to the carrier 20 through the transfer mechanism 40; and / or, the transfer equipment 100 further includes a second detection device 70, which is disposed on a side of the carrier 20 away from the loading side 201. When the second detection device 70 detects that the material 400 has arrived at the side of the carrier 20 away from the loading side 201 when the carrier 20 is in the first station, the carrier 20 is driven to move to the second station through the driving mechanism 30.

[0083] Specifically, the first detection device 60 can be a first infrared sensor, comprising a first infrared emitter and a first infrared receiver. The carrier 20 defines two second light holes 28 on opposite sides along its thickness. Two second light holes 28 are located near the loading side 201. The two second light holes 28 are coaxial and communicate with the accommodating cavity 22. A first infrared emitter is mounted axially outward of one second light hole 28, and a first infrared receiver is mounted axially outward of the other second light hole 28. Infrared light emitted by the first infrared emitter can pass through the two second light holes 28 and be received by the first infrared receiver. When the material 400 intercepts the infrared light between the two second light holes 28, it indicates that the material 400 has arrived at the loading side 201.

[0084] The second detection device 70 can be a second infrared sensor, comprising a second infrared emitter and a second infrared receiver. The carrier 20 defines two third light holes 29 on opposite sides of its thickness. Two third light holes 29 are located on the side of the carrier 20 away from the loading side 201. The two third light holes 29 are coaxial and communicate with the accommodating cavity 22. A second infrared emitter is mounted axially outward of one third light hole 29, and a second infrared receiver is mounted axially outward of the other third light hole 29. Infrared light emitted by the second infrared emitter can pass through the two third light holes 29 and be received by the second infrared receiver. When the material 400 intercepts the infrared light between the two third light holes 29, it indicates that the material 400 has escaped from the first opening 11 and been transferred to the carrier 20.

[0085] Among them, under the transmission of the first transmission mechanism, the material 400 moves toward the first opening 11 until the material 400 is separated from the first transmission mechanism, the material 400 stops at the first opening 11, and part of the material 400 first enters the accommodating cavity 22 through the first side opening 23. At this time, part of the material 400 located in the accommodating cavity 22 will intercept the infrared light between the first infrared emitter and the first infrared receiver, thereby triggering the first infrared sensor.

[0086] In some embodiments, the transfer device 100 also includes a control board, which is electrically connected to the first motor 312, the second motor 4113, the third motor, the fourth motor 4212, the ranging device 50, the first detection device 60 and the second detection device 70. The control board is used to control the coordinated operation of various components.

[0087] Specifically, when the carrier 20 is in the first working position and the material 400 arrives at the loading side 201, the material 400 triggers the first detection device 60, and the first detection device 60 sends a first signal to the control board; after receiving the first signal, the control board measures the target distance from the material 400 to the distance measuring device 50 through the distance measuring device 50, and the control board converts the target distance into the required moving distance for the buckle 4121 to move to the position where it is engaged with the slot 4101. After the control board controls the second motor 4113 to drive the pull rod 412 to extend the moving distance toward the material 400, the control board controls the third motor to control the pull rod 412 to rotate so that the buckle 4121 is engaged with the slot 4101, and then controls the second motor 4113 to retract the pull rod 412 to achieve Pulling the material 400; when the material 400 is pulled to the side of the carrier 20 away from the loading side 201, the material 400 triggers the second detection device 70, and the second detection device 70 sends a second signal to the control board; after the control board receives the second signal, the control board controls the third motor to control the pull rod 412 to reverse so that the buckle 4121 disengages from the slot 4101, and continues to retract the pull rod 412, controls the first motor 312 to drive the carrier 20 to flip to the second station, and then controls the fourth motor 4212 to drive the push rod 422 to push the material 400 on the carrier 20 to the second opening 12; when the material 400 exits the vacuum chamber from the second opening 12, the control board controls the first motor 312 to drive the carrier 20 to reverse to the first station.

[0088] The present invention also provides a coating system, which includes a first coating apparatus 200, a second coating apparatus 300, and the transfer apparatus 100 described above. The first coating apparatus 200 defines a third opening 210, which interfaces with the first opening 11. The third opening 210 and the first opening 11 allow the interior of the first coating apparatus 200 to communicate with the vacuum chamber of the transfer apparatus 100. The material 400 on the first coating apparatus 200 is transferred to the carrier 20 of the transfer apparatus 100 through the third opening 210 and the first opening 11 in sequence. The second coating apparatus 300 defines a fourth opening 310, which interfaces with the second opening 12. The fourth opening 310 and the second opening 12 allow the interior of the second coating apparatus 300 to communicate with the vacuum chamber of the transfer apparatus 100. The material 400 on the carrier 20 is transferred to the interior of the second coating apparatus 300 through the fourth opening 310 and the second opening 12 in sequence.

