Absorption equipment for trace elements in electronic special gas

Abstract

The utility model relates to absorption equipment for trace elements in electronic special gas, which comprises a replacement gas pipeline, a sample gas pipeline, a surge flask, a PFA absorption bottle and a Venturi valve, the replacement gas pipeline and the sample gas pipeline are arranged in parallel, the output ends of the replacement gas pipeline and the sample gas pipeline are both connected with the input end of the surge flask, and the input end of the surge flask is connected with the Venturi valve. The PFA absorption bottle and the Venturi valve are arranged in parallel, and the input end of the PFA absorption bottle and the input end of the Venturi valve are both connected with the output end of the buffer bottle. The device is reasonable in design, the replacement gas pipeline and the sample gas pipeline are arranged in parallel, purging can be carried out through replacement gas before absorption, air and special gas are prevented from reacting to pollute absorption liquid and influence experiment results, the working efficiency is improved, the safety of personnel and the accuracy of detection data in the absorption process are ensured, and the device is suitable for popularization and application. And dangers and pollution caused by personnel contact are reduced.

Description

Technical Field

[0001] The utility model relates to an absorption device for trace elements in electronic special gas. Background Art

[0002] GB / T 34972 Determination of Metal Content in Gases for Electronic Industry, Clause 7.2 of Inductively Coupled Plasma Mass Spectrometry and GB / T 15909 Gases for Electronic Industry, Appendix A of Silane recommend an absorption device that uses the bubbling method to absorb electronic special gases. However, this absorption device has the following problems: 1. All operations are manual, which poses operational risks, is not convenient, and is prone to contamination during the absorption process; 2. The absorption bottle is made of polytetrafluoroethylene (PTFE), which has insufficient resistance to element adsorption and precipitation; 3. The method detection limit is 0.01 μg / L, which cannot meet the quality requirements of special gases for semiconductors that are constantly improving in current processes; 4. The measurement accuracy is insufficient when using a rotor flowmeter / wet gas flowmeter or an electronic scale for weighing; 5. The interface of the container poses a safety risk of leakage of the absorbed special gas. Utility Model Content

[0003] The purpose of the utility model is to provide an absorption device for trace elements in electronic special gases, so as to solve the pollution of samples in the absorption process, facilitate personnel operation and improve work efficiency.

[0004] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: an absorption device for trace elements in electronic special gases, including a replacement gas pipeline, a sample gas pipeline, a buffer bottle, a PFA absorption bottle and a Venturi valve, the replacement gas pipeline and the sample gas pipeline are arranged in parallel, and the output ends of the replacement gas pipeline and the sample gas pipeline are both connected to the input end of the buffer bottle, the PFA absorption bottle and the Venturi valve are arranged in parallel, and the input ends of the PFA absorption bottle and the Venturi valve are both connected to the output end of the buffer bottle.

[0005] Furthermore, the replacement gas pipeline includes a replacement gas storage cylinder, and the output end of the replacement gas storage cylinder is connected to a first pressure reducing valve, a particle filter, a first pneumatic valve and a first one-way valve in sequence along the gas flow direction; the sample gas pipeline includes a sample gas storage cylinder, and the output end of the sample gas storage cylinder is connected to a second pressure reducing valve and a second pneumatic valve in sequence along the gas flow direction.

[0006] Furthermore, the input side of the buffer bottle is connected to a mass flow meter.

[0007] Furthermore, the input side of the mass flow meter is sequentially connected to a third pressure reducing valve, a pressure gauge and a third pneumatic valve along the gas flow direction.

[0008] Furthermore, a fourth pneumatic valve is provided on the input side of the Venturi valve; and a fifth pneumatic valve is provided on the input side of the PFA absorption bottle.

[0009] Furthermore, the exhaust end of the PFA absorption bottle is connected to a sixth pneumatic valve.

[0010] Furthermore, a second one-way valve is provided at the exhaust end of the Venturi valve, and a seventh pneumatic valve is provided at the nitrogen output end of the Venturi valve.

