Liquid mixing system

Abstract

The utility model belongs to the technical field of liquid mixing, and discloses a liquid mixing system which comprises a mixing tank, a first conveying mechanism, a second conveying mechanism, a homogenizing mechanism, a detecting mechanism and a finished product tank. The mixing tank is provided with a first weighing instrument; the first conveying mechanism can convey the first liquid into the mixing tank; the second conveying mechanism can convey second liquid into the mixing tank through the titration tank, then the second liquid is conveyed into the mixing tank through the titration tank, the volume of the titration tank is smaller than that of the mixing tank, and the titration tank is provided with a second weighing instrument; the homogenizing mechanism is used for homogenizing mixed liquid formed by the first liquid and the second liquid in the mixing tank; the detection mechanism is used for detecting the concentration of the homogenized mixed solution; the finished product tank is used for storing the mixed liquid qualified in concentration detection. According to the utility model, the liquid adding precision of the second liquid is improved, and the mixing efficiency is improved; and the mixed liquid can be subjected to secondary retest, so that the concentration of the mixed liquid is ensured to meet the requirement.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid mixing, in particular to a liquid mixing system. Background Art

[0002] In the semiconductor industry, wet etching processes require large quantities of high-purity mixed acid. Mixed acid is a key raw material for ensuring chip quality in chip manufacturing and ensuring the smooth completion of semiconductor wet etching and cleaning processes. In existing mixed acid systems, water and acid are separately delivered to a mixing tank via a conveyor mechanism and then weighed and quantified using a scale on the mixing tank to achieve the required water-acid mixing ratio. However, due to the relatively small amount of acid added, using a scale on the mixing tank to quantify the acid often results in significant errors, hindering the accuracy of the mixing ratio. Furthermore, existing mixed acid systems lack a secondary detection device for the mixed solution concentration, making secondary testing of the mixed solution impossible. Utility Model Content

[0003] The purpose of the utility model is to provide a liquid mixing system, which can improve the liquid adding accuracy and mixing efficiency, and can also perform a secondary retest on the mixed liquid to ensure that the concentration of the mixed liquid meets the requirements.

[0004] To achieve this purpose, the present invention adopts the following technical solutions:

[0005] Liquid mixing system, comprising:

[0006] a mixing tank provided with a first weighing instrument;

[0007] a first conveying mechanism, whose output port is connected to the first input port of the mixing tank through a first pipeline, and the first conveying mechanism is capable of conveying the first liquid into the mixing tank;

[0008] a second conveying mechanism capable of conveying a second liquid into the mixing tank through a titration tank, wherein an output port of the second conveying mechanism is connected to an input port of the titration tank via a second pipeline, and an output port of the titration tank is connected to a second input port of the mixing tank via a third pipeline, wherein the volume of the titration tank is smaller than that of the mixing tank, and the titration tank is provided with a second weighing instrument;

[0009] a homogenizing mechanism, configured to homogenize a mixed liquid consisting of the first liquid and the second liquid in the mixing tank;

[0010] A detection mechanism, used for detecting the concentration of the mixed solution after homogenization;

[0011] The finished product tank is used to store the mixed liquid that has passed the concentration test.

[0012] As an optional solution, the homogenizing mechanism includes a first pump, the input port of the first pump is connected to the output port of the mixing tank through a fourth pipeline, and the output port of the first pump is connected to the third input port of the mixing tank through a fifth pipeline.

[0013] As an optional solution, the fifth pipeline is connected in parallel with a sixth pipeline;

[0014] The detection mechanism includes a first concentration detector, which is arranged on the sixth pipeline.

[0015] As an optional solution, a seventh pipeline is connected in parallel to the sixth pipeline;

[0016] The detection mechanism further includes a second concentration detector, which is arranged on the seventh pipeline.

[0017] As an optional solution, both the first concentration detector and the second concentration detector are concentration meters.

[0018] As an optional solution, the fifth pipeline is connected to the first input port of the finished product tank through an eighth pipeline.

[0019] As an optional solution, a second pump is further included, the input port of the second pump is connected to the output port of the finished product tank through a ninth pipeline, and the output port of the second pump is provided with a tenth pipeline for outputting the mixed liquid.

[0020] As an optional solution, the output port of the second pump is connected to the second input port of the finished product tank through an eleventh pipeline.

[0021] As an optional solution, the mixing tank, the titration tank and the finished product tank are all provided with a gas supply and exhaust linkage mechanism for supplying and exhausting gas.

[0022] As an optional solution, both the first weighing instrument and the second weighing instrument are electronic scales.

