Gas pressure regulating valve box for regulating pressure of special gas
The automatic operation of the gas pressure regulating valve box is achieved through computer control technology, which solves the problems of valve parts and gas leakage caused by manual operation, and improves safety and operation reliability.
Patent Information
- Application Number
- CN202422086483.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-27
- Publication Date
- 2025-08-15
- Estimated Expiration
- 2034-08-27
AI Technical Summary
The existing gas pressure regulating valve box is usually manually operated, which can easily lead to misoperation, damage to the valve parts and gas leakage, threatening personnel's safety.
Using computer control technology, gas input, supply and pipeline cleaning are completed through program control of pneumatic valves, reducing human operations, and using components such as gas inlet pneumatic valves, outlet isolation valves, pressure regulating components and purge parts to achieve automated operations.
It effectively avoids valve parts and gas leakage caused by artificial misoperation, improves operating safety, and reduces the harm of toxic and harmful gases to personnel.
Smart Images
Figure CN223228271U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of gas pressure regulation, in particular to a gas pressure regulating valve box used for regulating the pressure of special gases. Background Art
[0002] Due to the vigorous development of the global electronics and photovoltaic industries, the scale of the semiconductor market is also growing. The photovoltaic industry has also developed rapidly in the past two years and is the main force of the future new energy industry. Many special gases are required in the commonly used processes of semiconductor and photovoltaic related industries. When using these special gases, a gas pressure regulating valve box is required to adjust the pressure.
[0003] However, the existing gas pressure regulating valve box is usually operated manually, which can easily lead to damage to the valve parts due to human error, thereby causing gas leakage and threatening the safety of personnel. Utility Model Content
[0004] The purpose of the utility model is to provide a gas pressure regulating valve box for regulating the pressure of special gases, aiming to solve the technical problem in the prior art that the gas pressure regulating valve box is usually operated manually, which is prone to human error in operation and may cause damage to the valve parts, thereby causing gas leakage and threatening the safety of personnel.
[0005] To achieve the above-mentioned purpose, the utility model adopts a gas pressure regulating valve box for regulating the pressure of special gases, including a box body and a pressure regulating mechanism, the pressure regulating mechanism including an operating unit, multiple groups of gas pressure regulating units, two groups of purge units and two groups of sealing units, each group of the gas pressure regulating units including a gas inlet manual valve, a gas inlet pneumatic valve, a test port valve, a main line pressure sensor and multiple groups of pressure regulating components, each group of the pressure regulating components including a gas outlet isolation valve, a gas pressure regulating valve, a gas pressure gauge and a purge part, multiple groups of the gas pressure regulating units are arranged inside the box body, the gas inlet manual valve is connected to the gas inlet pneumatic valve, and the gas inlet pneumatic valve is respectively connected through pipelines It is connected to multiple groups of pressure regulating components, the test port valve and the main line pressure sensor are sequentially arranged on the pipeline between the gas inlet pneumatic valve and multiple groups of pressure regulating components, the gas outlet isolation valve is connected to the gas inlet pneumatic valve through a pipeline, the gas pressure regulating valve is connected to the gas outlet isolation valve through a pipeline, the gas pressure gauge is arranged at one end of the gas pressure regulating valve, the purge component is arranged on the pipeline between the gas outlet isolation valve and the gas pressure regulating valve, the two groups of purge units are respectively connected in series with multiple groups of purge components through pipelines, the two groups of sealing units are symmetrically arranged on one side of the box body, and the operating unit is arranged on the upper surface of the box body.
[0006] Each set of the purge components includes a nitrogen purge one-way valve and a purge manual valve, one end of the purge manual valve is connected to the gas outlet isolation valve through a pipeline, and the other end of the purge manual valve is connected to the nitrogen purge one-way valve.
