Combined type cleaning tank cooling system

Abstract

The utility model provides a composite cleaning tank cooling system which comprises a shell, a cooling assembly and a liquid supply assembly, the cooling assembly and the liquid supply assembly are located in the shell, and the shell is configured to bear the cooling assembly and the liquid supply assembly; the cooling assembly comprises a cooling water machine, a first liquid conveying pipe and a cleaning tank, the cleaning tank comprises a first liquid storage part and a second liquid storage part, the second liquid storage part is located in the first liquid storage part, the outer wall of the second liquid storage part is in direct contact with liquid in the first liquid storage part, and the cooling machine is configured to cool cooling liquid; the first liquid conveying pipe is connected with the upper end of the first liquid storage part and an outlet of the cooling-water machine, and the first liquid conveying pipe is configured to convey cooling liquid output by the cooling-water machine to the first liquid storage part; and the liquid supply assembly comprises a second liquid conveying pipe and a third liquid storage part, and the cleaning liquid in the third liquid storage part is conveyed to the second liquid storage part through the second liquid conveying pipe, so that the cleaning liquid is cooled by the cooling liquid in the first liquid storage part, the cooling speed of the cooling liquid is accurately controlled, and the cleaning effect of the chip is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor equipment, and in particular to a composite cleaning tank cooling system. Background Art

[0002] In the semiconductor manufacturing process, chip cleaning is a key process that has a direct impact on product quality. Because most cleaning fluids are organic chemicals, their activity will be affected by temperature changes, so the requirements for temperature control during the cleaning process are getting higher and higher. However, existing chip cleaning equipment has certain limitations in temperature control, especially in the control of the cooling rate of the coolant. This directly leads to poor cleaning effect and production efficiency. Utility Model Content

[0003] The purpose of the present application is to provide a composite cleaning tank cooling system mechanism to solve the problem in the prior art of inaccurate cooling rate resulting in poor production efficiency and cleaning effect.

[0004] To achieve this goal, this application adopts the following technical solutions:

[0005] The present application proposes a composite cleaning tank cooling system, which includes a housing, a cooling component, and a liquid supply component, wherein:

[0006] The cooling assembly and the liquid supply assembly are located inside the housing, and the housing is configured to carry the cooling assembly and the liquid supply assembly;

[0007] The cooling assembly includes a water chiller, a first liquid infusion pipe, and a cleaning tank. The cleaning tank has a double-layer structure. The cleaning tank includes a first liquid storage portion and a second liquid storage portion. The second liquid storage portion is located inside the first liquid storage portion, and the outer wall of the second liquid storage portion is in direct contact with the liquid in the first liquid storage portion. The water chiller is configured to cool the coolant. The first liquid infusion pipe connects the upper end of the first liquid storage portion and the outlet of the water chiller. The first liquid infusion pipe is configured to transport the coolant output by the water chiller to the first liquid storage portion.

[0008] The liquid supply assembly includes a second infusion tube and a third liquid storage part. The third liquid storage part is configured to hold cleaning liquid. The second infusion tube connects the third liquid storage part and the second liquid storage part. The second infusion tube is configured to transport the cleaning liquid of the third liquid storage part to the second liquid storage part, so that the cooling liquid of the first liquid storage part cools the cleaning liquid.

[0009] Optionally, the first infusion tube and the second infusion tube are both connected to a first driving member and a valve, the first driving member is configured to drive the liquid to flow in the pipeline, and the valve is configured to control the flow rate and pressure of the liquid in the pipeline.

[0010] Optionally, the cleaning tank includes a bottom plate, an inner wall and an outer wall arranged in a vertical closed loop, the inner wall and the outer wall are fixedly connected to the bottom plate, the inner wall and the bottom plate form an inner tank, the inner wall, the outer wall and the bottom plate form an outer tank, and a first notch is opened in the inner tank part of the bottom plate, the first notch is connected to an external pipe, and the external pipe is configured to provide a channel for discharge of waste cleaning liquid.

[0011] Optionally, the second infusion tube is connected to the filter, the bottom of the filter is connected to an external pipeline, and the filter is configured to filter the cleaning liquid with more impurities to meet the usage standards.

[0012] Optionally, a pressure relief valve is provided above the filter, the pressure relief valve is connected to one end of a pressure relief pipe, the other end of the pressure relief pipe leads to the second liquid storage part, and the pressure relief pipe is configured to transport the gasified cleaning liquid.

[0013] Optionally, a third infusion tube is externally connected to the second infusion tube, one end of the third infusion tube is connected to the liquid inlet of the filter, and the other end of the third infusion tube is connected to the liquid outlet of the filter. The second infusion tube is configured to transport cleaning fluid without impurities.