[0011] Compared with the prior art, the utility model has the following effects: the utility model is reasonably designed, and the replacement gas pipeline and the sample gas pipeline are arranged in parallel. The replacement gas can be used for purging before absorption to prevent the air from reacting with the special gas to contaminate the absorption liquid and affect the experimental results. It not only improves work efficiency, but also ensures the safety of personnel during the absorption process and the accuracy of detection data, and reduces the danger and pollution caused by human contact. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic structural diagram of an embodiment of the present utility model.

[0013] In the picture:

[0014] 1-Displacement gas pipeline; 2-Sample gas pipeline; 3-Buffer bottle; 4-PFA absorption bottle; 5-Venturi valve; 6-Displacement gas storage cylinder; 7-First pressure reducing valve; 8-Particle filter; 9-First pneumatic valve; 10-First check valve; 11-Sample gas storage cylinder; 12-Second pressure reducing valve; 13-Second pneumatic valve; 14-Mass flowmeter; 15-Third pressure reducing valve; 16-Pressure gauge; 17-Third pneumatic valve; 18-Fourth pneumatic valve; 19-Fifth pneumatic valve; 20-Sixth pneumatic valve; 21-Second check valve; 22-Seventh pneumatic valve. DETAILED DESCRIPTION

[0015] The present invention will be further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0016] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0017] like Figure 1As shown, the utility model is an absorption device for trace elements in electronic special gases, which is used to solve the contamination of samples in the absorption process, optimize the process, facilitate personnel operation, and improve work efficiency. It specifically includes a replacement gas pipeline 1, a sample gas pipeline 2, a buffer bottle 3, a PFA absorption bottle 4 and a Venturi valve 5. The replacement gas pipeline 1 and the sample gas pipeline 2 are arranged in parallel, and the output ends of the replacement gas pipeline 1 and the sample gas pipeline 2 are both connected to the input end of the buffer bottle 3; the PFA absorption bottle 4 and the Venturi valve 5 are arranged in parallel, and the input ends of the PFA absorption bottle 4 and the Venturi valve 5 are both connected to the output end of the buffer bottle 3; the specific process can be:

[0018] (1) Select appropriate replacement gas according to sample characteristics;

[0019] (2) After the process is completed, the pipeline is cleaned. The replacement gas pipeline passes the replacement gas into the PFA absorption bottle for 30 minutes to exhaust the air in the bottle to prevent the air from reacting with the special gas to contaminate the absorption liquid and affect the experimental results;

[0020] (3) Introduce the sample through the sample gas pipeline, rinse the gas pipeline, and then send the gas to the PFA absorption bottle. Adjust the inlet pressure and flow rate for absorption, and control the flow rate and absorption time as required;

[0021] (4) After the absorption is completed, cut off the gas source and pass the replacement gas into the PFA absorption bottle for 30 minutes to purge the remaining special gas in the bottle. This will prevent the remaining special gas in the bottle from reacting with the air when the bottle is opened, affecting the experimental results and posing a safety hazard.

[0022] Pre-treating special gases according to the above process not only improves work efficiency, but also ensures the safety of personnel during the absorption process and the accuracy of detection data, and reduces the danger and pollution caused by human contact.

[0023] In this embodiment, the replacement gas pipeline 1 includes a replacement gas storage cylinder 6, which is used to store replacement gas. The output end of the replacement gas storage cylinder 6 is connected to a first pressure reducing valve 7, a particle filter 8, a first pneumatic valve 9 and a first one-way valve 10 in sequence along the gas flow direction. Specifically: the first pressure reducing valve is installed at the output end of the replacement gas storage cylinder, and is used to reduce the pressure of the output replacement gas; a particle filter is provided on the output side of the first pressure reducing valve, and is used to filter the replacement gas; a first pneumatic valve is provided on the output side of the particle filter, and is used to control on and off; the second pneumatic valve is provided with a first one-way valve to prevent the replacement gas from flowing in reverse.

