Equipment for detecting particles in electronic special gas

Abstract

The utility model relates to detection equipment for particles in electronic special gas, which comprises a sample gas delivery pipeline, a purge gas delivery pipeline, a mass flow meter, a particle tester, an emptying pipeline and a discharge pipeline, and the sample gas delivery pipeline and the purge gas delivery pipeline are arranged in parallel and are both connected with the input end of the mass flow meter; the particle tester and the emptying pipeline are arranged in parallel, the input ends of the particle tester and the emptying pipeline are both connected with the output end of the mass flow meter, and the output ends of the particle tester and the emptying pipeline are both connected with the discharge pipeline. The device is reasonable in design, can accurately analyze the size and the number of particles in the electronic special gas, can verify the gas tightness of a pipeline and equipment, and also can ensure the cleanliness of the pipeline, so that the safety, the accuracy and the stability of detection are ensured.

Description

Technical Field

[0001] The utility model relates to a device for detecting particles in electronic special gas. Background Art

[0002] The semiconductor industry has established requirements for the size and number of particles in specialized electronic gases. Currently, the main methods for measuring particles in gases are gravimetric and optical methods. The gravimetric method collects particles in the gas and uses weighing to determine their weight. However, this method cannot measure particle size and number, and some small particles, such as 0.1μm, cannot be effectively and completely collected. The optical method uses a laser beam to illuminate the gas passing through an optical cavity, and a detector detects the size and number of the projected beam. Depending on their application, they are mainly divided into two types: pump-type particle counters, which are primarily used to measure particle content in cleanroom air; and pipeline-type particle counters, which are primarily used to measure particle content in conventional gases such as N2, CO2, Ar, He, and CDA. The advantage of these methods is that they accurately measure particle size and number. However, their disadvantage is that they pose risks when measuring toxic, flammable, and explosive gases.

[0003] However, electronic special gases are generally highly toxic, flammable and explosive. The above two methods cannot provide a safe, closed and stable measurement environment for electronic special gases. Utility Model Content

[0004] The purpose of the utility model is to provide a detection device for particles in electronic special gas, which has a reasonable design and can accurately analyze the size and quantity of particles in the electronic special gas.

[0005] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a detection device for particles in electronic special gases, including a sample gas delivery pipeline, a purge gas delivery pipeline, a mass flowmeter, a particle tester, a vent pipeline and an exhaust pipeline. The sample gas delivery pipeline and the purge gas delivery pipeline are arranged in parallel and are both connected to the input end of the mass flowmeter; the particle tester and the exhaust pipeline are arranged in parallel, the input ends of the particle tester and the exhaust pipeline are both connected to the output end of the mass flowmeter, and the output ends of the particle tester and the exhaust pipeline are both connected to the exhaust pipeline.

[0006] Furthermore, a filter, a first manual valve and a first one-way valve are sequentially provided on the purge gas delivery pipeline along the gas flow direction; and a second manual valve is provided on the sample gas delivery pipeline.

[0007] Furthermore, a pressure reducing valve and a first pressure gauge are sequentially provided on the input side of the mass flow meter along the gas flow direction.

[0008] Furthermore, a gas buffer tank is provided on the output side of the mass flow meter.

[0009] Furthermore, a third manual valve and a fourth manual valve are sequentially provided between the output end of the gas buffer tank and the input end of the particle tester along the gas delivery direction; the input end of the vent line is connected between the third manual valve and the fourth manual valve.

[0010] Furthermore, a fifth manual valve and a second pressure gauge are sequentially provided on the output side of the particle tester along the gas flow direction.

[0011] Furthermore, a sixth manual valve and a seventh manual valve are respectively provided at the input end and the output end of the venting pipeline.

[0012] Furthermore, a second one-way valve is installed on the discharge pipeline.

[0013] Compared with the existing technology, the utility model has the following effects: the utility model is reasonably designed, can accurately analyze the size and quantity of particles in electronic special gases, can verify the airtightness of pipelines and equipment, and can also ensure the cleanliness of pipelines, thereby ensuring the safety, accuracy and stability of detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of an embodiment of the present utility model.