[0014] Optionally, a second notch is provided at the lower end of the outer wall, the second notch is connected to the first end of the fourth infusion tube, and the outlet end of the fourth infusion tube is connected to the liquid inlet of the chiller.

[0015] Optionally, a plurality of partitions are provided in parallel along the vertical direction between the inner wall and the outer wall, and the partitions are configured to block part of the coolant to slow down the falling speed of the coolant.

[0016] Optionally, a pulley is provided at the bottom of the housing, and the pulley is configured to assist in driving the overall movement of the mechanism.

[0017] Optionally, a third notch is provided on the shell, and the third notch is above the cleaning tank.

[0018] Compared with the prior art, the composite cleaning tank cooling system provided by this application has the following advantages:

[0019] 1) By setting a partition between the inner wall and the outer wall, not only the washing tank as a whole is made stronger, but also the cooling liquid entering the outer tank is facilitated to achieve graded cooling of the cleaning liquid in the inner tank, which facilitates more precise control of the temperature change during the cooling process, reducing or avoiding the risk of damage to the cleaning liquid caused by thermal stress generated inside the cleaning liquid due to rapid cooling.

[0020] 2) Through the cooperation of the cooling component and the liquid supply component, the cooled cooling liquid reaches the first liquid storage part and the cleaning liquid reaches the second liquid storage part. This not only realizes the cooling function of the cleaning liquid, but also accurately controls the cooling speed of the cooling liquid, thereby improving the cleaning effect of the chip.

[0021] 3) By providing a third infusion pipe, the cleaning liquid without impurities can bypass the filter and be directly delivered to the inner tank, saving time and improving overall work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate and understand the technical solutions in the embodiments of the present application, a brief introduction is given below to the background technology of the present application and the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the content of the embodiments of the present application and these drawings without paying any creative work.

[0023] Figure 1 Schematic diagram of the three-dimensional structure of the interior of the composite cleaning tank cooling system provided in an embodiment of the present application;

[0024] Figure 2 This is a schematic diagram of the internal three-dimensional structure of a cleaning tank of a composite cleaning tank cooling system provided in an embodiment of the present application;

[0025] Figure 3 It is a schematic diagram of the three-dimensional structure of the composite cleaning tank cooling system provided in an embodiment of the present application. DETAILED DESCRIPTION

[0026] To facilitate understanding of the present application, a more comprehensive description of the present application will be provided below with reference to the relevant drawings. Preferred embodiments of the present application are shown in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to enable a more thorough and comprehensive understanding of the disclosure of the present application. It should be noted that when a component is referred to as being "fixed to" another component, it can be directly on the other component or there can also be a central component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there can also be a central component. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by a person skilled in the art to which the present application belongs. The terms used herein in the specification of the present application are for the purpose of describing specific embodiments only and are not intended to limit the present application. The term "and / or" used herein includes any and all combinations of one or more of the relevant listed items.

[0027] See also Figures 1 to 3 As shown, an embodiment of the present application provides a composite cleaning tank cooling system, which includes a housing 10, a cooling assembly 20 and a liquid supply assembly 30, wherein:

[0028] The cooling assembly 20 and the liquid supply assembly 30 are located inside the housing 10 , and the housing 10 is configured to carry the cooling assembly 20 and the liquid supply assembly 30 ;

[0029] The cooling assembly 20 includes a water chiller 21, a first liquid infusion pipe 22, and a cleaning tank 23. The cleaning tank 23 has a double-layer structure and includes a first liquid storage portion 230 and a second liquid storage portion 231. The second liquid storage portion 231 is located inside the first liquid storage portion 230, and the outer wall of the second liquid storage portion 231 is in direct contact with the liquid of the first liquid storage portion 230. The water chiller 21 is configured to cool the coolant. The first liquid infusion pipe 22 connects the upper end of the first liquid storage portion 230 and the outlet of the water chiller 21. The first liquid infusion pipe 22 is configured to transport the coolant output by the water chiller 21 to the first liquid storage portion 230.

[0030] The liquid supply assembly 30 includes a second infusion tube 31 and a third liquid storage part. The third liquid storage part is configured to hold cleaning liquid. The second infusion tube 31 connects the third liquid storage part and the second liquid storage part 231. The second infusion tube 31 is configured to transport the cleaning liquid of the third liquid storage part to the second liquid storage part 231, so that the cooling liquid in the first liquid storage part 230 cools the cleaning liquid.

[0031] Through the cooperation of the cooling component 20 and the liquid supply component 30, the cooled cooling liquid reaches the first liquid storage part 230 and the cleaning liquid reaches the second liquid storage part 231, which not only realizes the cooling function of the cleaning liquid, but also accurately controls the cooling speed of the cooling liquid, thereby improving the cleaning effect of the chip.