[0023] Beneficial effects of the utility model:

[0024] The utility model provides a liquid mixing system, which can improve the quantitative addition of the second liquid by arranging a titration tank, effectively improve the addition accuracy, and improve the mixing efficiency; the homogenizing mechanism can also evenly mix the mixed liquid in the mixing tank, and the detection mechanism can detect the concentration of the mixed liquid after uniform mixing, so as to realize secondary re-testing of the mixed liquid to ensure that the concentration of the mixed liquid meets the requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of a liquid mixing system provided by an embodiment of the present utility model.

[0026] In the picture:

[0027] 1. Mixing tank; 11. First weighing instrument;

[0028] 2. First conveying mechanism; 21. First pipeline; 22. First solenoid valve;

[0029] 3. Second conveying mechanism; 31. Titration tank; 311. Second weighing instrument; 32. Second pipeline; 33. Third pipeline; 34. Second solenoid valve; 35. Third solenoid valve;

[0030] 41. First pump; 42. Fourth pipeline; 43. Fifth pipeline; 44. Fourth solenoid valve; 45. Fifth solenoid valve; 46. Sixth solenoid valve;

[0031] 51. Sixth pipeline; 52. First concentration detector; 53. Seventh pipeline; 54. Second concentration detector; 55. Seventh solenoid valve; 56. Eighth solenoid valve;

[0032] 6. Finished product tank; 61. Eighth pipeline; 62. Ninth solenoid valve;

[0033] 7. Second pump; 71. Ninth pipeline; 72. Tenth pipeline; 73. Eleventh pipeline; 74. Tenth solenoid valve; 75. Eleventh solenoid valve; 76. Twelfth solenoid valve; 77. Thirteenth pipeline; 78. Thirteenth solenoid valve;

[0034] 8. Supplement and exhaust linkage mechanism. DETAILED DESCRIPTION

[0035] The following describes in detail embodiments of the present invention. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar components or components having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to explain the present invention, and should not be construed as limiting the present invention.

[0036] In the description of this utility model, unless otherwise expressly specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they may refer to fixed or detachable connections, mechanical or electrical connections, direct or indirect connections through an intermediate medium, and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0037] In the description of the present utility model, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first feature and the second feature being in direct contact, or may include the first feature and the second feature being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0038] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0039] like Figure 1 As shown, an embodiment of the present invention provides a liquid mixing system, including a mixing tank 1, a first conveying mechanism 2, a second conveying mechanism 3, a homogenizing mechanism, a detection mechanism and a finished product tank 6.

[0040] Among them, the mixing tank 1 is provided with a first weighing meter 11, and the first conveying mechanism 2 and the second conveying mechanism 3 can respectively convey the first liquid (water or other liquid) and the second liquid (acid or other liquid) into the mixing tank 1. In this embodiment, the demand for the first liquid is large, while the demand for the second liquid is small. Therefore, the first weighing meter 11 can be used to measure the weight of the first liquid with a larger demand, so as to enable the first conveying mechanism 2 to quantitatively convey the first liquid into the mixing tank 1.

[0041] Specifically, the output port of the first conveying mechanism 2 is connected to the first input port of the mixing tank 1 through the first pipeline 21. The first pipeline 21 is provided with a first solenoid valve 22. When the first solenoid valve 22 is opened, the first conveying mechanism 2 can convey the first liquid into the mixing tank 1 through the first pipeline 21. When the weight of the first liquid reaches the requirement, the first solenoid valve 22 is closed.

[0042] Since the demand for the second liquid is small, in order to improve the addition accuracy of the second liquid, the second conveying mechanism 3 conveys the second liquid to the mixing tank 1 through the titration tank 31, and the output port of the second conveying mechanism 3 is connected to the input port of the titration tank 31 through the second pipeline 32, and the output port of the titration tank 31 is connected to the second input port of the mixing tank 1 through the third pipeline 33. The volume of the titration tank 31 is smaller than the volume of the mixing tank 1, and the titration tank 31 is provided with a second weighing instrument 311. Since the volume of the titration tank 31 is small, the range of the second weighing instrument 311 is smaller than the range of the first weighing instrument 11, and the weighing accuracy of the titration tank 31 is higher. The second pipeline 32 is provided with a second solenoid valve 34, and the third pipeline 33 is provided with a third solenoid valve 35. When it is necessary to transport the second liquid to the mixing tank 1, the second solenoid valve 34 can be opened first and the third solenoid valve 35 can be closed. The second conveying mechanism 3 transports the second liquid to the titration tank 31 through the second pipeline 32 for quantitative weighing, and then the third solenoid valve 35 is opened. The second liquid in the titration tank 31 is transported to the mixing tank 1 through the third pipeline 33. The quantitative delivery of the second liquid can be achieved through the titration tank 31 with high accuracy.