[0089] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various modifications can be made within the scope of knowledge possessed by a person skilled in the art without departing from the spirit of the present invention. In addition, the embodiments of the present invention and the features of the embodiments can be combined with each other unless there is a conflict.

Claims

1. A transfer device for transferring materials between a first coating device and a second coating device, characterized in that: include: A sealed shell, wherein a vacuum chamber is defined within the sealed shell, and a sidewall of the sealed shell defines a first opening and a second opening, wherein the vacuum chamber is communicated with the first opening and the second opening, respectively, wherein the first opening is used for docking with the first coating device, and the second opening is used for docking with the second coating device; A carrier, the carrier being movably disposed in the vacuum chamber, the carrier having a loading side and a unloading side; a driving mechanism, the driving mechanism being used to drive the carrier to move between a first station and a second station, the first station being a position where the loading side is docked with the first opening, and the second station being a position where the unloading side is docked with the second opening; A transfer mechanism is used to transfer the material located at the first opening to the carrier when the carrier is in the first station, and to transfer the material located on the carrier to the second opening when the carrier is in the second station.

2. The transfer equipment according to claim 1, characterized in that: The carrier is provided with a rotating connection portion; The driving mechanism is connected to the rotating connection part, and is used to drive the rotating connection part to drive the carrier to flip between the first station and the second station around the axis of the rotating connection part.

3. The transfer equipment according to claim 1, characterized in that: The interior of the carrier defines a receiving cavity, and the receiving cavity is used to receive the material; The carrier defines a first side opening on the loading side, the first side opening is communicated with the accommodating cavity, and the first side opening is suitable for the material to pass through and enter the accommodating cavity; The carrier defines a second side opening at the unloading side, the second side opening is communicated with the accommodating cavity, and the second side opening is suitable for moving out of the accommodating cavity through the second side opening.

4. The transfer equipment according to claim 3, characterized in that: The carrier defines a third side opening on a side away from the loading side, and the third side opening is communicated with the accommodating cavity; The transfer mechanism includes a pulling mechanism, which is arranged on the side where the third side opening is located. The pulling mechanism is used to pull the material located at the first opening to the carrier through the third side opening when the carrier is in the first working position.

5. The transfer equipment according to claim 3, characterized in that: The carrier defines a fourth side opening on a side away from the unloading side, and the fourth side opening is communicated with the accommodating cavity; The transfer mechanism includes a pushing mechanism, which is arranged on the side away from the unloading side when the carrier is in the second station. The pushing mechanism is used to push the material on the carrier to the second opening through the fourth side opening when the carrier is in the second station.

6. The transfer equipment according to claim 1, characterized in that: The transfer mechanism includes a pulling mechanism, which includes a second driving device and a pull rod. The second driving device is connected to one end of the pull rod, and the other end of the pull rod is provided with a buckle. The second driving device can drive the pull rod to extend toward the material located at the first opening and make the buckle buckle connected to the material.

7. The transfer equipment according to claim 6, characterized in that: It also includes a distance measuring device, which is arranged on the side away from the loading side when the carrier is in the first workstation. The distance measuring device is used to measure the target distance from the material to the distance measuring device, so that the second driving device can control the buckle to move to the position where it is buckled with the material according to the target distance.

8. The transfer equipment according to claim 1, characterized in that: The transfer mechanism includes a push mechanism, which includes a third drive device and a push rod. The third drive device is connected to one end of the push rod, and the other end of the push rod is provided with a push portion. The third drive device is used to drive the push rod to move toward the material located on the carrier, and to enable the push portion to push the material to the second opening.

9. The transfer equipment according to claim 1, characterized in that: It also includes a first detection device, which is arranged on the loading side. When the first detection device detects that part of the material has arrived at the loading side when the carrier is in the first station, the material is transferred to the carrier by the transfer mechanism; and / or, It also includes a second detection device, which is located on the side of the carrier away from the loading side. When the second detection device detects that the material has arrived at the side of the carrier away from the loading side when the carrier is in the first station, the carrier is driven to move to the second station through the driving mechanism.

10. A coating system, characterized in that: include: A first coating device, a second coating device, and a transfer device according to any one of claims 1 to 9; The side wall of the first coating device defines a third opening, and the third opening is connected to the first opening; A fourth opening is defined on a side wall of the second coating device, and the fourth opening is connected to the second opening.

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