[0024] In this embodiment, the sample gas pipeline 2 includes a sample gas storage cylinder 11, which is used to store sample gas. The gas flow direction of the output end of the sample gas storage cylinder 11 is connected to a second pressure reducing valve 12 and a second pneumatic valve 13 in sequence. Specifically: the second pressure reducing valve is installed at the output end of the sample gas storage cylinder, and is used to reduce the pressure of the output sample gas; a second pneumatic valve is set on the output side of the second pressure reducing valve to control the on and off.

[0025] In this embodiment, the replacement gas may be an inert gas such as argon, helium, nitrogen, etc., and its purity should reach 5N or above.

[0026] In this embodiment, in order to facilitate flow regulation, a mass flow meter 14 is connected to the input side of the buffer bottle 3 .

[0027] In this embodiment, the input side of the mass flow meter 14 is connected to a third pressure reducing valve 15, a pressure gauge 16 and a third pneumatic valve 17 in sequence along the gas flow direction. The input end of the third pressure reducing valve is connected to the first one-way valve and the second pneumatic valve. The third pressure reducing valve is used for reducing pressure, the pressure gauge is used for detecting pressure, and the third pneumatic valve is used for controlling on and off.

[0028] In this embodiment, a fourth pneumatic valve 18 is provided between the input side of the Venturi valve 5 and the buffer bottle 3 , and the fourth pneumatic valve is used for on-off control.

[0029] In this embodiment, a fifth pneumatic valve 19 is provided between the input side of the PFA absorption bottle 4 and the buffer bottle 3 , and the fifth pneumatic valve is used for on-off control.

[0030] In this embodiment, the exhaust end of the PFA absorption bottle 4 is connected to a sixth pneumatic valve 20 .

[0031] In this embodiment, a second one-way valve 21 is provided at the exhaust end of the Venturi valve 5 .

[0032] In this embodiment, a seventh pneumatic valve 22 is provided at the nitrogen output end of the Venturi valve 5 .

[0033] Example, combined with Figure 1 As shown, taking silane gas used in the electronics industry as an example:

[0034] (1) Pipeline cleaning: Open the first pressure reducing valve 7, the first pneumatic valve 9, the second pneumatic valve 13, the third pressure reducing valve 15, the third pneumatic valve 17 and the mass flow meter 14. The other valves are closed. After the pressure stabilizes, close the first pneumatic valve 9, open the seventh pneumatic valve 22, start the venturi valve 5, open the fourth pneumatic valve 18, exhaust the gas in the replacement gas pipeline and pump it into negative pressure. After the end, close the fourth pneumatic valve 18. Repeat this cycle 20 times. After the end, close all valves.

[0035] (2) Purge: After preparing the absorption liquid, press the PFA absorption bottle 4 Figure 1 Then, open the first pressure reducing valve 7, the first pneumatic valve 9, the third pressure reducing valve 15, the third pneumatic valve 17, the mass flow meter 14, the fifth pneumatic valve 19, and the sixth pneumatic valve 20 in sequence, and purge for 30 minutes. After that, close all valves.

[0036] (3) Rinse the pipeline: Open the sample gas storage cylinder and feed silane, open the second pressure reducing valve 12, the second pneumatic valve 13, the third pressure reducing valve 15, the third pneumatic valve 17, and the mass flow meter 14, and keep the other valves closed. After the pressure stabilizes, close the second pneumatic valve 13, open the seventh pneumatic valve 22, start the venturi valve 5, open the fourth pressure reducing valve 18, and drain the silane in the replacement gas pipeline and pump it into negative pressure. After the end, close the fourth gas valve. Repeat this cycle 10 times, and close all valves after the end.

[0037] (4) Silane absorption: Open the sample gas storage cylinder and feed silane. Open the second pressure reducing valve 12, the second pneumatic valve 13, the third pressure reducing valve 15, the third pneumatic valve 17, the mass flow meter 14, the fifth pneumatic valve 19, and the sixth pneumatic valve 20. Control the flow rate at 0.50 L / min. Absorb for 2 hours. After the absorption is completed, close all valves.