[0043] After the first liquid and the second liquid are quantitatively added into the mixing tank 1 to form a mixed liquid, the homogenizing mechanism is used to homogenize the mixed liquid to ensure uniform mixing; the detection mechanism then performs concentration detection on the homogenized mixed liquid to achieve a secondary inspection of the mixed liquid to ensure that the mixed liquid entering the finished product tank 6 meets the concentration requirements. If the detection mechanism detects that the mixed liquid does not meet the requirements, the detection result is fed back to the PLC, and the PLC automatically calculates to control the opening and closing of the first solenoid valve 22, the second solenoid valve 34 and the third solenoid valve 35 to achieve secondary addition of the first liquid or the second liquid until the mixed liquid meets the requirements.

[0044] By setting up the titration tank 31, the liquid mixing system can improve the quantitative addition of the second liquid, effectively improve the addition accuracy, and improve the mixing efficiency; and the homogenizing mechanism can also evenly mix the mixed liquid in the mixing tank 1, and the detection mechanism can detect the concentration of the evenly mixed mixed liquid to achieve secondary re-testing of the mixed liquid to ensure that the concentration of the mixed liquid meets the requirements.

[0045] Specifically, the homogenizing mechanism includes a first pump 41. The input port of the first pump 41 is connected to the output port of the mixing tank 1 through a fourth pipe 42. The output port of the first pump 41 is connected to the third input port of the mixing tank 1 through a fifth pipe 43. After the first liquid and the second liquid are added to the mixing tank 1, the first pump 41 is turned on to circulate the mixed liquid in the mixing tank 1 to ensure uniform mixing.

[0046] Furthermore, the fourth pipeline 42 is provided with a fourth solenoid valve 44, and the fifth pipeline 43 is provided with a fifth solenoid valve 45 and a sixth solenoid valve 46. When the fourth solenoid valve 44, the fifth solenoid valve 45 and the sixth solenoid valve 46 are all opened, the first pump 41 can evenly mix the mixed liquid in the mixing tank 1.

[0047] Specifically, the detection mechanism includes a first concentration detector 52, and the fifth pipeline 43 is connected in parallel with the sixth pipeline 51. The first concentration detector 52 is arranged on the sixth pipeline 51. When the mixed liquid is homogenized, the mixed liquid can be circulated to the mixing tank 1 through the sixth pipeline 51. The first concentration detector 52 on the sixth pipeline 51 can perform concentration detection on the homogenized mixed liquid.

[0048] Furthermore, the sixth pipeline 51 is also provided with a seventh solenoid valve 55 and an eighth solenoid valve 56, the first concentration detector 52 is arranged between the seventh solenoid valve 55 and the eighth solenoid valve 56, and the fifth solenoid valve 45 is connected in parallel with the first concentration detector 52. When the fifth solenoid valve 45 is closed and the fourth solenoid valve 44, the sixth solenoid valve 46, the seventh solenoid valve 55 and the eighth solenoid valve 56 are all opened, the first pump 41 can return the mixed liquid in the mixing tank 1 to the mixing tank 1 after detection by the first concentration detector 52.

[0049] Optionally, a seventh pipeline 53 is connected in parallel to the sixth pipeline 51, and the detection mechanism further includes a second concentration detector 54, which is disposed on the seventh pipeline 53 and is capable of detecting the concentration of the homogenized mixed liquid. When the fifth solenoid valve 45 is closed and the fourth, sixth, seventh, and eighth solenoid valves 44, 46, 55, and 56 are all open, the first pump 41 can simultaneously return the mixed liquid to the mixing tank 1 through the sixth and seventh pipelines 51, 53. The first and second concentration detectors 52, 54 can simultaneously detect the concentration of the mixed liquid, thereby preventing detection errors caused by failure of either the first or second concentration detectors 52, 54.

[0050] Optionally, both the first concentration detector 52 and the second concentration detector 54 may be concentration meters.

[0051] In this embodiment, the fifth pipeline 43 is connected to the first input port of the finished product tank 6 through the eighth pipeline 61. The eighth pipeline 61 is provided with a ninth solenoid valve 62. When the fourth solenoid valve 44, the fifth solenoid valve 45 and the ninth solenoid valve 62 are all opened, the sixth solenoid valve 46, the seventh solenoid valve 55 and the eighth solenoid valve 56 are all closed, the first pump 41 can transport the mixed liquid in the mixing tank 1 to the finished product tank 6.

[0052] Optionally, the liquid mixing system also includes a second pump 7, the input port of the second pump 7 is connected to the output port of the finished product tank 6 through a ninth pipeline 71, and the output port of the second pump 7 is provided with a tenth pipeline 72 for outputting the mixed liquid. After the second pump 7 is turned on, the mixed liquid in the finished product tank 6 can be output.

[0053] Furthermore, the ninth pipeline 71 is provided with a tenth solenoid valve 74 , and the tenth pipeline 72 is provided with an eleventh solenoid valve 75 . When the tenth solenoid valve 74 and the eleventh solenoid valve 75 are both opened, the second pump 7 can output the mixed liquid in the finished product tank 6 .