[0032] In one embodiment, the first infusion tube 22 and the second infusion tube 31 are both connected to a first driving member 40 and a valve 41. The first driving member 40 is configured to drive the flow of liquid in the pipeline, and the valve 41 is configured to control the flow rate and pressure of the liquid in the pipeline.

[0033] Specifically, the first driving member 40 is a pneumatic pump.

[0034] By cooperating with the pneumatic pump and the infusion pipeline, the cleaning liquid and the coolant are transported to the designated location, with a simple structure and easy operation; by installing the valve 41, the flow rate and pressure of the liquid in the pipeline are controlled.

[0035] In one embodiment, the cleaning tank 23 includes a bottom plate 232, an inner wall 233 and an outer wall 234 arranged in a vertical closed loop, the inner wall 233 and the outer wall 234 are fixedly connected to the bottom plate 232, the inner wall 233 and the bottom plate 232 form an inner tank, the inner wall 233, the outer wall 234 and the bottom plate 232 form an outer tank, and the bottom plate 232 is located in the inner tank part and has a first notch, the first notch is connected to the external pipe 235, and the external pipe 235 is configured to provide a channel for the discharge of waste cleaning liquid.

[0036] Specifically, the first liquid storage portion 230 is an outer tank, and the second liquid storage portion 231 is an inner tank.

[0037] By having the inner wall 233 and the outer wall 234 share a bottom plate 232, not only is it possible to form inner and outer tanks for different purposes, but it also saves costs; through the cooperation of the first notch and the external pipe 235, it is convenient to discharge the waste cleaning liquid, with a simple structure and easy operation.

[0038] In one embodiment, the second infusion tube 31 is connected to the filter 33 , the bottom of the filter 33 is connected to the external pipe 235 , and the filter 33 is configured to filter the cleaning liquid with more impurities to meet the usage standards.

[0039] By providing the filter 33 , the cleaning liquid containing impurities can be filtered to prevent the impurities from entering the cleaning tank 23 , which helps to improve the effect and efficiency of the cleaning process.

[0040] In one embodiment, a pressure relief valve 330 is provided above the filter 33 , the pressure relief valve 330 is connected to one end of a pressure relief pipe 331 , and the other end of the pressure relief pipe 330 is connected to the second liquid storage part 231 , and the pressure relief pipe 330 is configured to transport gasified cleaning liquid.

[0041] After the filter 33 works, the upper gas pressure relief valve 330 opens to inject the gasified cleaning liquid into the cleaning tank 23, thereby maintaining a stable air pressure inside the filter 33.

[0042] In one embodiment, a third infusion tube 34 is externally connected to the second infusion tube 31, one end of the third infusion tube 34 is connected to the liquid inlet of the filter 33, and the other end of the third infusion tube 34 is connected to the liquid outlet of the filter 33. The second infusion tube 34 is configured to transport cleaning fluid without impurities.

[0043] By providing the third liquid delivery tube 34 , the cleaning liquid without impurities can bypass the filter 33 and be directly delivered to the inner tank, thus saving time and improving overall work efficiency.

[0044] In one embodiment, a second notch 236 is provided at the lower end of the outer wall 234 . The second notch 236 is connected to the first end of the fourth liquid infusion tube 237 . The outlet end of the fourth liquid infusion tube 237 is connected to the liquid inlet of the chiller 21 .

[0045] Through the cooperation of the second notch 236 and the fourth liquid infusion tube 237, not only can the used coolant be automatically recovered to the chiller 21 to achieve the purpose of secondary utilization and save costs, but the structure is simple and the operation is convenient.

[0046] In one embodiment, a plurality of partitions 238 are provided in parallel along the vertical direction between the inner wall 233 and the outer wall 234 . The partitions 238 are configured to block part of the coolant to slow down the falling speed of the coolant.

[0047] By arranging a partition 238 between the inner wall 233 and the outer wall 234, not only the washing tank 23 is made more solid as a whole, but also the cooling liquid entering the outer tank and the cleaning liquid in the inner tank are facilitated to achieve graded cooling, which is convenient for more precise control of the temperature change during the cooling process, reducing or avoiding the risk of damage to the cleaning liquid due to thermal stress generated inside the cleaning liquid due to rapid cooling.

[0048] In one embodiment, a plurality of pulleys 11 are provided at the bottom of the housing 10 , and the pulleys 11 are configured to assist in driving the entire mechanism to move.

[0049] Specifically, the pulleys 11 are arranged at the four corners of the bottom of the housing 10 .