[0015] In the picture:

[0016] 1-First manual valve; 2-Second manual valve; 3-Pressure reducing valve; 4-First pressure gauge; 5-Third manual valve; 6-Sixth manual valve; 7-Fourth manual valve; 8-Fifth manual valve; 9-Seventh manual valve; 10-Second pressure gauge; 11-Sample gas delivery pipeline; 12-Purge gas delivery pipeline; 13-Mass flow meter; 14-Particle tester; 15-Vent pipeline; 16-Discharge pipeline; 17-Filter; 18-First one-way valve; 19-Gas buffer tank; 20-Second one-way valve. DETAILED DESCRIPTION

[0017] The present invention will be further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0018] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0019] like Figure 1 As shown, the utility model is a device for detecting particles in electronic special gas, so as to accurately analyze the size and quantity of particles in electronic special gas, which specifically includes a sample gas delivery pipeline 11, a purge gas delivery pipeline 12, a mass flow meter 13, a particle tester 14, a vent pipeline 15 and an exhaust pipeline 16. The sample gas delivery pipeline 11 is used to deliver sample gas, and the purge gas delivery pipeline 12 is used to deliver gas that has a purge effect. The sample gas delivery pipeline 11 and the purge gas delivery pipeline 12 are arranged in parallel, and the output end of the sample gas delivery pipeline 11 and the output end of the purge gas delivery pipeline 12 are both connected to the input end of the mass flow meter 13; the particle tester 14 and the exhaust pipeline 15 are arranged in parallel, and the input end of the particle tester 14 and the input end of the exhaust pipeline 15 are both connected to the output end of the mass flow meter 13, and the output end of the particle tester 14 and the output end of the exhaust pipeline 15 are both connected to the exhaust pipeline 16. The specific process is as follows:

[0020] (1) The purge gas delivery pipeline delivers purge gas, which is used to purge and replace the pipeline and particle counter to ensure that there are no particles in the pipeline and particle counter that may affect the detection;

[0021] (2) Fill the pipeline and particle tester with purge gas and maintain pressure for 1 hour;

[0022] (3) After the pipeline pressure test and purge replacement are completed, electronic special gas can be introduced for testing. The sample volume and the value of the particle tester are recorded by the mass flow meter, and the final result is calculated;

[0023] (4) After the test is completed, the electronic special gas is exhausted through the exhaust pipe, and then the purge gas is used to purge the remaining gas and particles into the exhaust pipe.

[0024] In this embodiment, a filter 17, a first manual valve 1 and a first one-way valve 18 are sequentially provided on the purge gas delivery pipeline 12 along the gas flow direction. The filter is a 0.1 μm particle filter for filtering particles in the gas to ensure the cleanliness of the purge gas.

[0025] In this embodiment, the purge gas delivery pipeline 12 is used to facilitate the delivery of the purge gas. The purge gas is helium gas, and its purity should reach 6N level.

[0026] In this embodiment, a second manual valve 2 is provided on the sample gas delivery pipeline 11 .

[0027] In this embodiment, a pressure reducing valve 3 and a first pressure gauge 4 are sequentially provided on the input side of the mass flow meter 13 along the gas flow direction. The pressure reducing valve is used to adjust the gas pressure, and the first pressure gauge is used to detect the pressure.

[0028] In this embodiment, a gas buffer tank 19 is provided at the output side of the mass flow meter 13. The function of the gas buffer tank is to buffer the flow rate of the gas to prevent the impact force from being too large and damaging the particle analyzer.

[0029] In this embodiment, a third manual valve 3 and a fourth manual valve 7 are sequentially provided between the output end of the gas buffer tank 19 and the input end of the particle analyzer 14 along the gas delivery direction.

[0030] In this embodiment, the input end of the venting pipeline 15 is connected between the third manual valve 3 and the fourth manual valve 7 .

[0031] In this embodiment, a fifth manual valve 8 and a second pressure gauge 10 are sequentially provided on the output side of the particle analyzer 14 along the gas flow direction.

[0032] In this embodiment, a sixth manual valve 6 and a seventh manual valve 9 are respectively provided at the input end and the output end of the venting pipeline 15 .

[0033] In this embodiment, a second one-way valve 20 is installed on the discharge pipeline.

[0034] Example: Combination Figure 1 As shown, taking the detection of the number of particles in silane (SiH4) gas as an example, the purge gas uses helium gas. The specific implementation process is as follows:

[0035] (1) Open the first manual valve 1 and introduce helium into the purge gas delivery pipeline 12. Then, open the pressure reducing valve 3, mass flow meter 4, third manual valve 5, sixth manual valve 6 and seventh manual valve 9 in sequence. After the pipeline is opened, set the flow rate of mass flow meter 4 to 28.3 L / min, and then adjust the pressure reducing valve 3 to stabilize the mass flow meter value at 28.3 L / min. Maintain this state for 5 minutes to blow away all the particles in the pipeline.