[0038] (5) Repeat the operation step (1) for cleaning the pipeline to remove all the residual silane in the sample pipeline; repeat the operation step (2) for purging to remove all the residual silane in the PFA absorption bottle 4 to prevent the residual silane from coming into contact with air and burning when the bottle is opened;

[0039] (6) Disassembling the bottle: Open the first pressure reducing valve 7, the first pneumatic valve 9, the third pressure reducing valve 15, the third pneumatic valve 17, the mass flow meter 14, the fifth pneumatic valve 19, and the sixth pneumatic valve 20, and introduce the replacement gas to continuously purge to maintain the positive pressure in the bottle. Slightly disassemble the bottle mouth and test the bottle mouth with a silane gas detection device. After testing for no silane residue, the PFA absorption bottle 4 can be disassembled, and the sample pretreatment is completed.

[0040] If the present invention discloses or involves components or structural parts that are fixedly connected to each other, then, unless otherwise stated, the fixed connection can be understood as: a detachable fixed connection (for example, connection using bolts or screws), and can also be understood as: a non-detachable fixed connection (for example, riveting, welding). Of course, the mutual fixed connection can also be replaced by an integrated structure (for example, manufactured by integral molding using a casting process) (except where it is obviously impossible to use an integrated molding process).

[0041] In addition, unless otherwise stated, the terms used in any technical solution disclosed in the above-mentioned utility model to express positional relationships or shapes include states or shapes that are approximate, similar or close thereto.

[0042] Any component provided by the present invention can be assembled from multiple separate components, or can be a separate component manufactured by an integral forming process.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model and not to limit it; although the utility model is described in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that the specific implementation methods of the utility model can still be modified or some technical features can be replaced by equivalents; without departing from the spirit of the technical solution of the utility model, they should all be included in the scope of the technical solution for protection of the utility model.

Claims

1. An absorption device for trace elements in electronic special gases, characterized by: It includes a replacement gas pipeline, a sample gas pipeline, a buffer bottle, a PFA absorption bottle and a Venturi valve. The replacement gas pipeline and the sample gas pipeline are arranged in parallel, and the output ends of the replacement gas pipeline and the sample gas pipeline are connected to the input end of the buffer bottle. The PFA absorption bottle and the Venturi valve are arranged in parallel, and the input ends of the PFA absorption bottle and the Venturi valve are connected to the output end of the buffer bottle.

2. The device for absorbing trace elements in electronic special gases according to claim 1, characterized in that: The replacement gas pipeline includes a replacement gas storage cylinder, and the output end of the replacement gas storage cylinder is connected to a first pressure reducing valve, a particle filter, a first pneumatic valve and a first one-way valve in sequence along the gas flow direction; the sample gas pipeline includes a sample gas storage cylinder, and the output end of the sample gas storage cylinder is connected to a second pressure reducing valve and a second pneumatic valve in sequence along the gas flow direction.

3. The device for absorbing trace elements in electronic special gases according to claim 1, characterized in that: The input side of the buffer bottle is connected to a mass flow meter.

4. The device for absorbing trace elements in electronic special gases according to claim 3, characterized in that: The input side of the mass flow meter is sequentially connected to a third pressure reducing valve, a pressure gauge and a third pneumatic valve along the gas flow direction.

5. The device for absorbing trace elements in electronic special gases according to claim 1, characterized in that: A fourth pneumatic valve is provided on the input side of the Venturi valve; and a fifth pneumatic valve is provided on the input side of the PFA absorption bottle.

6. The device for absorbing trace elements in electronic special gases according to claim 1, characterized in that: The exhaust end of the PFA absorption bottle is connected to a sixth pneumatic valve.

7. The device for absorbing trace elements in electronic special gases according to claim 1, characterized in that: The exhaust end of the Venturi valve is provided with a second one-way valve, and the nitrogen output end of the Venturi valve is provided with a seventh pneumatic valve.

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