[0054] In order to prevent the mixed liquid in the finished product tank 6 from settling, the output port of the second pump 7 is connected to the second input port of the finished product tank 6 through the eleventh pipeline 73. The eleventh pipeline 73 is provided with a twelfth solenoid valve 76. When the tenth solenoid valve 74 and the twelfth solenoid valve 76 are opened and the eleventh solenoid valve 75 is closed, the second pump 7 can circulate the mixed liquid in the finished product tank 6 to ensure that the mixed liquid in the finished product tank 6 does not precipitate.

[0055] Optionally, the tenth pipeline 72 and the eleventh pipeline 73 are both connected to the output port of the second pump 7 through the twelfth pipeline, and a thirteenth pipeline 77 is connected between the fifth pipeline 43 and the twelfth pipeline. The thirteenth pipeline 77 is provided with a thirteenth solenoid valve 78, and the end of the thirteenth pipeline 77 connected to the fifth pipeline 43 is provided upstream of the fifth solenoid valve 45 and the seventh solenoid valve 55.

[0056] Optionally, the first weighing instrument 11 and the second weighing instrument 311 are both electronic scales.

[0057] In order to prevent the pressure inside the mixing tank 1, the titration tank 31 and the finished product tank 6 from changing when the liquid is added or discharged, the mixing tank 1, the titration tank 31 and the finished product tank 6 are all provided with a replenishing and exhausting linkage mechanism 8. When the mixing tank 1, the titration tank 31 and the finished product tank 6 are filled with or discharged with liquid, the replenishing and exhausting linkage mechanism 8 can be used to replenish or exhaust the mixing tank 1, the titration tank 31 and the finished product tank 6 to prevent accidents caused by excessive pressure in the tank.

[0058] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. Liquid mixing system, characterized in that, include: A mixing tank (1) provided with a first weighing instrument (11); a first conveying mechanism (2), the output port of which is in communication with the first input port of the mixing tank (1) via a first pipeline (21), and the first conveying mechanism (2) is capable of conveying the first liquid into the mixing tank (1); a second conveying mechanism (3) capable of conveying the second liquid into the mixing tank (1) through the titration tank (31); an output port of the second conveying mechanism (3) is connected to an input port of the titration tank (31) through a second pipeline (32); an output port of the titration tank (31) is connected to a second input port of the mixing tank (1) through a third pipeline (33); the volume of the titration tank (31) is smaller than that of the mixing tank (1), and the titration tank (31) is provided with a second weighing instrument (311); a homogenizing mechanism for homogenizing a mixed liquid consisting of the first liquid and the second liquid in the mixing tank (1); A detection mechanism, used for detecting the concentration of the mixed solution after homogenization; The finished product tank (6) is used to store the mixed liquid that has passed the concentration test.

2. The liquid mixing system according to claim 1, characterized in that: The homogenizing mechanism comprises a first pump (41), the input port of the first pump (41) being connected to the output port of the mixing tank (1) via a fourth pipeline (42), and the output port of the first pump (41) being connected to the third input port of the mixing tank (1) via a fifth pipeline (43).

3. The liquid mixing system according to claim 2, characterized in that: The fifth pipeline (43) is connected in parallel with a sixth pipeline (51); The detection mechanism includes a first concentration detector (52), and the first concentration detector (52) is arranged on the sixth pipeline (51).

4. The liquid mixing system according to claim 3, characterized in that: The sixth pipeline (51) is connected in parallel with a seventh pipeline (53); The detection mechanism further includes a second concentration detector (54), which is arranged on the seventh pipeline (53).

5. The liquid mixing system according to claim 4, characterized in that: The first concentration detector (52) and the second concentration detector (54) are both concentration meters.

6. The liquid mixing system according to claim 2, characterized in that: The fifth pipeline (43) is connected to the first input port of the finished product tank (6) through an eighth pipeline (61).

7. The liquid mixing system according to claim 1, characterized in that: The invention also comprises a second pump (7), the input port of the second pump (7) is connected to the output port of the finished product tank (6) through a ninth pipeline (71), and the output port of the second pump (7) is provided with a tenth pipeline (72) for outputting the mixed liquid.

8. The liquid mixing system according to claim 7, characterized in that: The output port of the second pump (7) is connected to the second input port of the finished product tank (6) through an eleventh pipeline (73).

9. The liquid mixing system according to claim 1, characterized in that: The mixing tank (1), the titration tank (31) and the finished product tank (6) are all provided with a gas supply and exhaust linkage mechanism (8) for supplying and exhausting gas.

10. The liquid mixing system according to claim 1, characterized in that: The first weighing instrument (11) and the second weighing instrument (311) are both electronic scales.

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