[0036] (2) After 5 minutes, close the sixth manual valve 6 and the seventh manual valve 9, and then open the fourth manual valve 7 and the fifth manual valve 8 in sequence; pass helium into the particle counter and observe the values on the display of the particle counter 14. The final results of the number of particles of all particle sizes to be tested are 0, indicating that the pipeline and the particle counter 14 have been cleaned;

[0037] (3) Close the first manual valve 1. When the pressure gauge returns to 0, indicating that the helium has been exhausted, all manual valves can be closed.

[0038] (4) Introduce silane (SiH4) gas into the sample gas delivery pipeline 11, open the second manual valve 2, the pressure reducing valve 3, the mass flow meter 4, the third manual valve 5, the sixth manual valve 6, and the seventh manual valve 9; adjust the parameters of the mass flow meter 13 and the pressure reducing valve 3 according to the flow coefficient of different gases. After debugging, close the second manual valve 2 to exhaust the gas from the branch, then close the sixth manual valve 6 and the seventh manual valve 9, first open the fourth manual valve 7 and the fifth manual valve 8, and then open the second manual valve 2; start timing, continue ventilation for 1 minute, then close the second manual valve 2, observe the needle on the pressure gauge returns to 0, and record the data on the particle tester 14; repeat the above operation until three data are recorded;

[0039] (5) After the test is completed, the electronic special gas is exhausted, and the second manual valve 2 is closed. Then the first manual valve 1 is opened and the particle tester 14 is continuously purged. After ensuring that the displayed results of the particle tester are all 0, the fourth manual valve 7 and the fifth manual valve 8 are closed, and the seventh manual valve 6 and the eighth manual valve 9 are opened and purged for 5 minutes.

[0040] By following the above-mentioned testing process, the air tightness of pipelines and equipment can be verified, and the cleanliness of pipelines can be ensured, thereby ensuring the safety, accuracy and stability of the testing.

[0041] If the present invention discloses or involves components or structural parts that are fixedly connected to each other, then, unless otherwise stated, the fixed connection can be understood as: a detachable fixed connection (for example, connection using bolts or screws), and can also be understood as: a non-detachable fixed connection (for example, riveting, welding). Of course, the mutual fixed connection can also be replaced by an integrated structure (for example, manufactured by integral molding using a casting process) (except where it is obviously impossible to use an integrated molding process).

[0042] In addition, unless otherwise stated, the terms used in any technical solution disclosed in the above-mentioned utility model to express positional relationships or shapes include states or shapes that are approximate, similar or close thereto.

[0043] Any component provided by the present invention may be assembled from a plurality of separate components, or may be a separate component manufactured by an integral forming process.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model and not to limit it; although the utility model is described in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that the specific implementation methods of the utility model can still be modified or some technical features can be replaced by equivalents; without departing from the spirit of the technical solution of the utility model, they should all be included in the scope of the technical solution for protection of the utility model.

Claims

1. A device for detecting particles in electronic special gases, characterized by: It includes a sample gas delivery pipeline, a purge gas delivery pipeline, a mass flow meter, a particle tester, a vent pipeline and a discharge pipeline. The sample gas delivery pipeline and the purge gas delivery pipeline are arranged in parallel and are both connected to the input end of the mass flow meter; the particle tester and the vent pipeline are arranged in parallel, the input ends of the particle tester and the vent pipeline are both connected to the output end of the mass flow meter, and the output ends of the particle tester and the vent pipeline are both connected to the discharge pipeline.

2. The device for detecting particles in electronic special gases according to claim 1, characterized in that: A filter, a first manual valve and a first one-way valve are sequentially arranged on the purge gas delivery pipeline along the gas flow direction; a second manual valve is arranged on the sample gas delivery pipeline.

3. The device for detecting particles in electronic special gases according to claim 1, characterized in that: The input side of the mass flow meter is provided with a pressure reducing valve and a first pressure gauge in sequence along the gas flow direction.

4. The device for detecting particles in electronic special gases according to claim 1, characterized in that: A gas buffer tank is provided on the output side of the mass flow meter.

5. The device for detecting particles in electronic special gases according to claim 4, characterized in that: A third manual valve and a fourth manual valve are sequentially provided between the output end of the gas buffer tank and the input end of the particle tester along the gas delivery direction; the input end of the vent pipeline is connected between the third manual valve and the fourth manual valve.

6. The device for detecting particles in electronic special gas according to claim 1, characterized in that: The output side of the particle tester is provided with a fifth manual valve and a second pressure gauge in sequence along the gas flow direction.

7. The device for detecting particles in electronic special gases according to claim 1, characterized in that: The input end and the output end of the venting pipeline are respectively provided with a sixth manual valve and a seventh manual valve.

8. The device for detecting particles in electronic special gas according to claim 1, characterized in that: A second one-way valve is installed on the discharge pipeline.

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