[0007] Each group of the purge units includes a nitrogen inlet isolation valve, a nitrogen pressure regulating valve and a nitrogen pressure gauge. The nitrogen pressure regulating valve is connected to the multiple nitrogen purge one-way valves through pipelines. The nitrogen pressure gauge is arranged on the pipeline between the nitrogen pressure regulating valve and the multiple nitrogen purge one-way valves. The nitrogen inlet isolation valve is connected to the nitrogen pressure regulating valve.
[0008] Wherein, the operating unit includes an electric control box and an emergency stop button. The electric control box is arranged on the upper surface of the box body, and the emergency stop button is arranged on the outside of the electric control box.
[0009] Among them, each group of the sealing units includes a first box door, a second box door, a first observation window and a second observation window. The first box door and the second box door are arranged up and down and are hinged to the box body respectively. The first observation window is fixedly connected to the first box door, and the second observation window is fixedly connected to the second box door.
[0010] Wherein, the pressure regulating mechanism further includes two differential pressure gauges, and the two differential pressure gauges are respectively fixedly connected to one of the first door and one of the second door.
[0011] The utility model discloses a gas pressure regulating valve box for regulating the pressure of special gases. By utilizing computer control technology, the gas supply process is programmed, and the pneumatic valve is controlled by the program to complete the raw gas input, gas supply, pipeline cleaning and pipeline purging by itself. There is no need for an operator to directly operate the valves of each unit. The valve action can be controlled by a touch screen, thereby minimizing the harm of toxic and harmful gases to personnel. This method can effectively solve the problem in the prior art that the gas pressure regulating valve box is usually manually operated, which is prone to human error in operation and causes damage to valve parts, thereby causing gas leakage and threatening the safety of personnel. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0013] Figure 1 It is a structural diagram of the present utility model.
[0014] Figure 2 It is a schematic diagram of the internal disk surface of the box body of the present utility model.
[0015] Figure 3 It is a partial structural diagram of the utility model.
[0016] Figure 4 It is a circuit diagram of the present utility model.
[0017] Figure 5 It is a control logic schematic diagram of the present utility model.
[0018] 101- box body, 102- gas inlet manual valve, 103- gas inlet pneumatic valve, 104- test port valve, 105- main line pressure sensor, 106- gas outlet isolation valve, 107- gas pressure regulating valve, 108- gas pressure gauge, 109- nitrogen purge check valve, 110- purge manual valve, 111- nitrogen inlet isolation valve, 112- nitrogen pressure regulating valve, 113- nitrogen pressure gauge, 114- electric control box, 115- emergency stop button, 116- first box door, 117- second box door, 118- first observation window, 119- second observation window, 120- differential pressure gauge. DETAILED DESCRIPTION
[0019] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, but should not be understood as limiting the present invention.
[0020] See also Figures 1 to 5 ,in Figure 1 It is a structural diagram of the utility model. Figure 2 This is a schematic diagram of the internal disk of the box body of the utility model. Figure 3 This is a partial structural diagram of the utility model. Figure 4 This is a circuit diagram of the utility model. Figure 5 It is a control logic schematic diagram of the present utility model.
[0021] The utility model provides a gas pressure regulating valve box for regulating the pressure of special gases, comprising a box body 101 and a pressure regulating mechanism, wherein the pressure regulating mechanism comprises an operating unit, multiple groups of gas pressure regulating units, two groups of purge units and two groups of sealing units, each group of the gas pressure regulating units comprises a gas inlet manual valve 102, a gas inlet pneumatic valve 103, a test port valve 104, a main line pressure sensor 105 and multiple groups of pressure regulating components, each group of the pressure regulating components comprises a gas outlet isolation valve 106, a gas pressure regulating valve 107, a gas pressure gauge 108 and a purge component, each group of the purge components comprises a nitrogen purge check valve 109 and A manual purge valve 110 is provided, and each group of the purge units includes a nitrogen inlet isolation valve 111, a nitrogen pressure regulating valve 112 and a nitrogen pressure gauge 113. The operating unit includes an electrical control box 114 and an emergency stop button 115. Each group of the sealing units includes a first box door 116, a second box door 117, a first observation window 118 and a second observation window 119. The pressure regulating mechanism also includes two differential pressure gauges 120. The above solution solves the problem in the prior art that the gas pressure regulating valve box is usually manually operated, which is prone to human error and causes damage to the valve parts, thereby causing gas leakage and posing a threat to personnel safety.