[0050] The coordination between the plurality of pulleys 11 facilitates the overall movement of the mechanism to meet the cleaning needs of chips in different areas, thereby improving the cleaning efficiency.

[0051] In one embodiment, a third notch 12 is provided on the housing 10 , and the third notch 12 is above the cleaning tank 23 .

[0052] By providing the third notch 12 above the cleaning tank 23 on the housing 10, it is convenient to directly put the chip into the cleaning tank 23 through the third notch 12 for cleaning. On the one hand, the cleaning efficiency is improved, and on the other hand, it is convenient to observe the state of the cleaning liquid and make timely adjustments.

[0053] The above embodiments merely illustrate the basic principles and features of the present application. The present application is not limited by the above examples. Various changes and modifications may be made to the present application without departing from the spirit and scope of the present application. Such changes and modifications are intended to fall within the scope of the present application. The scope of protection claimed in the present application is defined by the appended claims and their equivalents.

Claims

1. A composite cleaning tank cooling system, characterized in that: The composite cleaning tank cooling system includes a housing, a cooling component and a liquid supply component, wherein: The cooling assembly and the liquid supply assembly are located inside the housing, and the housing is configured to carry the cooling assembly and the liquid supply assembly; The cooling assembly includes a water chiller, a first liquid infusion pipe, and a cleaning tank. The cleaning tank has a double-layer structure. The cleaning tank includes a first liquid storage portion and a second liquid storage portion. The second liquid storage portion is located inside the first liquid storage portion, and the outer wall of the second liquid storage portion is in direct contact with the liquid in the first liquid storage portion. The water chiller is configured to cool the coolant. The first liquid infusion pipe connects the upper end of the first liquid storage portion and the outlet of the water chiller. The first liquid infusion pipe is configured to transport the coolant output by the water chiller to the first liquid storage portion. The liquid supply assembly includes a second infusion tube and a third liquid storage part. The third liquid storage part is configured to hold cleaning liquid. The second infusion tube connects the third liquid storage part and the second liquid storage part. The second infusion tube is configured to transport the cleaning liquid of the third liquid storage part to the second liquid storage part, so that the cooling liquid in the first liquid storage part cools the cleaning liquid.

2. The composite cleaning tank cooling system according to claim 1, characterized in that: The first infusion tube and the second infusion tube are both connected to a first driving member and a valve. The first driving member is configured to drive the liquid to flow in the pipeline, and the valve is configured to control the flow rate and pressure of the liquid in the pipeline.

3. The composite cleaning tank cooling system according to claim 1, characterized in that: The cleaning tank includes a bottom plate, an inner side wall and an outer side wall arranged in a vertical closed loop, the inner side wall and the outer side wall are fixedly connected to the bottom plate, the inner side wall and the bottom plate form an inner tank, the inner side wall, the outer side wall and the bottom plate form an outer tank, the bottom plate is located in the inner tank part and a first notch is opened, the first notch is connected to an external pipe, and the external pipe is configured to provide a channel for discharging waste cleaning liquid.

4. The composite cleaning tank cooling system according to claim 3, characterized in that: The second infusion tube is connected to the filter, the bottom of the filter is connected to the external pipeline, and the filter is configured to filter the cleaning liquid with more impurities to meet the usage standards.

5. The composite cleaning tank cooling system according to claim 4, characterized in that: A pressure relief valve is provided above the filter, the pressure relief valve is connected to one end of a pressure relief pipe, the other end of the pressure relief pipe leads to the second liquid storage part, and the pressure relief pipe is configured to transport gasified cleaning liquid.

6. The composite cleaning tank cooling system according to claim 4, characterized in that: The second infusion tube is externally connected to a third infusion tube, one end of the third infusion tube is connected to the liquid inlet of the filter, and the other end of the third infusion tube is connected to the liquid outlet of the filter. The second infusion tube is configured to transport cleaning fluid without impurities.

7. The composite cleaning tank cooling system according to claim 3, characterized in that: A second notch is provided at the lower end of the outer wall, the second notch is connected to the first end of the fourth liquid infusion tube, and the outlet end of the fourth liquid infusion tube is connected to the liquid inlet of the chiller.

8. The composite cleaning tank cooling system according to claim 3, characterized in that: A plurality of partitions are arranged parallel to each other in a vertical direction between the inner wall and the outer wall, and the partitions are configured to block part of the coolant to slow down the falling speed of the coolant.

9. The composite cleaning tank cooling system according to claim 1, characterized in that: A pulley is provided at the bottom of the housing, and the pulley is configured to assist in driving the entire mechanism to move.

10. The composite cleaning tank cooling system according to claim 1, characterized in that: A third notch is provided on the shell, and the third notch is above the cleaning tank.

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