[0022] According to this specific embodiment, multiple groups of gas pressure regulating units are arranged inside the box 101, the gas inlet manual valve 102 is connected to the gas inlet pneumatic valve 103, and the gas inlet pneumatic valve 103 is connected to the multiple groups of pressure regulating components through pipelines. The test port valve 104 and the main line pressure sensor 105 are sequentially arranged on the pipeline between the gas inlet pneumatic valve 103 and the multiple groups of pressure regulating components, the gas outlet isolation valve 106 is connected to the gas inlet pneumatic valve 103 through a pipeline, the gas pressure regulating valve 107 is connected to the gas outlet isolation valve 106 through a pipeline, and the gas pressure gauge 108 is arranged on the gas pressure regulating valve 1 07, the purge component is arranged on one end of the gas outlet isolation valve 106 and the gas pressure regulating valve 107, the two groups of the purge units are respectively connected in series with multiple groups of purge components through pipelines, the two groups of sealing units are symmetrically arranged on one side of the box body 101, and the operating unit is arranged on the upper surface of the box body 101. When it is used specifically, the gas supply process is programmed by utilizing computer control technology, and the pneumatic valve is controlled by the program to complete the raw gas input, gas supply, pipeline cleaning and pipeline purging by itself. There is no need for operators to directly operate the valves of each unit. The valve action can be controlled by the touch screen, thereby minimizing the harm of toxic and harmful gases to personnel.
[0023] Among them, one end of the purge manual valve 110 is connected to the gas outlet isolation valve 106 through a pipeline, and the other end of the purge manual valve 110 is connected to the nitrogen purge one-way valve 109. When in use, the front end of the purge manual valve 110 is connected to the nitrogen purge one-way valve 109, and the rear end is connected to the rear end pipeline of the gas outlet isolation valve 106 through a pipeline.
[0024] Secondly, the nitrogen pressure regulating valve 112 is connected to the multiple nitrogen purge one-way valves 109 through pipelines, and the nitrogen pressure gauge 113 is arranged on the pipeline between the nitrogen pressure regulating valve 112 and the multiple nitrogen purge one-way valves 109. The nitrogen inlet isolation valve 111 is connected to the nitrogen pressure regulating valve 112. When used, the front end of the nitrogen inlet isolation valve 111 is a nitrogen pipeline, and the rear end is connected to the nitrogen pressure regulating valve 112. The rear end of the nitrogen pressure regulating valve 112 is connected to the multiple nitrogen purge one-way valves 109 through pipelines, and the nitrogen pressure gauge 113 is provided in the pipeline.
[0025] At the same time, the electric control box 114 is arranged on the upper surface of the box body 101, and the emergency stop button 115 is arranged on the outside of the electric control box 114. When in use, the interior of the electric control box 114 is provided with a differential pressure switch, a temperature and smoke detector, a gas detector, a flame detector and a microprocessor, so as to realize the functions of automatic control and early warning. Each unit can be shut down through the emergency stop button 115.
[0026] In addition, the first door 116 and the second door 117 are arranged up and down and are hinged to the box body 101 respectively. The first observation window 118 is fixedly connected to the first door 116, and the second observation window 119 is fixedly connected to the second door 117. When in use, the first door 116 and the second door 117 are used to seal the box body 101, and the first observation window 118 and the second observation window 119 are used to facilitate observation of the interior of the box body 101.
[0027] At the same time, the two differential pressure gauges 120 are fixedly connected to one of the first door 116 and one of the second door 117 respectively. When in use, the pressure difference is measured by the differential pressure gauge 120.
[0028] A gas pressure regulating valve box for regulating the pressure of special gases according to the present embodiment is used. When it is used, computer control technology is utilized to program the gas supply process. The pneumatic valve is controlled by the program to complete the raw gas input, gas supply, pipeline cleaning and pipeline purging by itself. There is no need for operators to directly operate the valves of each unit. The valve movement can be controlled by the touch screen, thereby minimizing the harm of toxic and harmful gases to personnel. This method can effectively solve the problem in the prior art that the gas pressure regulating valve box is usually manually operated, which is prone to human error, resulting in damage to the valve parts, thereby causing gas leakage and threatening the safety of personnel.
[0029] The above disclosure is only a preferred embodiment of the present invention, and certainly cannot be used to limit the scope of rights of the present invention. Ordinary technicians in this field can understand that all or part of the processes of the above embodiment and equivalent changes made in accordance with the claims of the present invention are still within the scope of the utility model.
Claims
1. A gas pressure regulating valve box for regulating the pressure of special gases, comprising a box body, characterized in that: It also includes a pressure regulating mechanism, which includes an operating unit, multiple groups of gas pressure regulating units, two groups of purge units and two groups of sealing units. The multiple groups of gas pressure regulating units are all arranged inside the box body, and each group of gas pressure regulating units includes a gas inlet manual valve, a gas inlet pneumatic valve, a test port valve, a main line pressure sensor and multiple groups of pressure regulating components. The gas inlet manual valve is connected to the gas inlet pneumatic valve, and the gas inlet pneumatic valve is connected to the multiple groups of pressure regulating components through pipelines. The test port valve and the main line pressure sensor are sequentially arranged between the gas inlet pneumatic valve and the multiple groups of pressure regulating components On the pipeline between, each group of the pressure regulating components includes a gas outlet isolation valve, a gas pressure regulating valve, a gas pressure gauge and a purge component, the gas outlet isolation valve is connected to the gas inlet pneumatic valve through a pipeline, the gas pressure regulating valve is connected to the gas outlet isolation valve through a pipeline, the gas pressure gauge is arranged at one end of the gas pressure regulating valve, and the purge component is arranged on the pipeline between the gas outlet isolation valve and the gas pressure regulating valve, the two groups of the purge units are respectively connected in series with multiple groups of purge components through pipelines, the two groups of the sealing units are symmetrically arranged on one side of the box body, and the operating unit is arranged on the upper surface of the box body.
2. The gas pressure regulating valve box for regulating the pressure of special gases according to claim 1, characterized in that: Each set of the purge components includes a nitrogen purge one-way valve and a purge manual valve. One end of the purge manual valve is connected to the gas outlet isolation valve through a pipeline, and the other end of the purge manual valve is connected to the nitrogen purge one-way valve.
3. The gas pressure regulating valve box for regulating the pressure of special gases according to claim 2, characterized in that: Each group of the purge units includes a nitrogen inlet isolation valve, a nitrogen pressure regulating valve and a nitrogen pressure gauge. The nitrogen pressure regulating valve is connected to the multiple nitrogen purge one-way valves through pipelines. The nitrogen pressure gauge is arranged on the pipeline between the nitrogen pressure regulating valve and the multiple nitrogen purge one-way valves. The nitrogen inlet isolation valve is connected to the nitrogen pressure regulating valve.
4. The gas pressure regulating valve box for regulating the pressure of special gases according to claim 3, characterized in that: The operating unit includes an electric control box and an emergency stop button. The electric control box is arranged on the upper surface of the box body, and the emergency stop button is arranged on the outside of the electric control box.
5. The gas pressure regulating valve box for regulating the pressure of special gases according to claim 4, characterized in that: Each group of the sealing units includes a first box door, a second box door, a first observation window and a second observation window. The first box door and the second box door are arranged up and down and are hinged to the box body respectively. The first observation window is fixedly connected to the first box door, and the second observation window is fixedly connected to the second box door.
6. The gas pressure regulating valve box for regulating the pressure of special gases according to claim 5, characterized in that: The pressure regulating mechanism further includes two differential pressure gauges, which are respectively fixedly connected to one of the first chamber doors and one of the second chamber doors.